A uniform ECR plasma is produced with a multi slot antenna of 280mm in diameter. The radial profile of the ion saturation current density is examined as a function of microwave power and pressure. The radial uniformity of the ion saturation current density is within pm3% over 8 inches in diameter for the input microwave power lkW at pressure of 2mTorr. Furthermore, the deposition of a-Si：H films is attempted on glass substrates using mixture SiH4/He. When the microwave power is increased, the thickness of the films increases.
{"title":"大口径マルチスロットアンテナによる均一 ECR プラズマの生成","authors":"上田 洋子, Y. Ueda, 寺西 秀明, Hideaki Teranishi, 田中 雅慶, Masayoshi Tanaka, 篠原 俊二郎, Shunjiro Shinohara, 河合 良信, Yoshinobu Kawai, ヨウコ ウエダ, ヒデアキ テラニシ, マサヨシ タナカ, シュンジロウ シノハラ, ヨシノブ カワイ","doi":"10.15017/17337","DOIUrl":"https://doi.org/10.15017/17337","url":null,"abstract":"A uniform ECR plasma is produced with a multi slot antenna of 280mm in diameter. The radial profile of the ion saturation current density is examined as a function of microwave power and pressure. The radial uniformity of the ion saturation current density is within pm3% over 8 inches in diameter for the input microwave power lkW at pressure of 2mTorr. Furthermore, the deposition of a-Si：H films is attempted on glass substrates using mixture SiH4/He. When the microwave power is increased, the thickness of the films increases.","PeriodicalId":11722,"journal":{"name":"Engineering sciences reports, Kyushu University","volume":"18 1","pages":"191-198"},"PeriodicalIF":0.0,"publicationDate":"1994-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79351722","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
H. Haji, H. Nakashima, H. Yoshinaga, 土師 宏, 中島 英治, 吉永 日出男, ハジ ヒロシ, ヒデハル ナカシマ, ヒデオ ヨシナガ
{"title":"Investigation on the Gold-Wire Bondability for the IC Device","authors":"H. Haji, H. Nakashima, H. Yoshinaga, 土師 宏, 中島 英治, 吉永 日出男, ハジ ヒロシ, ヒデハル ナカシマ, ヒデオ ヨシナガ","doi":"10.15017/17320","DOIUrl":"https://doi.org/10.15017/17320","url":null,"abstract":"","PeriodicalId":11722,"journal":{"name":"Engineering sciences reports, Kyushu University","volume":"36 6 1","pages":"329-342"},"PeriodicalIF":0.0,"publicationDate":"1994-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82709057","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Heru Koncoro, K. Nakagawa, Yang Fei Rao, K. Fukuda
An experimental study has been carried out to investigate into a two-phase flow instability called the “geysering”. The regions are divided by the frequency and amplitude of pressure fluctuations caused by periodical bubble nucleations and its expansions. Experiments are conducted with a double tube closed thermosyphon which is made of glass to make visual observation possible. As the working fluid R113 is adopted. The mechanism of the geysering is described based on the visual observation of the phenomena as well as on the transients of temperature distributions of the outer tube.
{"title":"On the Mechanism of the Geysering in a Double Tube Thermosyphon","authors":"Heru Koncoro, K. Nakagawa, Yang Fei Rao, K. Fukuda","doi":"10.15017/17309","DOIUrl":"https://doi.org/10.15017/17309","url":null,"abstract":"An experimental study has been carried out to investigate into a two-phase flow instability called the “geysering”. The regions are divided by the frequency and amplitude of pressure fluctuations caused by periodical bubble nucleations and its expansions. Experiments are conducted with a double tube closed thermosyphon which is made of glass to make visual observation possible. As the working fluid R113 is adopted. The mechanism of the geysering is described based on the visual observation of the phenomena as well as on the transients of temperature distributions of the outer tube.","PeriodicalId":11722,"journal":{"name":"Engineering sciences reports, Kyushu University","volume":"21 1","pages":"209-215"},"PeriodicalIF":0.0,"publicationDate":"1993-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88312922","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
K. Fukuda, T. Kondoh, S. Hasegawa, 福田 研二, 近藤 哲也, 修 長谷川, ケンジ フクダ, テツ コンドウ, シュウ ハセガワ
{"title":"Relationship between Heat Transfer and Pressure Drop of Porous Materials","authors":"K. Fukuda, T. Kondoh, S. Hasegawa, 福田 研二, 近藤 哲也, 修 長谷川, ケンジ フクダ, テツ コンドウ, シュウ ハセガワ","doi":"10.15017/17272","DOIUrl":"https://doi.org/10.15017/17272","url":null,"abstract":"","PeriodicalId":11722,"journal":{"name":"Engineering sciences reports, Kyushu University","volume":"47 1","pages":"213-223"},"PeriodicalIF":0.0,"publicationDate":"1992-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90797120","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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