Pub Date : 2018-10-08DOI: 10.1201/9781315214481-13
{"title":"Particulate Deposition in Liquid Systems","authors":"","doi":"10.1201/9781315214481-13","DOIUrl":"https://doi.org/10.1201/9781315214481-13","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"116 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124257402","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-10-08DOI: 10.1201/9781315214481-11
V. Chia, M. Edgell
{"title":"On-Wafer Measurement of Molecular Contaminants","authors":"V. Chia, M. Edgell","doi":"10.1201/9781315214481-11","DOIUrl":"https://doi.org/10.1201/9781315214481-11","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"38 3","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131686575","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-10-08DOI: 10.1201/9781315214481-16
R. Donovan
{"title":"Deposition of Metallic Contaminants from Liquids and Their Removal","authors":"R. Donovan","doi":"10.1201/9781315214481-16","DOIUrl":"https://doi.org/10.1201/9781315214481-16","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115154943","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Off-Wafer Measurement of Contaminants","authors":"","doi":"10.1201/9781315214481-9","DOIUrl":"https://doi.org/10.1201/9781315214481-9","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"14 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129404621","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-10-08DOI: 10.1016/B978-081551555-5.50005-8
D. Rader, A. S. Geller
{"title":"Transport and Deposition of Aerosol Particles","authors":"D. Rader, A. S. Geller","doi":"10.1016/B978-081551555-5.50005-8","DOIUrl":"https://doi.org/10.1016/B978-081551555-5.50005-8","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114379759","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-10-08DOI: 10.1201/9781315214481-15
{"title":"Organic Contamination Removal","authors":"","doi":"10.1201/9781315214481-15","DOIUrl":"https://doi.org/10.1201/9781315214481-15","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130339894","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-10-08DOI: 10.1201/9781315214481-10
R. Diaz, B. M. Nebeker, E. Hirleman
{"title":"On-Wafer Measurement of Particles","authors":"R. Diaz, B. M. Nebeker, E. Hirleman","doi":"10.1201/9781315214481-10","DOIUrl":"https://doi.org/10.1201/9781315214481-10","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"269 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123050459","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"National Technology Roadmap for Semiconductors: Basis and Alignment","authors":"","doi":"10.1201/9781315214481-8","DOIUrl":"https://doi.org/10.1201/9781315214481-8","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132222510","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-10-08DOI: 10.1201/9781315214481-17
{"title":"Sources of Contamination and Their Control","authors":"","doi":"10.1201/9781315214481-17","DOIUrl":"https://doi.org/10.1201/9781315214481-17","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"109 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125874491","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-10-08DOI: 10.1201/9781315214481-14
R. Donovan
{"title":"Deposition of Molecular Contaminants in Gaseous Environments","authors":"R. Donovan","doi":"10.1201/9781315214481-14","DOIUrl":"https://doi.org/10.1201/9781315214481-14","url":null,"abstract":"","PeriodicalId":325915,"journal":{"name":"Contamination-Free Manufacturing for Semiconductors and Other Precision Products","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124421554","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：