S. Mobes, G. Laurent, C. Clévy, N. Le Fort-Piat, B. Piranda, J. Bourgeois
This paper describes the design, prototyping and control of a 2D modular and self-reconfigurable robot for conveying microparts. The elementary block is designed to have a package dimension under 1 cm3 and will include the actuators, the electronics and the micro-controller. Electropermanent (EP) magnets are used for both the linkage and the traveling system to avoid any power consumption during the linkage. Some prototype blocks have been realized and show a well working of the motion and a sufficient holding force. The paper presents also an algorithm, common to all blocks units, allowing to reconfigure a set blocks from a spatial configuration to another one. This algorithm is implemented in a simulator software showing in real-time the reconfiguration of the robot.
{"title":"Toward a 2D Modular and Self-Reconfigurable Robot for Conveying Microparts","authors":"S. Mobes, G. Laurent, C. Clévy, N. Le Fort-Piat, B. Piranda, J. Bourgeois","doi":"10.1109/DMEMS.2012.20","DOIUrl":"https://doi.org/10.1109/DMEMS.2012.20","url":null,"abstract":"This paper describes the design, prototyping and control of a 2D modular and self-reconfigurable robot for conveying microparts. The elementary block is designed to have a package dimension under 1 cm3 and will include the actuators, the electronics and the micro-controller. Electropermanent (EP) magnets are used for both the linkage and the traveling system to avoid any power consumption during the linkage. Some prototype blocks have been realized and show a well working of the motion and a sufficient holding force. The paper presents also an algorithm, common to all blocks units, allowing to reconfigure a set blocks from a spatial configuration to another one. This algorithm is implemented in a simulator software showing in real-time the reconfiguration of the robot.","PeriodicalId":348324,"journal":{"name":"2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129735415","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
We have developed low power technologies for animal or human health monitoring system with wireless sensor node. A wireless sensor network system is composed of sensors, signal processing units, receiver and other components. Although there are several reports of low power technologies for these components separately, the technology which has consideration of a total system has not been researched. For example, if we use the combination of a wireless sensor node and a receiver, the number of receiving per a time can be utilized as measured data indirectly. In this case, since the transmitted data can be decreased, the power consumption of the transmission can also be decreased. In this paper, we report low power technologies of wireless sensor network system which was developed for chicken health monitoring system. The calculated average power consumption of the wireless sensor node is less than 1 μW.
{"title":"Development of Low Power Technologies for Health Monitoring System Using Wireless Sensor Nodes","authors":"H. Okada, H. Nogami, T. Itoh, T. Masuda","doi":"10.1109/DMEMS.2012.13","DOIUrl":"https://doi.org/10.1109/DMEMS.2012.13","url":null,"abstract":"We have developed low power technologies for animal or human health monitoring system with wireless sensor node. A wireless sensor network system is composed of sensors, signal processing units, receiver and other components. Although there are several reports of low power technologies for these components separately, the technology which has consideration of a total system has not been researched. For example, if we use the combination of a wireless sensor node and a receiver, the number of receiving per a time can be utilized as measured data indirectly. In this case, since the transmitted data can be decreased, the power consumption of the transmission can also be decreased. In this paper, we report low power technologies of wireless sensor network system which was developed for chicken health monitoring system. The calculated average power consumption of the wireless sensor node is less than 1 μW.","PeriodicalId":348324,"journal":{"name":"2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS","volume":"758 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133961573","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A new contact-less transport system for thin and fragile products like silicon wafers is introduced. The product is carried on a thin film of air separating the product from the system, and is transported using the relative velocity of the pressurized and moving air film parallel and adjacent to the system surface. This innovative concept can produce both the high stiffness and acceleration required for high precision positioning and efficient product transport. In this paper the basic design principles of this system are presented. Experimental verification is demonstrated on a 6-dof planar air actuated high precision positioning stage.
{"title":"Contact-Less Thin Substrate Transport Using Viscous Traction","authors":"R. V. van Ostayen, J. van Eijk, R. M. Schmidt","doi":"10.1109/DMEMS.2012.19","DOIUrl":"https://doi.org/10.1109/DMEMS.2012.19","url":null,"abstract":"A new contact-less transport system for thin and fragile products like silicon wafers is introduced. The product is carried on a thin film of air separating the product from the system, and is transported using the relative velocity of the pressurized and moving air film parallel and adjacent to the system surface. This innovative concept can produce both the high stiffness and acceleration required for high precision positioning and efficient product transport. In this paper the basic design principles of this system are presented. Experimental verification is demonstrated on a 6-dof planar air actuated high precision positioning stage.","PeriodicalId":348324,"journal":{"name":"2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128837125","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
R. Couturier, S. Domas, G. Goavec-Mérou, M. Favre, M. Lenczner, A. Meister
Atomic force microscopes (AFM) provide high resolution images of surfaces. In this paper, we focus our attention on an inter ferometry method for deflection estimation of cantilever arrays in quasi-static regime. In its original form, spline interpolation was used to determine interference fringe phase, and thus the deflections. Computations were performed on a PC. Here, we propose a new complete solution with a least square based algorithm and an optimized FPGA implementation. Simulations and real tests showed very good results and open perspective for real-time estimation and control of cantilever arrays in the dynamic regime.
{"title":"A New Approach Based on a Least Square Method for Real-Time Estimation of Cantilever Array Deflections with an FPGA","authors":"R. Couturier, S. Domas, G. Goavec-Mérou, M. Favre, M. Lenczner, A. Meister","doi":"10.1109/DMEMS.2012.16","DOIUrl":"https://doi.org/10.1109/DMEMS.2012.16","url":null,"abstract":"Atomic force microscopes (AFM) provide high resolution images of surfaces. In this paper, we focus our attention on an inter ferometry method for deflection estimation of cantilever arrays in quasi-static regime. In its original form, spline interpolation was used to determine interference fringe phase, and thus the deflections. Computations were performed on a PC. Here, we propose a new complete solution with a least square based algorithm and an optimized FPGA implementation. Simulations and real tests showed very good results and open perspective for real-time estimation and control of cantilever arrays in the dynamic regime.","PeriodicalId":348324,"journal":{"name":"2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS","volume":"118 14","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132772069","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
B. Yang, W. Belkhir, R. Dhara, A. Giorgetti, M. Lenczner
Multiphysics models of large arrays of micro- and nanosystems are too complex to be efficiently simulated by existing simulation software. Fortunately, asymptotic methods such as those based on two-scale convergence are applicable to homogenization of thin or periodic (i.e. array) structures. They generate simpler models tractable to simulation, but their application is long and requires a mathematical expertise. Our goal is to provide engineers with an implementation of this mathematical tool inside a modeling software. We follow therefore a multidisciplinary approach which combines a generalization and formalization effort of mathematical asymptotic methods, together with rewriting-based formal transformation techniques from computer science. This paper describes this approach, illustrates it with an example and presents the architecture of the software under design.
{"title":"Rewriting Strategies for a Two-Scale Method: Application to Combined Thin and Periodic Structures","authors":"B. Yang, W. Belkhir, R. Dhara, A. Giorgetti, M. Lenczner","doi":"10.1109/DMEMS.2012.14","DOIUrl":"https://doi.org/10.1109/DMEMS.2012.14","url":null,"abstract":"Multiphysics models of large arrays of micro- and nanosystems are too complex to be efficiently simulated by existing simulation software. Fortunately, asymptotic methods such as those based on two-scale convergence are applicable to homogenization of thin or periodic (i.e. array) structures. They generate simpler models tractable to simulation, but their application is long and requires a mathematical expertise. Our goal is to provide engineers with an implementation of this mathematical tool inside a modeling software. We follow therefore a multidisciplinary approach which combines a generalization and formalization effort of mathematical asymptotic methods, together with rewriting-based formal transformation techniques from computer science. This paper describes this approach, illustrates it with an example and presents the architecture of the software under design.","PeriodicalId":348324,"journal":{"name":"2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117197995","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Sato, Runhe Huang, Eugen Dedu, Julien Bourgeois
This paper proposes the tree-structured knowledge approach for performing part recognition in controlling MEMS-arrayed manipulation surfaces. In this approach, a new data structure, a tree-structured array, is used to store knowledge about models of the objects at an offline stage and to accumulate and share knowledge among neighboring active cells about shapes of objects which must be reconstructed and differentiated on a MEMS-arrayed surface at the online stage. Comparing this approach with the previous matrix-based approach, which contained redundant information in each cell and communication, and demanded excessively frequent comparison in shape differentiation, the current tree-structured knowledge approach aims to use one model for a shape in database, reducing the memory footprint, and avoiding frequent comparison in the differentiation phase. In this paper, both approaches are analysed and compared. Though the current approach shows better performance in terms of a smaller memory footprint and lower communication cost, it trades off the reduction of memory footprint against the probability of the differentiating.
{"title":"Tree-Structured Knowledge in a Distributed Intelligent MEMS Application","authors":"A. Sato, Runhe Huang, Eugen Dedu, Julien Bourgeois","doi":"10.1109/DMEMS.2012.9","DOIUrl":"https://doi.org/10.1109/DMEMS.2012.9","url":null,"abstract":"This paper proposes the tree-structured knowledge approach for performing part recognition in controlling MEMS-arrayed manipulation surfaces. In this approach, a new data structure, a tree-structured array, is used to store knowledge about models of the objects at an offline stage and to accumulate and share knowledge among neighboring active cells about shapes of objects which must be reconstructed and differentiated on a MEMS-arrayed surface at the online stage. Comparing this approach with the previous matrix-based approach, which contained redundant information in each cell and communication, and demanded excessively frequent comparison in shape differentiation, the current tree-structured knowledge approach aims to use one model for a shape in database, reducing the memory footprint, and avoiding frequent comparison in the differentiation phase. In this paper, both approaches are analysed and compared. Though the current approach shows better performance in terms of a smaller memory footprint and lower communication cost, it trades off the reduction of memory footprint against the probability of the differentiating.","PeriodicalId":348324,"journal":{"name":"2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130002082","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In this paper, we propose an approach to translate the Sys ML language to VHDL-AMS code. This approach is the first step to the generation of the VHDL-AMS code from the structural diagrams Sys ML. In this step, we address the Block Definition Diagram and the Internal Block Diagram. The translation uses Model Driven Engineer (MDE) methods as the transformation of model to another model (M2M) with ATL Atlas Transformation Language and the code generation from models (M2T) using Xpand. We provide the translation rules between the two elements. Implementation and methodology are illustrated on a micro-system case study: the Smart surface system.
{"title":"Transformation of SysML Structure Diagrams to VHDL-AMS","authors":"F. Bouquet, J. Gauthier, A. Hammad, F. Peureux","doi":"10.1109/DMEMS.2012.12","DOIUrl":"https://doi.org/10.1109/DMEMS.2012.12","url":null,"abstract":"In this paper, we propose an approach to translate the Sys ML language to VHDL-AMS code. This approach is the first step to the generation of the VHDL-AMS code from the structural diagrams Sys ML. In this step, we address the Block Definition Diagram and the Internal Block Diagram. The translation uses Model Driven Engineer (MDE) methods as the transformation of model to another model (M2M) with ATL Atlas Transformation Language and the code generation from models (M2T) using Xpand. We provide the translation rules between the two elements. Implementation and methodology are illustrated on a micro-system case study: the Smart surface system.","PeriodicalId":348324,"journal":{"name":"2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133567189","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Industrial applications have specific needs which require dedicated solutions. On the one hand, MEMS can be used as affordable and tailored solution while on the other hand, wireless sensor networks (WSNs) enhance the mobility and give more freedom in the design of the overall architecture. Integrating these two technologies would allow more optimal solutions in terms of adaptability, ease of deployment and reconfigurability. The objective of this article is to define the new challenges that will have to be solved in the specific context of wireless MEMS networks applied to industrial applications. To illustrate the current state of development of this domain, two projects are presented: the Smart Blocks project and the OCARI project.
{"title":"Towards Usage of Wireless MEMS Networks in Industrial Context","authors":"P. Minet, J. Bourgeois","doi":"10.1109/DMEMS.2012.18","DOIUrl":"https://doi.org/10.1109/DMEMS.2012.18","url":null,"abstract":"Industrial applications have specific needs which require dedicated solutions. On the one hand, MEMS can be used as affordable and tailored solution while on the other hand, wireless sensor networks (WSNs) enhance the mobility and give more freedom in the design of the overall architecture. Integrating these two technologies would allow more optimal solutions in terms of adaptability, ease of deployment and reconfigurability. The objective of this article is to define the new challenges that will have to be solved in the specific context of wireless MEMS networks applied to industrial applications. To illustrate the current state of development of this domain, two projects are presented: the Smart Blocks project and the OCARI project.","PeriodicalId":348324,"journal":{"name":"2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS","volume":"556 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132557206","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
These last years several research works have studied the application of Micro-Electro-Mechanical Systems (MEMS) for aero dynamical active flow control. Controlling such MEMS-based systems remains a challenge. Among the several existing control approaches for time varying systems, many of them use a process model representing the dynamic behavior of the process to be controlled. The purpose of this paper is to study the suitability of an artificial neural network first to predict the flow evolution induced by MEMS, and next to optimize the flow w.r.t a numerical criterion.
{"title":"Suitability of Artificial Neural Network for MEMS-based Flow Control","authors":"Jean-François Couchot, K. Deschinkel, M. Salomon","doi":"10.1109/DMEMS.2012.17","DOIUrl":"https://doi.org/10.1109/DMEMS.2012.17","url":null,"abstract":"These last years several research works have studied the application of Micro-Electro-Mechanical Systems (MEMS) for aero dynamical active flow control. Controlling such MEMS-based systems remains a challenge. Among the several existing control approaches for time varying systems, many of them use a process model representing the dynamic behavior of the process to be controlled. The purpose of this paper is to study the suitability of an artificial neural network first to predict the flow evolution induced by MEMS, and next to optimize the flow w.r.t a numerical criterion.","PeriodicalId":348324,"journal":{"name":"2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122372463","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Y. Tomimatsu, K. Kuwana, T. Kobayashi, T. Itoh, R. Maeda
Power management technology is a fundamental issue in wireless sensor network. In this paper, we propose a concept of a piezoelectric flow sensor for a wake-up switch of a wireless sensor node to reduce the power consumption. The sensor detects air flow change surrounding the wireless sensor node by using a cantilever with Pb(Zr, Ti)O3 (PZT) thin film. We fabricated a prototype of the flow sensor and measured the relationship between the flow velocity change and the piezoelectric voltage of the cantilever. The sensor responded when the flow velocity changed. The output voltage increases with the increase of the flow velocity change.
{"title":"A Piezoelectric Flow Sensor for Wake-Up Switch of Wireless Sensor Network Node","authors":"Y. Tomimatsu, K. Kuwana, T. Kobayashi, T. Itoh, R. Maeda","doi":"10.1109/DMEMS.2012.10","DOIUrl":"https://doi.org/10.1109/DMEMS.2012.10","url":null,"abstract":"Power management technology is a fundamental issue in wireless sensor network. In this paper, we propose a concept of a piezoelectric flow sensor for a wake-up switch of a wireless sensor node to reduce the power consumption. The sensor detects air flow change surrounding the wireless sensor node by using a cantilever with Pb(Zr, Ti)O3 (PZT) thin film. We fabricated a prototype of the flow sensor and measured the relationship between the flow velocity change and the piezoelectric voltage of the cantilever. The sensor responded when the flow velocity changed. The output voltage increases with the increase of the flow velocity change.","PeriodicalId":348324,"journal":{"name":"2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS","volume":"73 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127238325","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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