Pub Date : 2024-06-11DOI: 10.1117/1.jmm.23.2.020101
Harry Levinson
{"title":"Thoughts on Photomask Japan","authors":"Harry Levinson","doi":"10.1117/1.jmm.23.2.020101","DOIUrl":"https://doi.org/10.1117/1.jmm.23.2.020101","url":null,"abstract":"","PeriodicalId":505970,"journal":{"name":"Journal of Micro/Nanopatterning, Materials, and Metrology","volume":"15 23","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141357446","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-05-20DOI: 10.1117/1.jmm.23.2.024601
Markus Greul, Astrit Shoshi, Jan Klikovits, Stephan Martens, Ulrich Hofmann, Olga Barahona, Benyamin Shnirman, Leon Starz, Patrick Wintrich, Holger Sailer
{"title":"Universal approach for process optimization of chemically amplified photoresists in electron beam lithography","authors":"Markus Greul, Astrit Shoshi, Jan Klikovits, Stephan Martens, Ulrich Hofmann, Olga Barahona, Benyamin Shnirman, Leon Starz, Patrick Wintrich, Holger Sailer","doi":"10.1117/1.jmm.23.2.024601","DOIUrl":"https://doi.org/10.1117/1.jmm.23.2.024601","url":null,"abstract":"","PeriodicalId":505970,"journal":{"name":"Journal of Micro/Nanopatterning, Materials, and Metrology","volume":"14 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141119574","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-04-03DOI: 10.1117/1.jmm.23.2.020701
Harry Levinson
{"title":"Pushing the boundaries of patterning: a conversation with Tatiana Kovalevich","authors":"Harry Levinson","doi":"10.1117/1.jmm.23.2.020701","DOIUrl":"https://doi.org/10.1117/1.jmm.23.2.020701","url":null,"abstract":"","PeriodicalId":505970,"journal":{"name":"Journal of Micro/Nanopatterning, Materials, and Metrology","volume":"9 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-04-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140747788","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-01-30DOI: 10.1117/1.jmm.23.1.011204
Jiuning Hu, Adam Lyons, Chris Spence, Kurt Wampler, Mahmoud Mohsen, Yen-Wen Lu, Rachit Gupta, Youping Zhang, Rafael Howell, Jiyoon Chang, James Moon, Jun Ye
{"title":"Curvilinear data representation and its impact on file size and lithographic performance","authors":"Jiuning Hu, Adam Lyons, Chris Spence, Kurt Wampler, Mahmoud Mohsen, Yen-Wen Lu, Rachit Gupta, Youping Zhang, Rafael Howell, Jiyoon Chang, James Moon, Jun Ye","doi":"10.1117/1.jmm.23.1.011204","DOIUrl":"https://doi.org/10.1117/1.jmm.23.1.011204","url":null,"abstract":"","PeriodicalId":505970,"journal":{"name":"Journal of Micro/Nanopatterning, Materials, and Metrology","volume":"110 ","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140481598","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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