采用 ITO/In2O3 热电堆的高温热通量传感器,用于极端环境传感。

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION Microsystems & Nanoengineering Pub Date : 2024-07-25 eCollection Date: 2024-01-01 DOI:10.1038/s41378-024-00748-8
Helei Dong, Meimei Lu, Weifeng Wang, Qiulin Tan
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引用次数: 0

摘要

高超音速飞行器和飞机发动机叶片面临着高热流密度和高温等复杂恶劣的环境,而且它们一般都是狭窄的曲面空间,无法实际安装进行测试。薄膜热通量传感器(HFS)具有体积小、响应快、可就地制造等优点,但在测试过程中容易达到热平衡而失效。我们在手稿中设计了一种 ITO-In2O3 厚膜热通量传感器(HFS),并建立了高温热通量测试系统,以模拟叶片受到热流冲击时的工作状态。模拟和测试结果表明,通过优化结构和参数,厚膜热流传感器的测试性能得到了改善。在无水冷条件下,所设计的厚膜 HFS 可实现 1450 ℃ 的短时热通量监测和 1300 ℃ 及以下的长期稳定监测。所设计的 HFS 最大输出热电势为 17.8 mV,平均测试灵敏度为 0.035 mV/(kW/m2),具有其他现有薄膜(厚)HFS 无法达到的超强耐高温性能。因此,所设计的 HFS 在航空航天、武器装备和工业冶金等恶劣环境中具有巨大的应用潜力。
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High temperature heat flux sensor with ITO/In2O3 thermopile for extreme environment sensing.

Hypersonic vehicles and aircraft engine blades face complex and harsh environments such as high heat flow density and high temperature, and they are generally narrow curved spaces, making it impossible to actually install them for testing. Thin-film heat flux sensors (HFSs) have the advantages of small size, fast response, and in-situ fabrication, but they are prone to reach thermal equilibrium and thus fail during testing. In our manuscript, an ITO-In2O3 thick film heat flux sensor (HFS) is designed, and a high-temperature heat flux test system is built to simulate the working condition of a blade subjected to heat flow impact. The simulation and test results show that the test performance of the thick-film HFS is improved by optimizing the structure and parameters. Under the condition of no water cooling, the designed HFS can realize short-time heat flux monitoring at 1450 °C and long-term stable monitoring at 1300 °C and below. With a maximum output thermopotential of 17.8 mV and an average test sensitivity of 0.035 mV/(kW/m2), the designed HFS has superior high-temperature resistance that cannot be achieved by other existing thin (thick) film HFSs. Therefore, the designed HFS has great potential for application in harsh environments such as aerospace, weaponry, and industrial metallurgy.

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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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