微流体装置的特性

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI:10.1109/ICMTS.2002.1193198

D. Bien, S. Mitchell, H. Gamble

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引用次数: 4

摘要

硅微加工技术使得制造各种微流体元件和系统成为可能。考虑到液体体积小，流速低，这种系统的准确表征提出了一个挑战。迄今为止，许多测量都是手工进行的;这既耗时又容易出错。本文介绍了一种表面微加工阀门的自动测量技术，并给出了测量结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Characterisation of microfluidic devices

Silicon micromachining techniques have enabled the fabrication of a wide range of microfluidic components and systems. Given the small volumes of liquid and low flow rates involved, the accurate characterisation of such systems presents a challenge. To date many of the measurements have been performed manually; this is both time consuming and prone to inaccuracies. This paper describes an automated measurement technique and presents results for a surface micromachined valve.

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Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.

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