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Pub Date : 2025-01-13 DOI: 10.1002/phvs.202570113
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引用次数: 0
Ultraviolet line structuring of large solar wafers 大型太阳能晶片的紫外线线构造
Pub Date : 2024-11-03 DOI: 10.1002/phvs.202400035
Henrike Schlutow, Ulrike Fuchs, Claudia Reinlein

Ultrashort-pulsed lasers are ideal for material processing by welding, marking, and cutting. Scanning systems are crucial for large substrates. We introduce a novel UV line structuring method using deformable mirror technology and freeform optics. This approach aims to improve processing times on large substrates, especially for M12 solar wafer processing. By using a freeform lens and a Zwobbel deformable mirror, we achieve extended processing fields and high scan frequencies. The paper explores optical designs, their robust optomechanical implementation for prototyping, and setup characterization.

超短脉冲激光器是焊接、打标和切割等材料加工的理想选择。扫描系统对于大型基板至关重要。我们介绍了一种使用可变形镜技术和自由形态光学技术的新型紫外线线结构方法。这种方法旨在缩短大型基板的加工时间,特别是 M12 太阳能晶片的加工时间。通过使用自由形态透镜和 Zwobbel 可变形镜,我们实现了扩展的加工区域和高扫描频率。本文探讨了光学设计、用于原型开发的稳健光学机械实施以及设置表征。
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引用次数: 0
PARMS coating technology for UV to IR laser applications 用于紫外至红外激光应用的 PARMS 涂层技术
Pub Date : 2024-11-03 DOI: 10.1002/phvs.202470515

Reactive sputtering using a medium frequency (MF) dual magnetron source is an advanced technique widely employed in various thin film deposition applications. For the production of high-quality optical filters based on oxides with low losses, it is crucial to exclude any form of arcing, including both strong arcs and microarcs. These requirements are solved by plasmaassisted reactive magnetron sputtering (PARMS), which also provides a high deposition rate contributing to the economically efficient production of high-end optical filters.

使用中频(MF)双磁控管源进行反应溅射是广泛应用于各种薄膜沉积的先进技术。要生产出基于低损耗氧化物的高质量光学滤光片,必须排除任何形式的电弧,包括强电弧和微电弧。等离子体辅助反应磁控溅射(PARMS)可以满足这些要求,同时还能提供较高的沉积率,有助于经济高效地生产高端光学滤光片。
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引用次数: 0
SiC high-tech ceramics — a comparison of laser processes 碳化硅高科技陶瓷--激光工艺比较
Pub Date : 2024-11-03 DOI: 10.1002/phvs.202400038
Christian Rochholz, Andreas Meudtner

Extensive R&D applied various laser sources — from nanosecond VIS-wavelength to femtosecond IR and water-jet guided lasers — to enhance the quality and efficiency of laser structuring, fine cutting, and drilling of silicon carbide. Tests focused on surface roughness, cutting line precision, and high ablation rates. Challenges due to diverse material compositions, like diamond layers, required combined methods to develop viable approaches. To meet economic constraints, mechanical grinding was integrated with recurring laser processing.

广泛的研究与开发应用了各种激光源(从纳秒 VIS 波长到飞秒红外激光器和喷水导引激光器),以提高碳化硅激光成型、精细切割和钻孔的质量和效率。测试的重点是表面粗糙度、切割线精度和高烧蚀率。由于材料成分(如金刚石层)的多样性,需要采用综合方法来开发可行的方法。为了满足经济上的限制,机械研磨与循环激光加工相结合。
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引用次数: 0
Products: PhotonicsViews 5/2024 产品:PhotonicsViews 5/2024
Pub Date : 2024-11-03 DOI: 10.1002/phvs.202470504
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引用次数: 0
Organizations & Initiatives: PhotonicsViews 5/2024 组织与倡议:PhotonicsViews 5/2024
Pub Date : 2024-11-03 DOI: 10.1002/phvs.202470506
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引用次数: 0
Industrial-grade 2-μm ultrafast fiber laser CPA for silicon processing 用于硅加工的工业级 2 微米超快光纤激光器 CPA
Pub Date : 2024-11-03 DOI: 10.1002/phvs.202400036
Christian Gaida, Tobias Heuermann, Sven Breitkopf, Tino Eidam, Jens Limpert

A novel compact laser utilizing thulium-based fiber chirped-pulse amplification (CPA) technology has been developed to enable essential tasks such as microwelding or the precision cutting of filaments with semiconductors such as silicon. At a central wavelength of 2 μm, the activeTwo-15 provides pulse energies exceeding 100 μJ and an average power output surpassing 15 W, and can be seamlessly integrated into systems for materials processing.

利用铥基光纤啁啾脉冲放大(CPA)技术开发的新型紧凑型激光器可用于微焊接或精密切割硅等半导体灯丝等重要任务。activeTwo-15 的中心波长为 2 μm,脉冲能量超过 100 μJ,平均输出功率超过 15 W,可无缝集成到材料加工系统中。
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引用次数: 0
Dielectric material processing with ultrashort pulses 利用超短脉冲加工电介质材料
Pub Date : 2024-11-03 DOI: 10.1002/phvs.202400040
Deividas Andriukaitis, Mantvydas Jašinskas, Paulius Gečys, Christian Bischoff

Femtosecond lasers have become essential tools in material processing. Thanks to their ultrashort pulse duration, these lasers can process a wide range of materials without causing significant thermal effects, leading to superior quality. Dielectric materials, especially glass and ceramics, are among those that benefit the most from femtosecond laser technology. Traditional processing methods often struggle with these materials, but femtosecond lasers provide a solution with high precision and quality.

飞秒激光已成为材料加工的重要工具。由于脉冲持续时间超短,这些激光器可以加工各种材料,而不会产生明显的热效应,从而实现卓越的质量。介电材料,尤其是玻璃和陶瓷,是飞秒激光技术的最大受益者。传统的加工方法往往难以加工这些材料,而飞秒激光可提供高精度、高质量的解决方案。
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引用次数: 0
Contents: PhotonicsViews 5/2024 内容PhotonicsViews 5/2024
Pub Date : 2024-11-03 DOI: 10.1002/phvs.202470502
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引用次数: 0
News: PhotonicsViews 5/2024 新闻:PhotonicsViews 5/2024
Pub Date : 2024-11-03 DOI: 10.1002/phvs.202470503
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引用次数: 0
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