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Cooled and Uncooled One-Channel Deformable Mirrors for Industrial Laser Machines 工业激光机器用冷却和非冷却单通道可变形镜
Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.mc.4
A. G. Safrońov
Cooled and uncooled one-channel deformable mirrors for use in industrial laser machines for various applications have been developed and investigated. The design, technical parameters and effectiveness of the mirrors are described in detail. The experience of exploitation of the uncooled deformable mirrors is considered for two industrial laser machines based on: a) 2-kW cw-power CO-laser; b) 250-kW pulsed copper vapour laser.
用于各种应用的工业激光机器的冷却和非冷却单通道可变形反射镜已经开发和研究。详细介绍了反射镜的设计、技术参数和使用效果。介绍了两种工业激光器的非冷却可变形反射镜的开发经验:a) 2 kw功率co激光器;b) 250千瓦脉冲铜蒸气激光器。
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引用次数: 0
Adaptive receive telescope array for coherent free-space laser communications 相干自由空间激光通信的自适应接收望远镜阵列
Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.mb.3
A. Kalmar, K. Kudielka, W. Leeb
Free-space optical communication requires receive and transmit antennas in the form of telescopes. In comparison with single-aperture (“monolithic”) telescopes mainly considered so far, a phased telescope array offers many fundamental advantages: • reduced size of optical elements, • inherent modularity, therefore • redundancy (i. e. graceful degradation instead of total breakdown in case of a subtelescope failure), • reduced overall size and mass, • non-mechanical fine pointing.
自由空间光通信需要望远镜形式的接收和发射天线。与迄今为止主要考虑的单口径(“单片”)望远镜相比,相控望远镜阵列提供了许多基本优势:光学元件尺寸减小,固有模块化,因此冗余(即在子望远镜故障的情况下优雅地退化而不是完全崩溃),总体尺寸和质量减小,非机械精细指向。
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引用次数: 0
Applications of Shack-Hartman wavefront sensing and adaptive optics for in place laser gain media measurements and for horizontal path optical communications Shack-Hartman波前传感和自适应光学在原位激光增益介质测量和水平路径光通信中的应用
Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.tua.2
B. Levine, A. Wirth, F. Landers, E. Martinsen, A. Jankevics, M. Toledo-Quiñones, T. Bruno, R. Zielinski
The Shack-Hartmann wavefront sensor is a miniaturized version of the classical Hartmann mask extended by using a two-dimensional array of lenslets that is optically conjugate to the wavefront surface under test. The sensitivity and dynamic range of the wavefront measurement is controlled by the combination of reimaging optics and the diameter and focal length of the lenslet array. This allows an adjustment of the gradient measurement sensitivity . As the beam size is reduced in reimaging the test surface, the angular spread of the beam is magnified. This magnification increases the size of the gradients or tilts of the ray bundles from micro-radians to milliradians for typical testing configurations. Measurements of such large angles are not so prone to error due to mechanical and thermal instabilities in the sensor equipment as are interferometric sensors where dimensional stability must always be measured in parts of a micron. It is this flexibility that makes it possible for the same sensor system to measure with very high accuracy the wavefront produced by a Hubble Space Telescope simulator and, with a change of lens array, the shape of f/0.7 paraboloids.
Shack-Hartmann波前传感器是经典哈特曼掩模的小型化版本,通过使用与被测波前表面光学共轭的二维透镜阵列进行扩展。波前测量的灵敏度和动态范围由再成像光学器件和透镜阵列的直径和焦距共同控制。这允许调整梯度测量灵敏度。在对测试表面进行再成像时,由于光束尺寸减小,光束的角扩展被放大。对于典型的测试配置,这种放大可以增加射线束的梯度或倾斜的大小,从微弧度到毫弧度。由于传感器设备的机械和热不稳定性,这种大角度的测量不像干涉式传感器那样容易产生误差,干涉式传感器的尺寸稳定性必须始终以微米为单位进行测量。正是这种灵活性使得相同的传感器系统能够以非常高的精度测量哈勃太空望远镜模拟器产生的波前,并通过改变透镜阵列,测量f/0.7抛物面的形状。
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引用次数: 1
An Investigation of Active Optics for Extreme-Ultraviolet Projection Lithography 极紫外投影光刻的主动光学研究
Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.mc.3
H. Chapman, D. Sweeney
Projection lithography systems are being developed to print 0.1 μm features over a large field, using extreme ultraviolet (EUV) light of a wavelength of around 13 nm. At this wavelength the optics must be all-reflective with multilayer coatings. Current designs of the projection optics consist of off-axis ringfield systems with three or four mirrors (see Fig. I). The demands of microlithography are that the image must be of high quality across the entire field and within a large depth of focus, and that image distortion must be less than 10 nm. These requirements put severe constraints on the quality of the mirrors, which, in general, must have figure errors better than 0.2 nm rms. Although such tolerances can be met by the present state of the art there are various sources of error which can degrade the optical performance of the system. Of those sources, many may cause only low-frequency, quasi-static errors. These error sources include deformation due to stress of the multilayer coatings, thermal and gravitational loading, optical manufacture, and maintenance and alignment of the system. We are investigating the possibility of actively controlling the figure of the mirrors to correct for such errors and achieve the desired imaging performance. Control of the surface figure may also allow a greater throughput of the system, by being able to accommodate a higher heat load from a more intense EUV source.
投影光刻系统正在开发中,使用波长约为13纳米的极紫外(EUV)光,在大范围内打印0.1 μm的特征。在这个波长下,光学器件必须是全反射的,并有多层涂层。目前的投影光学设计由带有三个或四个反射镜的离轴环场系统组成(见图1)。微光刻技术的要求是,在整个视场和大聚焦深度内,图像必须具有高质量,并且图像畸变必须小于10 nm。这些要求对反射镜的质量提出了严格的限制,一般来说,反射镜的图像误差必须优于0.2 nm的均方根。虽然这样的公差可以由目前的技术状态来满足,但有各种各样的误差来源,可以降低系统的光学性能。在这些来源中,许多可能只引起低频的准静态误差。这些误差来源包括多层涂层的应力、热载荷和重力载荷、光学制造以及系统的维护和校准引起的变形。我们正在研究主动控制反射镜形状的可能性,以纠正此类错误并实现所需的成像性能。通过能够适应来自更强的EUV源的更高热负荷,表面图形的控制也可以允许系统的更大吞吐量。
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引用次数: 0
Laser requirements on active tracking 主动跟踪的激光要求
Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.mb.1
J. Riker, P. Merritt, J. Roark
In this paper, we will review the requirements on laser power and beam quality for active tracking of missiles and satellites. We will compare the cases of solar illumination and laser illumination from a theoretical and also simulation standpoint, and we will show results obtained from Starfire Optical Range and White Sands Missile Range using active tracking lasers. The potential benefits for active tracking include full sky coverage for orbiting debris, laser ranging for ephemeris updating, and precision tracking for boosting missiles. Other aspects of the laser requirements will also be presented, including the impacts of speckle and jitter coupling.
本文综述了导弹和卫星主动跟踪对激光功率和光束质量的要求。我们将从理论和仿真的角度比较太阳照明和激光照明的情况,我们将展示使用主动跟踪激光器从星火光学靶场和白沙导弹靶场获得的结果。主动跟踪的潜在好处包括对轨道碎片的全天空覆盖,对星历更新的激光测距,以及对助推导弹的精确跟踪。激光要求的其他方面也将被提出,包括散斑和抖动耦合的影响。
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引用次数: 4
Overview of the Shutura International Workshop for Adaptive Optics for Industry and Medicine Shutura工业和医学自适应光学国际研讨会综述
Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.ma.1
F. Merkle, C. Dainty, A. Kudryashov
Summary not available.
摘要不可用。
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引用次数: 0
The electrical and optical properties of liquid devices for adaptive optics 自适应光学液体器件的电学和光学特性
Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.tub.2
G. Love, D. Buscher, A. Purvis, D. Robertson, R. Sharpies
The use of adaptive optics (AO) for wavefront compensation other than for atmospheric turbulence is an emerging, exciting field. The required system specifications will obviously be dependent on the particular application, and indeed may not be well-characterized for many of the potential uses. Liquid crystal spatial light modulators (LC-SLMs) are also an emerging technology within the field of AO. With this in mind we present here a summary of the specifications of both currently available and predicted LC-SLMs which may be used as wavefront correctors, and discuss how they may be particularly suited for use in non-astronomical AO systems.
自适应光学(AO)用于波前补偿是一个新兴的、令人兴奋的领域,而不是用于大气湍流。所需的系统规范显然取决于特定的应用程序,并且实际上可能无法很好地描述许多潜在的用途。液晶空间光调制器(LC-SLMs)也是光学领域的一项新兴技术。考虑到这一点,我们在这里总结了目前可用的和预测的lc - slm的规格,它们可以用作波前校正器,并讨论了它们如何特别适合用于非天文AO系统。
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引用次数: 0
Use of an LCPM to Simulate Time Varying Atmospheric Distortion for an Adaptive Optics System: Laboratory Demonstration 用LCPM模拟自适应光学系统时变大气畸变:实验室演示
Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.tub.4
J. Gonglewski, S. Browne, R. Highland, D. Dayton, S. Sandven
Fast generation of known stimuli simulating atmospheric turbulence has long been an impossible dream for proving and characterizing adaptive optics systems. Now that liquid crystal phase modulators are available with a moderate number (>100) of elements, they can be readily employed to provide accurate and repeatable disturbances for the testing of adaptive optics. Moreover, their small size and low power dissipation make them ideal as on-board test sources with deterministic time-varying higher order phase screens.
快速生成模拟大气湍流的已知刺激一直是证明和表征自适应光学系统的一个不可能的梦想。现在液晶相位调制器具有中等数量(>100)的元件,它们可以很容易地被用来为自适应光学的测试提供准确和可重复的干扰。此外,它们的小尺寸和低功耗使其成为具有确定性时变高阶相位屏的板载测试源的理想选择。
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引用次数: 0
Liquid Crystal Phase Modulators For Time Phase Distortion Simulations 用于时间相位失真模拟的液晶相位调制器
Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.tub.3
J. Gonglewski, A. Kudryashov, S. Browne, R. Highland
Nematic liquid crystals have been used as phase retarders for adaptive optics for more than 10 years. Of the available options, liquid crystals phase modulators (LCPMs) have the advantages of low cost, reliability, compactness, low power, ease of controllability, a transmissive nature, and simple aperture scalability. A number of groups have investigated the use of LCPMs for adaptive wavefront control and demonstrated preliminary results.1-6 The current limitation for using these devices in atmospheric adaptive systems is their relatively slow response times. In this paper we present the results of turbulence simulation with a 127 element LCPM. The turbulence is statistically appropriate for the atmosphere in both temporal and spatial correlation, except for the low spatial and temporal frequency limitations of the LCPM. We address the limitations and potentialities of such modulators.
向列型液晶作为相位缓速器应用于自适应光学已有10多年的历史。在可用的选项中,液晶相位调制器(lcpm)具有低成本,可靠,紧凑,低功耗,易于控制,传输性质和简单的孔径可扩展性等优点。一些小组已经研究了lcpm用于自适应波前控制的使用,并展示了初步结果。目前在大气自适应系统中使用这些装置的限制是它们的响应时间相对较慢。本文给出了用127元LCPM进行湍流模拟的结果。除了LCPM的低时空频率限制外,湍流在时间和空间相关性上对大气都是统计合适的。我们讨论了这种调制器的局限性和潜力。
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引用次数: 0
Adaptive Correction of Laser Beam Aberration On Atmospheric Paths 大气路径上激光束像差的自适应校正
Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.tua.3
V. Lukin, B. Fortes
We consider here adaptive (phase conjugation) optical system for the correction of non-linear distortion with the independent reference beam. We can use either cooperative beacon from independent source, either glint on the target surface, either natural guide star, or artificial guide star, formed using atmospheric scattering of the light. First of all we will consider "exact" phase conjugation and "phase unwrapping" technique. Phase conjugation algorithm allows significantly decrease the atmospheric aberrations due to the thermal blooming and the atmospheric turbulence both for vertical and horizontal paths.
本文考虑用独立参考光束校正非线性畸变的自适应(相位共轭)光学系统。我们既可以使用独立光源的合作信标,也可以在目标表面闪烁,既可以使用自然导星,也可以使用利用大气散射光形成的人工导星。首先,我们将考虑“精确”相位共轭和“相位展开”技术。相位共轭算法在垂直和水平路径上都能显著降低由于热晕和大气湍流引起的大气像差。
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Nonastronomical Adaptive Optics
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