We present a monolithic, solidly-mounted CMOS-FBAR oscillator array for mass sensing applications. Thin-film bulk acoustic resonators (FBAR) are an effective platform for sensitive biological and chemical detection, where their high operating frequencies make them many times more sensitive than a quartz crystal microbalance. By monolithic integration with CMOS drive circuitry, we aim to overcome the spatial limitations of externally-coupled resonators to build dense sensor arrays without specialized fabrication techniques. The sensors in this work are constructed in a 6 × 4 array atop a 0.18μm CMOS active substrate, and mass sensitivity comparable to off-chip FBAR sensors is demonstrated.
We report a method for forming arrays of live single cells on a chip using polymer micro-traps made of SU8. We have studied the toxicity of the microfabricated structures and the associated environment for two cell lines. We also report a method for measuring the oxygen consumption rate of a single cell using optical interrogation of molecular oxygen sensors placed in micromachined micro-wells by temporarily sealing the cells in the micro-traps. The new techniques presented here add to the collection of tools available for performing "single-cell" biology. A single-cell self-assembly yield of 61% was achieved with oxygen draw down rates of 0.83, 0.82, and 0.71 fmol/minute on three isolated live A549 cells.
This paper reports a template-based technique for the fabrication of polymer micro/nanofiber composites, exercising control over the fiber dimensions and alignment. Unlike conventional spinning-based methods of fiber production, the presented approach is based on micro-transfer molding. It is a parallel processing technique capable of producing fibers with control over both in-plane and out-of-plane geometries, in addition to packing density and layout of the fibers. Collagen has been used as a test polymer to demonstrate the concept. Hollow and solid collagen fibers with various spatial layouts have been fabricated. Produced fibers have widths ranging from 2 µm to 50 µm, and fiber thicknesses ranging from 300 nm to 3 µm. Also, three-dimensionality of the process has been demonstrated by producing in-plane serpentine fibers with designed arc lengths, out-of-plane wavy fibers, fibers with focalized particle encapsulation, and porous fibers with desired periodicity and pore sizes.