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Economic and sustainability evaluation of green CO2-assisted propane dehydrogenation design 绿色co2辅助丙烷脱氢设计的经济性和可持续性评价
IF 3 Q2 ENGINEERING, CHEMICAL Pub Date : 2025-03-01 Epub Date: 2024-12-13 DOI: 10.1016/j.dche.2024.100203
Guilherme V. Espinosa, Amanda L.T. Brandão
Oxidative dehydrogenation of propane using CO2 (ODPC) is among the most investigated on-purpose processes to meet the increased propylene demand, due to the necessity to reduce CO2 emissions. In this context, the present work simulated an ODPC reactor integrated with chemical looping combustion (CLC) of biogas, which provides the necessary heat, and CO2 capture technology in Aspen Plus. The simulation was evaluated based on economic and sustainability criteria. In addition, a kinetic model was proposed and validated for a sufficient range of operation. It was possible to achieve net present value (NPV) of -14.86 106 US$, over a 15-year operational period, based on current carbon pricing policies. However, the potential profitability of the process was demonstrated by investigating the effects of more favorable carbon credit policies, with an increase from 50 to 120 US$ tCO2eq-1 resulting in a NPV of 164.15 106 US$ and 4 years payback period.
由于减少二氧化碳排放的必要性,使用二氧化碳进行丙烷氧化脱氢(ODPC)是满足丙烯需求增加的最常用工艺之一。在此背景下,本研究模拟了一个集成了沼气化学循环燃烧(CLC)的ODPC反应器,该反应器提供了必要的热量,并在Aspen Plus中模拟了二氧化碳捕获技术。根据经济和可持续性标准对模拟进行了评估。此外,提出了一个动力学模型,并验证了足够的操作范围。根据目前的碳定价政策,在15年的业务期内,有可能实现净现值(NPV)为-14.86 106美元。然而,通过调查更有利的碳信用政策的影响,该过程的潜在盈利能力得到了证明,从50美元增加到120美元,导致净现值为164.15 106美元,投资回收期为4年。
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引用次数: 0
First-principle modeling of parallel-flow regenerative kilns and their optimization with genetic algorithm and gradient-based method 平行流蓄热式窑炉的第一原理建模以及利用遗传算法和梯度法对其进行优化
IF 3 Q2 ENGINEERING, CHEMICAL Pub Date : 2024-12-01 Epub Date: 2024-10-09 DOI: 10.1016/j.dche.2024.100190
Michael Kreitmeir, Bruno Villela Pedras Lago, Ladislaus Schoenfeld, Sebastian Rehfeldt, Harald Klein
We present a one-dimensional first-principle model for parallel-flow regenerative kilns that accounts for the most important effects. These include the kinetics and thermal effects of the limestone decomposition as well as the heat transfer between the gaseous and solid phases. The model consists of two coupled equation systems for the upper and lower part of the kiln. The results of the model are validated qualitatively and are used to train an artificial neural network that predicts the conversion and the temperature in the crossover channel. The artificial neural network performs very well with values of the root mean squared error that are two to three orders of magnitudes lower than the range covered within the data. Finally, we use a genetic algorithm to optimize the feed mass flows such that the conversion and the fuel efficiency are improved in a Pareto-optimal manner. The results are compared to those of a gradient-based optimization method, which shows the usefulness and validity of the approach with the genetic algorithm.
我们提出了平行流蓄热式窑炉的一维第一原理模型,该模型考虑了最重要的影响。其中包括石灰石分解的动力学和热效应,以及气相和固相之间的热传递。该模型由窑炉上部和下部的两个耦合方程系统组成。模型的结果得到了定性验证,并被用于训练一个人工神经网络,以预测转化率和交叉通道的温度。人工神经网络的表现非常出色,其均方根误差值比数据范围内的误差值低两到三个数量级。最后,我们使用遗传算法来优化进料质量流量,从而以帕累托最优方式提高转化率和燃料效率。我们将结果与基于梯度的优化方法进行了比较,结果表明使用遗传算法的方法是有用和有效的。
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引用次数: 0
The trust region filter strategy: Survey of a rigorous approach for optimization with surrogate models 信任区域过滤策略:使用代用模型进行优化的严格方法概览
IF 3 Q2 ENGINEERING, CHEMICAL Pub Date : 2024-12-01 Epub Date: 2024-11-14 DOI: 10.1016/j.dche.2024.100197
Lorenz T. Biegler
Recent developments in efficient, large-scale nonlinear optimization strategies have had significants impact on the design and operation of engineering systems with equation-oriented (EO) models. On the other hand, rigorous first-principle procedural (i.e., black-box ’truth’) models may be difficult to incorporate directly within this optimization framework. Instead, black-box models are often substituted by lower fidelity surrogate models that may compromise the optimal solution. To overcome these challenges, Trust Region Filter (TRF) methods have been developed, which combine surrogate models optimization with intermittent sampling of truth models. The TRF approach combines efficient solution strategies with minimal recourse to truth models, and leads to guaranteed convergence to the truth model optimum. This survey paper provides a perspective on the conceptual development and evolution of the TRF method along with a review of applications that demonstrate the effectiveness of the TRF approach. In particular, three cases studies are presented on flowsheet optimization with embedded CFD models for advanced power plants and CO2 capture processes, as well as synthesis of heat exchanger networks with detailed finite-element equipment models.
高效、大规模非线性优化策略的最新发展,对采用方程导向(EO)模型的工程系统的设计和运行产生了重大影响。另一方面,严格的第一原理程序(即黑盒 "真理")模型可能难以直接纳入这种优化框架。相反,黑盒模型通常会被保真度较低的代用模型所替代,而代用模型可能会影响最优解。为了克服这些挑战,人们开发了信任区域滤波器(TRF)方法,该方法将代理模型优化与真实模型间歇采样相结合。TRF 方法结合了高效的求解策略和对真实模型的最小求助,并能保证收敛到真实模型的最优值。本调查报告从概念发展和 TRF 方法演变的角度,对证明 TRF 方法有效性的应用进行了综述。本文特别介绍了三个案例研究,分别涉及先进发电厂和二氧化碳捕集过程的嵌入式 CFD 模型流场优化,以及使用详细的有限元设备模型合成热交换器网络。
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引用次数: 0
Techno-economic analysis and process simulation of alkoxylated surfactant production in a circular carbon economy framework 循环碳经济框架下烷氧基表面活性剂生产的技术经济分析与工艺模拟
IF 3 Q2 ENGINEERING, CHEMICAL Pub Date : 2024-12-01 Epub Date: 2024-11-27 DOI: 10.1016/j.dche.2024.100199
Oliver J. Fisher , Jhuma Sadhukhan , Thorin Daniel , Jin Xuan
Successfully transitioning to a net-zero and circular carbon economy requires adopting innovative technologies and business models to capture CO2 and convert it into valuable chemicals and materials. Given the high economic costs and limited funding available for this transition, robust economic modelling of potential circular carbon pathways is essential to identify economically viable routes. This study introduces a novel techno-economic analysis (TEA) of producing alcohol ethoxylate (AE7), a valuable surfactant, from industrial flue gas. Traditionally, AE7 is produced by reacting fatty alcohols with ethylene oxide derived from fossil or bio-based sources. This research explores a method using CO2 captured from steel industry flue gas to produce AE7, addressing a notable gap in the literature. It evaluates a thermo-catalytic pathway involving Fischer-Tropsch (FT) synthesis with syngas generated by the reverse-water gas-shift reaction, where CO2 reacts with H2. CO2 conversion rates range around 3% across processing capacities of 25 kt/a, 100 kt/a, and 1000 kt/a. The study finds that the CO2 mass fraction concentration in the process emission is 2.47 × 10–5, compared to 0.13 in the incoming flue gas, highlighting the system's positive environmental impact. A radial basis function neural network was built to forecast the long-term average price of fossil-based and bio-based surfactants to benchmark the results against. Economic analysis reveals that the cost of green hydrogen significantly impacts the minimum selling price (MSP), making cost parity with existing fossil-based surfactants challenging. The lowest MSP of $8.77/kg remains above the long-term forecasted price of $3.75/kg for fossil-based C12–14 AE7. However, Monte Carlo simulations show a 21% probability of achieving a positive net present value (NPV) compared to leading bio-based surfactant alternatives. Sensitivity analyses identify capital costs, the price of low-carbon hydrogen (LCOH), and diesel prices as the most influential factors affecting the MSP. Continued advancements in Fischer-Tropsch catalyst technologies, reductions in green hydrogen costs and growing consumer demand for environmentally friendly products could significantly enhance the economic feasibility of this sustainable approach, paving the way for broader adoption and contributing to a circular carbon economy.
成功过渡到净零碳和循环碳经济需要采用创新的技术和商业模式来捕获二氧化碳并将其转化为有价值的化学品和材料。鉴于这种转变的经济成本高,可用资金有限,对潜在的循环碳途径进行强有力的经济建模对于确定经济上可行的路线至关重要。介绍了一种新的技术经济分析方法,即从工业烟气中提取有价值的表面活性剂乙醇乙氧基酸酯(AE7)。传统上,AE7是由脂肪醇与来自化石或生物基来源的环氧乙烷反应产生的。本研究探索了一种利用从钢铁工业烟气中捕获的二氧化碳生产AE7的方法,解决了文献中一个显着的空白。它评估了一种热催化途径,包括用逆水气移反应产生的合成气进行费托合成(FT),其中CO2与H2反应。在25 kt/a、100 kt/a和1000 kt/a的处理能力中,二氧化碳转化率约为3%。研究发现,过程排放中的CO2质量分数浓度为2.47 × 10-5,而进入烟气中的CO2质量分数浓度为0.13,突出了系统对环境的积极影响。建立了径向基函数神经网络来预测化石基和生物基表面活性剂的长期平均价格,并以此作为基准。经济分析表明,绿色氢的成本对最低销售价格(MSP)有很大影响,这使得与现有化石基表面活性剂的成本相当具有挑战性。最低MSP为8.77美元/公斤,仍高于化石燃料C12-14 AE7的长期预测价格3.75美元/公斤。然而,蒙特卡罗模拟显示,与领先的生物基表面活性剂替代品相比,实现正净现值(NPV)的可能性为21%。敏感性分析发现,资本成本、低碳氢(LCOH)价格和柴油价格是影响MSP的最重要因素。费托催化剂技术的持续进步、绿色氢成本的降低以及消费者对环保产品需求的不断增长,可以显著提高这种可持续方法的经济可行性,为更广泛的采用铺平道路,并为循环碳经济做出贡献。
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引用次数: 0
Towards a benchmark dataset for large language models in the context of process automation 为流程自动化背景下的大型语言模型建立基准数据集
IF 3 Q2 ENGINEERING, CHEMICAL Pub Date : 2024-12-01 Epub Date: 2024-09-16 DOI: 10.1016/j.dche.2024.100186
Tejennour Tizaoui , Ruomu Tan
The field of process automation possesses a substantial corpus of textual documentation that can be leveraged with Large Language Models (LLMs) and Natural Language Understanding (NLU) systems. Recent advancements in diverse LLMs, available in open source, present an opportunity to utilize them effectively in this area. However, LLMs are pre-trained on general textual data and lack knowledge in more specialized and niche areas such as process automation. Furthermore, the lack of datasets specifically tailored to process automation makes it difficult to assess the effectiveness of LLMs in this domain accurately. This paper aims to lay the foundation for creating a multitask benchmark for evaluating and adapting LLMs in process automation. In the paper, we introduce a novel workflow for semi-automated data generation, specifically tailored to creating extractive Question Answering (QA) datasets. The proposed methodology in this paper involves extracting passages from academic papers focusing on process automation, generating corresponding questions, and subsequently annotating and evaluating the dataset. The dataset initially created also undergoes data augmentation and is evaluated using metrics for semantic similarity. This study then benchmarked six LLMs on the newly created extractive QA dataset for process automation.
流程自动化领域拥有大量的文本文档语料库,可以通过大型语言模型(LLM)和自然语言理解(NLU)系统加以利用。最近,开源的各种 LLM 取得了进步,为在这一领域有效利用 LLM 提供了机会。然而,LLMs 是在一般文本数据上预先训练的,缺乏流程自动化等更专业、更细分领域的知识。此外,由于缺乏专门针对流程自动化的数据集,因此很难准确评估 LLM 在该领域的有效性。本文旨在为创建多任务基准奠定基础,以评估和调整流程自动化中的 LLM。在本文中,我们介绍了一种新颖的半自动数据生成工作流程,专门用于创建提取式问题解答(QA)数据集。本文提出的方法包括从关注流程自动化的学术论文中提取段落,生成相应的问题,然后对数据集进行注释和评估。最初创建的数据集还要进行数据扩充,并使用语义相似度指标进行评估。然后,本研究在新创建的流程自动化提取性质量保证数据集上对六种 LLM 进行了基准测试。
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引用次数: 0
A risk-based model for human-artificial intelligence conflict resolution in process systems 基于风险的流程系统中人工智能冲突解决模型
IF 3 Q2 ENGINEERING, CHEMICAL Pub Date : 2024-12-01 Epub Date: 2024-10-12 DOI: 10.1016/j.dche.2024.100194
He Wen , Faisal Khan
The conflicts stemming from discrepancies between human and artificial intelligence (AI) in observation, interpretation, and action have gained attention. Recent publications highlight the seriousness of the concern stemming from conflict and models to identify and assess the conflict risk. No work has been reported on systematically studying how to resolve human and artificial intelligence conflicts. This paper presents a novel approach to model the resolution strategies of human-AI conflicts. This approach reinterprets the conventional human conflict resolution mechanisms within AI. The study proposes a unique mathematical model to quantify conflict risks and delineate effective resolution strategies to minimize conflict risk. The proposed approach and mode are applied to control a two-phase separator system, a major component of a processing facility. The proposed approach promotes the development of robust AI systems with enhanced real-time responses to human inputs. It provides a platform to foster human-AI collaborative engagement and a mechanism of intelligence augmentation.
人类与人工智能(AI)在观察、解释和行动方面的差异所产生的冲突已引起人们的关注。最近的出版物强调了冲突所引发的严重问题,以及识别和评估冲突风险的模型。目前还没有关于系统研究如何解决人类与人工智能冲突的报道。本文提出了一种新颖的方法来模拟人类与人工智能冲突的解决策略。这种方法重新诠释了人工智能中传统的人类冲突解决机制。研究提出了一种独特的数学模型,用于量化冲突风险,并划定有效的解决策略,以最大限度地降低冲突风险。所提出的方法和模式被应用于控制一个两相分离器系统,该系统是加工设施的主要组成部分。所提出的方法促进了稳健的人工智能系统的发展,增强了对人类输入的实时响应。它提供了一个促进人类与人工智能协作参与的平台和一种智能增强机制。
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引用次数: 0
Multi-agent distributed control of integrated process networks using an adaptive community detection approach 使用自适应群落检测方法对集成流程网络进行多代理分布式控制
IF 3 Q2 ENGINEERING, CHEMICAL Pub Date : 2024-12-01 Epub Date: 2024-10-24 DOI: 10.1016/j.dche.2024.100196
AmirMohammad Ebrahimi, Davood B. Pourkargar
This paper focuses on developing an adaptive system decomposition approach for multi-agent distributed model predictive control (DMPC) of integrated process networks. The proposed system decomposition employs a refined spectral community detection method to construct an optimal distributed control framework based on the weighted graph representation of the state space process model. The resulting distributed architecture assigns controlled outputs and manipulated inputs to controller agents and delineates their interactions. The decomposition evolves as the process network undergoes various operating conditions, enabling adjustments in the distributed architecture and DMPC design. This adaptive architecture enhances the closed-loop performance and robustness of DMPC systems. The effectiveness of the multi-agent distributed control approach is investigated for a benchmark benzene alkylation process under two distinct operating conditions characterized by medium and low recycle ratios. Simulation results demonstrate that adaptive decompositions derived through spectral community detection, utilizing weighted graph representations, outperform the commonly employed unweighted hierarchical community detection-based system decompositions in terms of closed-loop performance and computational efficiency.
本文主要针对集成过程网络的多代理分布式模型预测控制(DMPC)开发一种自适应系统分解方法。所提出的系统分解方法采用了一种精炼的谱群检测方法,以状态空间过程模型的加权图表示为基础,构建了一个最优分布式控制框架。由此产生的分布式架构将受控输出和操纵输入分配给控制器代理,并划定它们之间的交互关系。随着过程网络经历不同的运行条件,分解也会发生变化,从而对分布式架构和 DMPC 设计进行调整。这种自适应架构提高了 DMPC 系统的闭环性能和鲁棒性。在以中循环比和低循环比为特征的两种不同运行条件下,对基准苯烷基化工艺的多代理分布式控制方法的有效性进行了研究。仿真结果表明,通过光谱群落检测得出的自适应分解利用加权图表示法,在闭环性能和计算效率方面优于常用的基于群落检测的非加权分层系统分解。
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引用次数: 0
Application of multi-objective neural network algorithm in industrial polymerization reactors for reducing energy cost and maximising productivity 在工业聚合反应器中应用多目标神经网络算法,降低能源成本,最大限度提高生产率
IF 3 Q2 ENGINEERING, CHEMICAL Pub Date : 2024-12-01 Epub Date: 2024-09-07 DOI: 10.1016/j.dche.2024.100181
Fakhrony Sholahudin Rohman , Sharifah Rafidah Wan Alwi , Dinie Muhammad , Ashraf Azmi , Zainuddin Abd Manan , Jeng Shiun Lim , Hong An Er , Siti Nor Azreen Ahmad Termizi

Optimization on an industrial scale is a complex task that involves fine-tuning the performance of large-scale systems and applications to make them more efficient and effective. This process can be challenging due to the increasing volume of work, growing system complexity, and the need to maintain optimal performance. Due to the significant power required for compression and the high costs of reactant materials, optimizing low-density polyethylene (LDPE) production to provide maximum productivity with a reduction of energy cost is required. However, it is not a simple process because the optimization problem of the LDPE tubular reactor consists of conflicting objective functions. Multi-objective neural network algorithm (MONNA) is a metaheuristic optimization method that provides a versatile and robust approach for solving complex, contradictory targets and diverse optimization problems that do not rely on specific mathematical properties of the problem. It is inspired by the structure and information-processing capabilities of biological neural networks. MONNA iteratively proposes solutions, evaluates its performance, and adjusts its approach based on feedback, which avoids complex mathematical formulations. In this work, we implement Multi-objective optimization neural network algorithm (MONNA) in LDPE tubular reactor for maximising productivity, conversion and minimising energy costs with three scenario of problem optimization, i.e. maximising productivity and reducing energy cost for the first problem (P1); increasing conversion and reducing energy costs for the second problem (P2); and increasing productivity and reducing by-products for the third problem (P3). The results show that the highest productivity, highest conversion, and lowest energy are 545.1 mil. RM/year, 0.314, and 0.672 mil. RM/year. The extreme points in the Pareto Front (PF) for various bi-objective situations provide practitioners with helpful information for selecting the best trade-off for the operational strategy. According to their preferences, decision-makers can use the resulting Pareto to decide on the most acceptable alternative. The decision variable plots show that both initiators in the reacting zone highly affected the optimal solution with the opposite action.

工业规模的优化是一项复杂的任务,涉及对大型系统和应用程序的性能进行微调,使其更加高效和有效。由于工作量不断增加、系统复杂性不断提高以及需要保持最佳性能,这一过程极具挑战性。由于压缩需要大量电力,而反应物材料成本高昂,因此需要优化低密度聚乙烯(LDPE)生产,在降低能源成本的同时实现最高生产率。然而,这并不是一个简单的过程,因为低密度聚乙烯管式反应器的优化问题由相互冲突的目标函数组成。多目标神经网络算法(MONNA)是一种元启发式优化方法,为解决复杂、目标矛盾和多样化的优化问题提供了一种通用而稳健的方法,它不依赖于问题的特定数学属性。它的灵感来源于生物神经网络的结构和信息处理能力。MONNA 可以迭代地提出解决方案、评估性能并根据反馈调整方法,从而避免了复杂的数学公式。在这项工作中,我们在低密度聚乙烯管式反应器中实现了多目标优化神经网络算法(MONNA),以最大化生产率、转化率和最小化能源成本为目标,对三个问题进行了优化,即第一个问题(P1)最大化生产率并降低能源成本;第二个问题(P2)提高转化率并降低能源成本;第三个问题(P3)提高生产率并减少副产品。结果表明,最高生产率、最高转化率和最低能耗分别为 545.1 百万林吉特/年、0.31 百万林吉特/年和 0.31 百万林吉特/年。RM/年、0.314 和 0.672 mil.马币/年。各种双目标情况下的帕累托前沿(PF)极值点为从业人员选择最佳运营战略权衡提供了有用的信息。决策者可以根据自己的偏好,利用得出的帕累托前沿来决定最可接受的替代方案。决策变量图显示,反应区中的两个启动者都对最佳解决方案产生了很大影响。
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引用次数: 0
An MINLP-based decision-making tool to help microbreweries improve energy efficiency and reduce carbon footprint through retrofits 基于 MINLP 的决策工具,帮助微型酿酒厂通过改造提高能效并减少碳足迹
IF 3 Q2 ENGINEERING, CHEMICAL Pub Date : 2024-12-01 Epub Date: 2024-10-03 DOI: 10.1016/j.dche.2024.100189
Veit Schagon, Rohit Murali, Ruosi Zhang, Melis Duyar, Michael Short
Microbreweries have greater production costs per litre of beer compared to large breweries, as well as higher carbon footprints. Due to the range of different retrofit technologies available and the different capacities and configurations of microbreweries, it is not always clear what retrofits will improve operations. Therefore, this work proposes a novel mixed-integer nonlinear programming decision-making tool to be used by any microbrewery, that determines the technoeconomic feasibility and sizing of energy efficiency-improving retrofits, including solar and wind power, battery storage, anaerobic digestion, boiler type selection, heat integration by heat storage, and carbon capture via dual-function materials. The model was demonstrated on a real UK microbrewery case study. The model gave an optimal configuration of a 10 m3 anaerobic digester, 30 solar panels outputting 380 W each, an 800 W wind turbine and a 2.3 m3 heat storage tank, reducing annual operating costs by 62.9 % and carbon dioxide emissions by 77.1 % with a payback period of 8 years. The tool is designed to be flexible for use by any microbrewery in any location with any brewing recipe and allow the owner(s) to develop more profitable and sustainable microbreweries.
Tweetable abstract
Microbreweries can implement mathematically optimised renewable energy, heat integration and anaerobic digestion to reduce operating costs by 62.9 % and carbon emissions by 77.1 %.
与大型啤酒厂相比,微型啤酒厂每升啤酒的生产成本更高,碳足迹也更大。由于现有的改造技术多种多样,而且微型啤酒厂的产能和配置也各不相同,因此并不总是很清楚什么样的改造才能改善运营。因此,这项工作提出了一种新颖的混合整数非线性编程决策工具,可供任何微型酿酒厂使用,用于确定提高能效改造的技术经济可行性和规模,包括太阳能和风能、电池存储、厌氧消化、锅炉类型选择、通过热存储进行热集成以及通过双功能材料进行碳捕集。该模型在一个真实的英国微型酿酒厂案例研究中进行了演示。该模型给出了一个 10 立方米厌氧消化器、30 块太阳能电池板(每块输出功率为 380 瓦)、800 瓦风力涡轮机和 2.3 立方米储热罐的最佳配置,每年可降低 62.9% 的运营成本和 77.1% 的二氧化碳排放量,投资回收期为 8 年。该工具设计灵活,适用于任何地点、任何酿造配方的任何微型啤酒厂,使所有者都能开发出利润更高、更可持续的微型啤酒厂。
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引用次数: 0
Industrial data-driven machine learning soft sensing for optimal operation of etching tools 用于优化蚀刻工具操作的工业数据驱动型机器学习软传感技术
IF 3 Q2 ENGINEERING, CHEMICAL Pub Date : 2024-12-01 Epub Date: 2024-10-22 DOI: 10.1016/j.dche.2024.100195
Feiyang Ou , Henrik Wang , Chao Zhang , Matthew Tom , Sthitie Bom , James F. Davis , Panagiotis D. Christofides
<div><div>Smart Manufacturing, or Industry 4.0, has gained significant attention in recent decades with the integration of Internet of Things (IoT) and Information Technologies (IT). As modern production methods continue to increase in complexity, there is a greater need to consider what variables can be physically measured. This advancement necessitates the use of physical sensors to comprehensively and directly gather measurable data on industrial processes; specifically, these sensors gather data that can be recontextualized into new process information. For example, artificial intelligence (AI) machine learning-based soft sensors can increase operational productivity and machine tool performance while still ensuring that critical product specifications are met. One industry that has a high volume of labor-intensive, time-consuming, and expensive processes is the semiconductor industry. AI machine learning methods can meet these challenges by taking in operational data and extracting process-specific information needed to meet the high product specifications of the industry. However, a key challenge is the availability of high quality data that covers the full operating range, including the day-to-day variance. This paper examines the applicability of soft sensing methods to the operational data of five industrial etching machines. Data is collected from readily accessible and cost-effective physical sensors installed on the tools that manage and control the operating conditions of the tool. The operational data are then used in an intelligent data aggregation approach that increases the scope and robustness for soft sensors in general by creating larger training datasets comprised of high value data with greater operational ranges and process variation. The generalized soft sensor can then be fine-tuned and validated for a particular machine. In this paper, we test the effects of data aggregation for high performing Feedforward Neural Network (FNN) models that are constructed in two ways: first as a classifier to estimate product PASS/FAIL outcomes and second as a regressor to quantitatively estimate oxide thickness. For PASS/FAIL classification, a data aggregation method is developed to enhance model predictive performance with larger training datasets. A statistical analysis method involving point-biserial correlation and the Mean Absolute Error (MAE) difference score is introduced to select the optimal candidate datasets for aggregation, further improving the effectiveness of data aggregation. For large datasets with high quality data that enable model training for more complex tasks, regression models that predict the oxide thickness of the product are also developed. Two types of models with different loss functions are tested to compare the effects of the Mean Squared Error (MSE) and Mean Absolute Percentage Error (MAPE) loss functions on model performance. Both the classification and regression models can be applied in industrial setti
近几十年来,随着物联网(IoT)与信息技术(IT)的融合,智能制造(或称工业 4.0)获得了极大关注。随着现代生产方法的复杂性不断提高,人们更需要考虑哪些变量可以进行物理测量。这种进步要求使用物理传感器来全面、直接地收集工业流程的可测量数据;具体而言,这些传感器收集的数据可以重新组合为新的流程信息。例如,基于人工智能(AI)机器学习的软传感器可以提高操作生产力和机床性能,同时还能确保满足关键的产品规格要求。半导体行业是一个劳动密集型、耗时长、成本高的行业。人工智能机器学习方法可以通过接收操作数据并提取满足该行业高产品规格所需的特定流程信息来应对这些挑战。然而,一个关键的挑战是如何获得涵盖整个操作范围(包括日常差异)的高质量数据。本文研究了软传感方法对五台工业蚀刻机运行数据的适用性。数据是从安装在工具上的易于获取且经济高效的物理传感器中收集的,这些传感器负责管理和控制工具的运行条件。操作数据随后被用于一种智能数据聚合方法,该方法通过创建更大的训练数据集(由具有更大操作范围和流程变化的高价值数据组成)来增加软传感器的总体范围和鲁棒性。然后,可以针对特定机器对通用软传感器进行微调和验证。在本文中,我们测试了数据聚合对高性能前馈神经网络 (FNN) 模型的影响,这些模型以两种方式构建:第一种是作为分类器来估计产品的 PASS/FAIL 结果,第二种是作为回归器来定量估计氧化层厚度。针对 PASS/FAIL 分类,开发了一种数据聚合方法,以提高模型在更大训练数据集上的预测性能。此外,还引入了一种统计分析方法,通过点-阶梯相关性和平均绝对误差(MAE)差异得分来选择最佳的候选数据集进行聚合,从而进一步提高了数据聚合的有效性。对于具有高质量数据的大型数据集,可以进行更复杂任务的模型训练,还开发了预测产品氧化层厚度的回归模型。测试了具有不同损失函数的两类模型,以比较平均平方误差 (MSE) 和平均绝对百分比误差 (MAPE) 损失函数对模型性能的影响。分类和回归模型都可以应用于工业环境,因为它们提供了有关过程结果的额外信息。单独来看,这些模型可以减少半导体工厂的计量步骤,进一步开发后,还能增强先进过程控制策略的开发能力。
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Digital Chemical Engineering
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