Pub Date : 2021-09-15DOI: 10.14332/svc21.proc.0043
D. Tsu
{"title":"Optical Properties of Amorphous MoOx, AR for Metal Conductors","authors":"D. Tsu","doi":"10.14332/svc21.proc.0043","DOIUrl":"https://doi.org/10.14332/svc21.proc.0043","url":null,"abstract":"","PeriodicalId":153602,"journal":{"name":"64th Annual Technical Conference Proceedings","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115662809","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-09-15DOI: 10.14332/svc21.proc.0050
Tahere Hemati
{"title":"Parity-Time High Contrast (PT-HCGs): A New Platform for Integrated Thin Film Gas Sensors","authors":"Tahere Hemati","doi":"10.14332/svc21.proc.0050","DOIUrl":"https://doi.org/10.14332/svc21.proc.0050","url":null,"abstract":"","PeriodicalId":153602,"journal":{"name":"64th Annual Technical Conference Proceedings","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123623479","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-09-15DOI: 10.14332/svc21.proc.0022
J. Gudmundsson
{"title":"On the Deposition Rate and Ionized Flux Fraction in High Power Impulse Magnetron Sputtering (HiPIMS)","authors":"J. Gudmundsson","doi":"10.14332/svc21.proc.0022","DOIUrl":"https://doi.org/10.14332/svc21.proc.0022","url":null,"abstract":"","PeriodicalId":153602,"journal":{"name":"64th Annual Technical Conference Proceedings","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121913870","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-09-15DOI: 10.14332/svc21.proc.0049
D. Thiry
{"title":"Plasma Diagnostic: A Mandatory Step Towards a Better Understanding of the Plasma Polymerization Process","authors":"D. Thiry","doi":"10.14332/svc21.proc.0049","DOIUrl":"https://doi.org/10.14332/svc21.proc.0049","url":null,"abstract":"","PeriodicalId":153602,"journal":{"name":"64th Annual Technical Conference Proceedings","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124181555","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-09-15DOI: 10.14332/svc21.proc.0018
S. Saager, B. Scheffel, T. Modes, O. Zywitzki
Abstract Porous thin films have various application fields, e.g., for energy conversion in fuel cells, energy storage in lithium ion batteries or supercapacitors as well for catalysis, filtration and sensing. We synthesized porous thin films by co-evaporating a low-vapor-pressure material (e.g., Si, Ni or C) together with zinc and depositing a compact layer of resulting composite. High-rate deposition process up to 100 nm/s was realized by electron beam physical vapor deposition (EB-PVD) of the materials from two graphite crucibles with a fast deflected electron beam in high vacuum. Immediately after deposition, the coated substrates were heated up in vacuum to a temperature above 500 °C and thereby zinc is removed selectively. Due to its higher vapor pressure against that of remaining component, zinc is expelled from the layer and vacancies are generated by so called vapor phase dealloying (VPD). We investigated the feasibility of VPD process for the elements silicon, nickel and carbon. The elemental composition and the morphology of the layers prior and after thermal annealing were analyzed by scanning electron microscopy, by energy-dispersive X-ray spectrometry and by X-ray diffraction.
{"title":"Synthesis of Porous Silicon, Nickel and Carbon Layers by Vapor Phase Dealloying","authors":"S. Saager, B. Scheffel, T. Modes, O. Zywitzki","doi":"10.14332/svc21.proc.0018","DOIUrl":"https://doi.org/10.14332/svc21.proc.0018","url":null,"abstract":"Abstract Porous thin films have various application fields, e.g., for energy conversion in fuel cells, energy storage in lithium ion batteries or supercapacitors as well for catalysis, filtration and sensing. We synthesized porous thin films by co-evaporating a low-vapor-pressure material (e.g., Si, Ni or C) together with zinc and depositing a compact layer of resulting composite. High-rate deposition process up to 100 nm/s was realized by electron beam physical vapor deposition (EB-PVD) of the materials from two graphite crucibles with a fast deflected electron beam in high vacuum. Immediately after deposition, the coated substrates were heated up in vacuum to a temperature above 500 °C and thereby zinc is removed selectively. Due to its higher vapor pressure against that of remaining component, zinc is expelled from the layer and vacancies are generated by so called vapor phase dealloying (VPD). We investigated the feasibility of VPD process for the elements silicon, nickel and carbon. The elemental composition and the morphology of the layers prior and after thermal annealing were analyzed by scanning electron microscopy, by energy-dispersive X-ray spectrometry and by X-ray diffraction.","PeriodicalId":153602,"journal":{"name":"64th Annual Technical Conference Proceedings","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114378867","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-09-15DOI: 10.14332/svc21.proc.0040
R. Willey, Consultants Willey Optical
{"title":"Extracting n and k Values of Optical Coating Layers From Spectrophotometric Curves","authors":"R. Willey, Consultants Willey Optical","doi":"10.14332/svc21.proc.0040","DOIUrl":"https://doi.org/10.14332/svc21.proc.0040","url":null,"abstract":"","PeriodicalId":153602,"journal":{"name":"64th Annual Technical Conference Proceedings","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126249124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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