Pub Date : 2024-07-11DOI: 10.1007/s00542-024-05696-x
Bharat Bhushan
{"title":"Foreword: Special Issue on ESDA 2022","authors":"Bharat Bhushan","doi":"10.1007/s00542-024-05696-x","DOIUrl":"https://doi.org/10.1007/s00542-024-05696-x","url":null,"abstract":"","PeriodicalId":509843,"journal":{"name":"Microsystem Technologies","volume":"75 6","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-07-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141658086","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-07-05DOI: 10.1007/s00542-024-05719-7
R. Rosa, Pierre Andre Barroca, A. Seabra
{"title":"Correction: Design and fabrication of a novel microswitch made in LTCC-PDMS technology applicable to micro total analysis systems","authors":"R. Rosa, Pierre Andre Barroca, A. Seabra","doi":"10.1007/s00542-024-05719-7","DOIUrl":"https://doi.org/10.1007/s00542-024-05719-7","url":null,"abstract":"","PeriodicalId":509843,"journal":{"name":"Microsystem Technologies","volume":" 19","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-07-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141677184","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Fabrication of the microfluidic channels in silicon wafers using isotropic wet etching method: the impact of the composition of HNA solution on etching","authors":"Priyanka Dewangan, Soumya Purohit, Vishal Sahu, Robbi Vivek Vardhan, Mahesh Peddigari, Prem Pal","doi":"10.1007/s00542-024-05688-x","DOIUrl":"https://doi.org/10.1007/s00542-024-05688-x","url":null,"abstract":"","PeriodicalId":509843,"journal":{"name":"Microsystem Technologies","volume":"11 5","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140969029","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Correction: A conceptual study on novel current mirror integrated cantilever (CMIC) mass sensor for micro-gram (µg) range sensing applications","authors":"Menuvolu Tetseo, Kalpana Gogoi, Shashiranjan Kumar, Gaurav Kumar, Peesapati Rangababu, Akhilrendra Pratap Singh, P. Rathore","doi":"10.1007/s00542-024-05619-w","DOIUrl":"https://doi.org/10.1007/s00542-024-05619-w","url":null,"abstract":"","PeriodicalId":509843,"journal":{"name":"Microsystem Technologies","volume":"367 6","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139839291","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Correction: A conceptual study on novel current mirror integrated cantilever (CMIC) mass sensor for micro-gram (µg) range sensing applications","authors":"Menuvolu Tetseo, Kalpana Gogoi, Shashiranjan Kumar, Gaurav Kumar, Peesapati Rangababu, Akhilrendra Pratap Singh, P. Rathore","doi":"10.1007/s00542-024-05619-w","DOIUrl":"https://doi.org/10.1007/s00542-024-05619-w","url":null,"abstract":"","PeriodicalId":509843,"journal":{"name":"Microsystem Technologies","volume":"38 11","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139779548","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-01-23DOI: 10.1007/s00542-023-05599-3
Bharat Bhushan
{"title":"Foreword: special issue on CCSN-22","authors":"Bharat Bhushan","doi":"10.1007/s00542-023-05599-3","DOIUrl":"https://doi.org/10.1007/s00542-023-05599-3","url":null,"abstract":"","PeriodicalId":509843,"journal":{"name":"Microsystem Technologies","volume":"120 30","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139605606","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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