Pub Date : 1989-05-22DOI: 10.1109/PLASMA.1989.166035
U. Sen, D. Benenson
Experimental studies were conducted to determine the spatial and temporal distributions of average temperature and the fluctuations of a dynamic nitrogen arc column in a single-flow-nozzle arrangement. The arc was operated at a stagnation pressure of 14 bars absolute. The test section contained a converging-diverging (shock-free) nozzle with a throat diameter of 10 mm and an electrode spacing of 10 mm. Provisions were incorporated for measurements of static pressures along the nozzle wall and observation of plasma radiation through viewing windows located 3 mm and 20 mm downstream of the throat. The data indicated that under comparable current levels, lower centerline arc temperature and higher fluctuations occur 20 mm downstream from the throat as compared to results obtained near the throat (about 30% and 3%, respectively). The results also showed that turbulence starts at the outer edge and progresses inward to the center of the arc column. A one-dimensional arc model has been applied, and the computed timewise distributions of centerline arc temperature and arc diameter showed reasonably good agreement with experimental results.<>
{"title":"Turbulence studies of high pressure dynamic nitrogen arcs","authors":"U. Sen, D. Benenson","doi":"10.1109/PLASMA.1989.166035","DOIUrl":"https://doi.org/10.1109/PLASMA.1989.166035","url":null,"abstract":"Experimental studies were conducted to determine the spatial and temporal distributions of average temperature and the fluctuations of a dynamic nitrogen arc column in a single-flow-nozzle arrangement. The arc was operated at a stagnation pressure of 14 bars absolute. The test section contained a converging-diverging (shock-free) nozzle with a throat diameter of 10 mm and an electrode spacing of 10 mm. Provisions were incorporated for measurements of static pressures along the nozzle wall and observation of plasma radiation through viewing windows located 3 mm and 20 mm downstream of the throat. The data indicated that under comparable current levels, lower centerline arc temperature and higher fluctuations occur 20 mm downstream from the throat as compared to results obtained near the throat (about 30% and 3%, respectively). The results also showed that turbulence starts at the outer edge and progresses inward to the center of the arc column. A one-dimensional arc model has been applied, and the computed timewise distributions of centerline arc temperature and arc diameter showed reasonably good agreement with experimental results.<<ETX>>","PeriodicalId":165717,"journal":{"name":"IEEE 1989 International Conference on Plasma Science","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127079434","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-05-22DOI: 10.1109/PLASMA.1989.166193
C. C. Kung, M. Rhee
A comprehensive circuit analysis of basic inductive energy pulsed power systems has been conducted. In most practical systems, the inductive energy is stored in a lumped inductor by a slow current charging and then rapidly released to a load by means of an opening switch. Such a system may be practical for generation of a relatively slow output pulse. It has been shown by M.J. Rhee et al. (1987) that, as in capacitive systems, a fast square pulse can be produced by using a transmission line for energy storage in lieu of the lumped inductor, resulting in a high power multiplication. In addition, the authors have proposed a few other inductive energy circuits that may be useful for practical applications. These are the duals of well-known capacitive energy circuits such as the LC generator and the Blumlein line. The output pulse waveforms, with relevant circuit parameters, have been derived for a number of basic inductive energy storage circuits.<>
{"title":"Circuit description of inductive energy storage pulsed power systems","authors":"C. C. Kung, M. Rhee","doi":"10.1109/PLASMA.1989.166193","DOIUrl":"https://doi.org/10.1109/PLASMA.1989.166193","url":null,"abstract":"A comprehensive circuit analysis of basic inductive energy pulsed power systems has been conducted. In most practical systems, the inductive energy is stored in a lumped inductor by a slow current charging and then rapidly released to a load by means of an opening switch. Such a system may be practical for generation of a relatively slow output pulse. It has been shown by M.J. Rhee et al. (1987) that, as in capacitive systems, a fast square pulse can be produced by using a transmission line for energy storage in lieu of the lumped inductor, resulting in a high power multiplication. In addition, the authors have proposed a few other inductive energy circuits that may be useful for practical applications. These are the duals of well-known capacitive energy circuits such as the LC generator and the Blumlein line. The output pulse waveforms, with relevant circuit parameters, have been derived for a number of basic inductive energy storage circuits.<<ETX>>","PeriodicalId":165717,"journal":{"name":"IEEE 1989 International Conference on Plasma Science","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124858422","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-05-22DOI: 10.1109/PLASMA.1989.166092
R. Stinnett, T. Lockner, D. J. Johnson, R. Coates, T. Mehlhorn, M. Desjarlais, K. Bieg, A. Pregenzer, J. Woodworth, R. Leeper, J. Maenchen, C. Ruiz, W. Stygar, J. Bailey, R. Kensek, J. Quintenz, S. Rosenthal, S. Slutz, D. Hanson, P. McKay
Significant progress has been made recently in ion-beam production and focusing in both radial focusing and extraction geometries. Experiments on Sandia's Particle Beam Fusion Accelerator (PBFA) II have demonstrated efficient ion-beam generation, with 0.6 MJ of ions produced with 80% ion efficiency on experiments at the 3/4 energy level. With the flashover ion sources presently used on PBFA II, approximately half of the ion are protons. Horizontal FWHM proton focuses of approximately 5 mm have been obtained at diode voltages of over 5 MV. Experiments have revealed a linear scaling of FWHM with anode-cathode gap. Experiments and simulations have provided important information on the effects of both solenoidal and self-field focusing in the diode. Extraction diode experiments have been conducted in support of Sandia's light ion version of the US Department of Energy's Laboratory Microfusion Facility (LMF). Results from diode experiments on the 0.7-TW Mite accelerator together with an improved understanding of diode operation provide a reasonable path to a 30-MV, 1.2-MA LMF module.<>
近年来，离子束的产生和聚焦在径向聚焦和提取几何形状方面都取得了重大进展。在桑迪亚的粒子束聚变加速器(PBFA) II上的实验证明了高效的离子束产生，在3/4能级的实验中产生了0.6 MJ的离子，离子效率为80%。目前在PBFA II上使用的闪络离子源，大约一半的离子是质子。在二极管电压大于5毫伏的情况下，获得了大约5毫米的水平FWHM质子聚焦。实验表明，FWHM与阳极-阴极间隙呈线性关系。实验和仿真为研究螺线管和自场聚焦对二极管的影响提供了重要的信息。萃取二极管实验已经进行，以支持美国能源部实验室微聚变设施(LMF)的桑迪亚光离子版本。在0.7 tw的Mite加速器上的二极管实验结果以及对二极管工作的改进理解为30 mv, 1.2 ma LMF模块提供了合理的路径。
{"title":"Progress in ion beam research at Sandia National Laboratories","authors":"R. Stinnett, T. Lockner, D. J. Johnson, R. Coates, T. Mehlhorn, M. Desjarlais, K. Bieg, A. Pregenzer, J. Woodworth, R. Leeper, J. Maenchen, C. Ruiz, W. Stygar, J. Bailey, R. Kensek, J. Quintenz, S. Rosenthal, S. Slutz, D. Hanson, P. McKay","doi":"10.1109/PLASMA.1989.166092","DOIUrl":"https://doi.org/10.1109/PLASMA.1989.166092","url":null,"abstract":"Significant progress has been made recently in ion-beam production and focusing in both radial focusing and extraction geometries. Experiments on Sandia's Particle Beam Fusion Accelerator (PBFA) II have demonstrated efficient ion-beam generation, with 0.6 MJ of ions produced with 80% ion efficiency on experiments at the 3/4 energy level. With the flashover ion sources presently used on PBFA II, approximately half of the ion are protons. Horizontal FWHM proton focuses of approximately 5 mm have been obtained at diode voltages of over 5 MV. Experiments have revealed a linear scaling of FWHM with anode-cathode gap. Experiments and simulations have provided important information on the effects of both solenoidal and self-field focusing in the diode. Extraction diode experiments have been conducted in support of Sandia's light ion version of the US Department of Energy's Laboratory Microfusion Facility (LMF). Results from diode experiments on the 0.7-TW Mite accelerator together with an improved understanding of diode operation provide a reasonable path to a 30-MV, 1.2-MA LMF module.<<ETX>>","PeriodicalId":165717,"journal":{"name":"IEEE 1989 International Conference on Plasma Science","volume":"60 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125804097","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-05-22DOI: 10.1109/PLASMA.1989.165957
M. Bose
Summary form only. The author has considered a plasma model in which the electrons consist of two distinct groups, i.e. hot and cold. He has investigated analytically the drift dissipative instabilities of modified electron-acoustic and lower-hybrid waves in such a two-electron-temperature plasma. He has found that the modified electron-acoustic drift dissipative mode are strongly dependent on the number density of the cold electrons. From the expression for the growth rate, it is clear that these cold electrons can control the growth of this mode. However, the lower-hybrid drift-dissipative mode is nearly unaffected by these cold electron species.<>
{"title":"Modified electron-acoustic and lower-hybrid drift dissipative instability in a two-electron temperature plasma","authors":"M. Bose","doi":"10.1109/PLASMA.1989.165957","DOIUrl":"https://doi.org/10.1109/PLASMA.1989.165957","url":null,"abstract":"Summary form only. The author has considered a plasma model in which the electrons consist of two distinct groups, i.e. hot and cold. He has investigated analytically the drift dissipative instabilities of modified electron-acoustic and lower-hybrid waves in such a two-electron-temperature plasma. He has found that the modified electron-acoustic drift dissipative mode are strongly dependent on the number density of the cold electrons. From the expression for the growth rate, it is clear that these cold electrons can control the growth of this mode. However, the lower-hybrid drift-dissipative mode is nearly unaffected by these cold electron species.<<ETX>>","PeriodicalId":165717,"journal":{"name":"IEEE 1989 International Conference on Plasma Science","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125582745","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-05-22DOI: 10.1109/PLASMA.1989.166114
S. Kuo, M. Whang
Summary form only. The ISEE 1 and 2 spacecraft have detected both magnetosonic waves and Alfven waves propagating upstream in the high-speed solar wind. The magnetosonic wave is a hybrid and elliptically polarized mode that can propagate obliquely across the magnetic field. It becomes decoupled from the Alfven wave when the direction of its propagation is exactly perpendicular to the ambient magnetic field. The filamentation instability of the magnetosonic wave that propagates perpendicular to the magnetic field has been analyzed. The authors have extended this analysis to the general case of convective filamentation instabilities of obliquely propagating magnetosonic waves. The dispersion relation of the instability has been derived and solved numerically for the dependence of the threshold field and spatial growth rate on the wave number k of the nonoscillatory mode, the beta of the plasma, and the frequency of the magnetosonic pump.<>
{"title":"Filamentation instability of MHD waves in solar wind plasma","authors":"S. Kuo, M. Whang","doi":"10.1109/PLASMA.1989.166114","DOIUrl":"https://doi.org/10.1109/PLASMA.1989.166114","url":null,"abstract":"Summary form only. The ISEE 1 and 2 spacecraft have detected both magnetosonic waves and Alfven waves propagating upstream in the high-speed solar wind. The magnetosonic wave is a hybrid and elliptically polarized mode that can propagate obliquely across the magnetic field. It becomes decoupled from the Alfven wave when the direction of its propagation is exactly perpendicular to the ambient magnetic field. The filamentation instability of the magnetosonic wave that propagates perpendicular to the magnetic field has been analyzed. The authors have extended this analysis to the general case of convective filamentation instabilities of obliquely propagating magnetosonic waves. The dispersion relation of the instability has been derived and solved numerically for the dependence of the threshold field and spatial growth rate on the wave number k of the nonoscillatory mode, the beta of the plasma, and the frequency of the magnetosonic pump.<<ETX>>","PeriodicalId":165717,"journal":{"name":"IEEE 1989 International Conference on Plasma Science","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126739822","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-05-22DOI: 10.1109/PLASMA.1989.166166
P. Proulx, J. Bilodeau
The problem of describing the evolution of the particle size distribution is considered. The authors use a statistical model, and they describe the evolution of the moments of the distribution instead of the distribution itself. Applying a macroscopic population balance to the moments equations leads to the formulation of conservation equations in terms of the moments of the distribution. Using psi -z coordinates reduces the problem to a one-dimensional problem in the direction of a stream line. This procedure is applicable when the ultrafine particles do not cross the stream lines, so that their lateral mobility is small with respect to the flow. The calculated temperature and average ultra-fine-particle diameter fields are presented for a simplified case, where a hot flow of argon with 10% iron vapor at 4000 K mixes with a pure argon flow at 2000 K.<>
{"title":"A numerical simulation of the production of ultrafine particles in a thermal plasma reactor","authors":"P. Proulx, J. Bilodeau","doi":"10.1109/PLASMA.1989.166166","DOIUrl":"https://doi.org/10.1109/PLASMA.1989.166166","url":null,"abstract":"The problem of describing the evolution of the particle size distribution is considered. The authors use a statistical model, and they describe the evolution of the moments of the distribution instead of the distribution itself. Applying a macroscopic population balance to the moments equations leads to the formulation of conservation equations in terms of the moments of the distribution. Using psi -z coordinates reduces the problem to a one-dimensional problem in the direction of a stream line. This procedure is applicable when the ultrafine particles do not cross the stream lines, so that their lateral mobility is small with respect to the flow. The calculated temperature and average ultra-fine-particle diameter fields are presented for a simplified case, where a hot flow of argon with 10% iron vapor at 4000 K mixes with a pure argon flow at 2000 K.<<ETX>>","PeriodicalId":165717,"journal":{"name":"IEEE 1989 International Conference on Plasma Science","volume":"1230 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115044632","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-05-22DOI: 10.1109/PLASMA.1989.166049
R. G. Greaves, P. J. Barrett
The heating of an ion beam by the ion acoustic turbulence generated as the beam streams across a weak magnetic field through magnetized electrons was investigated. A quasilinear (QL) relationship between the spatial heating rate delta T/sub i// delta x and the spatially growing noise energy density Psi was sought, as was any departure therefrom as Psi is varied. For the broadband turbulence encountered, QL theory gives delta T/sub i// delta x varies as Psi tau , where tau is the autocorrelation time of the turbulence. If tau remains independent of Psi , then delta T/sub i// delta x varies as Psi /sup beta /, with beta =1 for QL heating. The experiment was carried out in a double-plasma device.<>
{"title":"Departure from quasilinear heating in a cross-field ion beam experiment","authors":"R. G. Greaves, P. J. Barrett","doi":"10.1109/PLASMA.1989.166049","DOIUrl":"https://doi.org/10.1109/PLASMA.1989.166049","url":null,"abstract":"The heating of an ion beam by the ion acoustic turbulence generated as the beam streams across a weak magnetic field through magnetized electrons was investigated. A quasilinear (QL) relationship between the spatial heating rate delta T/sub i// delta x and the spatially growing noise energy density Psi was sought, as was any departure therefrom as Psi is varied. For the broadband turbulence encountered, QL theory gives delta T/sub i// delta x varies as Psi tau , where tau is the autocorrelation time of the turbulence. If tau remains independent of Psi , then delta T/sub i// delta x varies as Psi /sup beta /, with beta =1 for QL heating. The experiment was carried out in a double-plasma device.<<ETX>>","PeriodicalId":165717,"journal":{"name":"IEEE 1989 International Conference on Plasma Science","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115181273","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-05-22DOI: 10.1109/PLASMA.1989.166290
S. Mendelsohn, A. Todd, H. Wexler, G. Navratil
Access to an operation in the second regime, using a large aspect ratio range (R/a=6-9) device, is discussed. The large aspect ratio was chosen to reduce required heating power for second regime studies and to permit large aspect ratio confinement experiments under ohmic, NBI, and ECH heating conditions. In addition, it leads to a simplified machine geometry based on reduced stresses from relatively low values of plasma current and magnetic field strength. Design features include an inside null divertor to test divertor physics at high beta and to provide added flexibility to control the plasma boundary. A close-fitting, adjustable conducting shell providing stabilization against external modes allows study of wall-plasma separation effects and permit R/a variation. The size and field of the SRX conceptual design were selected to minimize cost while maintaining sufficient beam-ion confinement for neutral beam current drive and sufficient bulk-ion thermal confinement for meaningful measurements of tokamak energy confinement scaling at high beta.<>
{"title":"SRX-precursor to large scale high beta plasma devices","authors":"S. Mendelsohn, A. Todd, H. Wexler, G. Navratil","doi":"10.1109/PLASMA.1989.166290","DOIUrl":"https://doi.org/10.1109/PLASMA.1989.166290","url":null,"abstract":"Access to an operation in the second regime, using a large aspect ratio range (R/a=6-9) device, is discussed. The large aspect ratio was chosen to reduce required heating power for second regime studies and to permit large aspect ratio confinement experiments under ohmic, NBI, and ECH heating conditions. In addition, it leads to a simplified machine geometry based on reduced stresses from relatively low values of plasma current and magnetic field strength. Design features include an inside null divertor to test divertor physics at high beta and to provide added flexibility to control the plasma boundary. A close-fitting, adjustable conducting shell providing stabilization against external modes allows study of wall-plasma separation effects and permit R/a variation. The size and field of the SRX conceptual design were selected to minimize cost while maintaining sufficient beam-ion confinement for neutral beam current drive and sufficient bulk-ion thermal confinement for meaningful measurements of tokamak energy confinement scaling at high beta.<<ETX>>","PeriodicalId":165717,"journal":{"name":"IEEE 1989 International Conference on Plasma Science","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122822423","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-05-22DOI: 10.1109/PLASMA.1989.166291
D. McGarrah, M. Brake
Unusual light emission has been observed in relativistic-electron-beam (REB)-produced plasmas in rare gases. In order to understand these studies of argon ion emission produced by a relativistic electron beam, the authors have generated a complete set of cross sections and deposition efficiencies for singly ionized argon experiencing collisions with relativistic electrons. Calculations of the electron impact excitation cross sections considering electrons with energies up to and including relativistic values have been made using the first Born approximation modified by Fano and the generalized oscillator formalism. Deposition efficiencies for fast electrons were generated from an integral equation based on the continuously slowing down approximation calculations of the energy apportionment for electron energies from 1 keV to 10 MeV. For most transitions the values of the efficiencies are roughly constant above a beam energy of about 1 keV, although in a few cases the efficiency continues to increase up to beam electron energies of 10 keV. Electrons ejected from inner shells contribute up to 12% of the efficiency of the transition for electrons above 10 keV.<>
{"title":"Collision cross sections and deposition efficiencies for argon ion excitation by relativistic electrons","authors":"D. McGarrah, M. Brake","doi":"10.1109/PLASMA.1989.166291","DOIUrl":"https://doi.org/10.1109/PLASMA.1989.166291","url":null,"abstract":"Unusual light emission has been observed in relativistic-electron-beam (REB)-produced plasmas in rare gases. In order to understand these studies of argon ion emission produced by a relativistic electron beam, the authors have generated a complete set of cross sections and deposition efficiencies for singly ionized argon experiencing collisions with relativistic electrons. Calculations of the electron impact excitation cross sections considering electrons with energies up to and including relativistic values have been made using the first Born approximation modified by Fano and the generalized oscillator formalism. Deposition efficiencies for fast electrons were generated from an integral equation based on the continuously slowing down approximation calculations of the energy apportionment for electron energies from 1 keV to 10 MeV. For most transitions the values of the efficiencies are roughly constant above a beam energy of about 1 keV, although in a few cases the efficiency continues to increase up to beam electron energies of 10 keV. Electrons ejected from inner shells contribute up to 12% of the efficiency of the transition for electrons above 10 keV.<<ETX>>","PeriodicalId":165717,"journal":{"name":"IEEE 1989 International Conference on Plasma Science","volume":"461 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123024874","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-05-22DOI: 10.1109/PLASMA.1989.166269
R. Carlile, J. L. Houghten
A technique in which the sidewall angle of a via is controlled by the components of the chemistry is reported. The wafer is
本文报道了一种由化学成分控制通孔侧壁角的技术。晶圆片是
{"title":"Etching of vias in SiO/sub 2/ with controllable sidewall angles","authors":"R. Carlile, J. L. Houghten","doi":"10.1109/PLASMA.1989.166269","DOIUrl":"https://doi.org/10.1109/PLASMA.1989.166269","url":null,"abstract":"A technique in which the sidewall angle of a via is controlled by the components of the chemistry is reported. The wafer is","PeriodicalId":165717,"journal":{"name":"IEEE 1989 International Conference on Plasma Science","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128528995","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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