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Electrical characteristics of the GEC reference cell at low pressure: A two-dimensional PIC/MCC modeling study GEC 基准电池在低压下的电气特性:二维 PIC/MCC 建模研究
Pub Date : 2024-03-27 DOI: 10.1088/1361-6595/ad3849
Zili Chen, Hongyu Wang, Shimin Yu, Yu Wang, Zhipeng Chen, Wei Jiang, Julian Schulze, Ya Zhang
The electrical characteristics of the Gaseous Electronics Conference (GEC) reference cell at low pressures are investigated using a two-dimensional electrostatic implicit particle-in-cell / Monte Carlo collision model (PIC / MCC) in cylindrical coordinates. The coupling between the complex reactor geometry and the external circuit is included via an equivalent capacitance calculated from the electric energy density and the charge conservation equation. The results of this model are compared with experimental measurements and other model calculations and show agreement. The plasma series resonance (PSR) effect, closely related to electron heating, is observed in this numerical simulation of a strongly asymmetric reactor at low pressures. The plasma kinetics of the capacitively coupled discharge and details of the external circuit response, including electrical waveforms and higher-order harmonics, are discussed at different pressures, which provides important insights for understanding the power coupling mechanisms in capacitively coupled discharges.
使用圆柱坐标的二维静电隐式粒子-电池/蒙特卡洛碰撞模型(PIC/MCC)研究了气态电子会议(GEC)基准电池在低压下的电气特性。根据电能密度和电荷守恒方程计算出的等效电容包含了复杂反应器几何形状与外部电路之间的耦合。该模型的结果与实验测量结果和其他模型计算结果进行了比较,结果显示一致。在对低压下的强不对称反应器进行的数值模拟中,观察到了与电子加热密切相关的等离子体串联共振(PSR)效应。讨论了不同压力下电容耦合放电的等离子体动力学和外电路响应的细节,包括电波形和高阶谐波,这为理解电容耦合放电中的功率耦合机制提供了重要启示。
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引用次数: 0
Statistical analysis on branching characteristics of positive streamer discharges in N2-O2 mixtures 关于 N2-O2 混合物中正流放电分支特征的统计分析
Pub Date : 2024-03-26 DOI: 10.1088/1361-6595/ad37bf
Yihao Guo, S. Nijdam
Streamers are fast-propagating ionization channels that can usually branch and form complex tree-like structures in dielectric media. In this paper, we perform experiments on positive streamers in different N2-O2 mixtures under varying conditions including voltage, pressure, and electrode geometry, with at least 125 discharge images captured for each condition. We present a statistical analysis on streamer branching characteristics from 3D models that are reconstructed by stereoscopic stroboscopic images and our dedicated semi-automatic 3D reconstruction method. We found that by varying the concentration of O2, the morphology and branching characteristics are greatly changed. Specifically, the average branching angle decrease significantly from 90° in air to 66° in 1% O2, suggesting that photoionization plays an important role in streamer branching. The branching angles in our work are generally larger than previously reported results due to the resolved 3D structures of discharges by our method. A linear relation between the streamer diameter ratio and the branching direction difference of two daughter branches is found, which intersects the vertical axis almost at unity. It is also found that the average branching angles, streamer velocities and diameters increase as the voltage increases. This is again attributed to stronger photoionization effect under higher voltages. The velocities and diameters are similar at different pressures but at the same reduced electric field. The average branching angle decreases from 90° at 133 mbar to 79° at 200 mbar. This suggests that stochastic fluctuations become dominant over photoionization effect at higher pressures.
流线是一种快速传播的电离通道,通常可以在介电质中分支并形成复杂的树状结构。在本文中,我们在不同的条件(包括电压、压力和电极几何形状)下,对不同 N2-O2 混合物中的正流束进行了实验,每种条件下至少捕获了 125 幅放电图像。我们通过立体频闪图像重建的三维模型和专用的半自动三维重建方法,对流束分支特征进行了统计分析。我们发现,随着氧气浓度的变化,流线的形态和分支特征都发生了很大变化。具体来说,平均分枝角从空气中的 90° 显著下降到 1%氧气中的 66°,这表明光离子化在流线分枝中起着重要作用。由于我们的方法解析了放电的三维结构,因此我们工作中的分支角通常比以前报告的结果要大。研究发现,流线直径比与两个子分支的分支方向差之间存在线性关系,其与纵轴的交点几乎为 1。研究还发现,平均分支角、流线速度和直径随着电压的增加而增大。这同样归因于较高电压下更强的光离子化效应。在不同的压力和相同的减弱电场下,速度和直径相似。平均分支角从 133 毫巴时的 90°下降到 200 毫巴时的 79°。这表明,在较高压力下,随机波动比光离子化效应更占优势。
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引用次数: 0
Formation of Ar2 + ions in cold argon plasmas through the ternary recombination mechanism 通过三元重组机制在冷氩等离子体中形成 Ar2 + 离子
Pub Date : 2024-03-25 DOI: 10.1088/1361-6595/ad377a
Fresnelle Tenanguena Nongni, R. Kalus, M. Benhenni, F. Gadéa, Mohammed Yousfi
A general scheme for calculating ternary recombination rate constants of atomic species based on a hybrid quantum-classical nonadiabatic dynamics approach is presented and applied to a specific case of the ternary recombination of atomic ions of argon in cold argon plasmas. Rate constants are reported for both fine-structure states of the Ar$^+$ ion, $^2P_{3/2}$ and $^2P_{1/2}$, $T = 300$ K, and selected values of the reduced electric field. A thorough comparison with literature data available for $T=300$ K and a couple of close temperatures is performed with a favorable agreement achieved. It is shown that the excited Ar$^+(^2P_{1/2})$ ions may contribute to the formation of dimer ions, Ar$_2^+$, as efficiently as the ground-state ions, Ar$^+(^2P_{3/2})$, due to fast internal conversion of the electronic energy which takes place in ternary collision complexes, Ar$^+$/Ar/Ar.
本文介绍了基于混合量子经典非绝热动力学方法计算原子物种三元重组速率常数的一般方案,并将其应用于冷氩等离子体中氩原子离子三元重组的特定情况。报告了 Ar$^+$ 离子的两种精细结构状态($^2P_{3/2}$ 和 $^2P_{1/2}$)、$T = 300$ K 和选定的还原电场值的速率常数。与文献中关于 $T=300$ K 和几个相近温度的数据进行了全面比较,结果一致。结果表明,激发态 Ar$^+(^2P_{1/2})$ 离子与基态离子 Ar$^+(^2P_{3/2})$ 一样,由于在三元碰撞复合物 Ar$^+$/Ar/Ar 中发生了电子能量的快速内部转换,因此激发态 Ar$^+(^2P_{1/2})$ 离子可以有效地促进二聚态离子 Ar$_2^+$ 的形成。
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引用次数: 0
Determining the swarm parameters of gases considering ion kinetics by parallel genetic algorithm on GPU platform 通过 GPU 平台上的并行遗传算法确定考虑离子动力学的气体群参数
Pub Date : 2024-03-20 DOI: 10.1088/1361-6595/ad31b3
Mai Hao, Boya Zhang, Xingwen Li, Peiqiong Liu, Yuyang Yao, Anthony B Murphy
In this work, a convenient and efficient method is proposed to determine swarm parameters considering ion kinetics from pulsed Townsend (PT) measurements. First, a physical model was presented to describe the development of PT discharge considering electron detachment and ion conversion reactions. A numerical solution to the model was also proposed. In order to assess the precision of our calculations, we presented the calculated electronic and ionic transients derived from our model for different cases. Then, a genetic algorithm (GA) was proposed to find a set of swarm parameters, under which the deviation between the simulated current waveform and the actual measured current waveform is minimum. It is time-consuming to simulate a single waveform, and since a large number of waveforms need to be simulated in the GA, graphic processing unit-based parallel computing is used to improve computing efficiency. Finally, the swarm parameters of dry air considering electron detachment and ion conversion processes using the method were obtained and they are in good agreement with those in references.
在这项工作中,我们提出了一种便捷高效的方法,通过脉冲汤森(PT)测量来确定考虑到离子动力学的蜂群参数。首先,考虑到电子脱离和离子转换反应,提出了一个物理模型来描述 PT 放电的发展过程。此外,还提出了该模型的数值解决方案。为了评估计算的精确性,我们展示了根据模型计算出的不同情况下的电子和离子瞬态。然后,我们提出了一种遗传算法(GA)来寻找一组蜂群参数,在该参数下,模拟电流波形与实际测量电流波形之间的偏差最小。模拟单个波形耗时较长,由于在 GA 中需要模拟大量波形,因此采用了基于图形处理单元的并行计算来提高计算效率。最后,利用该方法得到了考虑了电子脱离和离子转换过程的干燥空气的蜂群参数,这些参数与参考文献中的参数非常一致。
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引用次数: 0
Numerical simulation of streamer, pressure wave, and vortex induced by nanosecond pulsed surface dielectric barrier discharges 纳秒脉冲表面介质阻挡层放电诱导的流线、压力波和涡流的数值模拟
Pub Date : 2024-03-18 DOI: 10.1088/1361-6595/ad2d6c
Jiao Zhang, Weiwei Tang, Yanhui Wang, Dezhen Wang
In this study, a two-dimensional fluid model is employed to simulate the streamer, pressure wave, and vortex in surface dielectric barrier discharge driven by nanosecond pulse voltage (ns-SDBD). It comprises a numerical model with two interconnected modules: discharge dynamics and gas flow dynamics. These modules are coupled through the physical variables including ‘EHD force’, ‘thermal source’, ‘velocity field’, ‘gas temperature’, and ‘gas pressure’. Our research primarily focuses on the underlying physical mechanisms of pressure waves and vortices for plasma-based flow control. The generation of pressure waves is attributed to the rapid gas heating by pulsed discharge, whereas the formation and development of the vortex are related to the ionic wind (EHD effect) provided by the plasma. To thoroughly understand and optimize flow control performance, an investigation into the effects of various discharge parameters, such as voltage amplitude and polarity, is conducted. Additionally, several SDBD modules are arranged in series, each featuring a dual three-electrode configuration. Subsequently, the dynamic behaviors of multiple streamers, pressure waves, and vortices, along with their interactions, are explored.
本研究采用二维流体模型模拟纳秒脉冲电压驱动的表面介质势垒放电(ns-SDBD)中的流线、压力波和涡流。该模型由一个数值模型和两个相互关联的模块组成:放电动力学和气体流动动力学。这些模块通过 "EHD 力"、"热源"、"速度场"、"气体温度 "和 "气体压力 "等物理变量耦合在一起。我们的研究主要集中于压力波和涡流的基本物理机制,以实现基于等离子体的流动控制。压力波的产生归因于脉冲放电对气体的快速加热,而漩涡的形成和发展则与等离子体提供的离子风(EHD 效应)有关。为了深入了解和优化流量控制性能,我们对电压幅值和极性等各种放电参数的影响进行了研究。此外,多个 SDBD 模块串联排列,每个模块都采用双三电极配置。随后,探讨了多流线、压力波和涡流的动态行为及其相互作用。
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引用次数: 0
Study of synchronous RF pulsing in dual frequency capacitively coupled plasma 双频电容耦合等离子体中的同步射频脉冲研究
Pub Date : 2024-03-11 DOI: 10.1088/1361-6595/ad29be
Abhishek Verma, Shahid Rauf, Kallol Bera, D Sydorenko, A Khrabrov, Igor Kaganovich
Low-pressure multi-frequency capacitively coupled plasmas (CCPs) are used for numerous etch and deposition applications in the semiconductor industry. Pulsing of the radio-frequency (RF) sources enables control of neutral and charged species in the plasma on a millisecond timescale. The synchronous (i.e. simultaneous, in-phase) pulsing of both power sources in a dual frequency CCP is examined in this article. Due to the low gas pressure, modeling has been done using the electrostatic particle-in-cell/Monte Carlo collision method. The objective of this work is to investigate the sensitivity of the plasma properties to small changes in timing during synchronous pulsing of the two RF sources. It is demonstrated that small deviations in the on and off times of the two RF sources can lead to major changes in the plasma characteristics. This high sensitivity is of concern for process repeatability but can be utilized to enable better control of the dynamics of plasma-surface interaction. In the simulations, the pulsing parameters (on and off times and ramp rates) are varied and the temporal evolution of plasma characteristics such as electron density (ne), species current at the electrode, and electron temperature are examined. It is demonstrated that if the low-frequency (LF) source is turned off a few μs before (or after) the high-frequency source, ne during the off-state is significantly higher (or lower) due to the frequency coupling effect. Similarly, turning on the LF source with a small delay results in a sharp increase in the plasma density when the RF sources are turned on.
低压多频电容耦合等离子体(CCP)被广泛应用于半导体工业的蚀刻和沉积领域。射频(RF)源的脉冲可在毫秒级的时间范围内控制等离子体中的中性和带电物种。本文对双频 CCP 中两个电源的同步(即同时、同相)脉冲进行了研究。由于气体压力较低,建模采用了静电粒子-电池/蒙特卡洛碰撞方法。这项工作的目的是研究两个射频源同步脉冲期间等离子体特性对时间微小变化的敏感性。研究表明,两个射频源开启和关闭时间的微小偏差会导致等离子体特性发生重大变化。这种高灵敏度会影响工艺的可重复性,但也可用于更好地控制等离子体与表面相互作用的动态。在模拟中,改变脉冲参数(开、关时间和斜率),并检查等离子体特性的时间演变,如电子密度(ne)、电极上的物种电流和电子温度。结果表明,如果低频源在高频源之前(或之后)几微秒关闭,由于频率耦合效应,关闭状态下的电子密度(ne)会明显升高(或降低)。同样,在开启射频源时,如果低频源的开启延迟较小,则等离子体密度会急剧增加。
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引用次数: 0
Polarization properties of E-FISH signals and optimization of simultaneous measurement of electric field vectors E-FISH 信号的极化特性以及电场矢量同步测量的优化
Pub Date : 2024-03-08 DOI: 10.1088/1361-6595/ad2e3c
Xinlei Zheng, Zheng Zhao, Haotian Zheng, Zongze Huang, Zihan Sun, Jiangtao Li
Electric field measurements based on the electric field induced second harmonic (E-FISH) method have been employed in a wide range of studies. Most studies typically measure two components of the electric field separately. Although there have been proposals for the simultaneous measurement of electric field vectors, the imbalance of the two corresponding E-FISH signals has limited its application. Furthermore, the relationship between the polarization of the E-FISH signal and the direction of external electric field remains unclear. In this paper, the general expressions for the polarization and power of both components of E-FISH signals are derived, assuming arbitrary probe beam polarization and external electric field direction. The theoretical results indicate that the polarization of E-FISH signals varies along the interaction length. The final signal’s polarization is elliptically polarized for arbitrary electric field distribution and is correlated with the polarization of the probe beam, which deviates from what is commonly assumed to be consistent with the external electric field. If the polarization of the probe beam is not parallel to the axes, the power of each signal component is determined by both components of the external electric field, which lays the foundation for the simultaneous measurement of electric field vectors. This theoretical prediction is subsequently validated by experimental results. Finally, the power maps suggest that the optimal polarization angle of the probe beam is 45° or 135° to achieve a balanced signal power when measuring an unknown electric field vector. Both components of the electric field can be simultaneously obtained according to the theoretical relationship.
基于电场诱导二次谐波(E-FISH)方法的电场测量已被广泛应用于各种研究中。大多数研究通常分别测量电场的两个分量。虽然也有人提议同时测量电场矢量,但两个相应的 E-FISH 信号的不平衡限制了其应用。此外,E-FISH 信号的极化与外部电场方向之间的关系仍不清楚。本文假设探针光束极化和外电场方向任意,推导出了 E-FISH 信号两个分量的极化和功率的一般表达式。理论结果表明,E-FISH 信号的极化沿相互作用长度变化。在任意电场分布的情况下,最终信号的极化是椭圆极化,与探针光束的极化相关,而探针光束的极化偏离了通常假定的与外电场一致的极化。如果探针光束的极化与轴线不平行,则每个信号分量的功率由外电场的两个分量决定,这为同时测量电场矢量奠定了基础。这一理论预测随后得到了实验结果的验证。最后,功率图表明,在测量未知电场矢量时,探针光束的最佳偏振角为 45° 或 135°,以获得平衡的信号功率。根据理论关系,可以同时获得电场的两个分量。
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引用次数: 0
Micro-discharge in tortuous pores: ‘splitting-quenching’ of primary ionization wave and the role of pre-ionization 曲折孔隙中的微放电:主电离波的 "分裂-淬灭 "和预电离的作用
Pub Date : 2024-03-06 DOI: 10.1088/1361-6595/ad2c9a
Dingyuan Peng, Jialu Duan, Lan Li, Ruobing Zhang
Porous discharge has been widely studied recent years, however the discharge development inside the pores with complicated structure was little involved. In this paper, the discharge developments in vertical and tortuous pore are studied using a 2D fluid model in Cartesian coordinate system established by COMSOL Multiphysics. The discharge develops symmetrically and bilaterally in vertical pore, and along the higher potential sidewall in tortuous pore, respectively. For tortuous pore, there are two pre-ionization process with negative and positive polarity successively, the latter one splits off from the former one and is in the form of multiple ionizing heads propagating simultaneously in string. The negative one can induce the primary discharge to deflect at the channel elbow joint in a ‘splitting-quenching’ way or directly deflect it by bridging with it. For the positive one, the multiple ionizing heads can distort the electric field and short cut the potential and thus accelerate the primary discharge. Furthermore, the discharge can be enhanced deep inside the tortuous pore by the large number of seed electrons provided by pre-ionization. The influence of the dielectric constant is also studied, with the dielectric constant increases, the discharge can maintain bilateral morphology in tortuous pores for a deeper development distance.
近年来,人们对多孔排泄进行了广泛的研究,但对结构复杂的孔隙内的排泄发展却很少涉及。本文利用 COMSOL Multiphysics 建立的直角坐标系二维流体模型,研究了垂直孔隙和曲折孔隙中的放电发展。在垂直孔隙中,放电分别沿对称方向和双侧方向发展;在迂回孔隙中,放电分别沿高电位侧壁发展。在迂回孔隙中,先后存在两个极性为负和正的预电离过程,后一个过程从前一个过程中分离出来,以多个电离头同时串联传播的形式出现。负极可诱导主放电以 "分裂-淬火 "的方式在通道肘节处发生偏转,或通过与主放电桥接而直接发生偏转。对于正极,多个电离头可以扭曲电场,缩短电位,从而加速原放电。此外,通过预电离提供的大量种子电子,可以增强迂回孔隙深处的放电。还研究了介电常数的影响,随着介电常数的增大,放电可在迂回孔隙中保持双边形态,发展距离更深。
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引用次数: 0
Quantification of plasma enabled surface cooling by electron emission from high temperature materials 等离子体通过高温材料电子发射实现表面冷却的定量分析
Pub Date : 2024-03-04 DOI: 10.1088/1361-6595/ad2b7c
Junhwi Bak, Albina Tropina, James Creel, Richard B Miles
In this work, the potential for hypersonic leading edge cooling by electron emission is demonstrated. To overcome space charge limitations the experiments are carried out in an argon discharge at 1 Torr. Cooling is observed with time-resolved measurements of the electron emission current and surface temperature, taking advantage of well controlled laser heating of the emitting surface and time accurate surface pyrometry. For the ignited mode of the plasma discharge, surface cooling by the electron emission is directly observed, leading to an estimated cooling rate of 1.6±0.2 MW m−2. Higher cooling rates with self sustained plasmas for space charge mitigation are expected using cesium transpiration. A two-dimensional model of heat transfer has been developed, which reproduces well the experimentally observed cooling dynamics. Parametric tests of emitter materials with various work functions show that for effective surface cooling by electron emission, the optimal work function must be less than 3.0 eV. This result indicates that electron cooling can be a promising thermal protection method for leading edges of hypersonic vehicles in flight.
在这项工作中,通过电子发射证明了高超音速前缘冷却的潜力。为了克服空间电荷的限制,实验在 1 托的氩气放电中进行。通过对电子发射电流和表面温度进行时间分辨测量,利用对发射表面进行良好控制的激光加热和时间精确的表面高温计,观察冷却情况。在等离子体放电的点燃模式下,可直接观察到电子发射的表面冷却,估计冷却率为 1.6±0.2 MW m-2。利用铯蒸腾作用,用于空间电荷减缓的自持等离子体的冷却率预计会更高。已经建立了一个二维传热模型,该模型很好地再现了实验观察到的冷却动态。对具有各种功函数的发射器材料进行的参数测试表明,要想通过电子发射实现有效的表面冷却,最佳功函数必须小于 3.0 eV。这一结果表明,对于飞行中的高超音速飞行器前缘,电子冷却是一种很有前途的热保护方法。
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引用次数: 0
Genesis of column sprites: formation mechanisms and optical structures 柱状精灵的成因:形成机制和光学结构
Pub Date : 2024-02-26 DOI: 10.1088/1361-6595/ad29c0
R Marskar
Sprite discharges are electrical discharges that initiate from the lower ionosphere during intense lightning storms, manifesting themselves optically as flashes of light that last a few milliseconds. This study unravels sprite initiation mechanisms and evolution into distinctive morphologies like glows and beads, using direct 3D numerical simulations that capture the intricate electrical discharge processes. We clarify various morphological aspects of sprites such as the halo dynamics, column glows, branching, streamer reconnection, and bead formation. The results advance our understanding of sprites and their connection to thunderstorm dynamics, and puts quantitative analysis of their effect on Earth’s climate within reach.
魍魉放电是强烈闪电风暴期间从低层电离层引发的放电,在光学上表现为持续几毫秒的闪光。本研究利用直接三维数值模拟捕捉错综复杂的放电过程,揭示了魍魉放电的启动机制以及演变为发光和串珠等独特形态的过程。我们阐明了精灵的各种形态,如光环动力学、柱状辉光、分支、流线再连接和珠的形成。这些结果推进了我们对精灵及其与雷暴动力学联系的理解,并使我们能够对它们对地球气候的影响进行定量分析。
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引用次数: 0
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Plasma Sources Science and Technology
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