Pub Date : 2020-01-01Epub Date: 2020-02-01DOI: 10.1007/s00542-020-04758-0
Robert M Taylor, Dilendra Maharjan, Fernando Moreu, Justin T Baca
The need for novel, minimally invasive diagnostic, prognostic, and therapeutic biomedical devices has garnered increased interest in recent years. Microneedle (MN) technology has stood out as a promising new method for drug delivery, as well as extraction of interstitial fluid (ISF). ISF comprises a large portion of the extracellular fluid in living organisms yet remains inadequately characterized for clinical applications. Current MN research has focused on the fabrication of needles with different materials like silicone, carbon, and metals. However, little effort has been put forth into improving MN holders and patches that can be used with low cost MNs, which could effectively change how MNs are attached to the human body. Here, we describe different 3D-printed MN holders, printed using an MJP Pro 2500 3D printer, and compare the ISF extraction efficiencies in CD Hairless rats. We varied design parameters that may affect the skin-holder interface, such as throat thickness, tip curvature, and throat diameter. MN arrays, with insertion depths of 1500 μm, had extraction efficiencies of 0.44 ± 0.35, 0.85 ± 0.64, 0.32 ± 0.21, or 0.44 ± 0.46 µl/min when designed with flat, concave, convex, or bevel profile geometries, respectively. Our results suggest ISF extraction is influenced by MN holder design parameters and that a concave tip design is optimal for extracting ISF from animals. The future direction of this research aims to enable a paradigm in MN design that maximizes its efficiency and engineering performance in terms of volume, pressure, and wearability, thereby automatizing usage and reducing patient intervention to ultimately benefit remote telemedicine.
近年来,对新型、微创诊断、预后和治疗生物医学设备的需求已引起越来越多的关注。微针(MN)技术作为一种很有前途的药物递送和提取间质液(ISF)的新方法而脱颖而出。ISF占活生物体细胞外液的很大一部分,但在临床应用方面仍未充分表征。目前MN的研究主要集中在用硅树脂、碳和金属等不同材料制造针。然而,对于可以与低成本MN一起使用的MN支架和贴片进行改进的努力很少,这可以有效地改变MN与人体的附着方式。在这里,我们描述了使用MJP Pro 2500 3D打印机打印的不同的3D打印MN支架,并比较了CD无毛大鼠的ISF提取效率。我们改变了可能影响蒙皮支架界面的设计参数,如喉道厚度、尖端曲率和喉道直径。当插入深度为1500 μm时,平面、凹形、凸形和斜面的提取效率分别为0.44±0.35、0.85±0.64、0.32±0.21和0.44±0.46µl/min。我们的研究结果表明,ISF提取受到MN支架设计参数的影响,凹尖端设计是提取动物ISF的最佳选择。本研究的未来方向旨在实现MN设计的范式,使其在体积、压力和可穿戴性方面的效率和工程性能最大化,从而使使用自动化并减少患者干预,最终使远程远程医疗受益。
{"title":"Parametric study of 3D printed microneedle (MN) holders for interstitial fluid (ISF) extraction.","authors":"Robert M Taylor, Dilendra Maharjan, Fernando Moreu, Justin T Baca","doi":"10.1007/s00542-020-04758-0","DOIUrl":"10.1007/s00542-020-04758-0","url":null,"abstract":"<p><p>The need for novel, minimally invasive diagnostic, prognostic, and therapeutic biomedical devices has garnered increased interest in recent years. Microneedle (MN) technology has stood out as a promising new method for drug delivery, as well as extraction of interstitial fluid (ISF). ISF comprises a large portion of the extracellular fluid in living organisms yet remains inadequately characterized for clinical applications. Current MN research has focused on the fabrication of needles with different materials like silicone, carbon, and metals. However, little effort has been put forth into improving MN holders and patches that can be used with low cost MNs, which could effectively change how MNs are attached to the human body. Here, we describe different 3D-printed MN holders, printed using an MJP Pro 2500 3D printer, and compare the ISF extraction efficiencies in CD Hairless rats. We varied design parameters that may affect the skin-holder interface, such as throat thickness, tip curvature, and throat diameter. MN arrays, with insertion depths of 1500 μm, had extraction efficiencies of 0.44 ± 0.35, 0.85 ± 0.64, 0.32 ± 0.21, or 0.44 ± 0.46 µl/min when designed with flat, concave, convex, or bevel profile geometries, respectively. Our results suggest ISF extraction is influenced by MN holder design parameters and that a concave tip design is optimal for extracting ISF from animals. The future direction of this research aims to enable a paradigm in MN design that maximizes its efficiency and engineering performance in terms of volume, pressure, and wearability, thereby automatizing usage and reducing patient intervention to ultimately benefit remote telemedicine.</p>","PeriodicalId":49813,"journal":{"name":"Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems","volume":"26 6","pages":"2067-2073"},"PeriodicalIF":1.6,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7238769/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"9091841","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-04-27DOI: 10.3390/TECHNOLOGIES6020045
M. Salucci, C. Castlunger, D. Marcantonio, G. Oliveri, F. Robol, P. Rosatti, L. Tosato, F. Zardi, A. Massa
The elementary radiator of a planar array for next generation millimeter-wave (mm-wave) 5G base stations is described. The antenna is designed for high density interconnect (HDI) manufacturing for yielding a compact, densely-interconnected, and highly-integrable stacked structure. The layout of the single element is determined by directly optimizing key radiation features of the whole planar arrangement according to specific application-driven requirements. In addition, thanks to the exploitation of a spline-shaped modelling of the radiator, suitable performance in terms of impedance matching, realized gain, half-power beamwidth (HPBW), polarization purity, and inter-element isolation are achieved within the 28-GHz pass-band. Moreover, integrated out-of-band filtering capabilities are obtained in selected and wide non-contiguous stop-bands without additional circuitry
{"title":"High Density Interconnect Microstrip Patch Antenna for 5G Base Stations with Integrated Filtering Performance","authors":"M. Salucci, C. Castlunger, D. Marcantonio, G. Oliveri, F. Robol, P. Rosatti, L. Tosato, F. Zardi, A. Massa","doi":"10.3390/TECHNOLOGIES6020045","DOIUrl":"https://doi.org/10.3390/TECHNOLOGIES6020045","url":null,"abstract":"The elementary radiator of a planar array for next generation millimeter-wave (mm-wave) 5G base stations is described. The antenna is designed for high density interconnect (HDI) manufacturing for yielding a compact, densely-interconnected, and highly-integrable stacked structure. The layout of the single element is determined by directly optimizing key radiation features of the whole planar arrangement according to specific application-driven requirements. In addition, thanks to the exploitation of a spline-shaped modelling of the radiator, suitable performance in terms of impedance matching, realized gain, half-power beamwidth (HPBW), polarization purity, and inter-element isolation are achieved within the 28-GHz pass-band. Moreover, integrated out-of-band filtering capabilities are obtained in selected and wide non-contiguous stop-bands without additional circuitry","PeriodicalId":49813,"journal":{"name":"Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems","volume":"14 1","pages":"45"},"PeriodicalIF":2.1,"publicationDate":"2018-04-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87848823","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Scale factor nonlinearity is one of the main errors of MEMS gyroscopes. The paper firstly analyzes the operating principle of MEMS gyroscopes, and presents the commonly used model in calibration pr...
{"title":"Scale factor model analysis of MEMS gyroscopes","authors":"TangQijian, WangXiangjun, YangQingping","doi":"10.5555/3086312.3086386","DOIUrl":"https://doi.org/10.5555/3086312.3086386","url":null,"abstract":"Scale factor nonlinearity is one of the main errors of MEMS gyroscopes. The paper firstly analyzes the operating principle of MEMS gyroscopes, and presents the commonly used model in calibration pr...","PeriodicalId":49813,"journal":{"name":"Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems","volume":"1 1","pages":""},"PeriodicalIF":2.1,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74249559","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-01-01Epub Date: 2015-07-11DOI: 10.1007/s00542-015-2615-3
Mohd Zahid Ansari, Chongdu Cho
Surface stress is a versatile and efficient means to study various physical, chemical, biochemical and biological processes. This work focuses on developing high sensitive piezoresistive microcantilever designs to study surface stress. The cantilevers are made of silicon with rectangular holes at their base that also circumscribe a piezoresistor sensing element. To find the optimum design, the effects of change in cantilever width, rectangular hole length and type of dopant on mechanical properties like deflection, frequency and maximum stress are characterised using finite element analysis software. The surface stress sensitivity characteristics of the different cantilever designs is ascertained by applying a surface stress on their top surfaces. Results show that the sensitivity is increased by increasing the cantilever width as well as the length of the hole and the sensitivity of p-type designs is more than two times the n-type.
{"title":"An optimised silicon piezoresistive microcantilever sensor for surface stress studies.","authors":"Mohd Zahid Ansari, Chongdu Cho","doi":"10.1007/s00542-015-2615-3","DOIUrl":"10.1007/s00542-015-2615-3","url":null,"abstract":"<p><p>Surface stress is a versatile and efficient means to study various physical, chemical, biochemical and biological processes. This work focuses on developing high sensitive piezoresistive microcantilever designs to study surface stress. The cantilevers are made of silicon with rectangular holes at their base that also circumscribe a piezoresistor sensing element. To find the optimum design, the effects of change in cantilever width, rectangular hole length and type of dopant on mechanical properties like deflection, frequency and maximum stress are characterised using finite element analysis software. The surface stress sensitivity characteristics of the different cantilever designs is ascertained by applying a surface stress on their top surfaces. Results show that the sensitivity is increased by increasing the cantilever width as well as the length of the hole and the sensitivity of p-type designs is more than two times the n-type.</p>","PeriodicalId":49813,"journal":{"name":"Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems","volume":"22 9","pages":"2279-2285"},"PeriodicalIF":2.1,"publicationDate":"2016-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1007/s00542-015-2615-3","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"37773095","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-10-01DOI: 10.1007/s00542-013-1941-6
Mateusz L Hupert, Joshua M Jackson, Hong Wang, Małgorzata A Witek, Joyce Kamande, Matthew I Milowsky, Young E Whang, Steven A Soper
Microsystem-based technologies are providing new opportunities in the area of in vitro diagnostics due to their ability to provide process automation enabling point-of-care operation. As an example, microsystems used for the isolation and analysis of circulating tumor cells (CTCs) from complex, heterogeneous samples in an automated fashion with improved recoveries and selectivity are providing new opportunities for this important biomarker. Unfortunately, many of the existing microfluidic systems lack the throughput capabilities and/or are too expensive to manufacture to warrant their widespread use in clinical testing scenarios. Here, we describe a disposable, all-polymer, microfluidic system for the high-throughput (HT) isolation of CTCs directly from whole blood inputs. The device employs an array of high aspect ratio (HAR), parallel, sinusoidal microchannels (25 µm × 150 µm; W × D; AR = 6.0) with walls covalently decorated with anti-EpCAM antibodies to provide affinity-based isolation of CTCs. Channel width, which is similar to an average CTC diameter (12-25 µm), plays a critical role in maximizing the probability of cell/wall interactions and allows for achieving high CTC recovery. The extended channel depth allows for increased throughput at the optimized flow velocity (2 mm/s in a microchannel); maximizes cell recovery, and prevents clogging of the microfluidic channels during blood processing. Fluidic addressing of the microchannel array with a minimal device footprint is provided by large cross-sectional area feed and exit channels poised orthogonal to the network of the sinusoidal capillary channels (so-called Z-geometry). Computational modeling was used to confirm uniform addressing of the channels in the isolation bed. Devices with various numbers of parallel microchannels ranging from 50 to 320 have been successfully constructed. Cyclic olefin copolymer (COC) was chosen as the substrate material due to its superior properties during UV-activation of the HAR microchannels surfaces prior to antibody attachment. Operation of the HT-CTC device has been validated by isolation of CTCs directly from blood secured from patients with metastatic prostate cancer. High CTC sample purities (low number of contaminating white blood cells, WBCs) allowed for direct lysis and molecular profiling of isolated CTCs.
{"title":"Arrays of High-Aspect Ratio Microchannels for High-Throughput Isolation of Circulating Tumor Cells (CTCs).","authors":"Mateusz L Hupert, Joshua M Jackson, Hong Wang, Małgorzata A Witek, Joyce Kamande, Matthew I Milowsky, Young E Whang, Steven A Soper","doi":"10.1007/s00542-013-1941-6","DOIUrl":"10.1007/s00542-013-1941-6","url":null,"abstract":"<p><p>Microsystem-based technologies are providing new opportunities in the area of in vitro diagnostics due to their ability to provide process automation enabling point-of-care operation. As an example, microsystems used for the isolation and analysis of circulating tumor cells (CTCs) from complex, heterogeneous samples in an automated fashion with improved recoveries and selectivity are providing new opportunities for this important biomarker. Unfortunately, many of the existing microfluidic systems lack the throughput capabilities and/or are too expensive to manufacture to warrant their widespread use in clinical testing scenarios. Here, we describe a disposable, all-polymer, microfluidic system for the high-throughput (HT) isolation of CTCs directly from whole blood inputs. The device employs an array of high aspect ratio (HAR), parallel, sinusoidal microchannels (25 µm × 150 µm; W × D; AR = 6.0) with walls covalently decorated with anti-EpCAM antibodies to provide affinity-based isolation of CTCs. Channel width, which is similar to an average CTC diameter (12-25 µm), plays a critical role in maximizing the probability of cell/wall interactions and allows for achieving high CTC recovery. The extended channel depth allows for increased throughput at the optimized flow velocity (2 mm/s in a microchannel); maximizes cell recovery, and prevents clogging of the microfluidic channels during blood processing. Fluidic addressing of the microchannel array with a minimal device footprint is provided by large cross-sectional area feed and exit channels poised orthogonal to the network of the sinusoidal capillary channels (so-called Z-geometry). Computational modeling was used to confirm uniform addressing of the channels in the isolation bed. Devices with various numbers of parallel microchannels ranging from 50 to 320 have been successfully constructed. Cyclic olefin copolymer (COC) was chosen as the substrate material due to its superior properties during UV-activation of the HAR microchannels surfaces prior to antibody attachment. Operation of the HT-CTC device has been validated by isolation of CTCs directly from blood secured from patients with metastatic prostate cancer. High CTC sample purities (low number of contaminating white blood cells, WBCs) allowed for direct lysis and molecular profiling of isolated CTCs.</p>","PeriodicalId":49813,"journal":{"name":"Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems","volume":"20 10-11","pages":"1815-1825"},"PeriodicalIF":2.1,"publicationDate":"2014-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4207852/pdf/nihms536593.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"32775682","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-06-01DOI: 10.1007/s00542-013-1988-4
Jonghyun Oh, Kewei Liu, Tim Medina, Francis Kralick, Hongseok Moses Noh
We present a microfabricated 10 by 10 array of microneedles for the treatment of a neurological disease called communicating hydrocephalus. Together with the previously reported microvalve array, the current implantable microneedle array completes the microfabricated arachnoid granulations (MAGs) that mimic the function of normal arachnoid granulations (AGs). The microneedle array was designed to enable the fixation of the MAGs through dura mater membrane in the brain and thus provide a conduit for the flow of cerebrospinal fluid (CSF). Cone-shaped microneedles with hollow channels were fabricated using a series of microfabrication techniques: SU-8 photolithography for tapered geometry, reactive ion etching for sharpening the microneedles, 248 nm deep UV excimer laser machining for creating through-hole inside the microneedles, and metal sputtering for improved rigidity. Puncture tests were conducted using porcine dura mater and the results showed that the fabricated microneedle array is strong enough to pierce the dura mater. The in-vitro biocompatibility test result showed that none of the 100 outlets of the microneedles exposed to the bloodstream were clogged significantly by blood cells. We believe that these test results demonstrate the potential use of the microneedle array as a new treatment of hydrocephalus.
{"title":"A novel microneedle array for the treatment of hydrocephalus.","authors":"Jonghyun Oh, Kewei Liu, Tim Medina, Francis Kralick, Hongseok Moses Noh","doi":"10.1007/s00542-013-1988-4","DOIUrl":"https://doi.org/10.1007/s00542-013-1988-4","url":null,"abstract":"<p><p>We present a microfabricated 10 by 10 array of microneedles for the treatment of a neurological disease called communicating hydrocephalus. Together with the previously reported microvalve array, the current implantable microneedle array completes the microfabricated arachnoid granulations (MAGs) that mimic the function of normal arachnoid granulations (AGs). The microneedle array was designed to enable the fixation of the MAGs through dura mater membrane in the brain and thus provide a conduit for the flow of cerebrospinal fluid (CSF). Cone-shaped microneedles with hollow channels were fabricated using a series of microfabrication techniques: SU-8 photolithography for tapered geometry, reactive ion etching for sharpening the microneedles, 248 nm deep UV excimer laser machining for creating through-hole inside the microneedles, and metal sputtering for improved rigidity. Puncture tests were conducted using porcine dura mater and the results showed that the fabricated microneedle array is strong enough to pierce the dura mater. The <i>in-vitro</i> biocompatibility test result showed that none of the 100 outlets of the microneedles exposed to the bloodstream were clogged significantly by blood cells. We believe that these test results demonstrate the potential use of the microneedle array as a new treatment of hydrocephalus.</p>","PeriodicalId":49813,"journal":{"name":"Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems","volume":"20 6","pages":"1169-1179"},"PeriodicalIF":2.1,"publicationDate":"2014-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1007/s00542-013-1988-4","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"32497553","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-02-01DOI: 10.1007/s00542-013-1800-5
D Homentcovschi, R N Miles, P V Loeppert, A J Zuckerwar
An analysis is presented of the effect of the protective cover on the acoustic response of a miniature silicon microphone. The microphone diaphragm is contained within a small rectangular enclosure and the sound enters through a small hole in the enclosure's top surface. A numerical model is presented to predict the variation in the sound field with position within the enclosure. An objective of this study is to determine up to which frequency the pressure distribution remains sufficiently uniform so that a pressure calibration can be made in free space. The secondary motivation for this effort is to facilitate microphone design by providing a means of predicting how the placement of the microphone diaphragm in the package affects the sensitivity and frequency response. While the size of the package is typically small relative to the wavelength of the sounds of interest, because the dimensions of the package are on the order of the thickness of the viscous boundary layer, viscosity can significantly affect the distribution of sound pressure around the diaphragm. In addition to the need to consider viscous effects, it is shown here that one must also carefully account for thermal conductivity to properly represent energy dissipation at the system's primary acoustic resonance frequency. The sound field is calculated using a solution of the linearized system consisting of continuity equation, Navier-Stokes equations, the state equation and the energy equation using a finite element approach. The predicted spatial variation of both the amplitude and phase of the sound pressure is shown over the range of audible frequencies. Excellent agreement is shown between the predicted and measured effects of the package on the microphone's sensitivity.
{"title":"A microacoustic analysis including viscosity and thermal conductivity to model the effect of the protective cap on the acoustic response of a MEMS microphone.","authors":"D Homentcovschi, R N Miles, P V Loeppert, A J Zuckerwar","doi":"10.1007/s00542-013-1800-5","DOIUrl":"https://doi.org/10.1007/s00542-013-1800-5","url":null,"abstract":"<p><p>An analysis is presented of the effect of the protective cover on the acoustic response of a miniature silicon microphone. The microphone diaphragm is contained within a small rectangular enclosure and the sound enters through a small hole in the enclosure's top surface. A numerical model is presented to predict the variation in the sound field with position within the enclosure. An objective of this study is to determine up to which frequency the pressure distribution remains sufficiently uniform so that a pressure calibration can be made in free space. The secondary motivation for this effort is to facilitate microphone design by providing a means of predicting how the placement of the microphone diaphragm in the package affects the sensitivity and frequency response. While the size of the package is typically small relative to the wavelength of the sounds of interest, because the dimensions of the package are on the order of the thickness of the viscous boundary layer, viscosity can significantly affect the distribution of sound pressure around the diaphragm. In addition to the need to consider viscous effects, it is shown here that one must also carefully account for thermal conductivity to properly represent energy dissipation at the system's primary acoustic resonance frequency. The sound field is calculated using a solution of the linearized system consisting of continuity equation, Navier-Stokes equations, the state equation and the energy equation using a finite element approach. The predicted spatial variation of both the amplitude and phase of the sound pressure is shown over the range of audible frequencies. Excellent agreement is shown between the predicted and measured effects of the package on the microphone's sensitivity.</p>","PeriodicalId":49813,"journal":{"name":"Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems","volume":"20 2","pages":"265-272"},"PeriodicalIF":2.1,"publicationDate":"2014-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1007/s00542-013-1800-5","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"32236463","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-01-01Epub Date: 2012-09-13DOI: 10.1007/s00542-012-1660-4
Chih-Hsien Huang, Junjie Yao, Lihong V Wang, Jun Zou
Fast scanning is highly desired for both ultrasound and photoacoustic microscopic imaging, whereas the liquid environment required for acoustic propagation limits the usage of traditional microelectromechanical systems (MEMS) scanning mirrors. Here, a new water-immersible scanning mirror microsystem has been designed, fabricated and tested. To achieve reliable underwater scanning, flexible polymer torsion hinges fabricated by laser micromachining were used to support the reflective silicon mirror plate. Two efficient electromagnetic microactuators consisting of compact RF choke inductors and high-strength neodymium magnet disc were constructed to drive the silicon mirror plate around a fast axis and a slow axis. The performance of this water-immersible scanning mirror microsystem in both air and water were tested using the laser tracing method. For the fast axis, the resonance frequency reached 224 Hz in air and 164 Hz in water, respectively. The scanning angles in both air and water under ±16 V DC driving were ±12°. The scanning angles in air and water under ±10 V AC driving (at the resonance frequencies) were ±13.6° and ±10°. For the slow axis, the resonance frequency reached 55 Hz in air and 38 Hz in water, respectively. The scanning angles in both air and water under ±10 V DC driving were ±6.5°. The scanning angles in air and water under ±10 V AC driving (at the resonance frequencies) were ±8.5° and ±6°. The feasibility of using such a water-immersible scanning mirror microsystem for scanning ultrasound microscopic imaging has been demonstrated with a 25-MHz ultrasound pulse/echo system and a target consisting of three optical fibers.
{"title":"A water-immersible 2-axis scanning mirror microsystem for ultrasound andha photoacoustic microscopic imaging applications.","authors":"Chih-Hsien Huang, Junjie Yao, Lihong V Wang, Jun Zou","doi":"10.1007/s00542-012-1660-4","DOIUrl":"https://doi.org/10.1007/s00542-012-1660-4","url":null,"abstract":"<p><p>Fast scanning is highly desired for both ultrasound and photoacoustic microscopic imaging, whereas the liquid environment required for acoustic propagation limits the usage of traditional microelectromechanical systems (MEMS) scanning mirrors. Here, a new water-immersible scanning mirror microsystem has been designed, fabricated and tested. To achieve reliable underwater scanning, flexible polymer torsion hinges fabricated by laser micromachining were used to support the reflective silicon mirror plate. Two efficient electromagnetic microactuators consisting of compact RF choke inductors and high-strength neodymium magnet disc were constructed to drive the silicon mirror plate around a fast axis and a slow axis. The performance of this water-immersible scanning mirror microsystem in both air and water were tested using the laser tracing method. For the fast axis, the resonance frequency reached 224 Hz in air and 164 Hz in water, respectively. The scanning angles in both air and water under ±16 V DC driving were ±12°. The scanning angles in air and water under ±10 V AC driving (at the resonance frequencies) were ±13.6° and ±10°. For the slow axis, the resonance frequency reached 55 Hz in air and 38 Hz in water, respectively. The scanning angles in both air and water under ±10 V DC driving were ±6.5°. The scanning angles in air and water under ±10 V AC driving (at the resonance frequencies) were ±8.5° and ±6°. The feasibility of using such a water-immersible scanning mirror microsystem for scanning ultrasound microscopic imaging has been demonstrated with a 25-MHz ultrasound pulse/echo system and a target consisting of three optical fibers.</p>","PeriodicalId":49813,"journal":{"name":"Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems","volume":"19 4","pages":"577-582"},"PeriodicalIF":2.1,"publicationDate":"2013-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1007/s00542-012-1660-4","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"38883993","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In this paper, we introduce a novel design for high performance silicon-based Fabry---Perot cavities and their corresponding design model. According to the design model, the new design shows higher...
{"title":"Design, modeling and characterization of stable, high Q-factor curved Fabry---Pérot cavities","authors":"MalakMaurine, PavyNicolas, MartyFrédéric, RichalotElodie, LiuAi-Qun, BourouinaTarik","doi":"10.5555/3112039.3112372","DOIUrl":"https://doi.org/10.5555/3112039.3112372","url":null,"abstract":"In this paper, we introduce a novel design for high performance silicon-based Fabry---Perot cavities and their corresponding design model. According to the design model, the new design shows higher...","PeriodicalId":49813,"journal":{"name":"Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems","volume":"24 1","pages":""},"PeriodicalIF":2.1,"publicationDate":"2011-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83237124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
We developed novel interconnection technology for heterogeneous integration of MEMS and LSI multi-chip module, in which MEMS and LSI chips would be horizontally integrated on substrate and vertical...
{"title":"Novel interconnection technology for heterogeneous integration of MEMS–LSI multi-chip module","authors":"LeeKang-Wook, KoyanagiMitsumasa","doi":"10.5555/1712972.1712984","DOIUrl":"https://doi.org/10.5555/1712972.1712984","url":null,"abstract":"We developed novel interconnection technology for heterogeneous integration of MEMS and LSI multi-chip module, in which MEMS and LSI chips would be horizontally integrated on substrate and vertical...","PeriodicalId":49813,"journal":{"name":"Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems","volume":"7 1","pages":""},"PeriodicalIF":2.1,"publicationDate":"2009-12-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78989395","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}