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Microoptical Gyros Based on Passive Ring Cavities 基于无源环形腔的微光学陀螺
Pub Date : 2020-09-15 DOI: 10.1109/ISS50053.2020.9244887
Y. Filatov, A. Kukaev, V. Venediktov, E. Shalymov
Optical gyros, such as ring laser gyros and fiber optical gyros, have become a mainstay for strapdown inertial navigation systems due to a number of advantages (larger dynamic range of the measured velocities; high stability of scale factor, insensitivity to acceleration and overload; smaller time readiness and etc.). Despite success in their development, ring laser and fiber optic gyros are unsuitable for using in control systems of small portable devices because of their large size and weight. So now the actual task is miniaturization of optical gyros, or development and research of microoptical gyros.During the last decade the main activities in the area of developing the microoptical gyro were concentrated on the scheme of device, based on the use of passive ring single-mode cavities, which are usually produced with the use of planar integral optical technologies.Whispering gallery modes resonators can be also used as the gyro sensitive element instead of planar single-mode resonator. This is due to their following properties: highest optical quality factors, small eigenmodes volume, compactness and relative ease of fabrication. In this work we consider effects arising in the whispering gallery modes resonator during its rotation and possible ways of their application as sensing element of microoptical gyro.
光学陀螺,如环形激光陀螺和光纤陀螺,已成为捷联惯性导航系统的支柱,由于许多优点(较大的动态范围的测量速度;比例系数稳定性高,对加速度和过载不敏感;更小的时间准备等)。尽管它们的发展取得了成功,但环形激光和光纤陀螺由于体积大和重量大,不适合用于小型便携式设备的控制系统。因此,当前的实际任务是光学陀螺的小型化,或者说微型光学陀螺的开发和研究。近十年来,微光学陀螺的主要研究工作集中在利用平面积分光学技术制造的无源环形单模腔的器件方案上。窃窃廊模谐振器也可以代替平面单模谐振器作为陀螺敏感元件。这是由于它们的以下特性:最高的光学质量因子,小特征模体积,紧凑性和相对容易制造。本文研究了窃窃廊谐振器在旋转过程中产生的效应,以及它们作为微光陀螺传感元件的可能应用方法。
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引用次数: 0
A direct approach for high-quality MEMS based IMU/INS production 基于MEMS的IMU/INS生产的直接方法
Pub Date : 2020-09-15 DOI: 10.1109/ISS50053.2020.9244876
L. Poletti, D. S. Sanchis, R. Siryani
This paper describes an industrial process for microelectromechanical systems (MEMS) based inertial measurement unit (IMU) and inertial navigation systems (INS) production. Producing high accuracy sensor in a limited time and with a robust process is a universal problem in IMU and INS production. The challenge we face today is finding a calibration and a performance validation processes which will systematically get the most of each IMU.As MEMS based IMU start competing with other technologies based on high-end gyroscopes, the calibration becomes a critical topic to increase the IMU performance. A common technique used on high-end technologies as Fiber-optic Gyroscopes (FOG) is to combine a set of non-specific multi-position observations and a systematic calibration method as a Kalman filter [1–4]. However, this method requires ultra-low-noise gyroscopes with excellent bias stability and repeatability to correctly measure Earth rotation rate. These attributes are hardly found on MEMS. The method also limits the observability of non-linearities and cross-axis sensitivity errors because of low dynamics.The calibration method proposed here is based on a direct process [5] combined with high dynamics. High dynamics help discarding noise and bias stability from a proper measurement. Also, a direct approach allows to master all the process and gives the possibility to separate and compensate sensors manufacturing and calibration tools imperfections.Finally, the performance assessment and acceptance test presented in this paper are used to check the consistency of the direct approach technique by applying high dynamics after calibration and measuring sensor errors and triads misalignment in a whole temperature range as shown in Figure 1.
本文介绍了基于微机电系统(MEMS)的惯性测量单元(IMU)和惯性导航系统(INS)的工业生产过程。在有限的时间内生产出高精度的传感器并保证其鲁棒性是IMU和INS生产中普遍存在的问题。我们今天面临的挑战是找到一个校准和性能验证过程,以系统地充分利用每个IMU。随着基于MEMS的IMU开始与其他基于高端陀螺仪的技术竞争,校准成为提高IMU性能的关键问题。光纤陀螺仪(FOG)等高端技术中常用的一种技术是将一组非特定的多位置观测数据与系统校准方法结合起来作为卡尔曼滤波器[1-4]。然而,这种方法需要超低噪声陀螺仪,具有优异的偏置稳定性和可重复性,才能正确测量地球自转速率。这些特性在MEMS上很难找到。由于该方法的动态性较低,限制了非线性和跨轴灵敏度误差的可观测性。本文提出的标定方法是基于直接过程[5]与高动态相结合的方法。高动态有助于从适当的测量中去除噪声和偏置稳定性。此外,直接方法允许掌握所有过程,并提供分离和补偿传感器制造和校准工具缺陷的可能性。最后,本文提出的性能评估和验收测试通过在整个温度范围内应用高动态校准和测量传感器误差和三位一体偏差来检查直接接近技术的一致性,如图1所示。
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引用次数: 2
Silicon MEMS by Safran - Navigation grade accelerometer ready for mass production 赛峰硅MEMS -导航级加速度计准备批量生产
Pub Date : 2020-09-15 DOI: 10.1109/ISS50053.2020.9244881
D. Marjoux, P. Ullah, N. Frantz-Rodriguez, P-F Morgado-Orsini, M. Soursou, R. Brisson, Y. Lenoir, F. Delhaye
Safran Electronics & Defense is a world leader in inertial navigation systems for both civilian and military applications. Capitalizing on its industrial heritage, Safran has achieved a major technological breakthrough in the past years by introducing the most CSWAP (Cost Size Weight and Power) navigation-grade INS technology based on HRG CrystalTM gyros.In line with past efforts to push back inertial navigation boundaries, Safran is increasing its technological and competitive edges through the development of new-generation accelerometers.Building on its daughter-company Safran Colibrys expertise and portfolio of tactical grade open loop accelerometers, Safran is indeed a leading player in Silicon MEMS accelerometers. As such, Safran’s choice was naturally steered towards silicon MEMS thanks to their unrivalled CSWAP, characteristics compared to the complex design of legacy pendulous torque-balanced servo-accelerometers.Closed-loop operation technology is indeed essential to reach the most demanding performance levels. For instance, ACSIL accelerometers, with their smart closed-loop operation design, have successfully been used for 30 years in high-grade commercial avionics AHRS.Taking advantage of their combined expertise, Safran Electronics & Defense and Safran Colibrys have brought the performance of closed loop pendulous MEMS accelerometers to an unprecedented level while keeping all the CSWaP benefits of the technology. This accelerometer is currently in production at low rate (LRIP) and is henceforth ready to enter mass-production phase as a component of HRG CrystalTM based INS for all applications including certified aerospace under DO-254 standards.This paper presents the key design choices of our navigation grade Si-MEMS accelerometer: the MEMS sensor architecture and its ∑Δ control electronics including innovative approach to reach very high measurement ranges.Actual product performances statistics from a few hundred-sample production batch are detailed. Navigation grade key characteristics are examined: bias, scale factor, misalignment temperature and ageing stability. Vibration susceptibility, a key performance for harsh environment capability and warm-up response, a key performance required by fast alignment time INS, are also discussed.Designed and matured under a rigorous process, Safran navigation grade MEMS accelerometer has proven a high level of inertial performances and its ability to operate as the ideal accelerometer to be associated to HRG CrystalTM to offer, by far, the best CSWAP INS on the market place.
赛峰电子与防务公司是民用和军用惯性导航系统领域的全球领导者。利用其工业传统,赛峰集团在过去几年中通过引入基于HRG CrystalTM陀螺仪的最cswwap(成本尺寸重量和功率)导航级INS技术取得了重大技术突破。赛峰集团一如既往地努力突破惯性导航的界限,通过开发新一代加速度计来提高其技术和竞争优势。基于其子公司Safran Colibrys的专业知识和战术级开环加速度计的产品组合,Safran确实是硅MEMS加速度计领域的领先企业。因此,赛峰的选择自然转向了硅MEMS,这要归功于其无与伦比的CSWAP,与传统的摆摆式扭矩平衡伺服加速度计的复杂设计相比,它具有独特的特性。闭环操作技术确实是必不可少的,以达到最苛刻的性能水平。例如,ACSIL加速度计,其智能闭环操作设计,已成功应用于高档商用航空电子AHRS 30年。赛峰电子与防务公司和赛峰科博瑞公司利用他们的综合专业知识,将闭环摆式MEMS加速度计的性能提升到了前所未有的水平,同时保持了该技术的所有CSWaP优势。该加速度计目前以低速(LRIP)生产,从此准备进入批量生产阶段,作为基于HRG CrystalTM的INS的组件,适用于所有应用,包括根据DO-254标准认证的航空航天。本文介绍了我们导航级Si-MEMS加速度计的关键设计选择:MEMS传感器架构及其∑Δ控制电子元件,包括实现非常高测量范围的创新方法。从几百个样品生产批次的实际产品性能统计详细。考察了导航等级的关键特征:偏置、尺度因子、错准温度和老化稳定性。振动敏感性是恶劣环境性能的关键性能,而预热响应是快速对准时间惯导系统所需的关键性能。赛峰导航级MEMS加速度计经过严格的设计和成熟,已证明具有高水平的惯性性能,并且能够作为与HRG CrystalTM相关联的理想加速度计,提供迄今为止市场上最好的CSWAP INS。
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引用次数: 5
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2020 DGON Inertial Sensors and Systems (ISS)
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