Zhe Wang, Ikumi Ozawa, Y. Susumago, T. Odashima, N. Takahashi, H. Kino, Tetsu Tanaka, T. Fukushima
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Multi-level Metallization on an Elastomer PDMS for FOWLP-based Flexible Hybrid Electronics
In order to fabricate a wearable flexible display as a flexible hybrid electronic (FHE) device with micro-LED dies, we demonstrate multi-level metallization on an elastomer using die-first fan-out wafer-level packaging (FOWLP). The elastic substrate of this display is PDMS (polydimethylsiloxane) in which the array of 3-color micro-LEDs is embedded. In this study, we address serious issues such as die shift and stress accumulation in advanced FOWLP to integrate a self-luminescent flexible micro-LED display.
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