Pub Date : 2024-02-01DOI: 10.1016/j.precisioneng.2024.02.009
Katarzyna Peta, George Love, Chris Brown
{"title":"Comparing repeatability and reproducibility of topographic measurement types directly using linear regression analyses of measured heights","authors":"Katarzyna Peta, George Love, Chris Brown","doi":"10.1016/j.precisioneng.2024.02.009","DOIUrl":"https://doi.org/10.1016/j.precisioneng.2024.02.009","url":null,"abstract":"","PeriodicalId":501382,"journal":{"name":"Precision Engineering","volume":"51 11","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139890490","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-02-01DOI: 10.1016/j.precisioneng.2024.02.008
Jianxing Wu, Huaichao Wu, Lv Yang, Fang Lu, Bin Ji, Limei Zhao
{"title":"Dynamic solid-liquid mixing mechanical model of contact surfaces and experiment of M50 aviation bearing steel by using ultrasonic-assisted electrolytic in-process dressing grinding","authors":"Jianxing Wu, Huaichao Wu, Lv Yang, Fang Lu, Bin Ji, Limei Zhao","doi":"10.1016/j.precisioneng.2024.02.008","DOIUrl":"https://doi.org/10.1016/j.precisioneng.2024.02.008","url":null,"abstract":"","PeriodicalId":501382,"journal":{"name":"Precision Engineering","volume":"48 ","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139826295","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Theoretical predictions and experimental measurements of novel aerostatic bearing with multi-inclined-orifice restrictors for the improvement of stability","authors":"Puliang Yu, Liang Huang, Shize Li, Liangbin Guo, Min Zhong, Liping Zhang","doi":"10.1016/j.precisioneng.2024.02.007","DOIUrl":"https://doi.org/10.1016/j.precisioneng.2024.02.007","url":null,"abstract":"","PeriodicalId":501382,"journal":{"name":"Precision Engineering","volume":"50 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139817875","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-12-21DOI: 10.1016/j.precisioneng.2023.12.012
Jiaqing Zhu, Terutake Hayashi, Syuhei Kurokawa
Chemical mechanical polishing/planarization (CMP) slurry contains mainly abrasive grains (primary particles) with few aggregations (secondary particles). Measuring the particle size distribution (PSD) of CMP slurry is crucial for improving the productivity of the CMP process. For the quality management of CMP slurry, it is necessary to evaluate both the sizes and quantities of both the primary and secondary particles. Conventional PSD analysis methods, except for image analysis, face challenges in identifying primary and secondary particles for PSD measurements. For image analysis, the particles must be transferred from a suspension to a substrate using the conventional sampling method; however, this creates aggregates, resulting in a change in the PSD of the particles on the substrate compared to that in suspension under poly-dispersed conditions. Thus, this study proposed a novel particle sizing method using nanoparticle chip (NPC) to assist in the image analysis of the PSD. The NPC can pick up a single particle in a small volume droplet to avoid aggregation and maintain the poly-dispersed condition of the particles in suspension. The primary and secondary particles can be identified using scanning electron microscope (SEM) or atomic force microscope (AFM), and the PSD can be evaluated by measuring the area and height of the particles. Further, the quantities of both the primary and secondary particles can be counted from the substrate. This study presented a comparison of the diameter measurements using NPC and the conventional method. The results show that the NPC identified the primary and secondary particles and decreased the measurement error of the particle diameters. Consequently, the NPC proves to be superior to the conventional method for use in the PSD analysis of CMP slurry.
{"title":"Measurement of number-weighted particle size distribution for CMP slurry using nanoparticle chip","authors":"Jiaqing Zhu, Terutake Hayashi, Syuhei Kurokawa","doi":"10.1016/j.precisioneng.2023.12.012","DOIUrl":"https://doi.org/10.1016/j.precisioneng.2023.12.012","url":null,"abstract":"<p>Chemical mechanical polishing/planarization (CMP) slurry contains mainly abrasive grains (primary particles) with few aggregations (secondary particles). Measuring the particle size distribution (PSD) of CMP slurry is crucial for improving the productivity of the CMP process. For the quality management of CMP slurry, it is necessary to evaluate both the sizes and quantities of both the primary and secondary particles. Conventional PSD analysis methods, except for image analysis, face challenges in identifying primary and secondary particles for PSD measurements. For image analysis, the particles must be transferred from a suspension to a substrate using the conventional sampling method; however, this creates aggregates, resulting in a change in the PSD of the particles on the substrate compared to that in suspension under poly-dispersed conditions. Thus, this study proposed a novel particle sizing method using nanoparticle chip (NPC) to assist in the image analysis of the PSD. The NPC can pick up a single particle in a small volume droplet to avoid aggregation and maintain the poly-dispersed condition of the particles in suspension. The primary and secondary particles can be identified using scanning electron microscope (SEM) or atomic force microscope (AFM), and the PSD can be evaluated by measuring the area and height of the particles. Further, the quantities of both the primary and secondary particles can be counted from the substrate. This study presented a comparison of the diameter measurements using NPC and the conventional method. The results show that the NPC identified the primary and secondary particles and decreased the measurement error of the particle diameters. Consequently, the NPC proves to be superior to the conventional method for use in the PSD analysis of CMP slurry.</p>","PeriodicalId":501382,"journal":{"name":"Precision Engineering","volume":"16 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-12-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139030235","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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