在硅上生长的氮化半导体激光器

IF 7.4 1区 物理与天体物理 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Progress in Quantum Electronics Pub Date : 2021-05-01 DOI:10.1016/j.pquantelec.2021.100323
Meixin Feng , Jianxun Liu , Qian Sun , Hui Yang
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引用次数: 24

摘要

在硅上直接生长的氮化半导体激光器是一种潜在的硅光子学片上光源。此外,它可以大大降低激光二极管的制造成本,进一步扩大其应用范围。因此,在硅上生长的iii -氮化物激光器已经被研究了大约二十年。与在独立GaN衬底上生长的GaN同外延不同,在Si衬底上生长的iii -氮化物半导体由于GaN衬底与Si衬底之间晶格常数和热膨胀系数的巨大不匹配,通常会产生丰富的应变和螺纹位错,从而阻碍了电注入激光的实现。详细讨论了在Si衬底上直接生长高质量iii -氮化物半导体激光材料所面临的主要挑战以及相应的解决方案。其次,综述了近年来在硅基上生长的iii -氮化物半导体激光器的研究进展,包括法布里-帕姆罗腔激光器、微盘激光器、纳米结构激光器以及硅基激光器的单片集成。最后,讨论了硅基iii -氮化半导体激光器的进一步发展,包括材料质量的改进和新型器件结构,以增强光约束和降低电阻,具有更好的性能和可靠性的广阔前景。
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III-nitride semiconductor lasers grown on Si

III-nitride semiconductor laser directly grown on Si is a potential on-chip light source for Si photonics. Moreover, it may greatly lower the manufacture cost of laser diodes and further expand their applications. Therefore, III-nitride lasers grown on Si have been pursued for about two decades. Different from GaN homoepitaxy on free-standing GaN substrates, III-nitride semiconductors grown on Si substrates are usually rich with strain and threading dislocations due to the large mismatch in both lattice constant and coefficient of thermal expansion between GaN and Si substrates, which hindered the realization of electrically injected lasing. The key challenges in the direct growth of high-quality III-nitride semiconductor laser materials on Si substrates, as well as their corresponding solutions, are discussed in detail. Afterwards, a comprehensive review is presented on the recent progress of III-nitride semiconductor lasers grown on Si, including Fabry-Pérot cavity lasers, microdisk lasers, and the lasers with nanostructures, as well as the monolithic integration of lasers on Si. Finally, the further development of III-nitride semiconductor lasers grown on Si is also discussed, including the material quality improvement and novel device structures for enhancing optical confinement and reducing electrical resistance, with a great prospect for better performance and reliability.

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来源期刊
Progress in Quantum Electronics
Progress in Quantum Electronics 工程技术-工程:电子与电气
CiteScore
18.50
自引率
0.00%
发文量
23
审稿时长
150 days
期刊介绍: Progress in Quantum Electronics, established in 1969, is an esteemed international review journal dedicated to sharing cutting-edge topics in quantum electronics and its applications. The journal disseminates papers covering theoretical and experimental aspects of contemporary research, including advances in physics, technology, and engineering relevant to quantum electronics. It also encourages interdisciplinary research, welcoming papers that contribute new knowledge in areas such as bio and nano-related work.
期刊最新文献
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