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Influence of Chemical Cleaning Procedures and Thermal Oxidation Processes on the Uniformity of MOS Gate Oxides on Abrupt Steps on Silicon Surfaces 化学清洗和热氧化工艺对硅表面突变台阶上MOS栅氧化物均匀性的影响
Pub Date : 2023-08-03 DOI: 10.34024/jsse.2023.v1.15261
R. Souza, W. Nogueira, S. G. dos Santos Filho
This work analyzes the influence of some chemical steps used in standard cleaning recipes on the surface micro-roughness of silicon wafers. The effect of varying the ammonium hydroxide concentration in the NH4OH: H2O2:H2O solution was studied and silicon wafer micro-roughness was characterized by atomic force microscopy technique at different scans of 1µmx1µm. Based on the results, it was possible to point the condition to obtain low surface micro-roughness for NH4OH-based solutions with the lowest NH4OH content before the growth of gate oxides. Following, it silicon-oxide thin films were grown onto periodic rectangular shapes, 100 nm in height, obtained by localized plasma etching on silicon wafer surfaces. Silicon oxides (SiO2), about 4.5 nm thick, were grown in ultrapure dry-O2 or pyrogenic (O2 + H2) environments in order to compare the planar uniformity and the grade of coverage at the step edges of rectangular shapes defined onto silicon surfaces. Pyrogenic and conventional oxidation at 850 oC allowed one to obtain gate oxides on 100 nm-stepped silicon surfaces with high dielectric breakdown field (>10 MV/cm), good planar uniformity and conformal coverage at the step edges. The impact of this result is now the feasibility of fabricating good-quality gate oxides for surrounding gate transistors (SGT’s) and texturized MOS solar cells.
本文分析了标准清洗配方中一些化学步骤对硅片表面微粗糙度的影响。研究了NH4OH: H2O2:H2O溶液中氢氧化铵浓度的变化对硅片表面粗糙度的影响,并利用原子力显微镜技术在1µmx1µm的不同扫描范围内对硅片表面粗糙度进行了表征。基于这些结果,可以指出在栅极氧化物生长之前,NH4OH含量最低的NH4OH基溶液获得低表面微粗糙度的条件。然后,通过局部等离子体刻蚀在硅晶圆表面获得100 nm高的周期性矩形氧化硅薄膜。为了比较硅表面矩形边缘的平面均匀性和覆盖等级,在超纯干氧或热原(O2 + H2)环境中生长了约4.5 nm厚的硅氧化物(SiO2)。850℃下的热原氧化和常规氧化可以在100 nm台阶硅表面上获得栅极氧化物,具有高介电击穿场(bbb10 MV/cm),良好的平面均匀性和台阶边缘的保形覆盖。这一结果的影响现在是制造高质量的栅极氧化物的可行性,用于围绕栅极晶体管(SGT)和纹理化MOS太阳能电池。
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引用次数: 0
Waste treatment and Sustainable Bioelectricity Generation using Microbial fuel cell 利用微生物燃料电池进行废物处理和可持续生物发电
Pub Date : 2023-08-03 DOI: 10.34024/jsse.2023.v1.15460
Tomas Rebequi, Yasmim Pio, Carolina Ferreira Andrade Penteado, Luiza Helena da Silva Martins, Anthony Andrey Ramalho Diniz, Andrea Komesu, Eduardo Dellosso Penteado
In the last decade, great attentions have been paid to microbial fuel cells (MFC) due to the possibility to be the solution for the three bigger world project – energy security, climate changes and waste management. Different from all the conventional wastewater treatment which are energy intensive, MFC can use waste as substrate/fuel to directly generate electricity through microbial reactions in anode and microbial/enzymatic/abiotic electrochemical reactions in cathode. In this sense, the MFC is an emerging technology for treat waste and produce wealth products (energy and some added value substance – organic acids, nutrients). Although, there are a large number of research in new materials and operational conditional to improve the MFC performance, as yet there are practical barriers, such as low power generation, expensive electrode materials and the inability to scale up MFC. Therefore, this work summarizes information about the recent advances in MFC research, focused on MFC configurations, material electrodes, and performances. Limitations and challenges in applying MFC to treat waste are also discussed, moreover future perspective pointed the new hot topics to solve these problems.
在过去的十年里,微生物燃料电池(MFC)受到了极大的关注,因为它有可能成为三大世界项目——能源安全、气候变化和废物管理——的解决方案。不同于传统废水处理的能源密集型,MFC可以将废弃物作为基质/燃料,通过阳极的微生物反应和阴极的微生物/酶/非生物电化学反应直接发电。从这个意义上说,MFC是一种处理废物和生产财富产品(能源和一些附加值物质-有机酸,营养物质)的新兴技术。虽然在提高MFC性能的新材料和操作条件方面进行了大量的研究,但目前仍存在一些实际障碍,如发电功率低、电极材料昂贵以及无法扩大MFC的规模。因此,本工作总结了MFC研究的最新进展,重点是MFC的结构、材料电极和性能。讨论了应用MFC处理垃圾的局限性和挑战,并展望了未来解决这些问题的新热点。
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引用次数: 0
Microbial Degradation of Heterocycles- A Review 杂环化合物的微生物降解研究进展
Pub Date : 2023-08-03 DOI: 10.34024/jsse.2023.v1.15462
Luiza Helena da Silva Martins, Jhonatas Rodrigues Barbosa, Sabrina Baleixo da Silva, Paulo Wender Portal Gomes, Andrea Komesu, Glauce Vasconcelos da Silva Pereira, Rafaela Cristina Barata Alves, Carissa Michelle Goltara Bichara
Heterocycles are organic compounds that are well-known and distributed in nature; they can be used in the pharmaceutical, agrochemical, and chemical industries. Heterocycles composed of sulfur, nitrogen, and oxygen atoms are harmful toxins and can cause cancers; these substances can persist for years in the environment. One attractive alternative to expensive physical and chemical methods is microbial degradations, which present high potential and low cost, causing minimal environmental impacts. The use of these microorganisms makes use of heterocyclic substances as substrates, removing them efficiently and safely. Some strains of wild and genetically modified microorganisms (bacteria and fungi) have already been used to degrade various pesticides and aromatic compounds. Understanding the biodegradation mechanism of microorganisms will benefit future bioremediation studies, which may prove to be one of the alternatives to solving environmental problems. This review will focus on the microbial degradation of heterocyclic compounds, taking into account the most used techniques and their limitations in future research
杂环化合物是自然界中已知和分布的有机化合物;它们可用于制药、农化和化学工业。由硫、氮、氧原子组成的杂环化合物是有害毒素,可致癌;这些物质可以在环境中存在数年。与昂贵的物理和化学方法相比,一个有吸引力的替代方法是微生物降解,它具有高潜力和低成本,对环境的影响最小。这些微生物的使用利用杂环物质作为底物,有效和安全地去除它们。一些野生和转基因微生物(细菌和真菌)菌株已经被用于降解各种农药和芳香化合物。了解微生物的生物降解机制将有利于未来的生物修复研究,这可能是解决环境问题的替代方案之一。本文将重点介绍杂环化合物的微生物降解,并考虑到目前最常用的技术及其在未来研究中的局限性
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引用次数: 0
Innovations for the Treatment of Effluents in the Food Industry 食品工业废水处理的创新
Pub Date : 2023-08-03 DOI: 10.34024/jsse.2023.v1.15461
Luiza Helena da Silva Martins, Andrea Komesu, Sabrina Baleixo da Silva, Ali Hassan Khalid, Eduardo Dellosso Penteado, Johnatt Allan Rocha de Oliveira, Camilo Barroso Teixeira
During the processing phases of the food business, a large amount of water is used, resulting in a large volume of effluents. Raw materials, sanitary water for food processing, transportation, cooking, dissolving, auxiliary water, cooling, cleaning, and so on are all utilized extensively in the business. Traditional anaerobic or aerobic biological wastewater treatment processes can be employed to handle organic compounds found in food sector effluent. However, some hazardous chemicals to a microbial population may be present in the effluent due to varied consumption. The effluent may contain significant levels of suspended particles, nitrogen in various chemical forms, lipids, oils, phosphorus, chlorides, and high organic content. There are traditional and well-established methods for treating effluents in the food industry, such as the coagulation-flocculation process, electrochemical processes, and biological processes, which have proven to be quite effective when used as treatment methods in a variety of industries; however, such methods have limitations. Innovative techniques, such as microbial fuel cells (MFCs), microalgae, water ultrafiltration, nanofiltration, and membrane technologies, can replace or complement traditional methods in the future. The treatment method chosen will be determined by the industry's and its wastewater's characteristics.
在食品业务的加工阶段,大量的水被使用,导致大量的污水。原料、食品加工、运输、蒸煮、溶解、辅助水、冷却、清洗等卫生用水在企业中都有广泛的应用。传统的厌氧或好氧生物废水处理工艺可用于处理食品行业废水中的有机化合物。然而,由于不同的消耗,一些对微生物种群有害的化学物质可能存在于流出物中。流出物可能含有大量的悬浮颗粒、各种化学形式的氮、脂类、油、磷、氯化物和高有机含量。食品工业中有处理废水的传统和完善的方法,如混凝-絮凝法、电化学法和生物法,这些方法在各种工业中被证明是相当有效的处理方法;然而,这种方法有局限性。创新技术,如微生物燃料电池(MFCs)、微藻、水超滤、纳滤和膜技术,在未来可以取代或补充传统的方法。所选择的处理方法将根据工业及其废水的特点而定。
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引用次数: 0
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