Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_7-1
A. Suzuki
{"title":"Advances in Optics and Exposure Devices Employed in Excimer Laser/EUV Lithography","authors":"A. Suzuki","doi":"10.1007/978-3-319-69537-2_7-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_7-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116827075","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_29-1
J. Dubowski
{"title":"Bandgap Engineering of Quantum Semiconductor Microstructures","authors":"J. Dubowski","doi":"10.1007/978-3-319-69537-2_29-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_29-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128515485","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_34-1
G. Corrielli, P. Paié, R. Osellame
{"title":"Applications of Femtosecond-Laser-Generated in-Volume Structures","authors":"G. Corrielli, P. Paié, R. Osellame","doi":"10.1007/978-3-319-69537-2_34-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_34-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"24 4","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132900148","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_19-1
Peixun Fan, M. Zhong
{"title":"Laser Surface Micro-Nano Structuring via Hybrid Process","authors":"Peixun Fan, M. Zhong","doi":"10.1007/978-3-319-69537-2_19-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_19-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"72 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126316474","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_32-1
S. Varapnickas, M. Malinauskas
{"title":"Processes of Laser Direct Writing 3D Nanolithography","authors":"S. Varapnickas, M. Malinauskas","doi":"10.1007/978-3-319-69537-2_32-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_32-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122228867","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_54-1
H. Mizoguchi, A. Endo, T. Yanagida, H. Nakarai, Toshihiro Oga
{"title":"EUV Sources","authors":"H. Mizoguchi, A. Endo, T. Yanagida, H. Nakarai, Toshihiro Oga","doi":"10.1007/978-3-319-69537-2_54-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_54-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121195049","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_10-1
P. Balling
{"title":"Laser Coupling and Relaxation of the Absorbed Energy: Metals, Semiconductors, and Dielectrics","authors":"P. Balling","doi":"10.1007/978-3-319-69537-2_10-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_10-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"199 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115690124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_22-1
M. Zhong, J. Long
{"title":"Laser Surface Structuring of Metals and Functionalization","authors":"M. Zhong, J. Long","doi":"10.1007/978-3-319-69537-2_22-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_22-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115489661","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_11-1
M. Shugaev, M. He, Y. Levy, A. Mazzi, A. Miotello, N. Bulgakova, L. Zhigilei
{"title":"Laser-Induced Thermal Processes: Heat Transfer, Generation of Stresses, Melting and Solidification, Vaporization, and Phase Explosion","authors":"M. Shugaev, M. He, Y. Levy, A. Mazzi, A. Miotello, N. Bulgakova, L. Zhigilei","doi":"10.1007/978-3-319-69537-2_11-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_11-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116427834","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_47-1
Chao Wei, Lin Li
{"title":"Acoustic Emission and Ultrasound Monitoring in Laser Micro/Nanofabrication","authors":"Chao Wei, Lin Li","doi":"10.1007/978-3-319-69537-2_47-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_47-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132327541","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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