Pub Date : 2019-02-15DOI: 10.1002/9783527818655.ch8
{"title":"Application of Cat-CVD Technologies","authors":"","doi":"10.1002/9783527818655.ch8","DOIUrl":"https://doi.org/10.1002/9783527818655.ch8","url":null,"abstract":"","PeriodicalId":355203,"journal":{"name":"Catalytic Chemical Vapor Deposition","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-02-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123763595","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-02-15DOI: 10.1002/9783527818655.ch3
{"title":"Fundamentals for Analytical Methods for Revealing Chemical Reactions in Cat-CVD","authors":"","doi":"10.1002/9783527818655.ch3","DOIUrl":"https://doi.org/10.1002/9783527818655.ch3","url":null,"abstract":"","PeriodicalId":355203,"journal":{"name":"Catalytic Chemical Vapor Deposition","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-02-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124984308","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-02-15DOI: 10.1002/9783527818655.ch9
{"title":"Radicals Generated in Cat-CVD Apparatus and Their Application","authors":"","doi":"10.1002/9783527818655.ch9","DOIUrl":"https://doi.org/10.1002/9783527818655.ch9","url":null,"abstract":"","PeriodicalId":355203,"journal":{"name":"Catalytic Chemical Vapor Deposition","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-02-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125365388","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-02-15DOI: 10.1002/9783527818655.ch4
{"title":"Physics and Chemistry of Cat-CVD","authors":"","doi":"10.1002/9783527818655.ch4","DOIUrl":"https://doi.org/10.1002/9783527818655.ch4","url":null,"abstract":"","PeriodicalId":355203,"journal":{"name":"Catalytic Chemical Vapor Deposition","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-02-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133472153","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-02-15DOI: 10.1002/9783527818655.ch2
{"title":"Fundamentals for Studying the Physics of Cat-CVD and Difference from PECVD","authors":"","doi":"10.1002/9783527818655.ch2","DOIUrl":"https://doi.org/10.1002/9783527818655.ch2","url":null,"abstract":"","PeriodicalId":355203,"journal":{"name":"Catalytic Chemical Vapor Deposition","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-02-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132804319","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-02-15DOI: 10.1002/9783527818655.ch5
{"title":"Properties of Inorganic Films Prepared by Cat-CVD","authors":"","doi":"10.1002/9783527818655.ch5","DOIUrl":"https://doi.org/10.1002/9783527818655.ch5","url":null,"abstract":"","PeriodicalId":355203,"journal":{"name":"Catalytic Chemical Vapor Deposition","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-02-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132896126","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-02-15DOI: 10.1002/9783527818655.ch7
{"title":"Physics and Technologies for Operating Cat-CVD Apparatus","authors":"","doi":"10.1002/9783527818655.ch7","DOIUrl":"https://doi.org/10.1002/9783527818655.ch7","url":null,"abstract":"","PeriodicalId":355203,"journal":{"name":"Catalytic Chemical Vapor Deposition","volume":"110 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-02-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134268265","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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