Pub Date : 1900-01-01DOI: 10.1299/JSMEMNM.2020.11.28P1-MN3-2
H. Ando, T. Namazu
This paper describes the fabrication method of Silicon (Si) nanowires to evaluate the mechanical properties of Si, which is widely used as a based material in Micro Electro Mechanical System (MEMS). Nanoscale Si nanowires are fabricated by gallium (Ga) ion doping on monocrystalline silicon using Focus Ion Beam (FIB) and alkaline etching using Tetra methyl ammonium hydroxide (TMAH). In addition, fabricate Si nanowires with changed the various conditions of FIB ion dope and determine optimal conditions for fabricate Si nanowires.
{"title":"Fabrication and tensile characterization of FIB doped Si nanostructures","authors":"H. Ando, T. Namazu","doi":"10.1299/JSMEMNM.2020.11.28P1-MN3-2","DOIUrl":"https://doi.org/10.1299/JSMEMNM.2020.11.28P1-MN3-2","url":null,"abstract":"This paper describes the fabrication method of Silicon (Si) nanowires to evaluate the mechanical properties of Si, which is widely used as a based material in Micro Electro Mechanical System (MEMS). Nanoscale Si nanowires are fabricated by gallium (Ga) ion doping on monocrystalline silicon using Focus Ion Beam (FIB) and alkaline etching using Tetra methyl ammonium hydroxide (TMAH). In addition, fabricate Si nanowires with changed the various conditions of FIB ion dope and determine optimal conditions for fabricate Si nanowires.","PeriodicalId":344990,"journal":{"name":"The Proceedings of the Symposium on Micro-Nano Science and Technology","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124375008","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1299/jsmemnm.2019.10.20am2pn339
Tasuku Sato, S. Maeda, Y. Yamanishi
{"title":"Study of electrohydrodynamic using non-contact visualization method","authors":"Tasuku Sato, S. Maeda, Y. Yamanishi","doi":"10.1299/jsmemnm.2019.10.20am2pn339","DOIUrl":"https://doi.org/10.1299/jsmemnm.2019.10.20am2pn339","url":null,"abstract":"","PeriodicalId":344990,"journal":{"name":"The Proceedings of the Symposium on Micro-Nano Science and Technology","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121863406","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1299/jsmemnm.2019.10.19pm5pn318
K. Tani, Kweon Sanghyo, H. Hida, I. Kanno
{"title":"Design, fabrication and evaluation of PZT piezoelectric thin-film transformer","authors":"K. Tani, Kweon Sanghyo, H. Hida, I. Kanno","doi":"10.1299/jsmemnm.2019.10.19pm5pn318","DOIUrl":"https://doi.org/10.1299/jsmemnm.2019.10.19pm5pn318","url":null,"abstract":"","PeriodicalId":344990,"journal":{"name":"The Proceedings of the Symposium on Micro-Nano Science and Technology","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125247238","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1299/jsmemnm.2019.10.20pm3pn212
S. Fujimoto, Taichi Furukawa, S. Maruo
{"title":"Micro pillar array produced by microstereolithography using an optical fiber","authors":"S. Fujimoto, Taichi Furukawa, S. Maruo","doi":"10.1299/jsmemnm.2019.10.20pm3pn212","DOIUrl":"https://doi.org/10.1299/jsmemnm.2019.10.20pm3pn212","url":null,"abstract":"","PeriodicalId":344990,"journal":{"name":"The Proceedings of the Symposium on Micro-Nano Science and Technology","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130410960","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1299/jsmemnm.2019.10.20pm3pn344
Harutoshi Takahashi, T. Abe, K. Kanda, M. Sohgawa
{"title":"Force / vibration detection by cantilever embedded in PDMS for strain gauge and piezoelectric tactile sensor","authors":"Harutoshi Takahashi, T. Abe, K. Kanda, M. Sohgawa","doi":"10.1299/jsmemnm.2019.10.20pm3pn344","DOIUrl":"https://doi.org/10.1299/jsmemnm.2019.10.20pm3pn344","url":null,"abstract":"","PeriodicalId":344990,"journal":{"name":"The Proceedings of the Symposium on Micro-Nano Science and Technology","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129915741","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Direct writing method of conductive metal pattern using 405 nm blue laser","authors":"Furukawa Taichi, Komori Takuma, Iijima Motoyuki, Maruo Shoji","doi":"10.1299/jsmemnm.2019.10.20pm3pn348","DOIUrl":"https://doi.org/10.1299/jsmemnm.2019.10.20pm3pn348","url":null,"abstract":"","PeriodicalId":344990,"journal":{"name":"The Proceedings of the Symposium on Micro-Nano Science and Technology","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130940729","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1299/jsmemnm.2019.10.20am2pn347
Takashi Sato, K. Yamagishi, Michinao Hashimoto, E. Iwase
{"title":"Study on Electrical Connection on Electronic Component Packaging using Liquid Metal","authors":"Takashi Sato, K. Yamagishi, Michinao Hashimoto, E. Iwase","doi":"10.1299/jsmemnm.2019.10.20am2pn347","DOIUrl":"https://doi.org/10.1299/jsmemnm.2019.10.20am2pn347","url":null,"abstract":"","PeriodicalId":344990,"journal":{"name":"The Proceedings of the Symposium on Micro-Nano Science and Technology","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128536249","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1299/jsmemnm.2019.10.20pm3pn350
T. Onomoto, Y. Yoshida, N. Miki
{"title":"Electroencephalogram Measurement in Long-term Adapting Process to Inverted Vision with Candle-like Micro-needle Electrodes","authors":"T. Onomoto, Y. Yoshida, N. Miki","doi":"10.1299/jsmemnm.2019.10.20pm3pn350","DOIUrl":"https://doi.org/10.1299/jsmemnm.2019.10.20pm3pn350","url":null,"abstract":"","PeriodicalId":344990,"journal":{"name":"The Proceedings of the Symposium on Micro-Nano Science and Technology","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133891778","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1299/jsmemnm.2019.10.19am3pn313
L. Heinrich, H. Tohmyoh
{"title":"On fabrication of Al whiskers by utilizing stress migration and evaluation of their electrical properties","authors":"L. Heinrich, H. Tohmyoh","doi":"10.1299/jsmemnm.2019.10.19am3pn313","DOIUrl":"https://doi.org/10.1299/jsmemnm.2019.10.19am3pn313","url":null,"abstract":"","PeriodicalId":344990,"journal":{"name":"The Proceedings of the Symposium on Micro-Nano Science and Technology","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123530809","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1299/jsmemnm.2019.10.20pm3pn202
Ko Beppu, A. Hukui, Akira Takakura, Taishi Nishihara, Y. Miyauchi, K. Itami, T. Namazu
{"title":"Strength of bundled carbon nanotubes","authors":"Ko Beppu, A. Hukui, Akira Takakura, Taishi Nishihara, Y. Miyauchi, K. Itami, T. Namazu","doi":"10.1299/jsmemnm.2019.10.20pm3pn202","DOIUrl":"https://doi.org/10.1299/jsmemnm.2019.10.20pm3pn202","url":null,"abstract":"","PeriodicalId":344990,"journal":{"name":"The Proceedings of the Symposium on Micro-Nano Science and Technology","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121943040","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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