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Adaptive X-Ray Optics V最新文献

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Front Matter: Volume 10761 前题:10761卷
Pub Date : 2018-11-06 DOI: 10.1117/12.2516844
At-wavelength metrology, wavefront sensing, and feedback techniques
波长测量,波前传感和反馈技术
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引用次数: 0
The transform limited SXR monochromator with ultra-high-resolution option to open up new scientific capabilities at LCLS II (Conference Presentation) 具有超高分辨率选项的转换有限SXR单色仪在LCLS II上开辟了新的科学能力(会议报告)
Pub Date : 2018-09-18 DOI: 10.1117/12.2322941
D. Cocco, G. Dakovski, S. Guillet, C. Hardin, D. Morton, J. Nicolas, F. O'Dowd, D. Rich, J. Stieber, Randy A. Whitney
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引用次数: 1
Shaping the mirror profile by using a novel cooling scheme to increase optical design flexibility in high power XFELs (Conference Presentation) 采用新颖的冷却方案塑造镜面轮廓,增加高功率XFELs的光学设计灵活性(会议报告)
Pub Date : 2018-09-18 DOI: 10.1117/12.2323216
C. Hardin, M. L. Ng, D. Morton, L. Lee, L. Zhang, D. Cocco
With the onset of high power XFELs and diffraction limited storage rings, there is a growing demand to maintain sub nanometer mirror figures even under high heat load. This is a difficult issue as the optimum cooling design for an optic is highly dependent on the power footprint on the mirror, which can be highly dynamic. Resistive Element Adjustable Length (REAL) cooling can be utilized to change the cooling parameters during an experiment to adapt for changing beam parameters. A case study of the new soft x-ray monochromator for the LCLS L2SI program is presented that utilizes this new capability to allow the beam to translate across the mirror for different operation modes, greatly simplifying the monochromator mechanics. Metrology of a prototype mirror will also be presented.
随着高功率XFELs和衍射限制存储环的出现,即使在高热负荷下也需要保持亚纳米反射镜的形状。这是一个困难的问题,因为光学器件的最佳冷却设计高度依赖于反射镜上的功率足迹,这可能是高度动态的。电阻元件可调长度(REAL)冷却可以在实验过程中改变冷却参数,以适应光束参数的变化。本文介绍了LCLS L2SI项目的新型软x射线单色仪的案例研究,该单色仪利用了这种新能力,允许光束在不同的操作模式下在镜子上转换,大大简化了单色仪的力学。还将介绍原型镜的测量方法。
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引用次数: 1
Micro-focusing of broadband high-order harmonic radiation by a double toroidal mirror (Conference Presentation) 双环面反射镜对宽带高次谐波辐射的微聚焦(会议报告)
Pub Date : 2018-09-18 DOI: 10.1117/12.2323770
P. Zeitoun, Hélène Couderc-Alteirac, A. L’Huillier, P. Rudawski, H. Dacasa
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引用次数: 0
Compact metrology beamline for EUV optic and adaptive optic tests (Conference Presentation) 用于EUV光学和自适应光学测试的紧凑计量光束线(会议报告)
Pub Date : 2018-09-18 DOI: 10.1117/12.2323768
P. Zeitoun, Domenico Alj, H. Dacasa, O. Rochefoucauld
With the progresses achieved on the development of high quality, highly coherent soft X-ray (or EUV) sources from synchrotrons, free-electrons laser, high harmonics and plasma based soft X-ray laser, as well as for the need of always better optics for imaging (EUV lithography, EUV spatial telescopes, EUV microscopes), the demand on metrology is increasing very fast. Nowadays, many synchrotrons have developed metrology beamlines but with the limit of being too expensive and too large for transposing them to university-scale laboratories or optical firms. At Laboratoire d'Optique Appliquee, we have developed a compact and versatile metrology beamline to test at-wavelength different EUV optics, from single component to full assembly and adaptive optics. The beamline is based on the use of high harmonics generated by the interaction of a 35 fs, 4 kHz, 3 mJ laser with neutral gases. The high harmonics span from 10 to 50 nm and are fully coherent, collimated and exhibit a good wavefront of about lambda/5 rms. The beamline covers a footprint of about 5*1.5 m2 while the driving laser occupies about 4 m2. Itis composed of an interaction chamber where high harmonics are generated, a spectrometer and the metrology chamber (1.5m*0.7m) . We have tested many optical components from flat or curved mirrors to toroidal mirror or Schwarzschild microscope. We will present in detail the beamline as well as results from optic metrology. The beamline is also used for calibration of wavefront sensors. This beamline is well suited for testing EUV adaptive optic in any configurations.
随着同步加速器、自由电子激光器、高次谐波和等离子体软x射线激光器等高质量、高相干软x射线光源的发展,以及对成像光学技术(EUV光刻、EUV空间望远镜、EUV显微镜)的需求不断提高,对计量学的需求也在快速增长。如今,许多同步加速器已经开发出了计量光束线,但由于过于昂贵和过于庞大,无法将它们转移到大学规模的实验室或光学公司。在Laboratoire d’optique Appliquee,我们开发了一种紧凑而通用的计量光束线,用于测试波长不同的EUV光学器件,从单组件到全组装和自适应光学器件。光束线是基于使用35fs, 4khz, 3mj激光与中性气体相互作用产生的高谐波。高次谐波的范围为10 ~ 50nm,是完全相干的、准直的,波前约为λ / 5rms。光束线占地面积约为5*1.5 m2,而驱动激光器占地面积约为4 m2。它由产生高次谐波的相互作用室、光谱仪和计量室(1.5m*0.7m)组成。我们测试了许多光学元件,从平面或曲面镜到环面镜或史瓦西显微镜。我们将详细介绍光束线以及光学测量的结果。波束线还可用于波前传感器的标定。该光束线非常适合测试任何配置的EUV自适应光学。
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引用次数: 0
期刊
Adaptive X-Ray Optics V
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