Lei Feng, Jing-Wei Dong, F. Lai, Jiabin Zheng, Run-Yu Gao, Le-Xing You, Jiangtao Fang, J. Sun
{"title":"Key technologies and interfacial fundamentals of wafer plating equipment","authors":"Lei Feng, Jing-Wei Dong, F. Lai, Jiabin Zheng, Run-Yu Gao, Le-Xing You, Jiangtao Fang, J. Sun","doi":"10.1360/ssc-2023-0136","DOIUrl":"https://doi.org/10.1360/ssc-2023-0136","url":null,"abstract":"","PeriodicalId":21640,"journal":{"name":"SCIENTIA SINICA Chimica","volume":" ","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"43931445","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0