Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_55-1
J. Ihlemann, T. Makimura
{"title":"Optics and Apparatus for Excimer Laser/EUV Microprocessing","authors":"J. Ihlemann, T. Makimura","doi":"10.1007/978-3-319-69537-2_55-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_55-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117330727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_41-1
H. Niino
{"title":"Photochemical and Photophysical Etching","authors":"H. Niino","doi":"10.1007/978-3-319-69537-2_41-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_41-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127799019","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_64-1
A. Narazaki
{"title":"Characterization of Laser-Processed Samples","authors":"A. Narazaki","doi":"10.1007/978-3-319-69537-2_64-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_64-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131347657","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_39-1
Seungyeon Kang, C. Arnold
{"title":"Subtractive Laser Processing Using Extended Depth of Field Focusing","authors":"Seungyeon Kang, C. Arnold","doi":"10.1007/978-3-319-69537-2_39-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_39-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"59 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127036843","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_5-2
Xiaoxu Deng, Minglie Hu
{"title":"Optics and Apparatus for Solid State Laser Micro-processing","authors":"Xiaoxu Deng, Minglie Hu","doi":"10.1007/978-3-319-69537-2_5-2","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_5-2","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"07 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114715202","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_9-1
Y. Hayasaki, S. Hasegawa
{"title":"Optics for Spatially Tailored Ultrashort Pulse Laser Beam Micro-/Nanoprocessing","authors":"Y. Hayasaki, S. Hasegawa","doi":"10.1007/978-3-319-69537-2_9-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_9-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130380011","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_4-1
A. Hohnholz, K. Rettschlag, M. Desens, P. Taschner, L. Overmeyer
{"title":"Optics and Apparatus for CO2 and CO Laser Micro-processing","authors":"A. Hohnholz, K. Rettschlag, M. Desens, P. Taschner, L. Overmeyer","doi":"10.1007/978-3-319-69537-2_4-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_4-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"182 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133445396","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_58-1
Daijun Li, K. Du
{"title":"Ultrashort Pulse Lasers","authors":"Daijun Li, K. Du","doi":"10.1007/978-3-319-69537-2_58-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_58-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124548452","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_26-1
A. Piqué, K. Charipar
{"title":"Laser-Induced Forward Transfer Applications in Micro-engineering","authors":"A. Piqué, K. Charipar","doi":"10.1007/978-3-319-69537-2_26-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_26-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"176 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121629774","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1007/978-3-319-69537-2_20-1
Chen Lianwei, Hong Minghui
{"title":"Laser Surface Structuring of Semiconductors and Functionalization","authors":"Chen Lianwei, Hong Minghui","doi":"10.1007/978-3-319-69537-2_20-1","DOIUrl":"https://doi.org/10.1007/978-3-319-69537-2_20-1","url":null,"abstract":"","PeriodicalId":212715,"journal":{"name":"Handbook of Laser Micro- and Nano-Engineering","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122907346","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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