R. Robison, Janet M. Wilson, R. Vega, Terence Hook, F. Geelhaar, Jonathan Cobb, Tim Tsuei
{"title":"A Synopsys TCAD-based workflow to support technology evaluation at 3nm and beyond","authors":"R. Robison, Janet M. Wilson, R. Vega, Terence Hook, F. Geelhaar, Jonathan Cobb, Tim Tsuei","doi":"10.1117/12.2658572","DOIUrl":"https://doi.org/10.1117/12.2658572","url":null,"abstract":"","PeriodicalId":129208,"journal":{"name":"DTCO and Computational Patterning II","volume":"2010 19","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132871567","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Abdalaziz Awad, Philipp Brendel, Bappaditya Dey, S. Halder, A. Erdmann
{"title":"Training data selection and optimization for EUV lithography deep learning models","authors":"Abdalaziz Awad, Philipp Brendel, Bappaditya Dey, S. Halder, A. Erdmann","doi":"10.1117/12.2658411","DOIUrl":"https://doi.org/10.1117/12.2658411","url":null,"abstract":"","PeriodicalId":129208,"journal":{"name":"DTCO and Computational Patterning II","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130055665","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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