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IEEE 1989 International Conference on Plasma Science最新文献

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Analysis of multiple-foil XRL targets using X-ray spectroscopy 多箔XRL靶的x射线光谱分析
Pub Date : 1989-05-22 DOI: 10.1109/PLASMA.1989.166216
J. Wang, T. Boehly, B. Yaakobi, D. Shvarts, R. Epstein, D. Meyerhofer, M. Richardson, M. Russotto, J. Soures
Multiple-foil collisional excitation X-ray laser targets have been studies spectroscopically. Using spatially resolved 3d-2p X-ray spectra, the temperatures and densities obtained in single- and double-foil geometries have been compared. The ratio of the dipole transitions to the electric quadrupole transitions in the neonlike species has been used as a density diagnostic. An average-ion atomic physics model has been used to describe the ionization process, and a relativistic atomic physics code has been used for calculation of the level energies, populations, and gain calculations. The results confirm that the double-foils provide higher densities and in some cases concave density profiles. The extreme ultraviolet spectra in the range of 20-300 AA show the effect of target geometry and incident laser intensity on the laser lines and the ionization balance.<>
对多箔碰撞激发x射线激光靶进行了光谱研究。使用空间解决3 d-2p x射线光谱,获得的温度和密度相比,单和double-foil几何图形。偶极子跃迁与电四极子跃迁的比率已被用作密度诊断。用平均离子原子物理模型描述电离过程,用相对论原子物理代码计算能级、居群和增益。结果证实,双箔提供了更高的密度和在某些情况下凹密度轮廓。在20 ~ 300 AA范围内的极紫外光谱显示了目标几何形状和入射激光强度对激光谱线和电离平衡的影响。
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引用次数: 0
Dynamics of sheaths in low pressure RF discharges 低压射频放电中鞘层动力学
Pub Date : 1989-05-22 DOI: 10.1109/PLASMA.1989.166201
M. Lieberman
Low-pressure RF discharges are widely used for materials processing. Typical parameters are pressure of 1-100 mtorr, frequency of 13.56 MHz, and RF voltage of 50-1000 V. A reasonably complete picture of the dynamics of these sheaths has been developed. Some typical results for a high-voltage sheath driven by a sinusoidal current source, under the assumptions of time-independent, collisionless ion motion and inertialess electrons, are: (1) the ion sheath thickness s/sub m/ is square root 50/27 larger than a Child's law sheath for the same DC voltage and ion current density; (2) the sheath capacitance per unit area for the fundamental voltage harmonic is 1.226 epsilon /sub 0//s/sub m/, where epsilon /sub 0/ is the free space permittivity; (3) the ratio of the DC to the peak value of the oscillating voltage is 54/125; (4) the second and third voltage harmonics are, respectively, 12.3% and 4.2% of the fundamental; and (5) the conductance per unit area for stochastic heating by the oscillating sheath is 2.98 ( lambda /sub D//s/sub m/)/sup 2/3/ ( epsilon /sup 2/n/sub 0//mu/sub e/), where n/sub 0/ is the ion density, lambda /sub D/ is the Debye length at the plasma-sheath edge, and u/sub e/=(8eT/sub e// pi m)/sup 1/2/ is the mean electron speed.<>
低压射频放电广泛应用于材料加工。典型参数为压力1 ~ 100mtorr,频率13.56 MHz,射频电压50 ~ 1000v。对这些鞘层的动力学已经形成了一个相当完整的图景。对于正弦电流源驱动的高压鞘层,在时间无关、离子无碰撞运动和电子无惯性的假设下,典型结果如下:(1)在相同直流电压和离子电流密度下,离子鞘层厚度s/sub m/比Child’s定律鞘层厚平方根50/27;(2)基频电压谐波单位面积护套电容为1.226 epsilon /sub 0//s/sub m/,其中epsilon /sub 0/为自由空间介电常数;(3)直流与振荡电压峰值之比为54/125;(4)第二次和第三次电压谐波分别为基频的12.3%和4.2%;(5)振荡鞘层随机加热单位面积电导为2.98 (lambda /sub D//s/sub m/)/sup 2/ (epsilon /sup 2/n/sub 0//mu/sub e/),其中n/sub 0/为离子密度,lambda /sub D/为等离子体鞘层边缘的德贝长度,u/sub e/=(8eT/sub e// pi m)/sup 1/2/为平均电子速度
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引用次数: 0
Compact pulsed power generator using fuses and plasma erosion opening switches 紧凑的脉冲发电机使用熔断器和等离子侵蚀开开关
Pub Date : 1989-05-22 DOI: 10.1109/PLASMA.1989.165976
H. Akiyama, N. Shimomura, S. Maeda
Summary form only. A compact pulsed power generator based on an inductive energy storage system has been constructed and tested. The generator, which has been named ASO-1, is about 210 cm high. Parallel fuses and plasma erosion opening switches are used as two-stage opening switches. The operation of the generator is described. It has been confirmed by experiment that the parallel fuses vaporize simultaneously. Pulsed power of about 250 kV and several tens of kiloamperes is obtained with a risetime <150 ns.<>
只有摘要形式。研制了一种基于感应储能系统的小型脉冲发电机,并对其进行了测试。这台发电机被命名为ASO-1,高约210厘米。并联熔断器和等离子侵蚀开路开关作为两级开路开关。介绍了发电机的运行情况。实验证实了平行熔断器是同时汽化的。脉冲功率约为250千伏和几十千安培,随时间的增加而增加
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引用次数: 0
Development of 2-D hydrodynamic code for spherical plasma shell 球形等离子体壳二维流体力学程序的开发
Pub Date : 1989-05-22 DOI: 10.1109/PLASMA.1989.166263
S. Kawata, Yuichi Masubuchi
A two-dimensional hydrodynamic code HALLEY2D has been developed for analysis of a spherical plasma shell. A polar coordinate (r, theta , phi ) is used, and homogeneity in the phi coordinate is assumed, so that only part of the sphere need to be simulated. Conservation equations for mass, momentum, and energy are solved using a control volume method with an equation of state. A simulation result is presented for an imploding plasma shell irradiated by proton beams with a nonuniformity of 6% of the beam intensity.<>
开发了用于分析球形等离子体壳的二维流体力学代码HALLEY2D。使用极坐标(r, theta, phi),并且假设phi坐标的均匀性,因此只需要模拟球体的一部分。质量、动量和能量守恒方程用控制体积法和状态方程求解。本文给出了质子束辐照内爆等离子体壳的模拟结果,非均匀性为质子束强度的6%。
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引用次数: 0
A model for anomalous thermal diffusivity in tokamaks 托卡马克异常热扩散率模型
Pub Date : 1989-05-22 DOI: 10.1109/PLASMA.1989.165994
A. Hirose
It has been recently pointed out that a certain function F of the plasma density, n(r), and the electron temperature gradient relative to the density gradient, eta /sub e/(r), reproduces well the radial profiles of chi /sub e/ (electron thermal diffusivity) in several tokamaks with various heating modes. Plots are shown of F with n=10/sup 19//m/sup 3/ and the experimentally deduced chi /sub e/ (m/sup 2//s) in three different modes in JET: ohmic, ohmic+ICRH, and ohmic+NBI. The F and chi /sub e/ profiles agree rather well. The factor 1+ eta /sub e/, which appears in the numerator of F, is proportional to the pressure gradient, which may provide a source for drift-type instability. The electron temperature gradient, which appears in the denominator, is possibly due to the nonlinear stabilization of drift-type modes by temperature gradient.<>
最近有人指出,等离子体密度n(r)和电子温度梯度相对于密度梯度eta /sub e/(r)的某个函数F,很好地再现了几种不同加热模式的托卡马克中chi /sub e/(电子热扩散率)的径向分布。在JET中,n=10/sup 19//m/sup 3/时的F和实验推导的chi /sub / e/ (m/sup 2//s)在欧姆、欧姆+ICRH和欧姆+NBI三种不同模式下的图。F和chi /sub e/剖面相当吻合。因子1+ eta /sub e/出现在F的分子中,与压力梯度成正比,这可能是漂移型失稳的一个来源。电子温度梯度出现在分母中,可能是由于温度梯度对漂移型模式的非线性稳定。
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引用次数: 0
Experimental study of cusp injected electron beam 尖端注入电子束的实验研究
Pub Date : 1989-05-22 DOI: 10.1109/PLASMA.1989.165993
K. Boulais, J. Choe, W. Namkung, V. Ayres
Critical parameters were measured for the axis-encircling electron beam of a cusptron, a high-power microwave tube for several different magnetic field profiles. The tube utilizes the negative mass instability (NMI) of the beam either in a circular or multivane circuit. Thus, microwave radiation can be produced at the fundamental or high harmonics of the electron cyclotron frequency. If the beam orbit does not coincide with the peak wave amplitude, the NMI is damped. The off-centering stems mainly from a nonideal magnetic field. A series of experiments was set up to measure the beam envelope radius and velocity ratio as a function of axial distance for several unique magnetic field profiles. Each field profile maximized one of the off-centering sources from which measurements were taken. Thus, insight to the magnitude of off-centering and spread in axial velocity for each source led to a final field profile set up to reduce the undesirable effects of off-centering.<>
对大功率微波管cuscustron在不同磁场分布下的绕轴电子束的关键参数进行了测量。管利用负质量不稳定性(NMI)的光束在一个圆形或多叶片电路。因此,微波辐射可以在电子回旋频率的基频或高次谐波上产生。如果波束轨道与波峰振幅不重合,则NMI被阻尼。偏心主要是由非理想磁场引起的。建立了一系列实验,测量了几种独特的磁场剖面下光束包络半径和速度比随轴向距离的变化规律。每个油田剖面都最大限度地利用了一个偏心源进行测量。因此,通过了解每个源的偏心程度和轴向速度分布,可以建立最终的场剖面,以减少偏心的不良影响。
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引用次数: 0
Characterization of a multipolar electron cyclotron resonance microwave plasma source 多极电子回旋共振微波等离子体源的特性研究
Pub Date : 1989-05-22 DOI: 10.1109/PLASMA.1989.166148
J. Hopwood, R. Wagner, D. Reinhard, J. Asmusen
A microwave-cavity plasma applicator with multicusp electron cyclotron resonance (ECR) used as an ion beam source and for oxidation and etching of semiconductor materials has been characterized over its range of operating conditions. Single and double Langmuir probe measurements of electron density, ion density, and electron energy distribution functions have been made in the downstream region and as a function of power (120-250 W) and pressure (0.5-15.5 mtorr) in argon and oxygen. In addition, Faraday cup measurements of ion energies and optical emission data have been made. The plasma applicator is a 17.8 cm-diameter, 2.45 GHz cylindrical resonator with one end terminated by a sliding short and the other end by an overdense disk-shaped plasma. Processing of materials or ion extraction occurs at the field-free lower face of the plasma disk. Ion densities are typically 10/sup 11/-10/sup 12/ cm/sup -3/ at this point and decrease exponentially with distance downstream from the discharge. The electron energy distribution functions are Maxwellian and below 3 mtorr more closely follow a Druyvesteyn distribution with average energies of 5-8.5 eV. Ion energies to a grounded substrate are typically 10-25 eV with few, if any high-energy (>25 eV) ions.<>
本文研究了一种具有多脉冲电子回旋共振(ECR)的微波腔等离子体应用器,它可作为离子束源,用于半导体材料的氧化和蚀刻。单和双朗缪尔探针测量了下游区域的电子密度、离子密度和电子能量分布函数,以及氩气和氧气中功率(120-250 W)和压力(0.5-15.5 mtorr)的函数。此外,法拉第杯测量了离子能量和光发射数据。等离子体应用器是一个直径17.8 cm, 2.45 GHz的圆柱形谐振器,一端由滑动短段终止,另一端由过密的圆盘状等离子体终止。材料的加工或离子的提取发生在等离子盘无场的下表面。此时,离子密度通常为10/sup 11/-10/sup 12/ cm/sup -3/,并且随着距离放电下游的距离呈指数下降。电子能量分布函数为麦克斯韦分布函数,在3 mtor以下更接近于平均能量为5 ~ 8.5 eV的Druyvesteyn分布。对接地衬底的离子能量通常为10-25 eV,很少有高能(>25 eV)离子。
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引用次数: 0
High repetition rate, wide bandpass, data acquisition system for high power microwave applications 高重复率,宽带通,数据采集系统的高功率微波应用
Pub Date : 1989-05-22 DOI: 10.1109/PLASMA.1989.166234
L. M. Miner, D. Voss, P. R. Perea
A description is given of the system architecture, digitizing hardware, data capture and archiving software, and networking of a system for transient signal capture and analysis. This system is suitable for use with the multihertz repetition rated pulsed power supplies used for high-power microwave source development and effects testing. The system is automated using a high-speed GPIF interface through a VAX 3500/3600 workstation. Each of the data acquisition stations is controlled by one of two VAX 8650 mainframes over the local area VAX cluster. Shot data are stored using the Ingres database. Data analysis is done at any of the 25 PCs acting as DECNET nodes using DADiSP analysis software. The system archives as many as two dozen channels at repetition rates of approximately 2 Hz.<>
介绍了一种暂态信号采集与分析系统的系统结构、数字化硬件、数据采集与归档软件以及组网。该系统适用于用于大功率微波源开发和效果测试的多赫兹额定重复脉冲电源。该系统通过VAX 3500/3600工作站使用高速GPIF接口实现自动化。每个数据采集站由本地VAX集群上的两台VAX 8650大型机中的一台控制。镜头数据使用Ingres数据库存储。使用DADiSP分析软件,在作为DECNET节点的25台pc中的任何一台上进行数据分析。该系统以大约2hz的重复频率存档多达24个频道。
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引用次数: 1
Dielectric-barrier discharge for the removal of SO/sub 2/ from flue gas 介质阻挡放电法去除烟气中SO/sub / 2
Pub Date : 1989-05-22 DOI: 10.1109/PLASMA.1989.166255
S. Dhali, I. Sardja
Experimental results on the removal of SO/sub 2/ from a synthetic flue gas using a dielectric-barrier discharge have been obtained. The dielectric-barrier discharge, also known as silent discharge or partial discharge, is intermittent, and the current exhibits a large number of spikes during that part of the voltage period when the discharge is burning. The discharge electrode configuration is coaxial. The inner electrode is either exposed metal or is covered with glass, and the outer electrode is quartz coated with a conducting surface. The removal of SO/sub 2/ has been studied for several different gas mixtures, flows and pressures. A typical measurement shows a 44% reduction in SO/sub 2/ concentration for a sample gas of 32 parts per million of SO/sub 2/ in air in a 15-kV, 60-Hz, and 0.75-mA silent discharge.<>
获得了利用介电阻挡放电去除合成烟气中SO/ sub2 /的实验结果。介质阻挡放电,也称为无声放电或局部放电,是间歇性的,在放电燃烧时的电压期间,电流表现出大量的尖峰。放电电极的结构是同轴的。内电极是裸露的金属或用玻璃覆盖,外电极是石英,表面涂有导电表面。研究了几种不同的气体混合物、流量和压力对SO/ sub2 /的去除效果。典型的测量显示,在15 kv, 60 hz, 0.75 ma静音放电条件下,空气中SO/sub /浓度为百万分之32的样品气体,SO/sub /浓度降低44%。
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引用次数: 3
Generation and focusing of high power ion beam in magnetically insulated diode with applied B-field 外加b场磁绝缘二极管中高能离子束的产生和聚焦
Pub Date : 1989-05-22 DOI: 10.1109/PLASMA.1989.166095
V. Bystritskii, S. Volkov, Y. Krasik, I. Lisitsyn, N. Polkovnikova
High-power ion beam (HPIB) generation and plasma formation processes in a magnetically insulated diode (MID) installed at a 3*10/sup 10/-W nanosecond accelerator are reported. The possibility of efficient HPIB ballistic focusing using the performed plasma in the HPIB transport region has been demonstrated. Several new diagnostics (spring pendulum and acoustic probe) were used to measure the plasma ablation pressure during the impact of the HPIB with the target. The plasma formation and its behavior in the diode gap were studied by a high-voltage probe, array of collimated Faraday cups, and streak image converter. The electron losses at the anode played the dominant role in the MID impedance behavior. The application of the active plasma source provided control of the HPIB characteristics and MID impedance behavior. The highest degree of HPIB focusing attained during the experiments with spherical-geometry diode electrodes was equal to 60. The ablation average pressures measured by spring pendulum gave several kilobars for 8-10 kA/cm/sup 2/ of HPIB density. The peak pressures attained tens of kilobars for respective HPIB current amplitudes.<>
本文报道了安装在3*10/sup 10/-W纳秒加速器上的磁绝缘二极管(MID)的高功率离子束(HPIB)产生和等离子体形成过程。在HPIB输运区利用等离子体进行高效HPIB弹道聚焦的可能性已经被证明。在HPIB与靶体撞击过程中,采用了几种新的诊断方法(弹簧摆和声波探头)来测量等离子体消融压力。采用高压探头、准直法拉第杯阵列和条纹图像转换器研究了等离子体在二极管缝隙中的形成及其行为。阳极处的电子损耗在MID阻抗行为中起主导作用。主动等离子体源的应用提供了对HPIB特性和MID阻抗行为的控制。在球面二极管电极实验中获得的HPIB聚焦的最高程度等于60。当HPIB密度为8 ~ 10 kA/cm/sup /时,弹簧摆测得的消融平均压力为几千巴。对于各自的HPIB电流幅值,峰值压力达到数十千巴。
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引用次数: 1
期刊
IEEE 1989 International Conference on Plasma Science
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