Pub Date : 2009-06-05DOI: 10.1109/NEMS.2009.5068707
S. Kladsomboon, S. Pratontep, T. Puntheeranurak, T. Kerdcharoen
In this paper, we have investigated the sensing properties of magnesium - 5,10,15,20 - tetraphenyl - porphyrin (MgTPP) to various volatile organic compounds (VOCs). The spin-coated MgTPP thin films were subjected to thermal annealing and methanol-vapor exposure to study the effects of pre-treatment on the sensing properties. Atomic force microscopy (AFM) has shown that both pre-treatment techniques have induced re-crystallization of the film, thereby improving the sensitivity over the as-deposited film. The thermally annealed films were found more effective than the methanol-vapor treated ones. The in-house optical sensor setup was applied to discriminate various VOCs and alcoholic beverages. Principal component analysis (PCA) confirms that the thermally annealed MgTPP thin film can distinguish several kinds of VOCs. Computational density functional theory (DFT) indicates that the interaction energy between analyte and sensing molecules can be used to explain comparative sensitivity.
{"title":"Investigation of thermal and methanol-vapor treatments for MgTPP as an optical gas sensor","authors":"S. Kladsomboon, S. Pratontep, T. Puntheeranurak, T. Kerdcharoen","doi":"10.1109/NEMS.2009.5068707","DOIUrl":"https://doi.org/10.1109/NEMS.2009.5068707","url":null,"abstract":"In this paper, we have investigated the sensing properties of magnesium - 5,10,15,20 - tetraphenyl - porphyrin (MgTPP) to various volatile organic compounds (VOCs). The spin-coated MgTPP thin films were subjected to thermal annealing and methanol-vapor exposure to study the effects of pre-treatment on the sensing properties. Atomic force microscopy (AFM) has shown that both pre-treatment techniques have induced re-crystallization of the film, thereby improving the sensitivity over the as-deposited film. The thermally annealed films were found more effective than the methanol-vapor treated ones. The in-house optical sensor setup was applied to discriminate various VOCs and alcoholic beverages. Principal component analysis (PCA) confirms that the thermally annealed MgTPP thin film can distinguish several kinds of VOCs. Computational density functional theory (DFT) indicates that the interaction energy between analyte and sensing molecules can be used to explain comparative sensitivity.","PeriodicalId":284816,"journal":{"name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130753613","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-01-05DOI: 10.1109/NEMS.2009.5068779
N. Xi
Nanotechnology will allow us to build devices enormously smaller than before and will bring fundamental changes to the disciplines such as engineering, chemistry, medicine, biology, and physics. The research in nano manipulation and nano assembly is tremendously important because most physical magnitudes characterizing nano scale systems significantly differ from those familiar in macro, meso, and micro systems. In this presentation, the theoretical foundation as well as the development of the atomic force microscopy (AFM) based nano robotic system will be discussed. Furthermore, the development of nano manufacturing processes will also be addressed. The topics will include nano material purification, delivering, assembly, as well as packaging and testing. The examples of manufacturing nano sensors and electronic devices such as Carbon Nanotube based infrared detectors will be presented to demonstrate the effectiveness and efficiency the nano manufacturing processes.
{"title":"Plenary lecture 4: “Nano robotic manipulation and assembly for manufacturing nano sensors and devices”","authors":"N. Xi","doi":"10.1109/NEMS.2009.5068779","DOIUrl":"https://doi.org/10.1109/NEMS.2009.5068779","url":null,"abstract":"Nanotechnology will allow us to build devices enormously smaller than before and will bring fundamental changes to the disciplines such as engineering, chemistry, medicine, biology, and physics. The research in nano manipulation and nano assembly is tremendously important because most physical magnitudes characterizing nano scale systems significantly differ from those familiar in macro, meso, and micro systems. In this presentation, the theoretical foundation as well as the development of the atomic force microscopy (AFM) based nano robotic system will be discussed. Furthermore, the development of nano manufacturing processes will also be addressed. The topics will include nano material purification, delivering, assembly, as well as packaging and testing. The examples of manufacturing nano sensors and electronic devices such as Carbon Nanotube based infrared detectors will be presented to demonstrate the effectiveness and efficiency the nano manufacturing processes.","PeriodicalId":284816,"journal":{"name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-01-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115507004","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-01-05DOI: 10.1109/NEMS.2009.5068608
Sen Yao, S. Goto, J. Sakurai, T. Shinshi, M. Uehara, Hitoshi Yamamoto
SiN-based micro cantilever actuators with lengths of the order of 1mm and NdFeB/Ta thin films for actuation were designed, fabricated and characterized. Multilayered thin films of NdFeB and Ta, with total thicknesses of 13µm and 3µm, were deposited on 3µm-thick SiN cantilevers by magnetron sputtering. The remnant flux density and coercive force of the thin film were as high as those obtained for bulk NdFeB magnets. The SiN based magnetic actuator showed good strength even when undergoing considerable bending. Large bidirectional out-of-plane displacements (up to 700µm) were generated using an air cored coil placed beneath the cantilevers. Static and dynamic evaluations were carried out using a CCD camera and an optical fiber displacement sensor, respectively. The experimentally measured displacements were in agreement with simulated values.
{"title":"SiN-based micro cantilever actuators using NdFeB/Ta permanent magnetic thin film","authors":"Sen Yao, S. Goto, J. Sakurai, T. Shinshi, M. Uehara, Hitoshi Yamamoto","doi":"10.1109/NEMS.2009.5068608","DOIUrl":"https://doi.org/10.1109/NEMS.2009.5068608","url":null,"abstract":"SiN-based micro cantilever actuators with lengths of the order of 1mm and NdFeB/Ta thin films for actuation were designed, fabricated and characterized. Multilayered thin films of NdFeB and Ta, with total thicknesses of 13µm and 3µm, were deposited on 3µm-thick SiN cantilevers by magnetron sputtering. The remnant flux density and coercive force of the thin film were as high as those obtained for bulk NdFeB magnets. The SiN based magnetic actuator showed good strength even when undergoing considerable bending. Large bidirectional out-of-plane displacements (up to 700µm) were generated using an air cored coil placed beneath the cantilevers. Static and dynamic evaluations were carried out using a CCD camera and an optical fiber displacement sensor, respectively. The experimentally measured displacements were in agreement with simulated values.","PeriodicalId":284816,"journal":{"name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-01-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125244444","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-01-05DOI: 10.1109/NEMS.2009.5068549
Qijun Xiao, Wenyuan Chen, G. Ma, F. Cui, Shengyong Li, Weiping Zhang
An electrostatically levitated gyroscope based on UV-LIGA fabrication process is introduced. The stable levitation is vitally important for the gyroscope to work efficiently. Two types of levitation control model of such a device are presented to realize initial levitation. The axial squeeze film damping coefficient is calculated by finite element analysis and deduced by analytical solution. From the analysis of the proportional integral differential (PID) control completed by the bias and the feedback linearization control (FLC) without bias. It can be seen that the PID control with the bias can linearize the control equation near the null position and FLC can realize the large travel with desired dynamic performance and global stability. But it has steady-state error, which can be switched to the PID controller to minimize. At last, the levitation control system is constructed.
{"title":"Simulation of levitation control for a micromachined electrostatically levitated gyroscope","authors":"Qijun Xiao, Wenyuan Chen, G. Ma, F. Cui, Shengyong Li, Weiping Zhang","doi":"10.1109/NEMS.2009.5068549","DOIUrl":"https://doi.org/10.1109/NEMS.2009.5068549","url":null,"abstract":"An electrostatically levitated gyroscope based on UV-LIGA fabrication process is introduced. The stable levitation is vitally important for the gyroscope to work efficiently. Two types of levitation control model of such a device are presented to realize initial levitation. The axial squeeze film damping coefficient is calculated by finite element analysis and deduced by analytical solution. From the analysis of the proportional integral differential (PID) control completed by the bias and the feedback linearization control (FLC) without bias. It can be seen that the PID control with the bias can linearize the control equation near the null position and FLC can realize the large travel with desired dynamic performance and global stability. But it has steady-state error, which can be switched to the PID controller to minimize. At last, the levitation control system is constructed.","PeriodicalId":284816,"journal":{"name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"41 4","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-01-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120811988","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-01-05DOI: 10.1109/NEMS.2009.5068629
Xu Mao, Zhenchuan Yang, Zhihong Li, G. Yan
A novel method to apply thin metal film for preventing footing effect in making micro-mechanical structure on SOI wafer is presented. The handle wafer of the SOI wafer was etched to form cavity by KOH solution, and followed by removing the buried oxide from backside. Then a thin aluminum film was sputtered in the cavity to prevent footing effect. The experimental results showed that the SOI micro-mechanical structure was well protected from footing effect. We applied this method to make the SOI micro-accelerometer, and the linearity, sensitivity, resolution and bandwidth of the SOI micro-accelerometer were measured respectively. The performances of the fabricated SOI micro-accelerometer indicated that the method can improve the fabrication capability of SOI process.
{"title":"The method of prevent footing effect in making SOI micro-mechanical structure","authors":"Xu Mao, Zhenchuan Yang, Zhihong Li, G. Yan","doi":"10.1109/NEMS.2009.5068629","DOIUrl":"https://doi.org/10.1109/NEMS.2009.5068629","url":null,"abstract":"A novel method to apply thin metal film for preventing footing effect in making micro-mechanical structure on SOI wafer is presented. The handle wafer of the SOI wafer was etched to form cavity by KOH solution, and followed by removing the buried oxide from backside. Then a thin aluminum film was sputtered in the cavity to prevent footing effect. The experimental results showed that the SOI micro-mechanical structure was well protected from footing effect. We applied this method to make the SOI micro-accelerometer, and the linearity, sensitivity, resolution and bandwidth of the SOI micro-accelerometer were measured respectively. The performances of the fabricated SOI micro-accelerometer indicated that the method can improve the fabrication capability of SOI process.","PeriodicalId":284816,"journal":{"name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-01-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125032545","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-01-05DOI: 10.1109/NEMS.2009.5068710
T. Sun, S. Tsuda, K. Zauner, H. Morgan
Electrical impedance spectroscopy is a non-invasive technology for characterizing the dielectric properties of biological tissues and cells. Electrical impedance tomography extends impedance measurements from one dimension to two or three dimensions. Impedance measurements are performed across multiple electrodes, mapping the conductivity distribution within an object. In this paper, electrical impedance tomography is used to image a multi-nucleated cell, Physarum polycephalum, growing on agar gel in a miniaturized chip containing a circular 16-electrode array. An impedance analyzer combined with a USB-controlled multiplexing circuit board is used to perform adjacent impedance measurements. An open source software, EIDORS is used for image reconstruction and the system is evaluated using finite element modeling. Experimentally, a preliminary reconstructed image of Physarum is shown. The system has the potential to monitor kinetics of cells culture.
{"title":"Single cell imaging using electrical impedance tomography","authors":"T. Sun, S. Tsuda, K. Zauner, H. Morgan","doi":"10.1109/NEMS.2009.5068710","DOIUrl":"https://doi.org/10.1109/NEMS.2009.5068710","url":null,"abstract":"Electrical impedance spectroscopy is a non-invasive technology for characterizing the dielectric properties of biological tissues and cells. Electrical impedance tomography extends impedance measurements from one dimension to two or three dimensions. Impedance measurements are performed across multiple electrodes, mapping the conductivity distribution within an object. In this paper, electrical impedance tomography is used to image a multi-nucleated cell, Physarum polycephalum, growing on agar gel in a miniaturized chip containing a circular 16-electrode array. An impedance analyzer combined with a USB-controlled multiplexing circuit board is used to perform adjacent impedance measurements. An open source software, EIDORS is used for image reconstruction and the system is evaluated using finite element modeling. Experimentally, a preliminary reconstructed image of Physarum is shown. The system has the potential to monitor kinetics of cells culture.","PeriodicalId":284816,"journal":{"name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"111 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-01-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123335862","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-01-05DOI: 10.1109/NEMS.2009.5068535
X. Chen, D. Cui, L. L. Zhang
In this manuscript we designed and fabricated two types of microfluidic chips for plasma isolation from whole blood by using micro/nano structures. One type of the microchips was designed based on the principle of crossflow filtration, while the other was based on plasma skimming effect. The microchips were fabricated by MEMS technology, which were made of a silicon wafer and a PDMS-glass cover. The fabrication parameters were demonstrated and optimized for the both types of chips. These microfluidic chips used for plasma isolation has the potential to integrate into micro total analytical system (μTAS) with the advantages of low cost, short analytical time, disposability, low reagent and sample consumption, which will create a microanalysis system for point-of-care diagnostics.
{"title":"Design and fabrication of microfluidic chip with micro/nano structures","authors":"X. Chen, D. Cui, L. L. Zhang","doi":"10.1109/NEMS.2009.5068535","DOIUrl":"https://doi.org/10.1109/NEMS.2009.5068535","url":null,"abstract":"In this manuscript we designed and fabricated two types of microfluidic chips for plasma isolation from whole blood by using micro/nano structures. One type of the microchips was designed based on the principle of crossflow filtration, while the other was based on plasma skimming effect. The microchips were fabricated by MEMS technology, which were made of a silicon wafer and a PDMS-glass cover. The fabrication parameters were demonstrated and optimized for the both types of chips. These microfluidic chips used for plasma isolation has the potential to integrate into micro total analytical system (μTAS) with the advantages of low cost, short analytical time, disposability, low reagent and sample consumption, which will create a microanalysis system for point-of-care diagnostics.","PeriodicalId":284816,"journal":{"name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"151 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-01-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123442644","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-01-05DOI: 10.1109/NEMS.2009.5068693
Y. Lee, Yi-Chien Lin, Chen-Hui Tsai
A single-mode fiber (SMF) with a microlens on one end is widely used to facilitate laser-to-fiber and/or fiber-to-fiber coupling in optical communication systems. This paper will apply an excimer laser micromachining system and its planetary contour scanning method to fabricate refractive and aspheric microlenses which can be integrated with optical fibers. Two types of fiber lenses are investigated. The first one is for optic focusing aiming at a minimized focal spot size at a reasonable working distance. The second one is for optical collimation so that the beam coming out from the fiber has minimum divergence. Both types of fiber lenses can find a wide range of applications in electro-optic devices and optical communication.
{"title":"A novel method for fabricating aspheric fiber lens and its applications","authors":"Y. Lee, Yi-Chien Lin, Chen-Hui Tsai","doi":"10.1109/NEMS.2009.5068693","DOIUrl":"https://doi.org/10.1109/NEMS.2009.5068693","url":null,"abstract":"A single-mode fiber (SMF) with a microlens on one end is widely used to facilitate laser-to-fiber and/or fiber-to-fiber coupling in optical communication systems. This paper will apply an excimer laser micromachining system and its planetary contour scanning method to fabricate refractive and aspheric microlenses which can be integrated with optical fibers. Two types of fiber lenses are investigated. The first one is for optic focusing aiming at a minimized focal spot size at a reasonable working distance. The second one is for optical collimation so that the beam coming out from the fiber has minimum divergence. Both types of fiber lenses can find a wide range of applications in electro-optic devices and optical communication.","PeriodicalId":284816,"journal":{"name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-01-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123464706","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-01-05DOI: 10.1109/NEMS.2009.5068682
H. Cong, T. Pan
In this paper, we present microfabrication of a novel photopatternable conductive PDMS material with silver powder as conductive filler and benzophenone as photosensitive component, employing standard photolithography approach. An array of miniaturized capacitive pressure sensors is micromachined onto flexible polymeric transparency using this approach. Highest conductivity of ∼104 S·m−1 and minimal feature resolution of 60 µm have been successfully achieved. In addition, a thermal compression step can mold the microfabricated device into a desired shape (e.g., contact lens). The unique combination of physical properties from both silver filler and PDMS matrix along with photopatternability makes the conductive PDMS composite an excellent material for biological and clinical sensing applications.
{"title":"Microfabrication of conductive PDMS on flexible substrates for biomedical applications","authors":"H. Cong, T. Pan","doi":"10.1109/NEMS.2009.5068682","DOIUrl":"https://doi.org/10.1109/NEMS.2009.5068682","url":null,"abstract":"In this paper, we present microfabrication of a novel photopatternable conductive PDMS material with silver powder as conductive filler and benzophenone as photosensitive component, employing standard photolithography approach. An array of miniaturized capacitive pressure sensors is micromachined onto flexible polymeric transparency using this approach. Highest conductivity of ∼104 S·m−1 and minimal feature resolution of 60 µm have been successfully achieved. In addition, a thermal compression step can mold the microfabricated device into a desired shape (e.g., contact lens). The unique combination of physical properties from both silver filler and PDMS matrix along with photopatternability makes the conductive PDMS composite an excellent material for biological and clinical sensing applications.","PeriodicalId":284816,"journal":{"name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-01-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115106240","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-01-05DOI: 10.1109/NEMS.2009.5068685
P. Lv, Zhe Chen, Alice H. X. Zhang
In order to improve the performance of PECVD SiC in MEMS, pulse excimer laser annealing process was introduced in this paper. The effect was comprehensively investigated in several respects, including morphology, mechanical properties and residual stress elimination. The study revealed that: after laser annealing with adequate energy density, amorphous SiC (a-SiC) transformed into polycrystalline SiC, and larger crystal grains were formed with higher energy density; the process effectively enhanced the films' mechanical property, a moderate energy density about 90mJ/cm2 resulted in comparatively greatest Young's modulus and hardness; the stress indicating structure exhibited that the annealing eliminated the compressive stress of films as deposited effectively. Therefore, pulse excimer laser annealing process is a promising method to improve the performance of a-SiC films prepared by PECVD, and makes the material more applicable in many MEMS fields.
{"title":"Effect of laser annealing on amorphous silicon carbide films prepared by PECVD","authors":"P. Lv, Zhe Chen, Alice H. X. Zhang","doi":"10.1109/NEMS.2009.5068685","DOIUrl":"https://doi.org/10.1109/NEMS.2009.5068685","url":null,"abstract":"In order to improve the performance of PECVD SiC in MEMS, pulse excimer laser annealing process was introduced in this paper. The effect was comprehensively investigated in several respects, including morphology, mechanical properties and residual stress elimination. The study revealed that: after laser annealing with adequate energy density, amorphous SiC (a-SiC) transformed into polycrystalline SiC, and larger crystal grains were formed with higher energy density; the process effectively enhanced the films' mechanical property, a moderate energy density about 90mJ/cm2 resulted in comparatively greatest Young's modulus and hardness; the stress indicating structure exhibited that the annealing eliminated the compressive stress of films as deposited effectively. Therefore, pulse excimer laser annealing process is a promising method to improve the performance of a-SiC films prepared by PECVD, and makes the material more applicable in many MEMS fields.","PeriodicalId":284816,"journal":{"name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-01-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122369848","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：