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44th Annual Symposium on Frequency Control最新文献

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Plasma etching of monocrystal quartz 单晶石英的等离子蚀刻
Pub Date : 1990-05-23 DOI: 10.1109/FREQ.1990.177503
L. Spassov, E. Yossifov, D. Yankov, H. Poll, S. Schreiter
The influence of different plasma parameters on the etching rate and the surface profile of monocrystal quartz was studied. Quartz wafers were etched with a high rate (over 0.65 mu m/min) as a result of which thin quartz membranes were formed. On such membranes aluminum electrodes were deposited and resonance systems at 42.950 MHz were obtained. Among other results it is found that the parameters of the plasma process and the construction of the masks ought to be optimized in view of manufacturing membranes whose surface characteristics and plane-parallelism are similar to those of the initial wafers.<>
研究了不同等离子体参数对单晶石英刻蚀速率和表面形貌的影响。石英晶圆的刻蚀速率很高(超过0.65 μ m/min),形成了薄的石英膜。在这种膜上沉积铝电极,获得了42.950 MHz的谐振系统。在其他结果中,发现等离子体工艺参数和掩膜结构应该优化,以制造表面特征和平面平行度与原始晶圆相似的膜。
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引用次数: 2
On the influence of a fabrication imperfection on the normal acceleration sensitivity of contoured quartz resonators with rectangular supports 制造缺陷对矩形支撑异形石英谐振器法向加速度灵敏度的影响
Pub Date : 1990-05-23 DOI: 10.1109/FREQ.1990.177531
Y.S. Zhou, H. Tiersten
It is shown that the normal acceleration sensitivity of contoured quartz resonators with rectangular supports vanishes when the centers of the mode shape and support rectangle coincide. This result is essentially a consequence of symmetry and applies to many other shapes. Since it is extremely difficult to realize this situation in practice, an analysis of the influence of an offset of the centers on the normal acceleration sensitivity is performed. The biasing deformation is determined by means of a variational approximation procedure using the variational principle with all natural conditions for anisotropic static flexure. The very important accompanying strains which vary quadratically across the thickness are determined recursively. The resulting flexural biasing states are used in the existing perturbation equation along with the equivalent trapped energy mode shapes of the contoured resonators to calculate the normal acceleration sensitivities. It is shown that for small offsets the acceleration sensitivity increases linearly with offsets and orientations for which this effect is minimized.<>
结果表明,当模态振型中心与支撑矩形中心重合时,矩形支撑型轮廓石英谐振器的法向加速度灵敏度消失。这个结果本质上是对称的结果,也适用于许多其他形状。由于在实践中很难实现这种情况,因此分析了中心偏移对法向加速度灵敏度的影响。在各向异性静挠曲的所有自然条件下,利用变分原理,采用变分逼近法确定偏态变形。非常重要的伴随应变在厚度上呈二次变化是递归地确定的。在现有的微扰方程中,利用所得到的弯曲偏置状态和轮廓谐振器的等效捕获能量模态来计算法向加速度灵敏度。结果表明,对于较小的偏移量,加速度灵敏度随着偏移量和方向的增加而线性增加,从而使这种影响最小化
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引用次数: 20
Determination of the optimum orientation of an SC-cut resonator using a pulsed laser 用脉冲激光确定sc切割谐振腔的最佳取向
Pub Date : 1990-05-23 DOI: 10.1109/FREQ.1990.177497
P. Morley, R. Williamson
A method which has been developed to measure the force-frequency effect in stress compensated (SC)-cut resonators by the use of a pulsed light beam from an excimer laser which is directed onto the vibrating surface of the device is described. The crystal resonance is maintained by a phase-locked loop with a long time constant, and the phase across the crystal is monitored. The small phase change is measured by the use of a lock-in amplifier which is locked to the repetition rate of the laser. The resulting measurement gives a determination of both the phase and the amplitude of the force-frequency effect. Several devices which have been produced with crystallographic orientations spanning the theoretical value are discussed. These were measured using the laser pulsing method. The frequency modulation is plotted against angle.<>
本文描述了一种测量应力补偿(SC)切割谐振器中力频效应的方法,该方法利用准分子激光的脉冲光束直接照射到器件的振动表面。晶体共振由一个长时间常数的锁相环维持,并监测晶体上的相位。小的相位变化是通过使用锁定放大器来测量的,该放大器被锁定在激光的重复速率上。由此产生的测量给出了力-频率效应的相位和幅度的确定。讨论了几种晶体取向超过理论值的器件。这些都是用激光脉冲法测量的。频率调制是按角度绘制的。
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引用次数: 4
New inexpensive frequency calibration service from NIST NIST新的廉价频率校准服务
Pub Date : 1990-05-23 DOI: 10.1109/FREQ.1990.177488
D. Allan, D. Davis, J. Levine, M. Weiss, N. Hironaka, D. Okayama
An extremely cost-effective, modest-accuracy method of remotely obtaining time and frequency via a telephone model is demonstrated. This method uses the operation of the National Institute of Standards and Technology's (NIST) Automated Computer Time System (ACTS), which was begun in 1988. Time and frequency dissemination by this service depends on the reciprocity of the telephone system. The round-trip delay is measured by the NIST equipment. The advance of an on-time marker is adjusted so as to arrive at the user's site on time. A frequency calibration method taking advantage of this service, and preliminary tests are discussed. A computer is not required to access this service. All that is required is a telephone modem, a simple peripheral circuit to generator an on time marker and standard time and frequency measurement and data processing equipment.<>
通过电话模型演示了一种极具成本效益、精度适中的远程获取时间和频率的方法。这种方法使用了美国国家标准与技术研究所(NIST)的自动计算机时间系统(ACTS)的操作,该系统始于1988年。这种业务的时间和频率传播取决于电话系统的互易性。往返延迟由NIST设备测量。调整准点标记的前进,以便准时到达用户的地点。讨论了一种利用该服务的频率校准方法,并进行了初步试验。访问此服务不需要计算机。所需要的只是一个电话调制解调器,一个简单的外围电路,一个定时器和标准的时间和频率测量和数据处理设备。
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引用次数: 21
An analysis of oscillation frequency characteristics in a CMOS oscillating circuit using a coupling quartz crystal resonator 利用耦合石英晶体谐振器分析CMOS振荡电路的振荡频率特性
Pub Date : 1990-05-23 DOI: 10.1109/FREQ.1990.177548
H. Kawashima
Oscillation frequency characteristics in a CMOS oscillating circuit using a coupling quartz crystal resonator are described. A miniaturized GT cut quartz crystal resonator consisting of the vibrational portion and the supporting portions which is formed by an etching method is used. The relationship of the resonator's frequency temperature behavior versus load capacitance (CL) is clarified. The oscillating circuit is shown as an electric equivalent circuit. An amplitude continuation condition and an oscillation condition are theoretically derived. The coupling between both vibrations of a coupling quartz crystal resonator is regarded as a capacitive coupling. From the equivalent circuit of the coupling quartz crystal resonator, an imaginary part is easily calculated. As a result, a frequency equation which is given as a function of CL is readily derived from the oscillation condition and the imaginary part of the coupling resonator. It is shown that by suitably choosing CL, the frequency deviation in this CMOS oscillating circuit is less than 1 p.p.m. over a wide temperature range of -30 degrees C to +70 degrees C without any temperature compensation.<>
描述了采用耦合石英晶体谐振器的CMOS振荡电路的振荡频率特性。采用一种小型化的GT切割石英晶体谐振器,该谐振器由振动部分和通过蚀刻法形成的支撑部分组成。阐明了谐振器的频率温度特性与负载电容的关系。振荡电路表示为等效电路。从理论上推导了振幅延拓条件和振荡条件。耦合石英晶体谐振器的两种振动之间的耦合称为电容耦合。从耦合石英晶体谐振器的等效电路中,可以很容易地计算出虚部。因此,从耦合谐振腔的振荡条件和虚部可以很容易地推导出作为CL函数的频率方程。结果表明,在-30℃~ +70℃的宽温度范围内,通过选择合适的CL,该CMOS振荡电路的频率偏差小于1 p.p.m.,无需任何温度补偿。
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引用次数: 8
Design techniques for achieving state-of-the-art oscillator performance 实现最先进振荡器性能的设计技术
Pub Date : 1990-05-23 DOI: 10.1109/FREQ.1990.177540
G. K. Montress, T. Parker
The design, fabrication, component selection, and performance of extremely low noise surface acoustic wave (SAW) resonator and delay line oscillators, as well as an extremely low noise L-band dielectric resonator (DR) oscillator are described. To illustrate the design procedure, several specific examples are presented. It is shown that the basic feedback-loop oscillator configuration is well suited to high performance oscillator design in the VHF, U HF and microwave frequency ranges, based upon the incorporation of a two-port frequency stabilizing element. State-of-the-art performance is realized for SAW resonator and delay line based oscillators, as well as for a very simple L-band dielectric resonator oscillator design.<>
介绍了极低噪声表面声波(SAW)谐振器和延迟线振荡器以及极低噪声l波段介电谐振器(DR)振荡器的设计、制造、元件选择和性能。为了说明设计过程,给出了几个具体的例子。结果表明,基于双端口稳频元件,基本反馈环振荡器结构非常适合于甚高频、超高频和微波频率范围内的高性能振荡器设计。最先进的性能实现了SAW谐振器和基于延迟线的振荡器,以及一个非常简单的l波段介电谐振振荡器设计
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引用次数: 17
Total process control and its implementation in the manufacturing of cesium beam tubes (atomic frequency standard) 铯束管制造的全过程控制及其实施(原子频率标准)
Pub Date : 1990-05-23 DOI: 10.1109/FREQ.1990.177487
E.R. Straka, R.W. Sarrica, L. Hansen
The specific application of several analytical total quality control tools is discussed. One example deals with the restructuring of the method of handling cesium beam tube (CBT) work orders. The result is a reduction of manufacturing cycle time as well as a reduction of the total word-in-progress inventory. A corresponding improvement of the CBT performance is observed. The influence of total process control on existing and potential suppliers of CBT parts is discussed.<>
讨论了几种分析全面质量控制工具的具体应用。一个例子涉及处理铯束管(CBT)工作指令的方法的重组。其结果是减少了制造周期时间,并减少了在制品库存总量。观察到CBT的性能有相应的改善。讨论了全过程控制对现有和潜在CBT零件供应商的影响。
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引用次数: 1
An update on the TMXO TMXO的最新情况
Pub Date : 1990-05-23 DOI: 10.1109/FREQ.1990.177551
D. A. Symonds, D. Allen
Improvements made to enhance the performance and to improve the manufacturability of the tactical miniature crystal oscillator (TMXO) are presented. The results of these efforts are described in detail. The TMXO was radiation-hardened to tactical levels. Phase noise was reduced to -125 dBc/Hz at 10 Hz offset, with a floor of -160 dBx/Hz. The lowest structural resonance was increased to 1800 Hz. Numerous manufacturability improvements are described. In addition to a large number of process changes, the package has been improved, the number of thick-film screenings has been reduced from 13 to 2, and the circuit itself as well as circuit components have been changed extensively, both to enhance performance and to simplify assembly and alignment. Principal specifications of the improved TMXO are given.<>
提出了为提高战术微型晶体振荡器(TMXO)的性能和可制造性所作的改进。并详细叙述了这些努力的结果。TMXO的防辐射强度达到了战术水平。在10 Hz偏移时,相位噪声降至-125 dBc/Hz,下限为-160 dBx/Hz。最低结构共振增加到1800hz。描述了许多可制造性改进。除了大量的工艺变化外,封装也得到了改进,厚膜筛选的数量从13个减少到2个,电路本身以及电路元件也得到了广泛的改变,既提高了性能,又简化了组装和校准。给出了改进后的TMXO的主要性能指标
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引用次数: 3
Improved performance of the superconducting cavity maser at short measuring times (atomic frequency standards) 在短测量时间内改进超导腔脉泽的性能(原子频率标准)
Pub Date : 1990-05-23 DOI: 10.1109/FREQ.1990.177485
R.T. Wang, G. Dick
Measurements on a superconducting cavity maser oscillator are presented which show a frequency stability of parts in 10/sup 15/ for times from 1 second to 1000 seconds. A phase noise of approximately -80 dB/f/sup 3/, where f is frequency, is shown. The measured stability at a 1 second interval is 10 times better than that of a hydrogen maser, and phase noise at 8 GHz is more than 20 dB below that of a multiplied quartz crystal oscillator.<>
本文介绍了超导腔脉泽振荡器的测量结果,显示了零件在10/sup 15/范围内的频率稳定性,时间从1秒到1000秒不等。如图所示,相位噪声约为-80 dB/f/sup 3/,其中f为频率。测量到的1秒间隔的稳定性是氢脉泽的10倍,8 GHz时的相位噪声比乘式石英晶体振荡器低20 dB以上。
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引用次数: 26
A synopsis of quality involvement/improvement programs and the ramifications on our industry 质量参与/改进计划的概要及其对我们行业的影响
Pub Date : 1990-05-23 DOI: 10.1109/FREQ.1990.177510
C. Jensik, R. Zellers, R. Lackey
The authors discuss the North American quartz crystal industry. A decline in US factory output of oscillator crystals is described. Two quality programs, the Malcolm Baldrige National Quality Award program and the Supplier Partnership program, are discussed. Key points of both programs are listed. The benefits of quality oriented manufacturing are described.<>
对北美石英晶体产业进行了探讨。描述了美国工厂振荡器晶体产量的下降。两个质量计划,马尔科姆·鲍德里奇国家质量奖计划和供应商合作伙伴计划,讨论。列出了两个方案的要点。描述了质量导向制造的好处。
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引用次数: 0
期刊
44th Annual Symposium on Frequency Control
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