{"title":"硅片载体箱中有机污染物的排气模型","authors":"Yu-Min Ho, H. Parks, B. Vermeire","doi":"10.1109/ASMC.2002.1001625","DOIUrl":null,"url":null,"abstract":"A thermal desorption apparatus has been developed to study the adsorption and desorption of organic contaminants on silicon wafers due to outgassing from plastic wafer carrier boxes. This paper describes a complete outgassing model for organic contamination based on characterization of the outgassing of organic contamination from polypropylene carrier boxes using Butylated Hydroxytoluene (BHT) as a model compound. The model was developed from experimental data for a limited set of time/temperature conditions. Verification of the model is provided by its goodness of fit over an extended set of experimental data.","PeriodicalId":64779,"journal":{"name":"半导体技术","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2002-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A model for outgassing of organic contamination from wafer carrier boxes\",\"authors\":\"Yu-Min Ho, H. Parks, B. Vermeire\",\"doi\":\"10.1109/ASMC.2002.1001625\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A thermal desorption apparatus has been developed to study the adsorption and desorption of organic contaminants on silicon wafers due to outgassing from plastic wafer carrier boxes. This paper describes a complete outgassing model for organic contamination based on characterization of the outgassing of organic contamination from polypropylene carrier boxes using Butylated Hydroxytoluene (BHT) as a model compound. The model was developed from experimental data for a limited set of time/temperature conditions. Verification of the model is provided by its goodness of fit over an extended set of experimental data.\",\"PeriodicalId\":64779,\"journal\":{\"name\":\"半导体技术\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-08-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"半导体技术\",\"FirstCategoryId\":\"1087\",\"ListUrlMain\":\"https://doi.org/10.1109/ASMC.2002.1001625\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"半导体技术","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.1109/ASMC.2002.1001625","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A model for outgassing of organic contamination from wafer carrier boxes
A thermal desorption apparatus has been developed to study the adsorption and desorption of organic contaminants on silicon wafers due to outgassing from plastic wafer carrier boxes. This paper describes a complete outgassing model for organic contamination based on characterization of the outgassing of organic contamination from polypropylene carrier boxes using Butylated Hydroxytoluene (BHT) as a model compound. The model was developed from experimental data for a limited set of time/temperature conditions. Verification of the model is provided by its goodness of fit over an extended set of experimental data.
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