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Models for maintenance planning and scheduling – a citation-based literature review and content analysis 维修计划和调度模型-基于引用的文献综述和内容分析
IF 1.5 Q2 Engineering Pub Date : 2021-10-13 DOI: 10.1108/jqme-10-2020-0109
S. A. Raza, A. Hameed
PurposeThe findings of this study have lightened the focal research areas in maintenance planning and scheduling. These also served as effective guidelines for future studies in this area. This research, therefore, contributes in fulfilling the gap by carrying out an SLR of contemporary research studies in the area of models for maintenance planning and scheduling. At present, SLR rooted in BA has not been carried focusing on a survey over models for maintenance planning and scheduling. SLR uses advanced scientific methodologies from BA tools to unveil thematic structures.Design/methodology/approachWe have systematically reviewed over 1,021 peer-reviewed journal articles. Advanced contemporary tools from Bibliometric Analysis (BA) are used to perform a Systematic Literature Review (SLR). First, exploratory analysis is presented, highlighting the influential authors, sources and region amongst other key indices. Second, the large bibliographical data is visualized using co-citation network analyses, and research clusters (themes) are identified. The co-citation network is extended into a dynamic co-citation network and unveils the evolution of the research clusters. Last, cluster-based content analysis and historiographical analysis is carried out to predict the prospect of future research studies.FindingsBA tools first outlined an exploratory analysis that noted influential authors, production countries, top-cited papers and frequent keywords. Later, the bibliometric data of over 1,021 documents is visualized using co-citation network analyses. Later, a dynamic co-citation analysis identified the evolution of research clusters over time. A historiographical direct citation analysis also unveils potential research directions. We have clearly observed that there are two main streams of maintenance planning and scheduling applications. The first has focused on joint maintenance and operations on machines. The second focused on integrated production and maintenance models in an echelon setting for unrealizable production facilities.Originality/valueThere are many literature review-based research studies that have contributed to maintenance scheduling research surveys. However, most studies have adopted traditional approaches, which often fall short in handling large bibliometric data and therefore suffer from selection biases from the authors. As a result, in this area, the existing reviews could be non-comprehensive. This study bridges the research gap by conducting an SLR of maintenance models, which to the best of our knowledge, has not been carried out before this study.
目的本研究的结果为维修计划与调度的研究提供了新的思路。这些也为今后在这方面的研究提供了有效的指导。因此,本研究通过在维护计划和调度模型领域开展当代研究的SLR,有助于填补这一空白。目前,基于BA的单反研究还没有进行,重点是对维护计划和调度的模型进行调查。单反使用BA工具的先进科学方法来揭示主题结构。我们系统地审查了超过1021篇同行评议的期刊文章。先进的当代工具从文献计量分析(BA)被用于执行系统文献综述(SLR)。首先,进行了探索性分析,突出了作者、来源和地区等关键指标。其次,利用共引网络分析对大型书目数据进行可视化处理,确定研究聚类(主题)。将共被引网络扩展为一个动态的共被引网络,揭示了研究集群的演变。最后,进行了基于聚类的内容分析和史学分析,对未来的研究进行了展望。findsba工具首先概述了一项探索性分析,指出了有影响力的作者、生产国、被引次数最多的论文和常用关键词。随后,使用共引网络分析对超过1021篇文献的文献计量数据进行了可视化。后来,动态共被引分析确定了研究集群随时间的演变。史学上的直接引文分析也揭示了潜在的研究方向。我们已经清楚地观察到,有两种主要的维护计划和调度应用程序。第一个重点是机器的联合维护和操作。第二部分侧重于不可实现生产设施梯队设置中的集成生产和维护模型。原创性/价值许多基于文献综述的研究为维修计划研究调查做出了贡献。然而,大多数研究采用了传统的方法,这些方法在处理大量文献计量数据时往往不足,因此受到作者选择偏差的影响。因此,在这方面,现有的审查可能不全面。本研究通过进行维护模型的单反来弥补研究空白,据我们所知,这在本研究之前尚未进行过。
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引用次数: 8
Modeling a maintenance management framework for asset management based on ISO 55000 series guidelines 基于ISO 55000系列指南的资产管理维护管理框架建模
IF 1.5 Q2 Engineering Pub Date : 2021-10-13 DOI: 10.1108/jqme-08-2020-0082
R. F. da Silva, G. D. de Souza
PurposeMaintenance management is perceived as fundamental for ensuring that physical assets contribute to business outcomes. In this context, the purpose of this paper is to elaborate a novel maintenance management framework for asset management (MMFAM) based on ISO 55000 series guidelines.Design/methodology/approachThe paper proposes an MMFAM that intends to translate the technical requirements set out in the ISO 550001 standard to the maintenance stage of asset management. First, the framework is modeled using consideration based on the analysis of the ISO 55000 series and the review of previous maintenance management frameworks. Then, support tools are presented that collaborate for the implementation of the processes and activities provided for in the MMFAM.FindingsThe proposed MMFAM was modeled using a Business Process Model and Notation since it is a standardized graphical notation for process modeling and contributes to the understanding of the framework. In addition, the applicable tools were presented for the practical implementation of MMFAM processes and activities.Practical implicationsThe paper is expected to contribute to maintenance practitioners and researchers in understanding and disseminating a novel maintenance management framework that is in line with asset management through the international ISO 55000 series.Originality/valueAs it is essentially multidisciplinary and complex, asset management has still been little explored. Moreover, the requirements for implementing an asset management system, as explained in the ISO 55001 standard, only provide what needs to be done, but not how to do it. Accordingly, the paper fills a gap in maintenance management literature, as it addresses the ISO 55000 series for asset management in depth.
目的维护管理被认为是确保实物资产有助于业务成果的基础。在这种背景下,本文的目的是基于ISO 55000系列指南,阐述一种新的资产管理维护管理框架。设计/方法论/方法本文提出了一个MMFAM,旨在将ISO 550001标准中规定的技术要求转化为资产管理的维护阶段。首先,基于对ISO 55000系列的分析和对以前维护管理框架的审查,对该框架进行了建模。然后,提供了支持工具,用于协作实施MMFAM中提供的流程和活动。由于它是流程建模的标准化图形表示法,有助于理解框架,因此所提出的MMFAM是使用业务流程模型和表示法建模的。此外,还介绍了用于实际实施MMFAM流程和活动的适用工具。实际意义该论文有望有助于维护从业者和研究人员理解和传播一种新的维护管理框架,该框架符合国际ISO 55000系列的资产管理。独创性/价值由于资产管理本质上是多学科和复杂的,因此很少有人对其进行探索。此外,正如ISO 55001标准中所解释的,实施资产管理系统的要求只提供了需要做什么,而没有提供如何做。因此,本文填补了维护管理文献中的空白,因为它深入探讨了ISO 55000系列的资产管理。
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引用次数: 3
Fuzzy reliability of a turbines structure system using the right triangular fuzzy number 基于直角三角形模糊数的水轮机结构系统模糊可靠性
IF 1.5 Q2 Engineering Pub Date : 2021-09-28 DOI: 10.1108/jqme-02-2021-0017
P. Dhiman, Amit Kumar
PurposeThe purpose of this paper is to investigate the performance of a turbine structure of the oil and gas Egyptian company in terms of reliability, mean time to failure (MTTF), mean time to repair (MTTR) and mean time between failures (MTBF) under fuzzy environment and working criteria. This paper examines the impact of the failure of various components on the complete turbine structure of the oil and gas system.Design/methodology/approachTo overcome the problem of uncertain behavior of available data for various components, the right triangular generalized fuzzy number (RTrGFN) is proposed to be taken into the account to express the uncertainty which attains some tolerance in data. Furthermore, reliability indices are calculated with the help of the Lambda Tau method and the arithmetic operations on right generalized triangular fuzzy numbers (RTrGFN).FindingsThis paper explores the reliability of a repairable 3 out of 4 structure of turbines and along with the other parameters namely MTTF, MTTR and MTBF; under a fuzzy environment. Failure rates and repair times are expected to be exponential. The ranking of components of the structure is being found to decide the priority for maintenance.Originality/valueThis paper investigates the performance of the system with different spread/tolerance like 15%, 25% and 50% of crisp data. It helps to predict realistic results in the range value. To enhance the system's performance, the most important item of the system requires greater attention. For this, the authors find the sensitive part by ranking. For ranking, an extended approach has been developed to find the sensitive unit of the system by using the right triangular generalized fuzzy number. This paper explores the most and least sensitive component of the system, which helps the maintenance department to plan the maintenance action.
目的研究埃及石油天然气公司涡轮机结构在模糊环境和工作标准下的可靠性、平均故障时间(MTTF)、平均修复时间(MTTR)和平均无故障时间(MTBF)性能。本文研究了各种部件的故障对整个油气系统涡轮机结构的影响。设计/方法/方法为了克服各种组件的可用数据的不确定性问题,提出了考虑右三角广义模糊数(RTrGFN)来表示数据中达到一定容差的不确定性。此外,利用Lambda-Tau方法和右广义三角模糊数(RTrGFN)的算术运算计算了可靠性指标;在模糊的环境下。预计故障率和维修时间将呈指数级增长。正在对结构部件进行排序,以决定维修的优先级。原创性/价值本文研究了系统在不同扩展/容忍度(如15%、25%和50%的清晰数据)下的性能。它有助于预测范围值中的实际结果。为了提高系统的性能,系统中最重要的项目需要更多的关注。为此,作者通过排名找到了敏感部分。对于排序,提出了一种扩展的方法,通过使用右三角广义模糊数来找到系统的敏感单元。本文探讨了系统中最敏感和最不敏感的组件,这有助于维护部门计划维护行动。
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引用次数: 1
Operators’ risk awareness towards operations’ risk assessment: a field study in the motor vehicle field 运营商对运营风险评估的风险意识:机动车领域的实地研究
IF 1.5 Q2 Engineering Pub Date : 2021-09-27 DOI: 10.1108/jqme-10-2020-0104
M. Demichela, Lorenzo Comberti, G. Baldissone
PurposeThe purpose of the research was to verify if there was an alignment between the risk assessed and the risk perceived or if some inconsistencies arise that could affect the safety of the operators. In fact, eventual inconsistencies should be analysed, interpreted and managed to maximise the information and training process, if needed.Design/methodology/approachThe adopted approach in this work relies on the collection of the perception of the operators about the level of risk in a work environment and its comparison with the level of risk assessed by the company. The collection of data was performed through a survey designed ad hoc, subministrated to all the workers in the area under study, being them involved in the production and in the maintenance. The survey’s structure and aim were described to the operator by the researchers and returned by the operators in a voluntary and anonymous way.FindingsThe information collected allowed identifying a gap between the risk assessed and the risk perceived by the plant operators. For example, for the use of personal protective equipments, the data highlighted a discrepancy between the knowledge about their need and the behaviour in using them, which resulted in the revision of both communication and training processes, with the adoption of a more participatory approach.Originality/valueThe originality of the work is in the data set, originally collected for this study, in the data collection form, also devised specifically for the case under study, despite it can be easily adapted for other work environment, and in the purpose itself, aimed at pushing risk assessment towards a personalised and adaptive approach.
目的研究的目的是验证评估的风险和感知的风险之间是否一致,或者是否出现了可能影响操作员安全的不一致。事实上,如果需要,应分析、解释和管理最终的不一致,以最大限度地提高信息和培训过程。设计/方法/方法本工作中采用的方法依赖于收集操作员对工作环境中风险水平的感知,并将其与公司评估的风险水平进行比较。数据收集是通过一项专门设计的调查进行的,该调查提交给研究区域的所有工人,让他们参与生产和维护。研究人员向操作员描述了调查的结构和目的,操作员以自愿和匿名的方式返回。发现收集的信息可以识别评估的风险与工厂运营商感知的风险之间的差距。例如,关于个人防护装备的使用,数据强调了对其需求的了解与使用行为之间的差异,这导致了沟通和培训过程的修订,采用了更具参与性的方法。独创性/价值工作的独创性存在于最初为本研究收集的数据集中,也存在于专门为研究中的案例设计的数据收集形式中,尽管它可以很容易地适应其他工作环境,而且其目的本身旨在将风险评估推向个性化和适应性的方法。
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引用次数: 1
Economic study of maintenances and outage resolution in an electricity distribution network using the continuous-time Markov chain 用连续时间马尔可夫链对配电网维修和停电解决进行经济研究
IF 1.5 Q2 Engineering Pub Date : 2021-09-21 DOI: 10.1108/jqme-09-2020-0096
Navid Nazhand, R. Dashti, A. Ahmadi
PurposeThe purpose of this paper is to describe a novel method to compromise between planned (regulated) maintenance and outage initiation and unplanned (unregulated) maintenance and to find an economic model using which one can perform maintenance adequately and in the most optimal state.Design/methodology/approachIn this paper, a system consisting of similar components is considered, and the role of each component in the system is explained. Then, the cost pertaining to failure in each asset is determined. Costs such as energy not supplied, penalties, human resources to resolve the defect and replacing assets are taken into account. Finally, a new comprehensive objective is proposed, and optimization is performed for a sample system.FindingsIn this paper, some graphs have been plotted from which plenty of information may be extracted. This is mentioned in the Conclusion.Originality/valueIn this paper, some graphs have been plotted from which plenty of information may be extracted. This is mentioned in the Conclusion.
目的描述一种新的方法,在计划(管制)维护和停机启动和计划外(不管制)维护之间进行折衷,并找到一个经济模型,使用该模型可以在最优状态下进行充分的维护。设计/方法/方法本文考虑了一个由类似组件组成的系统,并解释了每个组件在系统中的作用。然后,确定与每个资产故障相关的成本。不提供能源、罚款、解决缺陷的人力资源和更换资产等成本都要考虑在内。最后,提出了一个新的综合目标,并对一个样本系统进行了优化。本文绘制了一些图表,从中可以提取出大量的信息。这在结束语中提到。本文绘制了一些图表,从中可以提取出大量的信息。这在结束语中提到。
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引用次数: 0
The requirements for maintenance management systems (MMS) at Malaysian polytechnic: a case study 马来西亚理工学院维护管理系统(MMS)的要求:一个案例研究
IF 1.5 Q2 Engineering Pub Date : 2021-09-03 DOI: 10.1108/jqme-09-2020-0101
Z. Ismail
PurposeThe conventional methods practiced by Development and Facilities Management Unit (UPPF) faced issues due to management deficiencies and negligent staffs to handle operation and maintenance processes of Chemical Facility (CFs) management at Malaysian Polytechnic. The prime objective of this paper is to improve the conventional methods which tend to be both cumbersome and ineffective in the Maintenance Management Systems (MMS) for UPPF at Malaysian Polytechnic.Design/methodology/approachPrimary data was gathered through the interview to develop the proposed system. The major conclusion drawn from the interview results was that there is a lack of comprehensive MMS that integrate operation and maintenance processes of CF management and software programming that provide the guides for decision-making processes. The interview results also revealed irregularities within the Malaysian Polytechnic's maintenance management database.FindingsThe conventional methods had significantly little emphasis on defect diagnosis tools. It had also increased the inadequate strategic decision making to analyse information in improving the maintenance project outcomes for Malaysian Polytechnic's building. New MMS tools is suggested from findings and lessons learned as a good practice to reduce the frequent overhauling and repairs on the durability's performance and design of building control instrument.Originality/valueThe new MMS potentially transform operation and maintenance processes of CF management into one of the most sophisticated technologies by providing access to all information published by all Malaysian Polytechnics institutions. This is in order to foster financial cooperation, the idea that being that Polytechnics who compete with one another become financially independent towards successful achievements of CF management for laboratory building and equipment.
目的马来西亚理工学院发展和设施管理单位(UPPF)的传统管理方法面临管理缺陷和员工疏忽处理化学设施(CFs)管理操作和维护过程的问题。本文的主要目的是改进传统的方法,这些方法在马来西亚理工学院的UPPF维护管理系统(MMS)中往往既麻烦又无效。设计/方法/方法通过访谈收集了主要数据,以开发拟议的系统。从访谈结果中得出的主要结论是,目前缺乏将CF管理的运维过程与为决策过程提供指导的软件编程相结合的综合MMS。采访结果还揭示了马来西亚理工学院维修管理数据库中的违规行为。发现传统方法对缺陷诊断工具的重视程度明显不足。它还增加了战略决策的不足,无法分析信息,以改善马来西亚理工学院大楼的维护项目成果。根据研究结果和经验教训,提出了新的MMS工具,以减少对建筑控制仪表耐久性性能和设计的频繁检修和维修。通过提供访问所有马来西亚理工学院发布的所有信息,新的MMS有可能将CF管理的操作和维护过程转变为最复杂的技术之一。这是为了促进财务合作,即相互竞争的理工学院在实验室建筑和设备的CF管理方面取得成功的财务独立。
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引用次数: 2
Lean maintenance index: a measure of leanness in maintenance organizations 精益维修指数:衡量维修组织的精益程度
IF 1.5 Q2 Engineering Pub Date : 2021-09-03 DOI: 10.1108/jqme-08-2020-0083
Maheswar Singha Mahapatra, Dinesh Shenoy
PurposeMaintenance organizations continue to be under pressure to systematically eliminate maintenance wastes and deliver services that their customers value. To this end, maintenance managers are implementing lean maintenance practices. But how does one consistently estimate the leanness of these practices in their organization? The purpose of this paper is to develop a framework for a metrics – referred to as the lean maintenance index (LMI) that can help managers estimate the leanness of maintenance practices.Design/methodology/approachBased on a comprehensive review of literature in the domain, this study identifies four factors and nineteen subfactors that are essential for the success of a lean maintenance program. A fuzzy-set-theory-based assessment framework is developed that can be used by an in-house team to measure the degree of implementation of lean maintenance practices in their organization. The authors applied the framework to a maintenance workshop that services diesel engines and other prime movers.FindingsThe framework provides maintenance managers valuable insights to help identify the strengths and weaknesses of their organization vis-à-vis their maintenance practices, thus enabling them come up with a firm action plan for future process improvements.Originality/valueThis paper adapts the concept of agility and readiness to maintenance work. A key contribution of this study is the identification of factors and subfactors that forms the basis to estimate the leanness of maintenance practices in an organization. Another contribution is its application to a large maintenance workshop that demonstrates the ease of its implementation. Future research in this area can help identify more factors and subfactors and thus improve the estimation of leanness.
目的维护组织继续面临着系统地消除维护浪费和交付客户所重视的服务的压力。为此,维护经理正在实施精益维护实践。但是,如何一致地评估组织中这些实践的精益程度呢?本文的目的是开发一个度量框架-被称为精益维护指数(LMI),它可以帮助管理人员估计维护实践的精益性。设计/方法/方法基于对该领域文献的全面回顾,本研究确定了精益维护计划成功的四个因素和十九个子因素。开发了一个基于模糊集理论的评估框架,该框架可被内部团队用于衡量其组织中精益维护实践的实施程度。作者将该框架应用于一个维修柴油发动机和其他原动机的车间。发现框架为维护经理提供了有价值的见解,帮助他们通过-à-vis维护实践来识别组织的优势和劣势,从而使他们能够为未来的过程改进提出一个坚定的行动计划。原创性/价值本文将敏捷性和准备性的概念应用到维护工作中。本研究的一个关键贡献是确定了构成评估组织中维护实践精益性基础的因素和子因素。另一个贡献是它在大型维护车间的应用,证明了其实现的便利性。未来在该领域的研究可以帮助识别更多的因素和子因素,从而提高对精益度的估计。
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引用次数: 2
Prioritizing success factors for implementing total productive maintenance (TPM) 为实施全面生产维护(TPM)确定成功因素的优先级
IF 1.5 Q2 Engineering Pub Date : 2021-09-01 DOI: 10.1108/jqme-09-2020-0098
R. Singh, Amulya Gurtu
PurposeThis paper aims to prioritize the factors for the successful implementation of total productive maintenance (TPM).Design/methodology/approachThe technique used for prioritization is the analytical hierarchy process (AHP).FindingsThe commitment and involvement of the top management, i.e. the leadership team, is the most critical success factor in the successful implementation of TPM. Employee training is another vital factor. Top management should also encourage a culture favorable for information flow, equipment ownership, the involvement of people and quality management throughout the organization.Research limitations/implicationsManufacturing organizations interested in improving productivity through the implementation of TPM should first involve the leadership team and seek their full support and train all the employees in this philosophy. However, the findings cannot be generalized for global application due to the inputs taken from experts in AHP from limited geography.Practical implicationsReducing production costs is a universal expectation of business leaders. TPM can be used as a long-term strategy to improve productivity by the organization.Social implicationsAll employees have to be trained in this philosophy, and as part of the training and the implementation of TPM, they feel empowered and committed to the organization.Originality/valueThis study has illustrated the use of AHP for the prioritization of success factors. Prioritization of success factors will help in strategy formulation by management for effective maintenance. It will help in improving the productivity and performance of the organization.
目的探讨成功实施全面生产维护(TPM)的因素。设计/方法/方法用于确定优先级的技术是层次分析法(AHP)。最高管理层的承诺和参与,即领导团队,是成功实施TPM的最关键的成功因素。员工培训是另一个重要因素。最高管理者还应该鼓励一种有利于信息流、设备所有权、人员参与和整个组织质量管理的文化。研究局限/启示有意通过实施TPM提高生产力的制造企业应首先让领导团队参与进来,寻求他们的全力支持,并以这一理念培训所有员工。然而,由于AHP专家的投入来自有限的地理位置,这些发现不能推广到全球应用。实际意义降低生产成本是企业领导人的普遍期望。TPM可以作为一个长期的策略来提高组织的生产力。社会意义所有员工都必须接受这一理念的培训,作为培训和实施TPM的一部分,他们感到被授权并对组织负责。原创性/价值本研究说明了AHP对成功因素的优先级排序的使用。确定成功因素的优先次序将有助于管理部门制定战略,以便有效维持。这将有助于提高组织的生产力和绩效。
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引用次数: 10
Integrated maintenance scheduling inventory policy adjustment considering back order disruptions using joint optimization approach 基于联合优化方法的考虑延期订单中断的集成维护调度库存策略调整
IF 1.5 Q2 Engineering Pub Date : 2021-08-18 DOI: 10.1108/jqme-12-2020-0122
S. Babaeimorad, P. Fattahi, H. Fazlollahtabar
PurposeThe purpose of this paper is to present an integrated strategy for inventory control and preventive maintenance planning for a single-machine production system with increasing failure rates.Design/methodology/approachThere are three scenarios for solving presented model. The strategy is such that the production component is placed under maintenance as soon as it reaches the m level or in the event of a malfunction earlier than m. Maintenance completion time is not predictable. As a result of periodic maintenance, a buffer stock h is held and the production component starts to produce from period A with the maximum throughput to satisfy demand and handle the shortage. A numerical algorithm to find the optimal policy is developed. The algorithm is implemented using MATLAB software.FindingsThe authors discovered that joint optimization mainly reduces production system costs. Cs is holding cost of a product unit during a unit of time. The authors consider two values for Cs, consist of, Cs = 1 and Cs = 2. By comparing the two cases, it is concluded that by reducing the cost from Cs = 2 to Cs = 1, the optimal scenario does not differ. The amount of decision variables decreases.Originality/valueThis paper is the provision of a model in which the shortage of back order type is considered, which greatly increases the complexity of the problem compared to similar issues. The methods for solving such problems are provided by the numerical algorithm, and the use of buffers as a way to compensate for the shortage in the event of a complete shutdown of the production line which is a very effective and efficient way to deal with customer loss.
目的针对故障率不断增加的单机生产系统,提出一种库存控制和预防性维护计划的集成策略。设计/方法论/方法解决所提出的模型有三种方案。该策略是,一旦生产部件达到m级,或者在m级之前发生故障,就将其置于维护之下。维护完成时间是不可预测的。作为定期维护的结果,缓冲库存h被保持,并且生产部件从周期a开始以最大吞吐量生产,以满足需求并处理短缺。提出了一种求解最优策略的数值算法。该算法使用MATLAB软件实现。发现联合优化主要是降低生产系统成本。Cs是一个产品单位在一个时间单位内的持有成本。作者考虑了Cs的两个值,包括Cs=1和Cs=2。通过比较这两种情况,得出的结论是,通过将成本从Cs=2降低到Cs=1,最优方案没有差异。决策变量的数量减少。原创性/价值本文提供了一个模型,其中考虑了缺货类型的短缺,与类似问题相比,这大大增加了问题的复杂性。数值算法提供了解决这些问题的方法,并且在生产线完全关闭的情况下使用缓冲器作为补偿短缺的一种方式,这是处理客户损失的一种非常有效和高效的方式。
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引用次数: 1
IOT-based in situ condition monitoring of semiconductor fabrication equipment for e-maintenance 基于物联网的电子维修半导体制造设备现场状态监测
IF 1.5 Q2 Engineering Pub Date : 2021-08-05 DOI: 10.1108/jqme-10-2020-0113
Youn Ji Lee, Hyuk Jun Kwon, Y. Seok, S. Hong
PurposeThe purpose of this paper is to demonstrate industrial Internet of Things (IIoT) solution to improve the equipment condition monitoring with equipment status data and process condition monitoring with plasma optical emission spectroscopy data, simultaneously. The suggested research contributes e-maintenance capability by remote monitoring in real time.Design/methodology/approachSemiconductor processing equipment consists of more than a thousand of components, and unreliable condition of equipment parts leads to the failure of wafer production. This study presents a web-based remote monitoring system for physical vapor deposition (PVD) systems using programmable logic controller (PLC) and Modbus protocol. A method of obtaining electron temperature and electron density in plasma through optical emission spectroscopy (OES) is proposed to monitor the plasma process. Through this system, parts that affect equipment and processes can be controlled and properly managed. It is certainly beneficial to improve the manufacturing yield by reducing errors from equipment parts.FindingsA web-based remote monitoring system provides much of benefits to equipment engineers to provide equipment data for the equipment maintenance even though they are physically away from the equipment side. The usefulness of IIoT for the e-maintenance in semiconductor manufacturing domain with the in situ monitoring of plasma parameters is convinced. The authors found the average electron temperature gradually with the increase of Ar carrier gas flow due to the increased atomic collisions in PVD process. The large amount of carrier gas flow, in this experimental case, was 90 sccm, dramatically decreasing the electron temperature, which represents kinetic energy of electrons.Research limitations/implicationsSemiconductor industries require high level of data security for the protection of their intellectual properties, and it also falls into equipment operational condition; however, data security through the Internet communication is not considered in this research, but it is already existing technology to be easily adopted by add-on feature.Practical implicationsThe findings indicate that crucial equipment parameters are the amount of carrier gas flow rate and chamber pressure among the many equipment parameters, and they also affect plasma parameters of electron temperature and electron density, which directly affect the quality of metal deposition process result on wafer. Increasing the gas flow rate beyond a certain limit can yield the electron temperature loss to have undesired process result.Originality/valueSeveral research studies on data mining with semiconductor equipment data have been suggested in semiconductor data mining domain, but the actual demonstration of the data acquisition system with real-time plasma monitoring data has not been reported. The suggested research is also valuable in terms of high cost and complicated equipment manufacturing.
目的通过工业物联网(IIoT)解决方案,利用设备状态数据改善设备状态监测,同时利用等离子体发射光谱数据改善过程状态监测。该研究通过远程实时监控,提高了电子维修能力。设计/方法/途径半导体加工设备由一千多个部件组成,设备部件的不可靠状态导致晶圆生产失败。本研究提出了一种基于网络的物理气相沉积(PVD)系统远程监控系统,该系统使用可编程逻辑控制器(PLC)和Modbus协议。提出了一种利用光学发射光谱(OES)获取等离子体中电子温度和电子密度的方法,用于监测等离子体过程。通过该系统,可以对影响设备和过程的部件进行控制和适当管理。通过减少设备零件的误差,当然有利于提高制造成品率。基于web的远程监控系统为设备工程师提供了很多好处,即使他们远离设备端,也可以为设备维护提供设备数据。通过对等离子体参数的现场监测,证明了工业物联网在半导体制造领域电子维护中的实用性。在PVD过程中,由于原子碰撞的增加,随着载气流量的增加,平均电子温度逐渐升高。在本实验中,载气的大流量为90 sccm,极大地降低了代表电子动能的电子温度。研究局限/启示半导体行业需要高水平的数据安全来保护其知识产权,并且它也属于设备运行状态;然而,通过互联网通信的数据安全在本研究中没有考虑,但它是已经存在的技术,很容易被附加功能所采用。研究结果表明,在众多设备参数中,载气流量和腔室压力是至关重要的设备参数,它们还会影响电子温度和电子密度等等离子体参数,直接影响金属在晶圆上沉积过程的质量。将气体流速增加到一定限度以上,会使电子温度损失产生不良的工艺效果。在半导体数据挖掘领域已经提出了一些利用半导体设备数据进行数据挖掘的研究,但利用等离子体实时监测数据进行数据采集系统的实际演示尚未见报道。在高成本和复杂的设备制造方面,本研究也具有一定的参考价值。
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Journal of Quality in Maintenance Engineering
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