Pub Date : 2018-06-06DOI: 10.5772/INTECHOPEN.73293
K. Bilisik, G. Kaya, H. Ozdemir, M. Korkmaz, G. Erdogan
E-glass three dimensional (3D) stitched preform composites have been developed for several industrial applications due to their high mechanical performance and damage tolerance properties. Although some in-plane properties of the stitched E-glass composite structure are slightly lower than in laminated composite, its mode-I delamination failure is improved. This was achieved by using the out-of-plane directional stitched fibers. Recently, some nanoparticles as single-walled nanotubes (SWNT) or multiwalled nanotubes (MWNT) or nanofibers (NF) were added to the glass fabric structure or stitched preform during consolidation process. This further enhances the thermo-mechanical impact properties of the E-glass fiber composites.
{"title":"Applications of Glass Fibers in 3D Preform Composites","authors":"K. Bilisik, G. Kaya, H. Ozdemir, M. Korkmaz, G. Erdogan","doi":"10.5772/INTECHOPEN.73293","DOIUrl":"https://doi.org/10.5772/INTECHOPEN.73293","url":null,"abstract":"E-glass three dimensional (3D) stitched preform composites have been developed for several industrial applications due to their high mechanical performance and damage tolerance properties. Although some in-plane properties of the stitched E-glass composite structure are slightly lower than in laminated composite, its mode-I delamination failure is improved. This was achieved by using the out-of-plane directional stitched fibers. Recently, some nanoparticles as single-walled nanotubes (SWNT) or multiwalled nanotubes (MWNT) or nanofibers (NF) were added to the glass fabric structure or stitched preform during consolidation process. This further enhances the thermo-mechanical impact properties of the E-glass fiber composites.","PeriodicalId":118101,"journal":{"name":"Advances in Glass Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114205648","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-06-06DOI: 10.5772/INTECHOPEN.73292
J. Yuan
Glass beads are solid glass spheres. Because of their high strength, chemical stability, low thermal expansion, and good flowability, they are manufactured from colorless glass for many industrial purposes. In recent years, the urban heat island (UHI) phenomenon has become very serious in urban centers. Heat emitted from exterior walls of buildings accounts for a relatively large proportion of total anthropogenic waste heat. Retroreflective (RR) materials are researched worldwide for the potential in application to building exterior wall surface instead of normal diffuse highly reflective (DHR) materials to resist the UHI. Glass beads are the common main components of these RR materials. Glass beads have different refractive indices and diameters. The classification and reflection principles of glass beads, experimental analysis on the optical properties and thermal performance of glass bead RR materials are elaborated in detail in this chapter. In addition, if these glass bead RR materials are used in building facades, when the incident angle of the sun is very high, the facade will produce a large specular reflection to the road, which may cause adverse effects on pedestrians. Therefore, theoretical and technical aspects of preventing the specular reflection from glass bead RR materials should be studied and implemented.
{"title":"Application of Glass Beads in Building Exterior Wall Surface Materials","authors":"J. Yuan","doi":"10.5772/INTECHOPEN.73292","DOIUrl":"https://doi.org/10.5772/INTECHOPEN.73292","url":null,"abstract":"Glass beads are solid glass spheres. Because of their high strength, chemical stability, low thermal expansion, and good flowability, they are manufactured from colorless glass for many industrial purposes. In recent years, the urban heat island (UHI) phenomenon has become very serious in urban centers. Heat emitted from exterior walls of buildings accounts for a relatively large proportion of total anthropogenic waste heat. Retroreflective (RR) materials are researched worldwide for the potential in application to building exterior wall surface instead of normal diffuse highly reflective (DHR) materials to resist the UHI. Glass beads are the common main components of these RR materials. Glass beads have different refractive indices and diameters. The classification and reflection principles of glass beads, experimental analysis on the optical properties and thermal performance of glass bead RR materials are elaborated in detail in this chapter. In addition, if these glass bead RR materials are used in building facades, when the incident angle of the sun is very high, the facade will produce a large specular reflection to the road, which may cause adverse effects on pedestrians. Therefore, theoretical and technical aspects of preventing the specular reflection from glass bead RR materials should be studied and implemented.","PeriodicalId":118101,"journal":{"name":"Advances in Glass Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128239663","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-06-06DOI: 10.5772/INTECHOPEN.73925
U. Petzold
Optical glass is the base material for the fabrication of spherical lenses, aspheres, prisms, beam splitters, optical fibers, axicons, or other optical components. The photonic indus try relies on such components and so on optical glass. Photonics is a key enabling tech - nology for many market segments and applications. The requirements for optical glass are the highest transmission and tight tolerances of not only the optical properties such as refraction and dispersion but also the mechanical properties such as sufficient size and low stress content. In order to achieve the above mentioned specification, a sophis - ticated melting technology, hot forming processes, annealing procedure, and measure ment devices are required. This chapter discusses the most relevant information of these processes.
{"title":"Optical Glass: A High-Tech Base Material as Key Enabler for Photonics","authors":"U. Petzold","doi":"10.5772/INTECHOPEN.73925","DOIUrl":"https://doi.org/10.5772/INTECHOPEN.73925","url":null,"abstract":"Optical glass is the base material for the fabrication of spherical lenses, aspheres, prisms, beam splitters, optical fibers, axicons, or other optical components. The photonic indus try relies on such components and so on optical glass. Photonics is a key enabling tech - nology for many market segments and applications. The requirements for optical glass are the highest transmission and tight tolerances of not only the optical properties such as refraction and dispersion but also the mechanical properties such as sufficient size and low stress content. In order to achieve the above mentioned specification, a sophis - ticated melting technology, hot forming processes, annealing procedure, and measure ment devices are required. This chapter discusses the most relevant information of these processes.","PeriodicalId":118101,"journal":{"name":"Advances in Glass Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116978633","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-06-06DOI: 10.5772/INTECHOPEN.74177
Hongwei Guo
The Bi2O3-SiO2 glasses were prepared by the melt cooling method. The non-isothermal crystallization kinetics and phase transformation kinetics of the BS glasses were analyzed by the Kissinger and Augis-Bennett equations by means of differential scanning calorimetry (DSC) and X-ray diffraction (XRD). The results show that three main crystal phases, namely Bi12SiO20, Bi2SiO5, and Bi4Si3O12 are generated sequentially in the heat treatment process. The corresponding activation energy is 150.6, 474.9, and 340.3 kJ/mol. The average crystallization index is 2.5, 2.1, and 2.2. The crystal phases generated by volume nucleation grow in a one-dimensional pattern, and the metastable Bi2SiO5 can be transformed into Bi4Si3O12, which is in a more stable phase.
{"title":"Crystallization Kinetics of Bi2O3-SiO2 Binary System","authors":"Hongwei Guo","doi":"10.5772/INTECHOPEN.74177","DOIUrl":"https://doi.org/10.5772/INTECHOPEN.74177","url":null,"abstract":"The Bi2O3-SiO2 glasses were prepared by the melt cooling method. The non-isothermal crystallization kinetics and phase transformation kinetics of the BS glasses were analyzed by the Kissinger and Augis-Bennett equations by means of differential scanning calorimetry (DSC) and X-ray diffraction (XRD). The results show that three main crystal phases, namely Bi12SiO20, Bi2SiO5, and Bi4Si3O12 are generated sequentially in the heat treatment process. The corresponding activation energy is 150.6, 474.9, and 340.3 kJ/mol. The average crystallization index is 2.5, 2.1, and 2.2. The crystal phases generated by volume nucleation grow in a one-dimensional pattern, and the metastable Bi2SiO5 can be transformed into Bi4Si3O12, which is in a more stable phase.","PeriodicalId":118101,"journal":{"name":"Advances in Glass Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132623696","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-06-06DOI: 10.5772/INTECHOPEN.74178
Quanlong He, Pengfei Wang, Min Lu, B. Peng
Final optics assembly is one of the most important parts in high energy and large-scale laser systems like US National Ignition Facility and SG III in China. Those final optics assembly are facing some severe tests, like the laser-induced damage caused by 3ω (351 nm) laser irradiation. Meanwhile, the irradiation of gamma ray and X-rays, will also cause the changes of optical properties in the investigated multi-component phos- phate glasses that have potential use in novel color separation optics in high power laser facilities. These changes of optical properties are associated with the defects induced by gamma radiation. In details, some defects contribute to the absorption in the UV region, which will deteriorate their UV performance. However, some of the induced defects can be eliminated by thermal treatment due to the release and capture of the electrons in conduction band. Besides, the doped Fe, Co, B, Ce and Sb will also affect the defect-state in phosphate-based glasses. In details, gamma radiation resistances of the phosphate glass can be greatly improved by CeO 2 and Sb 2 O 3 co-doping, and the introduction of B 2 O 3 reduces the connectivity of phosphate chains and thus increases the concentration of PO 3 -EC and PO 4 -EC defects.
{"title":"The Nature of the Defects in Phosphate-Based Glasses Induced by Gamma Radiation","authors":"Quanlong He, Pengfei Wang, Min Lu, B. Peng","doi":"10.5772/INTECHOPEN.74178","DOIUrl":"https://doi.org/10.5772/INTECHOPEN.74178","url":null,"abstract":"Final optics assembly is one of the most important parts in high energy and large-scale laser systems like US National Ignition Facility and SG III in China. Those final optics assembly are facing some severe tests, like the laser-induced damage caused by 3ω (351 nm) laser irradiation. Meanwhile, the irradiation of gamma ray and X-rays, will also cause the changes of optical properties in the investigated multi-component phos- phate glasses that have potential use in novel color separation optics in high power laser facilities. These changes of optical properties are associated with the defects induced by gamma radiation. In details, some defects contribute to the absorption in the UV region, which will deteriorate their UV performance. However, some of the induced defects can be eliminated by thermal treatment due to the release and capture of the electrons in conduction band. Besides, the doped Fe, Co, B, Ce and Sb will also affect the defect-state in phosphate-based glasses. In details, gamma radiation resistances of the phosphate glass can be greatly improved by CeO 2 and Sb 2 O 3 co-doping, and the introduction of B 2 O 3 reduces the connectivity of phosphate chains and thus increases the concentration of PO 3 -EC and PO 4 -EC defects.","PeriodicalId":118101,"journal":{"name":"Advances in Glass Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129539314","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-06-06DOI: 10.5772/INTECHOPEN.74180
M. Suklueng
Barium calcium aluminum boro-silicate glass (BCABS) is used as a sealant for Solid Oxide Fuel Cells (SOFCs) to protect against air and hydrogen gas leaking at 800 (cid:1) C. One major problem is the chemical reaction of this glass with barium oxide and other materials in the composition such as Ba-Y-Co-Fe (BYCF) and Ba-Sr-Co-Fe (cathode) used in the fuel cell components, leading to the formation and spreading of barium aluminosilicate glass on the cathode surface in the fuel cell. This investigation indicated that adding 0.4 mol% ZrO 2 to BCABS prevents the formation of barium aluminosilicate glass. Generally, the sealing glass of fuel cells must show high resistivity for no disturbance to electricity from the fuel cell system when generating the electron. The 0.4 mol% ZrO 2 to BCABS is generated with resistivity of 4 M Ω that is useful for SOFCs technology. The thermal expansion coefficient (TEC) in SOFCs is the major condition for producing the cell layers. The thermal expan- sion coefficient of SOFCs based on each layer (cathode, electrolyte, anode, interconnect and sealant) should be closed to prevent broken cells. The thermal expansion coefficient is 12.40 (cid:3) 10 (cid:4) 6 / o C matched with the TEC of the GDC 10 electrolyte. Therefore, BCABS glass with 0.4 mol%ZrO 2 generated a novel composite for SOFCs.
钡钙铝boro-silicate玻璃(bcab)被用作密封剂固体氧化物燃料电池(sofc)来防止空气和氢气泄漏800 (cid): 1) c的一个主要问题是玻璃的化学反应与氧化钡和其他材料的成分如Ba-Y-Co-Fe (BYCF)和Ba-Sr-Co-Fe(阴极)用于燃料电池组件,导致钡铝硅酸盐玻璃的形成和传播在燃料电池阴极表面。研究表明，在BCABS中加入0.4 mol%的zro2可以防止钡铝硅酸盐玻璃的形成。一般来说，燃料电池的密封玻璃必须具有高电阻率，以便在产生电子时不会对燃料电池系统的电产生干扰。生成的0.4 mol% zro2到BCABS的电阻率为4 M Ω，这对SOFCs技术很有用。sofc的热膨胀系数(TEC)是形成电池层的主要条件。sofc的每一层(阴极、电解液、阳极、互连和密封剂)的热膨胀系数都应该是封闭的，以防止电池破裂。热膨胀系数为12.40 (cid:3) 10 (cid:4) 6 / o C，与gdc10电解质的TEC相匹配。因此，含有0.4 mol% zro2的BCABS玻璃产生了一种新型的sofc复合材料。
{"title":"Seal Glass for Solid Oxide Fuel Cells","authors":"M. Suklueng","doi":"10.5772/INTECHOPEN.74180","DOIUrl":"https://doi.org/10.5772/INTECHOPEN.74180","url":null,"abstract":"Barium calcium aluminum boro-silicate glass (BCABS) is used as a sealant for Solid Oxide Fuel Cells (SOFCs) to protect against air and hydrogen gas leaking at 800 (cid:1) C. One major problem is the chemical reaction of this glass with barium oxide and other materials in the composition such as Ba-Y-Co-Fe (BYCF) and Ba-Sr-Co-Fe (cathode) used in the fuel cell components, leading to the formation and spreading of barium aluminosilicate glass on the cathode surface in the fuel cell. This investigation indicated that adding 0.4 mol% ZrO 2 to BCABS prevents the formation of barium aluminosilicate glass. Generally, the sealing glass of fuel cells must show high resistivity for no disturbance to electricity from the fuel cell system when generating the electron. The 0.4 mol% ZrO 2 to BCABS is generated with resistivity of 4 M Ω that is useful for SOFCs technology. The thermal expansion coefficient (TEC) in SOFCs is the major condition for producing the cell layers. The thermal expan- sion coefficient of SOFCs based on each layer (cathode, electrolyte, anode, interconnect and sealant) should be closed to prevent broken cells. The thermal expansion coefficient is 12.40 (cid:3) 10 (cid:4) 6 / o C matched with the TEC of the GDC 10 electrolyte. Therefore, BCABS glass with 0.4 mol%ZrO 2 generated a novel composite for SOFCs.","PeriodicalId":118101,"journal":{"name":"Advances in Glass Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126266101","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-06-06DOI: 10.5772/INTECHOPEN.73865
L. Ravangave, G. N. Devde
A series of stable and transparent glasses with the composition 59B2O3–10Na2O–(30 − x) CdO–xZnO–1CuO (0 ≤ x ≤ 30) (where x = 0, 7.5, 15, 22.5, and 30 mol%) were prepared by conventional melt-quenching technique. These glasses were characterized using X-ray diffraction (XRD), Fourier-transform infrared (FTIR) and Raman spectroscopes, differential scanning calorimetry (DSC), optical absorption, and electron paramagnetic resonance (EPR). XRD and DSC analysis confirmed the glassy nature of the prepared samples. The physical properties such as density (ρ), molar volume (Vm), oxygen packing density (OPD), and the molar volume of oxygen (Vo) were calculated and discussed. FTIR and Raman studies showed that the glass network consists of BO3 and BO4 units in various borate groups. From DSC, it was found that the glass transition temperature (Tg) varies nonlinearly with the addition of ZnO content in place of CdO. Both EPR and optical absorption results have confirmed that the Cu2+ ions are in octahedral coordination with a strong tetrahedral distortion. The changes in various spectroscopic properties of Cu2+ ions in the glasses such as spin-Hamiltonian parameters ( ) and bonding coefficients (α2, β1, and β2) were understood with the help of FTIR and Raman studies.
{"title":"Structure and Physical Properties of 59B2O3–10Na2O–(30 − x)CdO–xZnO–1CuO (0 ≤ x ≤ 30) Glass System","authors":"L. Ravangave, G. N. Devde","doi":"10.5772/INTECHOPEN.73865","DOIUrl":"https://doi.org/10.5772/INTECHOPEN.73865","url":null,"abstract":"A series of stable and transparent glasses with the composition 59B2O3–10Na2O–(30 − x) CdO–xZnO–1CuO (0 ≤ x ≤ 30) (where x = 0, 7.5, 15, 22.5, and 30 mol%) were prepared by conventional melt-quenching technique. These glasses were characterized using X-ray diffraction (XRD), Fourier-transform infrared (FTIR) and Raman spectroscopes, differential scanning calorimetry (DSC), optical absorption, and electron paramagnetic resonance (EPR). XRD and DSC analysis confirmed the glassy nature of the prepared samples. The physical properties such as density (ρ), molar volume (Vm), oxygen packing density (OPD), and the molar volume of oxygen (Vo) were calculated and discussed. FTIR and Raman studies showed that the glass network consists of BO3 and BO4 units in various borate groups. From DSC, it was found that the glass transition temperature (Tg) varies nonlinearly with the addition of ZnO content in place of CdO. Both EPR and optical absorption results have confirmed that the Cu2+ ions are in octahedral coordination with a strong tetrahedral distortion. The changes in various spectroscopic properties of Cu2+ ions in the glasses such as spin-Hamiltonian parameters ( ) and bonding coefficients (α2, β1, and β2) were understood with the help of FTIR and Raman studies.","PeriodicalId":118101,"journal":{"name":"Advances in Glass Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125000764","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-06-06DOI: 10.5772/INTECHOPEN.74664
Xiushan Zhu, A. Chavez-Pirson, D. Milanese, J. Lousteau, N. Boetti, D. Pugliese, N. Peyghambarian
Nonsilica oxide glasses have been developed and studied for many years as promising alternatives to the most used silica glass for the development of optical fiber lasers with unique characteristics. Their main properties and compositions, alongside the optical fiber fabrication principle, have been previously reviewed in part I. This chapter will review the development of optical fiber lasers operating in the infrared wavelength region based on nonsilica glass fiber materials, either phosphate, germanate or tellurite.
{"title":"Nonsilica Oxide Glass Fiber Laser Sources: Part II","authors":"Xiushan Zhu, A. Chavez-Pirson, D. Milanese, J. Lousteau, N. Boetti, D. Pugliese, N. Peyghambarian","doi":"10.5772/INTECHOPEN.74664","DOIUrl":"https://doi.org/10.5772/INTECHOPEN.74664","url":null,"abstract":"Nonsilica oxide glasses have been developed and studied for many years as promising alternatives to the most used silica glass for the development of optical fiber lasers with unique characteristics. Their main properties and compositions, alongside the optical fiber fabrication principle, have been previously reviewed in part I. This chapter will review the development of optical fiber lasers operating in the infrared wavelength region based on nonsilica glass fiber materials, either phosphate, germanate or tellurite.","PeriodicalId":118101,"journal":{"name":"Advances in Glass Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131275948","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-02-10DOI: 10.5772/INTECHOPEN.74179
N. Toan, N. Inomata, M. Toda, T. Ono
In this work, we review the progress in recent studies on glass patterning including technologies and applications. Four technologies for glass micromachining including wet etching, sandblasting, reactive ion etching, and glass reflow process are analyzed. Advantages as well as disadvantages of each method are presented and discussed in light of the experiments. Various microsystem applications using the above glass patterning technologies like thermal sensors, hermetically packaged capacitive silicon resonators, optical modulator devices, glass microfluidics, micro-heaters, and vacuum-sealed capacitive micromachined ultrasonic transducer arrays are reported.
{"title":"Glass Patterning: Technologies and Applications","authors":"N. Toan, N. Inomata, M. Toda, T. Ono","doi":"10.5772/INTECHOPEN.74179","DOIUrl":"https://doi.org/10.5772/INTECHOPEN.74179","url":null,"abstract":"In this work, we review the progress in recent studies on glass patterning including technologies and applications. Four technologies for glass micromachining including wet etching, sandblasting, reactive ion etching, and glass reflow process are analyzed. Advantages as well as disadvantages of each method are presented and discussed in light of the experiments. Various microsystem applications using the above glass patterning technologies like thermal sensors, hermetically packaged capacitive silicon resonators, optical modulator devices, glass microfluidics, micro-heaters, and vacuum-sealed capacitive micromachined ultrasonic transducer arrays are reported.","PeriodicalId":118101,"journal":{"name":"Advances in Glass Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-02-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134506193","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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