T. Fukuda, H. Morita, F. Arai, H. Ishihara, H. Matsuura
This paper proposes a tactile display for presenting the moving or the shearing direction to the skin of a human finger. We consider stimulating tactile sense by vibration and the development of a tactile feedback system. The proposed vibro-tactile stimulator employs a number of vibrating pins to provide a ticking sensation to the human operator's skin. We used micro resonators driven by electromagnetic force to vibrating pins. We performed an experiment to present vibro-tactile stimulation using a single micro resonator, and confirmed the ability to perform vibro-tactile stimulation. Next we arrayed the micro resonators in a matrix state and constructed the tactile display. We made a tactile feedback experiment using this display. From the experimental results, it was made clear that the tactile display had the ability to present much information to a human finger.
{"title":"Micro resonator using electromagnetic actuator for tactile display","authors":"T. Fukuda, H. Morita, F. Arai, H. Ishihara, H. Matsuura","doi":"10.1109/MHS.1997.768872","DOIUrl":"https://doi.org/10.1109/MHS.1997.768872","url":null,"abstract":"This paper proposes a tactile display for presenting the moving or the shearing direction to the skin of a human finger. We consider stimulating tactile sense by vibration and the development of a tactile feedback system. The proposed vibro-tactile stimulator employs a number of vibrating pins to provide a ticking sensation to the human operator's skin. We used micro resonators driven by electromagnetic force to vibrating pins. We performed an experiment to present vibro-tactile stimulation using a single micro resonator, and confirmed the ability to perform vibro-tactile stimulation. Next we arrayed the micro resonators in a matrix state and constructed the tactile display. We made a tactile feedback experiment using this display. From the experimental results, it was made clear that the tactile display had the ability to present much information to a human finger.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128403907","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The investigation of living cells in microstructures fabricated by semiconductor technology is a new field of research, which has found its first biotechnological and medical uses. This presentation contains selected examples of three-dimensional micro electrode systems designed to handle and characterise adherently growing cells, to determine their adhesion and surface migration and for their cultivation under strong electric fields (up to 50 kV/m). The trapping and the aggregation of cells and submicron particles (e.g. viruses) in multipole field cages are explained. Two new principles, (i) the use of electronic resonances to increase the polarisation forces and (ii) the computer-based investigation of cell rotation and cell dielectrophoresis, are demonstrated. Additionally, some results dealing with the concentration and motion of submicron particles using Brownian pumps are given. Finally, perspectives for such semiconductor micro-devices are outlined.
{"title":"From micro field cages for living cells to Brownian pumps for submicron particles","authors":"G. Fuhr","doi":"10.1109/MHS.1997.768848","DOIUrl":"https://doi.org/10.1109/MHS.1997.768848","url":null,"abstract":"The investigation of living cells in microstructures fabricated by semiconductor technology is a new field of research, which has found its first biotechnological and medical uses. This presentation contains selected examples of three-dimensional micro electrode systems designed to handle and characterise adherently growing cells, to determine their adhesion and surface migration and for their cultivation under strong electric fields (up to 50 kV/m). The trapping and the aggregation of cells and submicron particles (e.g. viruses) in multipole field cages are explained. Two new principles, (i) the use of electronic resonances to increase the polarisation forces and (ii) the computer-based investigation of cell rotation and cell dielectrophoresis, are demonstrated. Additionally, some results dealing with the concentration and motion of submicron particles using Brownian pumps are given. Finally, perspectives for such semiconductor micro-devices are outlined.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121952435","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Nowadays many types of pipe such as water pipes, drain pipes, and gas pipes, are underground. Also many types of pipeline are used in places where people cannot enter, such as atomic power plants and chemical plants. Maintenance of these pipes and pipelines is an important issue to keep our social life safe and comfortable. Some maintenance robots have already been developed; but all of these maintenance robots are used for pipes of medium or large sizes. No maintenance robots, which are used for pipes of small size with inner diameter of one inch or less, have been developed. The authors have thus been trying to develop a screw-principle microrobot, which can run in a small pipe one inch in diameter and can inspect the inner wall with a CCD camera. In this paper the screw-principle microrobot has been improved for running in a small pipe which is 20 m in length or longer and have some bends. Also the running performance has been experimentally investigated.
{"title":"An in-pipe operation microrobot based on the principle of screw-development of a prototype for running in long and bent pipes","authors":"I. Hayashi, N. Iwatsuki, K. Morikawa, M. Ogata","doi":"10.1109/MHS.1997.768869","DOIUrl":"https://doi.org/10.1109/MHS.1997.768869","url":null,"abstract":"Nowadays many types of pipe such as water pipes, drain pipes, and gas pipes, are underground. Also many types of pipeline are used in places where people cannot enter, such as atomic power plants and chemical plants. Maintenance of these pipes and pipelines is an important issue to keep our social life safe and comfortable. Some maintenance robots have already been developed; but all of these maintenance robots are used for pipes of medium or large sizes. No maintenance robots, which are used for pipes of small size with inner diameter of one inch or less, have been developed. The authors have thus been trying to develop a screw-principle microrobot, which can run in a small pipe one inch in diameter and can inspect the inner wall with a CCD camera. In this paper the screw-principle microrobot has been improved for running in a small pipe which is 20 m in length or longer and have some bends. Also the running performance has been experimentally investigated.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127590101","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This research work deals with the development of a simple and practical method for manufacturing micromechanical parts using different methods. The first method is a mask-based method in which an image is transferred to a liquid photopolymer by irradiating a UV laser through a patterned mask. The irradiated portion of the photopolymer is then solidified and it becomes a high aspect ratio polymer structure. In the second method, high aspect ratio and three-dimensional polymer structures are produced using direct focused UV laser beam writing. The accuracy of the solidified polymer when using these methods is examined. These methods produce micromechanical parts of produced shapes. In the third method, three-dimensional micro models are formed by metal jet deposition. The metal used in this experiment is solder. Some examples of three-dimensional products, electric circuits and functional gradient material are shown.
{"title":"Micro-machining using photo-polymerization and metal jet deposition","authors":"K. Yamaguchi","doi":"10.1109/MHS.1997.768853","DOIUrl":"https://doi.org/10.1109/MHS.1997.768853","url":null,"abstract":"This research work deals with the development of a simple and practical method for manufacturing micromechanical parts using different methods. The first method is a mask-based method in which an image is transferred to a liquid photopolymer by irradiating a UV laser through a patterned mask. The irradiated portion of the photopolymer is then solidified and it becomes a high aspect ratio polymer structure. In the second method, high aspect ratio and three-dimensional polymer structures are produced using direct focused UV laser beam writing. The accuracy of the solidified polymer when using these methods is examined. These methods produce micromechanical parts of produced shapes. In the third method, three-dimensional micro models are formed by metal jet deposition. The metal used in this experiment is solder. Some examples of three-dimensional products, electric circuits and functional gradient material are shown.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129964636","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Nowadays, MEMS and VLSI technologies produce sensors of increasing performance and functionality, microcontrollers generate an increasing amount of processing power in a small volume, and motors are getting as small as 1.9 mm in diameter. However, putting these elements together is still a challenge. For instance, one can buy or develop a very small video camera subset, but how to make it move using 2 motors of 5 mm in diameter, how to sense precisely the position and move as fast as the human eye, the constraints being a simple processor, a volume under 1 cubic inch, and a price compatible with mass distribution? Similar examples can be given for the medical and toy market. The 1 cm/sup 3/ robot contest is a good exercise for getting trained with miniature systems, and increase their intelligence. New approaches have to be taken in order to find efficient ideas for 3-D design, to solve the difficulty of machining and assembling miniature mechanical parts, to convert high speed motor rotation into the required movement, and to take care of the fragility of wires and the lack of really small connectors. Even software development and debugging need a new methodology. Fast prototyping is required in this field to test the new parts in real environments and to develop demonstrators that will convince about the feasibility of the product.
{"title":"Developing intelligent micro-mechanisms","authors":"J. Nicoud, O. Matthey","doi":"10.1109/MHS.1997.768868","DOIUrl":"https://doi.org/10.1109/MHS.1997.768868","url":null,"abstract":"Nowadays, MEMS and VLSI technologies produce sensors of increasing performance and functionality, microcontrollers generate an increasing amount of processing power in a small volume, and motors are getting as small as 1.9 mm in diameter. However, putting these elements together is still a challenge. For instance, one can buy or develop a very small video camera subset, but how to make it move using 2 motors of 5 mm in diameter, how to sense precisely the position and move as fast as the human eye, the constraints being a simple processor, a volume under 1 cubic inch, and a price compatible with mass distribution? Similar examples can be given for the medical and toy market. The 1 cm/sup 3/ robot contest is a good exercise for getting trained with miniature systems, and increase their intelligence. New approaches have to be taken in order to find efficient ideas for 3-D design, to solve the difficulty of machining and assembling miniature mechanical parts, to convert high speed motor rotation into the required movement, and to take care of the fragility of wires and the lack of really small connectors. Even software development and debugging need a new methodology. Fast prototyping is required in this field to test the new parts in real environments and to develop demonstrators that will convince about the feasibility of the product.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127933710","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
H. Sato, F. Arai, H. Ishihara, T. Fukuda, H. Iwata, K. Itoigawa
The parallel beam structure and the hydrothermal method have many significant features. Combining these features, we made a PZT microactuator by the hydrothermal method on the parallel beam structure. The basic properties of the prototype are investigated. We propose applications of this actuator: the multi degrees of freedom actuator, G-sensor, and vibration gyroscope. Finally, we measured the relationship between output-voltage and rotation.
{"title":"New PZT actuator using piezoelectric thin film on parallel plate structure","authors":"H. Sato, F. Arai, H. Ishihara, T. Fukuda, H. Iwata, K. Itoigawa","doi":"10.1109/MHS.1997.768861","DOIUrl":"https://doi.org/10.1109/MHS.1997.768861","url":null,"abstract":"The parallel beam structure and the hydrothermal method have many significant features. Combining these features, we made a PZT microactuator by the hydrothermal method on the parallel beam structure. The basic properties of the prototype are investigated. We propose applications of this actuator: the multi degrees of freedom actuator, G-sensor, and vibration gyroscope. Finally, we measured the relationship between output-voltage and rotation.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"108 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133016410","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
H. Ueno, M. Hosaka, Y. Zhang, O. Tabata, S. Konishi, S. Sugiyama
In order to fabricate high-aspect ratio microparts for micro electro mechanical systems (MEMS), we have investigated the LIGA process. Exposure for deep X-ray lithography has been carried out using the world's smallest synchrotron radiation (SR) source, AURORA. An X-ray mask, which was composed of 5 /spl mu/m thick Au as an absorber and 2 /spl mu/m thick SiC as a membrane, was produced. As a resist, commercially available polymethyl-methacrylate (PMMA) sheets of a thickness above 200 /spl mu/m were directly glued by PMMA resin on Si wafers. Consequently, we could fabricate PMMA microstructures of 200 /spl mu/m height and 4 /spl mu/m width, an aspect ratio of about 50. Using these PMMA microstructures as molds, we electroformed 200 /spl mu/m high Ni microstructures with the maximum aspect ratio of 40. These results show there is a good prospect of fabricating high aspect ratio microparts for MEMS.
{"title":"Study on fabrication of high aspect ratio microparts using the LIGA process","authors":"H. Ueno, M. Hosaka, Y. Zhang, O. Tabata, S. Konishi, S. Sugiyama","doi":"10.1109/MHS.1997.768856","DOIUrl":"https://doi.org/10.1109/MHS.1997.768856","url":null,"abstract":"In order to fabricate high-aspect ratio microparts for micro electro mechanical systems (MEMS), we have investigated the LIGA process. Exposure for deep X-ray lithography has been carried out using the world's smallest synchrotron radiation (SR) source, AURORA. An X-ray mask, which was composed of 5 /spl mu/m thick Au as an absorber and 2 /spl mu/m thick SiC as a membrane, was produced. As a resist, commercially available polymethyl-methacrylate (PMMA) sheets of a thickness above 200 /spl mu/m were directly glued by PMMA resin on Si wafers. Consequently, we could fabricate PMMA microstructures of 200 /spl mu/m height and 4 /spl mu/m width, an aspect ratio of about 50. Using these PMMA microstructures as molds, we electroformed 200 /spl mu/m high Ni microstructures with the maximum aspect ratio of 40. These results show there is a good prospect of fabricating high aspect ratio microparts for MEMS.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"121 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117304300","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The thermal dynamics of a bimetallic microactuator in micropump are analyzed by using FEM. On the basis of the analysis, a novel thermally-actuated silicon micropump is developed. This micropump utilizes both bimetallic thermal actuation and thermal pneumatic actuation. The bimetallic microactuator is composed of an aluminum membrane and a silicon membrane. An air chamber is also designed to realize the thermal pneumatic actuation. A new micro check valve is developed through surface micromachining. This microvalve has a high reverse-to-forward flow resistance and a very small reverse leakage.
{"title":"A novel thermally-actuated silicon micropump","authors":"J. Zou, X. Ye, Z. Zhou, Y. Yang","doi":"10.1109/MHS.1997.768885","DOIUrl":"https://doi.org/10.1109/MHS.1997.768885","url":null,"abstract":"The thermal dynamics of a bimetallic microactuator in micropump are analyzed by using FEM. On the basis of the analysis, a novel thermally-actuated silicon micropump is developed. This micropump utilizes both bimetallic thermal actuation and thermal pneumatic actuation. The bimetallic microactuator is composed of an aluminum membrane and a silicon membrane. An air chamber is also designed to realize the thermal pneumatic actuation. A new micro check valve is developed through surface micromachining. This microvalve has a high reverse-to-forward flow resistance and a very small reverse leakage.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"115 6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121095068","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Discusses miniaturized biochemical analysis system components, micromachined metallic pipette arrays (MPA) and the micromachined electrical field-flow fractionation system (/spl mu/-EFFF). The design, fabrication, and characterization of the MPA and /spl mu/-EFFF are detailed. In addition, the integration of the components using mechatronics technologies is discussed.
{"title":"Micromachined metallic pipettes and bioanalysis systems","authors":"A. B. Frazier, B. Gale, I. Papautsky","doi":"10.1109/MHS.1997.768849","DOIUrl":"https://doi.org/10.1109/MHS.1997.768849","url":null,"abstract":"Discusses miniaturized biochemical analysis system components, micromachined metallic pipette arrays (MPA) and the micromachined electrical field-flow fractionation system (/spl mu/-EFFF). The design, fabrication, and characterization of the MPA and /spl mu/-EFFF are detailed. In addition, the integration of the components using mechatronics technologies is discussed.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"184 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121034771","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The authors developed a method to detect in vivo fine motion inside human organs using high-speed echography, as ultrasonic imaging is the safest medical imaging technique. This method is based on high-speed digital subtraction echography, which calculates subtraction of successive echograms. By using this method, noninvasive real-time extraction of medical micromachine in the blood vessel is possible. Furthermore, making the use of blurriness of echograms, displacement length of fine motion in not only micromachine in human organ but also human organ itself is measurable. Measured motion is classified into velocity and superimposed with some colors on the original echograms according to velocity. Then we could distinguish diseased hearts from the normal heart by visualizing fine motion as colored pattern.
{"title":"In vivo measurement and visualization of fine motion without intervention by processing high-frame-rate echograms","authors":"K. Masuda, K. Ishihara, T. Nagakura","doi":"10.1109/MHS.1997.768865","DOIUrl":"https://doi.org/10.1109/MHS.1997.768865","url":null,"abstract":"The authors developed a method to detect in vivo fine motion inside human organs using high-speed echography, as ultrasonic imaging is the safest medical imaging technique. This method is based on high-speed digital subtraction echography, which calculates subtraction of successive echograms. By using this method, noninvasive real-time extraction of medical micromachine in the blood vessel is possible. Furthermore, making the use of blurriness of echograms, displacement length of fine motion in not only micromachine in human organ but also human organ itself is measurable. Measured motion is classified into velocity and superimposed with some colors on the original echograms according to velocity. Then we could distinguish diseased hearts from the normal heart by visualizing fine motion as colored pattern.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122864568","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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