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2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

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Attitude determination in dead reckoning navigation with reduced inertial support 减少惯性支持下航位推算导航中的姿态确定
Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358118
Y. Litmanovich, T. Paderina, Y. Binder
This paper further develops the new approach for compensation of the motion induced disturbances in dead reckoning navigation that was recently suggested by one of the authors [1], [2] and then presented internationally [3],[4]. The approach is alternative to the conventional one when an INS-type AHRS is used to provide attitude and heading data in order to transform the velocity components to the geographical frame. The new approach which was named Indirectly Correctable Pendulum (ICP) uses two techniques: one — is the construction of one-channel inertial vertical based on two vector observation. In doing so one vector is the specific force vector and the vertical is constructed in the plane that contains true vertical and the second vector regardless of its nature. The natural frequency of the inertial loop is defined by the nature of the second vector and can differ from the Schuler one. The second technique includes the compensation of the motion induced disturbances in the tilt angles generated from the accelerometer outputs but provided in the position components using the log data and the motion acceleration component generated in the inertial vertical channel. As a result the higher navigation accuracy and/or the reduced amount of gyros as compared to the conventional solution can be achieved.
本文进一步发展了最近由作者[1]、[2]提出并在国际上提出的[3]、[4]补偿航迹推算导航中运动扰动的新方法。该方法可替代传统的利用ins型AHRS提供姿态和航向数据,从而将速度分量转换为地理框架的方法。该方法采用了两种技术:一是基于双矢量观测构造单通道惯性垂直体。在这样做的过程中,一个矢量是特定的力矢量,垂直方向是在包含真正垂直方向的平面上构造的,而第二个矢量与它的性质无关。惯性环的固有频率由第二个矢量的性质决定,可以不同于舒勒矢量。第二种技术包括利用测井数据和惯性垂直通道中产生的运动加速度分量补偿由加速度计输出产生但在位置分量中提供的倾斜角度中的运动诱导扰动。因此,与传统解决方案相比,可以实现更高的导航精度和/或减少陀螺仪的数量。
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引用次数: 1
Liquid packaging effects on piezoresistive MEMS accelerometer 液体封装对压阻MEMS加速度计的影响
Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358133
Xixiang Liu, Weile Jiang, Libo Zhao, Chen Jia, Mingzhi Yu, Zhuangde Jiang
MEMS (Micro-electro Mechanical Systems) accelerometers are wildly used in vibration and impact detecting. Piezoresistive accelerometer is one of the wildly used types of sensor on the market with normal air package. However, when it is used in high impact environment, its fragile sensitive parts might get damaged. In this paper, we tried to use non-conducting liquid instead of air to fill the package shell of piezoresistive accelerometer. Its sensitivity and measuring range were analyzed when the package shell was filled with glycerinum, cyclohexane and silicon oil, respectively. Its resonant frequencies with glycerinum, cyclohexane and silicon oil package were also analyzed. The conclusion is that the liquid package is more suitable than air package for the piezoresistive MEMS accelerometer in harsh environment.
MEMS(微机电系统)加速度计广泛应用于振动和冲击检测。压阻式加速度计是目前市场上应用最为广泛的一种普通空气封装传感器。但是,在高冲击环境中使用时,其脆弱的敏感部件可能会受到损坏。本文尝试用非导电液体代替空气填充压阻式加速度计的封装外壳。分析了分别填充甘油、环己烷和硅油时,其灵敏度和测量范围。分析了其与甘油、环己烷和硅油包的共振频率。结论是液体封装比空气封装更适合于恶劣环境下的压阻式MEMS加速度计。
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引用次数: 0
Monitoring Earthquake through MEMS Sensors (MEMS project) in the town of Acireale (Italy) 利用MEMS传感器监测意大利acreale镇地震(MEMS项目)
Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358143
A. D’Alessandro, R. D'Anna, L. Greco, G. Passafiume, S. Scudero, S. Speciale, G. Vitale
We introduce the realization of the first European real-time urban seismic network based on Micro Electro-Mechanical Systems (MEMS) technology. The project is called Monitoring Earthquake through MEMS Sensors (MEMS) and encompass the installation of about 100 seismic station in the municipality of Acireale (Sicily, Italy). The stations, specifically designed and assembled, are equipped with a triaxial MEMS accelerometer, and gyroscope and GPS. In this paper we present the characteristics of the station and of the network. The main objective of the network is a rapid, post-earthquake disaster assessment through the automatic production of shake maps. The network also allow the implementation of an automatic recognition system for damage assessment from remotely piloted aircraft, and of a site-specific Earthquake Early Warning system.
介绍了欧洲首个基于微机电系统(MEMS)技术的实时城市地震台网的实现。该项目被称为通过MEMS传感器监测地震(MEMS),包括在acreale市(意大利西西里岛)安装约100个地震台站。这些观测站是专门设计和组装的,配备了三轴MEMS加速度计、陀螺仪和GPS。本文介绍了台站和网络的特点。该网络的主要目标是通过自动生成地震图,对震后灾害进行快速评估。该网络还允许实施远程驾驶飞机的损害评估自动识别系统,以及特定地点的地震预警系统。
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引用次数: 19
Investigating the impact of resonant cavity design on surface acoustic wave gyroscope 研究谐振腔设计对表面声波陀螺仪的影响
Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358137
A. Mahmoud, M. Mahmoud, T. Mukherjee, G. Piazza
This paper reports on the impact of the design of the resonant cavity on the noise performance of Surface Acoustic Wave Gyroscopes (SAWG). Inherently matched SAWGs were built on Y-cut Lithium Niobate (LN). Differently from all prior SAWG demonstrations, a large mass formed by periodically placed Au pillars were made to vibrate in-plane (and not out-of-plane) so as to measure rotation orthogonal to the gyroscope surface. Two cavity sizes were investigated. The larger cavity SAWG provided better performance. The experimental data agree well with theoretical expectations, hence validating our models.
本文研究了谐振腔的设计对表面声波陀螺仪噪声性能的影响。固有匹配的saw是建立在y切割铌酸锂(LN)上的。与所有先前的SAWG演示不同,由周期性放置的金柱形成的大质量在平面内(而不是平面外)振动,以便测量与陀螺仪表面正交的旋转。研究了两种空腔尺寸。更大的腔体提供了更好的性能。实验数据与理论预期吻合较好,从而验证了我们的模型。
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引用次数: 9
Combined electronics and algorithm development for offset drift characterization in MEMS accelerometers MEMS加速度计中偏移漂移特性的电子学与算法开发
Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358139
F. Maspero, V. F. López-Rey, L. Joet, S. Hentz, G. Langfelder
The work discusses methods for the characterization of the sensor-related offset drift component in MEMS capacitive accelerometers. It is shown how, even with discrete electronics, it is not trivial to isolate this contribution from electronic-related components, due to unavoidable electronics tolerances and drift. A method that involves the use of multiple (at least two), nominally identical boards, pre-characterized in terms of temperature drift, is shown to be effective in identifying sensor-related drift components with an accuracy as low as sub-50 μg/K. At the same time, the developed board reaches high-resolution performance, in order to clearly highlight the Brownian noise limit (40 μg/√Hz) in the tested consumer-grade accelerometers.
本文讨论了MEMS电容式加速度计中传感器相关偏置漂移元件的表征方法。由于不可避免的电子公差和漂移,即使使用离散电子器件,将这种贡献从电子相关元件中隔离出来也不是微不足道的。一种涉及使用多个(至少两个)名义上相同的电路板,根据温度漂移预先表征的方法,被证明可以有效地识别传感器相关的漂移组件,精度低至低于50 μg/K。同时,开发的电路板达到了高分辨率性能,以便在测试的消费级加速度计中清晰地突出布朗噪声极限(40 μg/√Hz)。
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引用次数: 4
Virtually rotated MEMS whole angle gyroscope using independently controlled CW/CCW oscillations 利用独立控制的连续波/连续波振荡虚拟旋转MEMS全角陀螺仪
Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358135
T. Tsukamoto, Shuji Tanaka
This paper reports a method to apply virtual rotation to a whole angle gyroscope (WAG) using independently controlled CW and CCW mode oscillations. The method does not require any additional mechanisms for the virtual rotation, but only changes the target phase values of two phase locked loops (PLLs). The virtual rotation at about 0.163 Hz was successfully applied to the WAG, and the angle locking phenomenon could be resolved. The bias instability as small as 1.1°/hr was observed.
本文报道了一种利用独立控制的连续波和连续波模式振荡实现全角陀螺仪虚旋转的方法。该方法不需要任何额外的虚旋转机制,而只改变两个锁相环的目标相位值。将约0.163 Hz的虚拟旋转成功应用于WAG,解决了锁角现象。观察到的偏置不稳定性小至1.1°/hr。
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引用次数: 13
Modeling of a vibrating MEMS magnetometer partially covered with a ferromagnetic thin film 部分覆盖铁磁薄膜的振动MEMS磁强计的建模
Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358130
T. Perrier, R. Lévy, P. Kayser, B. Verlhac, J. Moulin
This paper describes a fully analytic model of sensitivity of a vibrating magnetometer partially covered with a ferromagnetic thin film. This model is based on the Rayleigh's energetic method and is confirmed by Finite Element Method (FEM) and experimental measurements. Thereby, it is possible to optimize the position of the ferromagnetic thin film and find the best tradeoff between the sensitivity increase and the reduction of resonator energy losses to achieve better resolution.
本文建立了部分覆盖铁磁薄膜的振动磁强计灵敏度的全解析模型。该模型基于瑞利能量法,并通过有限元法和实验测量得到了验证。因此,可以优化铁磁薄膜的位置,并在灵敏度的提高和谐振器能量损失的减少之间找到最佳的权衡,以获得更好的分辨率。
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引用次数: 0
A system-level comparison of amplitude-vs frequency-modulation approaches exploited in low-power MEMS vibratory gyroscopes 低功耗MEMS振动陀螺仪中振幅与频率调制方法的系统级比较
Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358136
P. Minotti, G. Mussi, G. Langfelder, V. Zega, S. Facchinetti, A. Tocchio
Conventional MEMS vibratory gyroscopes rely on detecting the Coriolis-induced displacement amplitude along three orthogonal modes of a micro-mechanical structure. In recent years, an alternative approach based on frequency modulation, where the rate modulates the resonance frequency of the structure, has been proposed. This work tackles, from a system-level point of view, a comparison between the two solutions, aiming at a fair review of their main properties, advantages and drawbacks. The manuscript mainly focuses on low-power architectural aspects, on the sensitivity of the transduction principle against process and temperature variations, and on critical aspects related to the analog-to-digital conversion and the signal demodulation. Examples of experimental results enrich the discussion.
传统的MEMS振动陀螺仪依赖于沿三个正交模态检测微机械结构的科里奥利位移振幅。近年来,提出了一种基于调频的替代方法,其中速率调制结构的共振频率。本工作从系统级的角度对这两种解决方案进行比较,旨在公平地审查它们的主要特性、优点和缺点。手稿主要集中在低功耗架构方面,对过程和温度变化的传导原理的敏感性,以及与模数转换和信号解调相关的关键方面。实验结果的例子丰富了讨论。
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引用次数: 6
The Machine of Bohnenberger: Inertial link between astronomy, navigation, and geodesy 伯南伯格的机器:天文学、航海学和大地测量学之间的惯性联系
Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358150
Jörg F. Wagner
The “Machine of Bohnenberger” is considered to be the first gyro with cardanic suspension. As this apparatus forms the precursor of Foucault's Gyroscope of 1852, it rates as the ancestor of all gyroscopic instruments. Its inventor, Johann Gottlieb Friedrich Bohnenberger (1765–1831), was a professor of physics, mathematics, and astronomy at the University of Tübingen, Germany, as well as the scientific head-surveying officer of the early Kingdom of Württemberg. Being the direct counterpart of C.F. Gauß in south-west Germany, he made major contributions to introducing modern geodesy in Germany; and besides his Machine, he designed also other various physical instruments. The paper gives an overview over the initial dissemination and the further development of the Machine of Bohnenberger and outlines Bohnenberger's scientific work and life.
“博南伯格的机器”被认为是第一个带有枢机悬挂的陀螺。由于这个装置是1852年福柯陀螺仪的前身,它被认为是所有陀螺仪仪器的祖先。它的发明者约翰·戈特利布·弗里德里希·博南伯格(1765-1831)是德国宾根大学的物理学、数学和天文学教授,也是早期威腾堡王国的科学首席测量官。他是德国西南部的c·f·高斯(C.F. gaß)的直接对手,为将现代大地测量学引入德国做出了重大贡献;除了他的机器,他还设计了其他各种物理仪器。本文概述了博南伯格机器的最初传播和进一步发展,并概述了博南伯格的科学工作和生活。
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引用次数: 1
High-density wide-range digital accelerometer arrays with high detection resolution 具有高检测分辨率的高密度宽量程数字加速度计阵列
Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358145
Y. Tang, K. Najafi
This paper presents the implementation and preliminary characterization of a new type of digital accelerometer array with high detection resolution and low noise, enabled by high aspect-ratio (HAR) silicon proof-mass, dense sensor array, precisely-defined air-gaps and small air damping. We fabricated and tested 16-element (4-bit) and 32-element (5-bit) threshold accelerometer arrays (chip area <1 cm2) with evenly-spaced threshold air-gaps from 1–4 μm and incremental air-gaps as small as 100 nm. Vertically anchored springs of different cross-sectional dimensions (102–30μm2) are further designed to target specific g-ranges from < 100 mg to 40 g. The digital accelerometer chips are fabricated using a modified silicon-on-glass (SOG) process which provides tall (1mm) and HAR proof-mass within small footprint (>2.33 milligram/mm2), thus increasing the array density and reducing chip area while achieving Brownian noise equivalent acceleration (BNEA) at <1μg.
本文介绍了一种新型数字加速度计阵列的实现和初步表征,该阵列具有高宽高比(HAR)硅证明质量,密集的传感器阵列,精确定义的气隙和小空气阻尼,具有高检测分辨率和低噪声。我们制作并测试了16元(4位)和32元(5位)阈值加速度计阵列(芯片面积2.33毫克/mm2),从而增加了阵列密度和减少了芯片面积,同时实现了<1μg的布朗噪声等效加速度(BNEA)。
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引用次数: 2
期刊
2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
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