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2017 IEEE 19th Electronics Packaging Technology Conference (EPTC)最新文献

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Analysis and design of low loss differential transmission line structures for high speed applications 高速应用低损耗差动传输线结构分析与设计
Pub Date : 2017-12-06 DOI: 10.1109/EPTC.2017.8277541
M. D. Rotaru, Mahmoud Wagih
Recent work by Intel [1,2] has shown that it is possible to reduce the loss of transmission lines through innovative routing. The “vertical trench” proposed in Intel's work [1,2] showed a 20% reduction in the differential insertion loss. In this work a detailed discussion on the reasons why this novel routing approach can reduce the loss of the differential lines as well as analysis on the design variables of and their effects on the performance of a differential transmission line employing the vertical trench is undertaken. It is also shown through simulation that similar improvements in the differential insertion loss can be obtained through simply increasing the thickness of the of metal for the differential pair.
英特尔公司最近的工作[1,2]表明,通过创新路由可以减少传输线的损耗。英特尔的研究[1,2]中提出的“垂直沟槽”显示,差分插入损耗降低了20%。在这项工作中,详细讨论了这种新颖的布线方法可以减少差分线路损耗的原因,并分析了采用垂直沟槽的差分传输线的设计变量及其对性能的影响。通过仿真还表明,通过简单地增加差动副的金属厚度,可以获得类似的差动插入损耗的改善。
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引用次数: 3
Development of next generation solder resist 新一代阻焊剂的开发
Pub Date : 2017-12-01 DOI: 10.1109/EPTC.2017.8277582
Nobuhito Komuro, Yuta Daijima, Shinya Imabayashi
The solder resist is an ink which covers the surface of the printed wiring board (PWB) and serves as an insulating film for protecting the circuit pattern. “Resist” has the role of preventing solder (= solder) from adhering to unnecessary parts in the mounting of parts, as it means “to resist” and “tolerate”. At the same time, it protects the circuit pattern from dust, heat and moisture as a permanent protective film to maintain insulation.
阻焊剂是一种覆盖在印刷线路板(PWB)表面的油墨,作为保护电路图案的绝缘膜。“抵抗”在零件安装中具有防止焊料(=焊料)粘附在不必要的零件上的作用,因为它的意思是“抵抗”和“容忍”。同时,它保护电路图案免受灰尘,热量和水分作为永久保护膜,以保持绝缘。
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引用次数: 1
Investigations of copper wire bonding capability on plasma based additive copper metallizations 等离子体基增铜金属化层中铜丝键合性能的研究
Pub Date : 2017-12-01 DOI: 10.1109/EPTC.2017.8277588
A. Hensel, Klaus Kohlmann von Platen, J. Franke
This paper describes and discusses a novel manufacturing process that enables an advanced top-level interconnection for power electronic applications. The commonly used aluminum bond wire process, where a friction welded connection is performed by the usage of ultrasonic on the substrate as well as on the semiconductor, is replaced by copper as a wire material. Thus, the overall performance of power electronic modules can be increased significantly because of the preeminent material characteristics of copper [1]. However, the higher hardness and lower ductility of copper in comparison to aluminum presuppose a functional coating on the silicon layers that absorbs the high bonding forces and protects the crystal structures from shattering. Different approaches for a selective copper metallization like galvanic metallization have been investigated and provide usable coating quality. Disadvantageously the processes are neither very flexible nor cost-effective and have also a bad environmental impact. The technology described in the following uses a current stabilized argon plasma to melt single copper particles which are then accelerated towards the substrate. Upon impact, the coating material solidifies and creates a diffusion-based adhesive layer on which the copper bonding process can be performed.
本文描述和讨论了一种新的制造工艺,使电力电子应用的先进顶层互连成为可能。常用的铝键合线工艺,在衬底和半导体上使用超声波进行摩擦焊接连接,被铜作为线材料取代。因此,由于铜优异的材料特性,电力电子模块的整体性能可以显著提高[1]。然而,与铝相比,铜具有较高的硬度和较低的延展性,这就要求在硅层上有一层功能涂层来吸收高结合力并保护晶体结构免受破碎。研究了不同的选择性铜金属化方法,如电镀锌,并提供了可用的涂层质量。不利的是,这些过程既不灵活,也不具有成本效益,而且对环境也有不良影响。下面描述的技术使用电流稳定的氩等离子体熔化单个铜颗粒,然后加速到衬底。撞击后,涂层材料固化并产生基于扩散的粘合剂层,在该粘合剂层上可以进行铜粘合过程。
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引用次数: 2
Bond pad effects on the shear strength of copper wire bonds 粘结垫对铜丝粘结强度的影响
Pub Date : 2017-12-01 DOI: 10.1109/EPTC.2017.8277533
S. Manoharan, Stevan Hunter, P. McCluskey
Wire bond evaluation is crucial in determining its quality. With the increase in use of copper wire bonds, this becomes even more important due to its nature to induce defects such as pad cracking. Bond shear testing is a widely used method to assess wire bond quality. Standards for evaluating wirebonds by shear test are in place (JEDEC, ASTM, IEC, etc.) however, they do not prescribe factors that affect results, making it difficult to compare the quality of bonds made in different conditions. Bond pad thickness is a major factor, studied in detail in this work. It is shown from a design of experiment and through finite element analysis, that bond pad thickness affects the bond shear strength value, while the IMC % coverage and shear mode are not dependent on pad thickness.
钢丝粘接评价是决定其质量的关键。随着铜线键的使用增加,这变得更加重要,因为它的性质会导致缺陷,如焊盘开裂。粘结剪切试验是一种广泛应用的钢丝粘结质量评价方法。通过剪切测试评估线键的标准已经存在(JEDEC, ASTM, IEC等),但是,它们没有规定影响结果的因素,因此很难比较在不同条件下制作的键的质量。粘结垫厚度是影响粘结效果的主要因素,本文对此进行了详细的研究。通过试验设计和有限元分析表明,粘结垫层厚度影响粘结体抗剪强度值,而IMC %覆盖率和剪切模式与粘结垫层厚度无关。
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引用次数: 7
The correlation between sintered silver joint reliability and pressure assisted sintering parameters 烧结银接头可靠性与压力辅助烧结参数的关系
Pub Date : 2017-12-01 DOI: 10.1109/EPTC.2017.8277441
Wayne Ng, K. Sweatman, Keisuke Kumagai, K. Takamura, T. Nishimura, S. Letz, A. Schletz
Nano-particle sintering silver (Ag) paste has recently become a topic of much discussion in commercial and academic circles and has been the subject of many papers at international technical conferences. Sintered Ag is one of the candidates for the replacement of high-lead (Pb) alloys such as Pb-5Sn and Pb-5Sn-2.5Ag in semiconductors, an application that is still exempt from the RoHS restrictions on Pb in electrical and electronic equipment. Although the EU Restriction on Hazardous Substances (RoHS) exemption has been extended to 2021 there is still a lot of interest in the use of sintered Ag in semiconductor die attach because it can survive the higher operating temperatures of more advanced SiC and GaAs power semiconductors. The demand for these advanced higher efficiency power semiconductors is expected to increase as electric and hybrid vehicles, renewable energy and smart electricity grids are more widely adopted and this provides further justification for the development of sintered Ag bonding technology. One of the advantages of sintered Ag is that it can form a joint at temperatures comparable with those used in die attach with high-Pb solder but once the process is completed will not melt until the temperature exceeds the 961°C melting point of Ag. In this paper, the authors report the results of power cycling of insulated-gate bipolar transistor (IGBT) semiconductors built using two variants of Ag sintering paste with a range of process parameters with the intention of determining the sensitivity of the bond life to such variations. Included in the experimental program as benchmarks are semiconductors built with conventional Pb-5Sn alloy and Pb-free alloy, SAC305. The semiconductor subjected to power cycling were subsequently subjected to examination by confocal scanning acoustic microscopy (CSAM) and cross-sectioning and scanning electron microscopy to determine the failure mechanisms. No fatigue cracks were observed in the sintered Ag joint regardless type of Ag sintering material used and the processing parameters. The dominant failure mechanism in the sintered Ag bonds was delamination. In the benchmark bonding materials, Pb5Sn and SAC305, classic solder fatigue failure appeared to be the dominant failure mechanism.
近年来,纳米颗粒烧结银(Ag)浆料已成为商业界和学术界讨论的热门话题,并在国际技术会议上发表了许多论文。烧结银是替代半导体中高铅(Pb)合金(如Pb- 5sn和Pb- 5sn -2.5Ag)的候选材料之一,这一应用仍然不受电气和电子设备中Pb的RoHS限制。尽管欧盟对有害物质(RoHS)的豁免限制已延长至2021年,但在半导体晶片中使用烧结银仍然很有兴趣,因为它可以承受更先进的SiC和GaAs功率半导体的更高工作温度。随着电动和混合动力汽车、可再生能源和智能电网的广泛采用,对这些先进的高效率功率半导体的需求预计将增加,这为烧结银键合技术的发展提供了进一步的理由。烧结银的优点之一是它可以在与高铅焊料相媲美的温度下形成连接,但是一旦该过程完成,直到温度超过961°C的银熔点才会熔化。在本文中,作者报告了绝缘栅双极晶体管(IGBT)半导体的功率循环结果,该结果使用了两种不同的银烧结浆料,具有一系列的工艺参数,目的是确定键寿命对这些变化的敏感性。作为基准的实验程序包括用传统的Pb-5Sn合金和无pb合金SAC305制成的半导体。随后,通过共聚焦扫描声学显微镜(CSAM)和横切和扫描电子显微镜对受功率循环影响的半导体进行检查,以确定失效机制。无论采用何种烧结材料和工艺参数,烧结后的Ag接头均未出现疲劳裂纹。烧结银键的主要破坏机制是脱层。在Pb5Sn和SAC305中,典型的焊料疲劳失效是主要的失效机制。
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引用次数: 2
Indexer PVD platform — The key enabler for high productivity and low contact resistance for next-generation WLP applications Indexer PVD平台-下一代WLP应用的高生产率和低接触电阻的关键推动者
Pub Date : 2017-12-01 DOI: 10.1109/EPTC.2017.8277518
Patrik Carazzetti, F. Balon, M. Hoffmann, J. Weichart, A. Erhart, Ewald Strolz
This work analyzes the key performance of two different multi-chamber PVD systems used in volume WLP manufacturing. These are the Cluster-type and the Indexer-type platforms, respectively. It is emphasized how the faster wafer handling, which is a unique characteristic of the Indexer concept, results in throughput of production flows exceeding 50 wafers/hour. Moreover, the strategies of degas, cooling and sputter-etch implemented in the process-of-records executed by Indexer allow for wafer processing at lower temperature regimes and result in 50% lower contact resistance baseline. This work reports Rc values well below 1.0 mOhm measured on single-contact Kelvin structures. The Indexer system presented promotes itself as the ideal high-productivity PVD platform capable to tackle the ever-increasing manufacturing challenges arising from the progressive shrinkage of the critical device dimensions of next-generation WLCSP and FOWLP.
本文分析了两种不同的多腔PVD系统在批量WLP制造中的关键性能。它们分别是Cluster-type和Indexer-type平台。它强调了如何更快的晶圆处理,这是Indexer概念的独特特征,导致生产流程的吞吐量超过50片/小时。此外,在Indexer执行的记录过程中实施的脱气、冷却和溅射蚀刻策略允许在较低温度下进行晶圆处理,并导致接触电阻基线降低50%。这项工作报告了在单接触开尔文结构上测量的Rc值远低于1.0 mOhm。Indexer系统标榜自己是理想的高生产率PVD平台,能够解决下一代WLCSP和FOWLP关键器件尺寸逐渐缩小所带来的日益增长的制造挑战。
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引用次数: 1
Leading edge die stacking and wire bonding technologies for advanced 3D memory packages 先进的3D存储器封装的领先的芯片堆叠和线键合技术
Pub Date : 2017-12-01 DOI: 10.1109/EPTC.2017.8277544
O. Yauw, Jie Wu, Andrew Tan, I. Qin, Aashish Shah, J. Yang, G. Schulze
Vertical stacking of thin die in memory packages as tall as 16 layers and 32 layers is common in high volume production. 3D NAND flash memory makers are also announcing and realizing their production ramps for 64 layers. 3D die stacking enables device integration flexibility and enhancements in electrical performance. Thinner package requirements drive die thicknesses to below 25um. Assembly equipment manufacturers utilize state of the art thin wafer technologies in areas of wafer backgrinding, dicing, wafer handling, thin die attach and stacking, wire bonding on thin overhang die, and wire looping motions for ultra low loops. Material suppliers are developing materials to accompany these latest equipment advancements. Low adhesion wafer tape to ease thin die picking, thin Die Attach Film (DAF) going below 10um thickness, and ultra fine bonding wire at 0.6mil and less, are some of the examples. In this paper, we will focus on two areas: 1) thin die attachment up to 16 layers with die thicknesses of 15um and 25um, and DAF thicknesses of 5um and 10um, and 2) wire bonding on thin and overhanging die stacks. Finite element modelling indicating stress distribution on the die during thin die picking in die attach and overhang wire bonding, will be discussed and used as the basis of developing solutions to overcome die cracks and inconsistent bond qualities. These solutions include thin die tooling designs, pick processes for die attach, wire bonding processes on thin die with long overhang distance, and ultra low loop processes involving long inboard wire length and high die stack height.
在高至16层和32层的内存封装中垂直堆叠薄晶片在大批量生产中很常见。3D NAND闪存制造商也宣布并实现了64层的生产坡道。3D芯片堆叠使器件集成灵活性和电气性能增强。更薄的封装要求驱动模具厚度低于25um。装配设备制造商利用最先进的薄晶圆技术,在晶圆背景研磨、切割、晶圆处理、薄晶片附加和堆叠、薄悬模上的金属键合以及超低环的金属环运动等领域。材料供应商正在开发与这些最新设备配套的材料。低附着力晶圆带,以减轻薄晶片拾取,薄晶片附着膜(DAF)厚度低于10um,超细键合线0.6mil或更少,是一些例子。在本文中,我们将重点关注两个方面:1)多达16层的薄模具连接,模具厚度为15um和25um, DAF厚度为5um和10um,以及2)薄和悬垂模具堆上的电线粘合。有限元模型表明应力分布在模具上的薄型模具拾取过程中,模具连接和悬丝键合,将讨论和使用作为开发解决方案的基础,以克服模具裂纹和不一致的键合质量。这些解决方案包括薄模具工具设计,模具连接的挑接工艺,长悬垂距离的薄模具上的线粘合工艺,以及涉及长内线长度和高模具堆叠高度的超低环工艺。
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引用次数: 1
Ag nanoparticles — Based hybrid Ink with low metallization temperature 低金属化温度银纳米颗粒基杂化油墨
Pub Date : 2017-12-01 DOI: 10.1109/EPTC.2017.8277580
Yongdian Han, Siming Zhang, H. Jing, Jun Wei, F. H. Bu, Lei Zhao, X. Lv, Lianyong Xu
With the aim of developing highly conductive ink for writing electronics on heat-sensitive substrates, Ag nanospheres and nanoplates were mixed to synthesize hybrid inks. Five kinds of hybrid ink and two types of pure ink were written to square shape on Epson photo paper using rollerball pens and sintered at a low temperature (100 V). The microstructure, electrical resistivity, surface porosity, hardness and flexibility of silver patterns were systematically investigated and compared. It was observed that the optimal mixing ratio of nanospheres and nanoplates was 1:1, which equipped the directly written pattern with excellent electrical and mechanical properties. The electrical resistivity was 0.103 μΩ·m, which was only 6.5 times of bulk silver. The enhancement compared to pure silver nanospheres or nanoplates based ink was owing to the combined action of nanospheres and nanoplates. It was a valued way to prepare Ag nanoink with good performance for printed/written electronics.
为了开发高导电性的电子器件热敏基板书写油墨,将银纳米球和纳米板混合制备了混合油墨。用滚球笔在爱普生相纸上书写5种混合墨水和2种纯墨水,并在低温(100 V)下烧结成方形,系统地研究和比较了银图案的微观结构、电阻率、表面孔隙率、硬度和柔韧性。结果表明,纳米球与纳米片的最佳混合比例为1:1,可使直接书写的图案具有优异的电学和力学性能。电阻率为0.103 μΩ·m,仅为体银的6.5倍。与纯银纳米球或纳米板基油墨相比,这种增强是由于纳米球和纳米板的共同作用。制备具有良好性能的银纳米油墨是一种有价值的方法。
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引用次数: 0
Moisture sensitivity level one (1) packaging solution for a nickel-palladium-gold (NiPdAu) Pre-Plated frames 湿气敏感级一(1)包装解决方案的镍钯金(NiPdAu)预镀框架
Pub Date : 2017-12-01 DOI: 10.1109/EPTC.2017.8277481
A. Denoyo, A. Tan, J. Berte, Robert Altar
A reliable green packaging solution that can withstand the Pb-free 260°C reflow requirement during actual board mount assembly while maintaining its existing moisture sensitivity level (MSL) classification, is now a must in the semiconductor industry. And given with the said requirement, various improvements were considered such as process and material changes just to ensure improved adhesion between different material interfaces. External lead finish options includes the use of pure tin or Pre-Plated Frames (PPF) — the nickel-palladium-gold/silver (NiPdAu/Ag), but the PPF option is preferred to prevent leadframe oxidation, support factory automation and cycle time reduction. Thus, the objective of the study is to investigate the effect and behavior of the pre-plated frames with different surface finish morphologies on how it affects and improves the adhesion between the mold-leadframe interfaces thereby reducing if not eliminating the delamination seen after moisture soak. Per investigation, results showed roughening indeed improves the adhesion achieving MSL 1 without any form of delamination seen in all interface. Furthermore, the occurrence of delamination on the molded unit is very much dependent on the type or level of roughness of the material used.
可靠的绿色封装解决方案,在实际电路板安装组装过程中可以承受无铅260°C回流要求,同时保持其现有的湿度敏感等级(MSL)分类,现在是半导体行业的必备条件。根据上述要求,考虑了各种改进,如工艺和材料的变化,以确保改善不同材料界面之间的附着力。外部引线处理选项包括使用纯锡或预镀框架(PPF) -镍钯金/银(NiPdAu/Ag),但PPF选项首选防止引线框架氧化,支持工厂自动化和缩短周期时间。因此,本研究的目的是研究具有不同表面处理形态的预镀框架的效果和行为,它如何影响和改善模具-引线-框架界面之间的附着力,从而减少(如果不能消除)湿浸后出现的分层。研究结果表明,粗化确实提高了附着力,达到了MSL 1,而在所有界面上都没有出现任何形式的分层。此外,在模制单元上分层的发生在很大程度上取决于所用材料的类型或粗糙度水平。
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引用次数: 0
Strip warpage assessment of dual side molding SiP module 双面成型SiP模组带材翘曲评估
Pub Date : 2017-12-01 DOI: 10.1109/EPTC.2017.8277508
Ming-Han Wang, Ian Hu, RichardYC Chen, Chang-Lin Yeh, M. Shih, D. Tarng
SiP modules, integrates multi-function components in a package, are widely applied in consumer electronics and IoT, such as Wifi module, GPS module and RF module, etc. Dual side molding module is a more advanced device type, who integrate all the components on the both surfaces of the substrate to effectively reduce the module area. By process strip warpage control is one of the crucial matters for assembly in order to have good yield and high automatic manufacture efficiency. Finite element method is a powerful tool for strip warpage evaluation; however, dual side SiP module strip requires enormous elements to describe its details. A useful model simplification method was proposed in this study. The several layers substrate was simplified as a homogeneous material by numerical tensile and thermal expansion tests to obtain the substrate bulk material properties of modulus and thermal expansion coefficient. The simplified substrate not only helps for efficiency computing, but also can be a transition zone for the different component layout of top and bottom substrate surfaces successfully mesh in the simulation model. Birth and death method was used to investigate by process strip warpage, the evaluation results help to reduce the risk comes from strip warpage. According to the well validated simulation model, for process improvement, firstly SMT and molding top side has better performance for strip warpage; for EMC improvement, bottom side choose high shrinkage EMC or top side select low shrinkage EMC can well control strip warpage.
SiP模块是将多种功能组件集成在一个封装中,广泛应用于消费电子和物联网领域,如Wifi模块、GPS模块、射频模块等。双面成型模块是一种更先进的器件类型,它将所有组件集成在基板的两个表面上,有效地减少了模块面积。为了获得良好的成品率和较高的自动化生产效率,带材翘曲控制是装配过程中的关键问题之一。有限元法是评估带材翘曲的有力工具;然而,双面SiP模块带需要大量的元素来描述其细节。本研究提出了一种实用的模型简化方法。通过数值拉伸和热膨胀试验,将多层基板简化为均匀材料,得到基板本体材料的模量和热膨胀系数。简化后的基板不仅有助于提高计算效率,而且还可以作为模拟模型中成功网格化的上下基板表面不同组件布局的过渡区。采用生死法对带钢翘曲进行了工艺分析,评价结果有助于降低带钢翘曲带来的风险。根据验证良好的仿真模型,针对工艺改进,首先SMT和成型顶侧具有较好的带材翘曲性能;为改善板条翘曲,下侧选择高收缩率的板条翘曲,或上侧选择低收缩率的板条翘曲,都能很好地控制板条翘曲。
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引用次数: 3
期刊
2017 IEEE 19th Electronics Packaging Technology Conference (EPTC)
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