Youmei Xing, Tao Hu, Weihua Fang, Yunjian Yin, Lijiang Gao, Weixin Liu, Xu Ding, Jin Haian, Guojie Wang
{"title":"纳米金属氧簇EUV光刻胶及其性能影响因素","authors":"Youmei Xing, Tao Hu, Weihua Fang, Yunjian Yin, Lijiang Gao, Weixin Liu, Xu Ding, Jin Haian, Guojie Wang","doi":"10.1360/ssc-2024-0008","DOIUrl":"https://doi.org/10.1360/ssc-2024-0008","url":null,"abstract":"","PeriodicalId":21640,"journal":{"name":"SCIENTIA SINICA Chimica","volume":"125 ","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140463203","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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