先进半导体制造中的分布式在制品控制

R. Qiu, R. Burda, Robert Chylak
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引用次数: 12

摘要

提高制造系统响应性的成功策略是持续加强车间在制品管理。众所周知,集中式在制品管理系统会导致车间制造系统缺乏灵活性和较差的可扩展性。本文提出了一个易于管理且分布良好的在制品管理系统,以解决在制品控制起关键作用的先进半导体制造系统的这些问题。使用虚拟生产线的概念来同步来自中央服务器的多个生成的在制品控制模块。通过这样做,实现了车间软件和硬件的模块化。所提出的分布式在制品控制系统所控制的制造系统具有灵活性、可重构性和可扩展性。因此,当设备或制造单元发生变化时,调整将限制在相关线内,而对系统其他部分的影响非常有限。由于可以轻松、快速和经济地进行更改,因此使用这种分布式在制品控制系统的先进半导体制造系统因此变得更具竞争力。
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Distributed WIP control in advanced semiconductor manufacturing
A proven successful strategy to improve the responsiveness of manufacturing systems is to continuously enhance shop floor work-in-process (WIP) management. It is well known that a centralized WIP management system results in inflexibility and poor scalability for a manufacturing system on the shop floor. This article presents an easily manageable and well-distributed WIP management system to address these issues for an advanced semiconductor manufacturing system where WIP control plays a critical role. Multiple spawned WIP control modules from a central server are synchronized using the concept of Virtual Production Lines. By doing so the modularization of both software and hardware on the shop floor is realized. The manufacturing system governed by the proposed distributed WIP control system is flexible, re-configurable, and scaleable. Therefore, when changes occur on equipment or manufacturing cells, the adjustment will be limited within the relevant line, while the impact onto the rest of the system is very much limited. Because the change can be made easily, quickly, and cost-effectively, the advanced semiconductor manufacturing system using this distributed WIP control system thus becomes much more competitive.
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