{"title":"High-precision femtosecond laser processing with aberration compensation based on machine learning","authors":"Satoshi Hasegawa","doi":"10.1117/12.3005065","DOIUrl":"https://doi.org/10.1117/12.3005065","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"99 3","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140394800","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Microfabrication of thermoset polymer PDMS using laser-induced bubble (microFLIB) and its mechanism study","authors":"Yoichi Toba, Yasutaka Hanada","doi":"10.1117/12.3001300","DOIUrl":"https://doi.org/10.1117/12.3001300","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"63 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140394822","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Ali Gökhan Demir, Dario Crimella, Christian Piovera
{"title":"Laser induced forward transfer with high resolution for microelectronics applications","authors":"Ali Gökhan Demir, Dario Crimella, Christian Piovera","doi":"10.1117/12.3001784","DOIUrl":"https://doi.org/10.1117/12.3001784","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"41 S191","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140395052","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Multilevel diffraction gratings inside silicon towards spectral filtering","authors":"Mehmet Bütün, S. Saylan, R. Sabet, O. Tokel","doi":"10.1117/12.2692796","DOIUrl":"https://doi.org/10.1117/12.2692796","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"18 5","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140395235","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Joel N. Schrauben, Hisashi Matsumoto, Zhibin Lin, Jan Kleinert
{"title":"Rapid and high throughput formation of through glass vias","authors":"Joel N. Schrauben, Hisashi Matsumoto, Zhibin Lin, Jan Kleinert","doi":"10.1117/12.2685276","DOIUrl":"https://doi.org/10.1117/12.2685276","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"72 2","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140284760","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Lutz Deriks, E. Bahat Treidel, Elisabeth Brandl, Julian Bravin, E. Brusaterra, Serhiy Danylyuk
{"title":"Laser-lift-off of GaN-based transistors with an ultra-short-pulsed deep UV laser","authors":"Lutz Deriks, E. Bahat Treidel, Elisabeth Brandl, Julian Bravin, E. Brusaterra, Serhiy Danylyuk","doi":"10.1117/12.3001106","DOIUrl":"https://doi.org/10.1117/12.3001106","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"115 11","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140394922","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Sung-Yeob Jeong, Yusuke Ito, Jae‐Yeop Chung, Yong‐Wan Kwon, N. Sugita
{"title":"Developing laser-induced graphene from colorless polyimide for enhanced performance in pressure sensors and triboelectric nanogenerators","authors":"Sung-Yeob Jeong, Yusuke Ito, Jae‐Yeop Chung, Yong‐Wan Kwon, N. Sugita","doi":"10.1117/12.2691860","DOIUrl":"https://doi.org/10.1117/12.2691860","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"113 8","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140285105","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Laser singulation of high refractive index glasses for augmented reality waveguides","authors":"Jason R. Grenier, Erin K. Hosmer","doi":"10.1117/12.3007998","DOIUrl":"https://doi.org/10.1117/12.3007998","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"91 8","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140395372","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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