{"title":"用x射线衍射评价GaInAs/GaInAsP应变层多量子阱的结构参数","authors":"J. L. de Miguel, E. Gomez-Salas, J.L. Martin","doi":"10.1109/ICIPRM.1994.328171","DOIUrl":null,"url":null,"abstract":"The expressions given by the kinematic theory of X-ray diffraction have been particularized to strained layers multiple quantum wells (SL-MQW) of GaInAs/GaInAsP. A procedure based on these expressions is proposed that, with a proper design of the test sample, yields the layer thicknesses and composition of the SL-MQW. This procedure is applied to a sample containing a 20 periods SL-MQW of GaInAs/GaInAsP emitting at 1.55 /spl mu/m, and the results double checked using the dynamical theory of X-ray diffraction. This procedure is used for the fast and accurate assessment of SL-MQW on a routine basis.<<ETX>>","PeriodicalId":161711,"journal":{"name":"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Assessment of the structural parameters of GaInAs/GaInAsP strained layer multiquantum wells by X-ray diffraction\",\"authors\":\"J. L. de Miguel, E. Gomez-Salas, J.L. Martin\",\"doi\":\"10.1109/ICIPRM.1994.328171\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The expressions given by the kinematic theory of X-ray diffraction have been particularized to strained layers multiple quantum wells (SL-MQW) of GaInAs/GaInAsP. A procedure based on these expressions is proposed that, with a proper design of the test sample, yields the layer thicknesses and composition of the SL-MQW. This procedure is applied to a sample containing a 20 periods SL-MQW of GaInAs/GaInAsP emitting at 1.55 /spl mu/m, and the results double checked using the dynamical theory of X-ray diffraction. This procedure is used for the fast and accurate assessment of SL-MQW on a routine basis.<<ETX>>\",\"PeriodicalId\":161711,\"journal\":{\"name\":\"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)\",\"volume\":\"28 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-03-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICIPRM.1994.328171\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIPRM.1994.328171","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Assessment of the structural parameters of GaInAs/GaInAsP strained layer multiquantum wells by X-ray diffraction
The expressions given by the kinematic theory of X-ray diffraction have been particularized to strained layers multiple quantum wells (SL-MQW) of GaInAs/GaInAsP. A procedure based on these expressions is proposed that, with a proper design of the test sample, yields the layer thicknesses and composition of the SL-MQW. This procedure is applied to a sample containing a 20 periods SL-MQW of GaInAs/GaInAsP emitting at 1.55 /spl mu/m, and the results double checked using the dynamical theory of X-ray diffraction. This procedure is used for the fast and accurate assessment of SL-MQW on a routine basis.<>
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