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Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)最新文献

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Novel MEMS Capacitive Sensor Excited at Electrical Resonance for Detecting Helium Based on Changes in Air Electrical Properties 基于空气电性能变化的新型电谐振激励MEMS电容式氦探测传感器
Pub Date : 2022-08-14 DOI: 10.1115/detc2022-90015
Sulaiman Mohaidat, F. Alsaleem
Dry cask storage (DCS) is increasingly used for extended long-term storage of spent nuclear fuel. The canister is vacuum dried and then pressurized with helium to ensure an inert atmosphere and efficient heat transfer. Thus, helium leakage detection plays an important part in ensuring the safety of nuclear waste storage facilities. However, as it is a noble light gas with no order or color, using conventional gas sensing techniques for detecting Helium is a challenge. To overcome this challenge, in this paper we present the working principle of a simple electrostatic MEMS structure to detect Helium in ambient air. The working principle of this novel sensor is based on the decrease in the air die-electric constant due to the presence of Helium. While this change is small, we show that activating the MEMS RLC circuit can significantly amplify the sensor response and hence increase its sensitivity. The sensor response is simulated at different Helium concentration levels using a finite element model. The simulations showed that an electrostatic MEMS sensor operating close to the electrical resonance frequency of an RLC circuit showed different deflection and as such a different capacitance at different levels of helium. A decrease up to 20% of the MEMS deflection was observed at 20% Helium concentration compared to near 0% concentration.
干桶储存(DCS)越来越多地用于延长长期储存乏核燃料。该罐是真空干燥,然后用氦气加压,以确保惰性气氛和有效的传热。因此,氦泄漏检测对于保证核废料储存设施的安全起着重要的作用。然而,由于它是一种没有顺序和颜色的高贵轻气体,使用传统的气体传感技术来探测氦是一个挑战。为了克服这一挑战,本文提出了一种简单的静电MEMS结构的工作原理,用于检测环境空气中的氦气。这种新型传感器的工作原理是基于由于氦的存在而导致空气模电常数的降低。虽然这种变化很小,但我们表明,激活MEMS RLC电路可以显着放大传感器响应,从而提高其灵敏度。利用有限元模型模拟了不同氦浓度下传感器的响应。仿真结果表明,在RLC电路的电谐振频率附近工作的静电MEMS传感器在不同氦气水平下表现出不同的偏转,从而产生不同的电容。与接近0%的氦气浓度相比,在20%的氦气浓度下,MEMS偏转减少了20%。
{"title":"Novel MEMS Capacitive Sensor Excited at Electrical Resonance for Detecting Helium Based on Changes in Air Electrical Properties","authors":"Sulaiman Mohaidat, F. Alsaleem","doi":"10.1115/detc2022-90015","DOIUrl":"https://doi.org/10.1115/detc2022-90015","url":null,"abstract":"\u0000 Dry cask storage (DCS) is increasingly used for extended long-term storage of spent nuclear fuel. The canister is vacuum dried and then pressurized with helium to ensure an inert atmosphere and efficient heat transfer. Thus, helium leakage detection plays an important part in ensuring the safety of nuclear waste storage facilities. However, as it is a noble light gas with no order or color, using conventional gas sensing techniques for detecting Helium is a challenge. To overcome this challenge, in this paper we present the working principle of a simple electrostatic MEMS structure to detect Helium in ambient air. The working principle of this novel sensor is based on the decrease in the air die-electric constant due to the presence of Helium. While this change is small, we show that activating the MEMS RLC circuit can significantly amplify the sensor response and hence increase its sensitivity. The sensor response is simulated at different Helium concentration levels using a finite element model. The simulations showed that an electrostatic MEMS sensor operating close to the electrical resonance frequency of an RLC circuit showed different deflection and as such a different capacitance at different levels of helium. A decrease up to 20% of the MEMS deflection was observed at 20% Helium concentration compared to near 0% concentration.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131865925","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Bistability Condition for Electrostatically Actuated Initially Curved Micro-Beams in the Presence of Curved Electrodes 弯曲电极存在下静电驱动初始弯曲微梁的双稳性条件
Pub Date : 2022-08-14 DOI: 10.1115/detc2022-89669
L. Medina
Following increasing interest in electrostatic actuation of curved beams via curved electrodes. A rigorous limit point analysis is carried out to view how the beam reacts as a function of its geometry, as well as that of the electrode. The culmination of the study is in a bistability condition that describes what geometry both beam and electrode must have in order for bistability to be present. The study is based on a single-degree-of-freedom (DOF) reduced order (RO) model of a curved beam, derived from Galerkin’s decomposition. The extraction of a condition is based on the existence of a vanishing discriminant of a cubic equation, which formed a boundary in the parameters space of both beam and electrode geometries. The boundary describes a shift in behaviour, from mono- to bistability. Such a model and subsequent analysis have been used before for the study of curved beams, especially when it is on the verge of bistability, with high degree of fidelity. The condition shows that while actuation voltages will increase or decrease as a function of electrode curvature, as well as operational range, the curvature of an electrode plays a key role in determining the behaviour of the beam. Such results can serve researchers and engineers alike in designing curved beam-electrode configurations for usage in future studies, thus promoting their usage in micro-electro-mechanical (MEMS) based applications.
随着人们对通过弯曲电极静电驱动弯曲梁的兴趣日益增加。进行了严格的极限点分析,以查看光束如何反应作为其几何形状的函数,以及电极的函数。这项研究的高潮是在双稳条件下,描述了光束和电极必须具有什么样的几何形状才能实现双稳。该研究基于基于伽辽金分解的弯曲梁的单自由度降阶模型。条件的提取是基于三次方程的消失判别式的存在性,该方程在光束和电极几何参数空间中形成边界。边界描述了从单稳定到双稳定的行为转变。这种模型和后续的分析以前已经用于研究弯曲梁,特别是当它处于双稳边缘时,具有很高的保真度。该条件表明,虽然驱动电压会随着电极曲率和工作范围的变化而增加或减少,但电极的曲率在决定光束的行为方面起着关键作用。这些结果可以为研究人员和工程师设计用于未来研究的弯曲束电极配置提供服务,从而促进其在基于微机电(MEMS)的应用中的应用。
{"title":"Bistability Condition for Electrostatically Actuated Initially Curved Micro-Beams in the Presence of Curved Electrodes","authors":"L. Medina","doi":"10.1115/detc2022-89669","DOIUrl":"https://doi.org/10.1115/detc2022-89669","url":null,"abstract":"\u0000 Following increasing interest in electrostatic actuation of curved beams via curved electrodes. A rigorous limit point analysis is carried out to view how the beam reacts as a function of its geometry, as well as that of the electrode. The culmination of the study is in a bistability condition that describes what geometry both beam and electrode must have in order for bistability to be present. The study is based on a single-degree-of-freedom (DOF) reduced order (RO) model of a curved beam, derived from Galerkin’s decomposition. The extraction of a condition is based on the existence of a vanishing discriminant of a cubic equation, which formed a boundary in the parameters space of both beam and electrode geometries. The boundary describes a shift in behaviour, from mono- to bistability. Such a model and subsequent analysis have been used before for the study of curved beams, especially when it is on the verge of bistability, with high degree of fidelity. The condition shows that while actuation voltages will increase or decrease as a function of electrode curvature, as well as operational range, the curvature of an electrode plays a key role in determining the behaviour of the beam. Such results can serve researchers and engineers alike in designing curved beam-electrode configurations for usage in future studies, thus promoting their usage in micro-electro-mechanical (MEMS) based applications.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122698738","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Anisotropic Approach to Control Viscous Fingering Pattern Generated in Lifting Plate Hele-Shaw Cell 升降板Hele-Shaw单元中粘指纹的各向异性控制方法
Pub Date : 2022-08-14 DOI: 10.1115/detc2022-89600
K. Bhole, B. Kale, S. Mastud, N. Raykar, C. Sharma, P. Deshmukh
Stability is one of the important aspects of life, our everyday systems — the permanence of things. When this stability gets disturbed, instability is produced. Sometimes this instability is desirable, and sometimes not. In the crude oil extraction process, fluid instability is observed. Saffman and Taylor explored the concept of the Hele-Shaw cell to study these instabilities. The Hele-Shaw cell involves a high viscous fluid sandwiched between two parallel plates, and the low viscosity fluid enters from the periphery. Insertion of low viscous fluid into a high viscous fluid generates a pattern that is a resemblance to a finger. This phenomenon is called viscous fingering. In this paper, the authors control the instabilities and mimic patterns available in nature. These instabilities can be controlled by controlling one of the fluids in the cell. Here authors control the low viscous fluid (air) by providing anisotropies. Anisotropy means providing holes and slots on any plate of the cell. This anisotropy guides air to interact with high viscous fluid at some desired location. The authors further studied the effect of size, position, the orientation of these holes and slots on the viscous fingering exhaustively.
稳定是生活的一个重要方面,我们的日常系统——事物的永恒。当这种稳定性受到干扰时,就会产生不稳定性。这种不稳定有时是可取的,有时则不然。在原油开采过程中,观察到流体的不稳定性。Saffman和Taylor探索了Hele-Shaw细胞的概念来研究这些不稳定性。在Hele-Shaw细胞中,高粘性流体被夹在两个平行的平板之间,低粘性流体从外围进入。将低粘性流体插入高粘性流体中会产生类似手指的图案。这种现象被称为粘指。在本文中,作者控制了不稳定性并模拟了自然界中可用的模式。这些不稳定性可以通过控制细胞中的一种液体来控制。本文作者通过提供各向异性来控制低粘性流体(空气)。各向异性意味着在电池的任何板上都有孔和槽。这种各向异性引导空气在某些期望位置与高粘性流体相互作用。进一步详尽地研究了孔槽的尺寸、位置和方向对指法的影响。
{"title":"Anisotropic Approach to Control Viscous Fingering Pattern Generated in Lifting Plate Hele-Shaw Cell","authors":"K. Bhole, B. Kale, S. Mastud, N. Raykar, C. Sharma, P. Deshmukh","doi":"10.1115/detc2022-89600","DOIUrl":"https://doi.org/10.1115/detc2022-89600","url":null,"abstract":"\u0000 Stability is one of the important aspects of life, our everyday systems — the permanence of things. When this stability gets disturbed, instability is produced. Sometimes this instability is desirable, and sometimes not. In the crude oil extraction process, fluid instability is observed. Saffman and Taylor explored the concept of the Hele-Shaw cell to study these instabilities. The Hele-Shaw cell involves a high viscous fluid sandwiched between two parallel plates, and the low viscosity fluid enters from the periphery. Insertion of low viscous fluid into a high viscous fluid generates a pattern that is a resemblance to a finger. This phenomenon is called viscous fingering. In this paper, the authors control the instabilities and mimic patterns available in nature. These instabilities can be controlled by controlling one of the fluids in the cell. Here authors control the low viscous fluid (air) by providing anisotropies. Anisotropy means providing holes and slots on any plate of the cell. This anisotropy guides air to interact with high viscous fluid at some desired location. The authors further studied the effect of size, position, the orientation of these holes and slots on the viscous fingering exhaustively.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133227429","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Nuclear Batteries Enable Decades of Uninterrupted Life for Microelectronic Systems 核电池可为微电子系统提供数十年不间断的使用寿命
Pub Date : 2022-08-14 DOI: 10.1115/detc2022-89291
O. Barham
Nuclear radioisotope batteries are a class of energy dense power sources that convert radioactive decay particle energy directly into electricity for powering sensors, electronics, and medical implants in applications where battery replacement is difficult or impossible. In order to show the potential benefits of integrating these types of power sources into microelectronic sensor systems, three recent examples from the literature are considered: a gas sensor; a communication component (radio frequency front-end); and a photoplethysmographic sensor. These were selected to represent three common microsystem components: environmental sensors; communication components; and biological sensors. In each case, system operational lifetime is computed when powered with a commercial Li-ion coin cell battery, followed by a comparison with three nuclear battery prototypes from the literature. In each case, the nuclear power sources allow potential continuous, unattended operational life to be extended by an order of magnitude or more, typically from less than one year to decades of continuous use. Advantages and disadvantages of nuclear batteries in general are also addressed.
核放射性同位素电池是一种能量密集的电源,可将放射性衰变粒子的能量直接转化为电能,用于为传感器、电子设备和医疗植入物供电,用于更换电池困难或不可能的应用。为了展示将这些类型的电源集成到微电子传感器系统中的潜在好处,从文献中考虑了三个最近的例子:气体传感器;通信组件(射频前端);还有一个光电容积脉搏传感器。这些被选择来代表三个常见的微系统组件:环境传感器;通信组件;还有生物传感器。在每种情况下,系统运行寿命都是用商用锂离子硬币电池供电时计算的,然后与文献中的三种核电池原型进行比较。在每种情况下,核动力源允许潜在的连续,无人值守的运行寿命延长一个数量级或更多,通常从不到一年到几十年的连续使用。一般来说,核电池的优点和缺点也被讨论。
{"title":"Nuclear Batteries Enable Decades of Uninterrupted Life for Microelectronic Systems","authors":"O. Barham","doi":"10.1115/detc2022-89291","DOIUrl":"https://doi.org/10.1115/detc2022-89291","url":null,"abstract":"\u0000 Nuclear radioisotope batteries are a class of energy dense power sources that convert radioactive decay particle energy directly into electricity for powering sensors, electronics, and medical implants in applications where battery replacement is difficult or impossible. In order to show the potential benefits of integrating these types of power sources into microelectronic sensor systems, three recent examples from the literature are considered: a gas sensor; a communication component (radio frequency front-end); and a photoplethysmographic sensor. These were selected to represent three common microsystem components: environmental sensors; communication components; and biological sensors. In each case, system operational lifetime is computed when powered with a commercial Li-ion coin cell battery, followed by a comparison with three nuclear battery prototypes from the literature. In each case, the nuclear power sources allow potential continuous, unattended operational life to be extended by an order of magnitude or more, typically from less than one year to decades of continuous use. Advantages and disadvantages of nuclear batteries in general are also addressed.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127147335","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and Simulation of a MEMS Capacitive Pressure Sensor With Corrugated Membrane and Linear Capacitance-Pressure Response 具有线性电容-压力响应的波纹膜MEMS电容压力传感器的设计与仿真
Pub Date : 2022-08-14 DOI: 10.1115/detc2022-90093
M. Shavezipur
This paper presents a new design for MEMS capacitive pressure sensor that helps to linearize the capacitance-pressures response of the sensor. Capacitive pressure sensors have two electrodes, one often fixed and one is deformed as the ambient pressure changes. In general, the two electrodes are made of flat thin films. The proposed sensor design is based on a corrugated membrane, where circular ridges and grooves are made in the membrane altering its deformation as the pressure is applied. The sensor design is analyzed using finite element simulations, and ANSYS coupled-field multiphysics solver is used to model and obtain the response of a conventional and corrugated pressure sensor as the ambient pressure changes. The simulation results show that, as expected, the sensor displays high sensitivity at lower pressure and as the pressure increases and the contact area between the membrane and fixed electrode expands, the sensitivity of the capacitance-pressure (C-P) response decreases for both sensors. However, the sensor with corrugated membrane displays high linearity at lower pressures. The response for proposed design at this pressure range is nearly a perfect line, while the conventional design exhibits nonlinearity that is visually noticeable. To quantitatively evaluate the level of linearity of the C-P responses, a linearity factor as the coefficient of linear correlation between the capacitance and pressure is used. The simulation results show that at low pressure of 0.2–1.0 MPa, the sensor with corrugated membrane has high linearity of 0.999 compared to 0.987 for conventional sensor, where for pressure range 0–1.0 MPa these values are 0.997 and 0.983, respectively. The quantitative comparison of the linearity factors for the two design show a notable improvement in the linearity of the C-P response providing nearly a constant sensitivity over the pressure range of 0.2 to 1.0 MPa.
提出了一种新的MEMS电容式压力传感器设计方案,使传感器的电容-压力响应线性化。电容式压力传感器有两个电极,一个通常是固定的,另一个随着环境压力的变化而变形。一般来说,两个电极是由扁平的薄膜制成的。所提出的传感器设计基于波纹膜,其中在膜上制作圆形脊和凹槽,以改变其在施加压力时的变形。采用有限元仿真方法对传感器设计进行了分析,并利用ANSYS耦合场多物理场求解器对传统压力传感器和波纹压力传感器在环境压力变化下的响应进行了建模和计算。仿真结果表明,在较低的压力下,传感器具有较高的灵敏度,随着压力的增加和膜与固定电极之间接触面积的扩大,两种传感器的电容-压力(C-P)响应灵敏度降低。然而,波纹膜传感器在较低的压力下显示出较高的线性度。在这个压力范围内,所提出的设计的响应几乎是一条完美的线,而传统的设计表现出视觉上明显的非线性。为了定量地评估C-P响应的线性水平,使用线性系数作为电容和压力之间的线性相关系数。仿真结果表明,在0.2 ~ 1.0 MPa的低压环境下,波纹膜传感器的线性度为0.999,高于传统传感器的0.987,而在0 ~ 1.0 MPa的低压环境下,波纹膜传感器的线性度分别为0.997和0.983。两种设计的线性因子的定量比较表明,C-P响应的线性度显著提高,在0.2至1.0 MPa的压力范围内提供了几乎恒定的灵敏度。
{"title":"Design and Simulation of a MEMS Capacitive Pressure Sensor With Corrugated Membrane and Linear Capacitance-Pressure Response","authors":"M. Shavezipur","doi":"10.1115/detc2022-90093","DOIUrl":"https://doi.org/10.1115/detc2022-90093","url":null,"abstract":"This paper presents a new design for MEMS capacitive pressure sensor that helps to linearize the capacitance-pressures response of the sensor. Capacitive pressure sensors have two electrodes, one often fixed and one is deformed as the ambient pressure changes. In general, the two electrodes are made of flat thin films. The proposed sensor design is based on a corrugated membrane, where circular ridges and grooves are made in the membrane altering its deformation as the pressure is applied. The sensor design is analyzed using finite element simulations, and ANSYS coupled-field multiphysics solver is used to model and obtain the response of a conventional and corrugated pressure sensor as the ambient pressure changes. The simulation results show that, as expected, the sensor displays high sensitivity at lower pressure and as the pressure increases and the contact area between the membrane and fixed electrode expands, the sensitivity of the capacitance-pressure (C-P) response decreases for both sensors. However, the sensor with corrugated membrane displays high linearity at lower pressures. The response for proposed design at this pressure range is nearly a perfect line, while the conventional design exhibits nonlinearity that is visually noticeable. To quantitatively evaluate the level of linearity of the C-P responses, a linearity factor as the coefficient of linear correlation between the capacitance and pressure is used. The simulation results show that at low pressure of 0.2–1.0 MPa, the sensor with corrugated membrane has high linearity of 0.999 compared to 0.987 for conventional sensor, where for pressure range 0–1.0 MPa these values are 0.997 and 0.983, respectively. The quantitative comparison of the linearity factors for the two design show a notable improvement in the linearity of the C-P response providing nearly a constant sensitivity over the pressure range of 0.2 to 1.0 MPa.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132463034","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Three Degree of Freedom Model Approach to Enable a MEMS-Based Neural Computing Unit 一种实现mems神经计算单元的三自由度模型方法
Pub Date : 2022-08-14 DOI: 10.1115/detc2022-90498
Mohammad Megdadi, Hamed Nikfarjam, M. Okour, S. Pourkamali, F. Alsaleem
With enormous amounts of data being generated every day from countless sensors and sensor networks, the need for intelligent devices to process and make use of this data continues to grow and is only projected to increase. The advent of wearable technologies has exacerbated this problem, and with researchers struggling to process data locally with small power budgets, it is clear a solution is needed. Micro-electromechanical (MEMS)-based innovation will have high impact on these issues. MEMS devices can process computing taskes in the hardware level which consumes almost no power (nW). They are very small in size and do the classification without the need of storing the data which boosts up the power saving. Toward this goal, simulation results for a MEMS network to perform basic neural computing is shown in this paper. The network is made up of a mechanically connected network of three electrostatically controlled microstructures, two of which serve as input layers and the third as output (computing) layers. The mechanical coupling was achieved through stiffnesses connecting the masses of the MEMS. It has been demonstrated that such a device may be programmed to distinguish between a ramp (gradually growing) input signal and a step (abruptly rising) by applying suitable bias voltages to the electrostatic control electrodes. The findings serve as a proof of concept and founding to completing more sophisticated computational tasks using MEMS and opening a new direction for alternative efficient computing technologies compared to current digital computing.
随着每天从无数传感器和传感器网络中产生大量数据,对处理和利用这些数据的智能设备的需求不断增长,并且预计只会增加。可穿戴技术的出现加剧了这一问题,研究人员正在努力以较小的电力预算在本地处理数据,显然需要一个解决方案。基于微机电(MEMS)的创新将对这些问题产生重大影响。MEMS器件可以在硬件层面处理计算任务,几乎不消耗任何功耗。它们的体积非常小,而且不需要存储数据就可以进行分类,从而提高了功耗。为了实现这一目标,本文给出了MEMS网络进行基本神经计算的仿真结果。该网络由三个静电控制微结构组成的机械连接网络组成,其中两个作为输入层,第三个作为输出(计算)层。机械耦合是通过刚度连接MEMS的质量实现的。已经证明,这种装置可以通过对静电控制电极施加适当的偏置电压来编程以区分斜坡(逐渐增长)输入信号和阶跃(突然上升)输入信号。这一发现为使用MEMS完成更复杂的计算任务提供了概念证明和基础,并为与当前数字计算相比的替代高效计算技术开辟了新的方向。
{"title":"A Three Degree of Freedom Model Approach to Enable a MEMS-Based Neural Computing Unit","authors":"Mohammad Megdadi, Hamed Nikfarjam, M. Okour, S. Pourkamali, F. Alsaleem","doi":"10.1115/detc2022-90498","DOIUrl":"https://doi.org/10.1115/detc2022-90498","url":null,"abstract":"\u0000 With enormous amounts of data being generated every day from countless sensors and sensor networks, the need for intelligent devices to process and make use of this data continues to grow and is only projected to increase. The advent of wearable technologies has exacerbated this problem, and with researchers struggling to process data locally with small power budgets, it is clear a solution is needed. Micro-electromechanical (MEMS)-based innovation will have high impact on these issues. MEMS devices can process computing taskes in the hardware level which consumes almost no power (nW). They are very small in size and do the classification without the need of storing the data which boosts up the power saving. Toward this goal, simulation results for a MEMS network to perform basic neural computing is shown in this paper. The network is made up of a mechanically connected network of three electrostatically controlled microstructures, two of which serve as input layers and the third as output (computing) layers. The mechanical coupling was achieved through stiffnesses connecting the masses of the MEMS. It has been demonstrated that such a device may be programmed to distinguish between a ramp (gradually growing) input signal and a step (abruptly rising) by applying suitable bias voltages to the electrostatic control electrodes. The findings serve as a proof of concept and founding to completing more sophisticated computational tasks using MEMS and opening a new direction for alternative efficient computing technologies compared to current digital computing.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131094223","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of a Novel Three-Dimensional Parallel-Plate Biochemical Sensor for Electrochemical Impedance Spectroscopy (EIS) 新型三维平行板电化学阻抗谱生化传感器的研制
Pub Date : 2022-08-14 DOI: 10.1115/detc2022-90378
Negar Rafiee, Brian S. Huffman, M. Shavezipur
Miniaturized electrochemical impedance-based biochemical sensors have been extensively used for detection of chemical and biological agents at extremely low concentrations. The majority of the sensors presented in the literature have a two-dimensional (planar) geometry and use two interdigitated electrodes that are exposed to an aqueous solution for deteciotn. In this work, a novel three-dimensional sensor is presented that uses a parallel-plate geometry for sensor structure. The sensor has a digitated electrode patterned on the substrate and a planar and porous electrode suspended above the fixed electrode. The sensor is fabricated using PolyMUMPs and diethylhexyl phthalate (DEHP) is used to demonstrate the ability of the sensor for biochemical detection. The measurement results show that the sensor has distinct Nyquist responses for 0.02 ppm, 0.2 ppm, 2 ppm and 10 ppm concentrations of the DEHP. Different electrochemical phenomena such as double-layer capacitance formation and charge transport at high frequencies, and diffusion at low frequencies are detected using Nyquist plots. The experimental results show that, for 3D parallel-plate sensors, in contrast to interdigitated geometry, the electrostatic effect is noticeable, and the parallel-plate capacitance due to the dielectric effect of the solution notably affects the Nyquist response. This is an important effect, specially for biological detection.
小型化电化学阻抗型生化传感器已广泛应用于检测极低浓度的化学和生物制剂。文献中提出的大多数传感器具有二维(平面)几何形状,并使用暴露于水溶液中的两个交叉电极进行检测。在这项工作中,提出了一种新型的三维传感器,该传感器采用平行板几何结构。所述传感器具有在所述衬底上图案化的数字化电极和悬浮在所述固定电极上方的平面多孔电极。该传感器由PolyMUMPs和邻苯二甲酸二乙基己基酯(DEHP)制成,用于证明传感器的生化检测能力。测量结果表明,该传感器对浓度为0.02 ppm、0.2 ppm、2 ppm和10 ppm的DEHP具有明显的奈奎斯特响应。利用奈奎斯特图检测了不同的电化学现象,如高频双层电容形成和电荷输运以及低频扩散。实验结果表明,对于三维平行板传感器,与交叉几何结构相比,静电效应明显,且溶液介电效应引起的平行板电容显著影响奈奎斯特响应。这是一个重要的效应,特别是对于生物检测。
{"title":"Development of a Novel Three-Dimensional Parallel-Plate Biochemical Sensor for Electrochemical Impedance Spectroscopy (EIS)","authors":"Negar Rafiee, Brian S. Huffman, M. Shavezipur","doi":"10.1115/detc2022-90378","DOIUrl":"https://doi.org/10.1115/detc2022-90378","url":null,"abstract":"\u0000 Miniaturized electrochemical impedance-based biochemical sensors have been extensively used for detection of chemical and biological agents at extremely low concentrations. The majority of the sensors presented in the literature have a two-dimensional (planar) geometry and use two interdigitated electrodes that are exposed to an aqueous solution for deteciotn. In this work, a novel three-dimensional sensor is presented that uses a parallel-plate geometry for sensor structure. The sensor has a digitated electrode patterned on the substrate and a planar and porous electrode suspended above the fixed electrode. The sensor is fabricated using PolyMUMPs and diethylhexyl phthalate (DEHP) is used to demonstrate the ability of the sensor for biochemical detection. The measurement results show that the sensor has distinct Nyquist responses for 0.02 ppm, 0.2 ppm, 2 ppm and 10 ppm concentrations of the DEHP. Different electrochemical phenomena such as double-layer capacitance formation and charge transport at high frequencies, and diffusion at low frequencies are detected using Nyquist plots. The experimental results show that, for 3D parallel-plate sensors, in contrast to interdigitated geometry, the electrostatic effect is noticeable, and the parallel-plate capacitance due to the dielectric effect of the solution notably affects the Nyquist response. This is an important effect, specially for biological detection.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133370415","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Experimental Analysis of Flexural-Torsional Forced Vibrations of A Piezoelectric Double-Cantilever 压电双悬臂梁弯扭强迫振动的实验分析
Pub Date : 2022-08-14 DOI: 10.1115/detc2022-89969
A. Zargarani, John O'Donnell, S. Mahmoodi
In this paper, the experimental flexural-torsional forced vibration of a piezoelectric double-cantilever structure is studied and compared with analytical results. The structure of interest consists of two uniform and identical Euler-Bernoulli cantilever beams that are connected by a rigid tip connection at their free ends. Each of the cantilever beams can be excited by a piezoelectric layer attached on its top surface. The time response to the forced vibrations of the structure induced by the piezoelectric actuators is found using the Galerkin approximation method. The effects of dimensional parameters, the length of the cantilever beams and the length of the tip connection, as well as the piezoelectric input voltage on the flexural-torsional amplitude of the vibrations of the structure are studied analytically and experimentally. The amplitude of the flexural-torsional vibrations of the structure is observed to be proportional to the piezoelectric input voltage. However, the slope of the curves defining this relationship depends on dimensional parameters. For a constant input voltage, the effect of either of the dimensional parameters on the amplitude of vibrations is dependent on the other dimensional parameter such that a turning point, whose location is dependent on the configuration of the structure, exists in all the curves.
本文对压电双悬臂结构的弯扭强迫振动进行了实验研究,并与分析结果进行了比较。该结构由两个均匀且相同的欧拉-伯努利悬臂梁组成,在其自由端通过刚性尖端连接连接。每个悬臂梁都可以通过附着在其顶部表面的压电层来激发。利用伽辽金近似方法得到了压电致动器引起的结构强迫振动的时间响应。分析和实验研究了尺寸参数、悬臂梁长度和尖端连接长度以及压电输入电压对结构弯扭振动幅值的影响。结构的弯扭振动幅值与压电输入电压成正比。然而,定义这种关系的曲线的斜率取决于尺寸参数。对于一个恒定的输入电压,任何一个尺寸参数对振动振幅的影响依赖于另一个尺寸参数,这样一个转折点,其位置依赖于结构的配置,存在于所有的曲线。
{"title":"Experimental Analysis of Flexural-Torsional Forced Vibrations of A Piezoelectric Double-Cantilever","authors":"A. Zargarani, John O'Donnell, S. Mahmoodi","doi":"10.1115/detc2022-89969","DOIUrl":"https://doi.org/10.1115/detc2022-89969","url":null,"abstract":"\u0000 In this paper, the experimental flexural-torsional forced vibration of a piezoelectric double-cantilever structure is studied and compared with analytical results. The structure of interest consists of two uniform and identical Euler-Bernoulli cantilever beams that are connected by a rigid tip connection at their free ends. Each of the cantilever beams can be excited by a piezoelectric layer attached on its top surface. The time response to the forced vibrations of the structure induced by the piezoelectric actuators is found using the Galerkin approximation method. The effects of dimensional parameters, the length of the cantilever beams and the length of the tip connection, as well as the piezoelectric input voltage on the flexural-torsional amplitude of the vibrations of the structure are studied analytically and experimentally. The amplitude of the flexural-torsional vibrations of the structure is observed to be proportional to the piezoelectric input voltage. However, the slope of the curves defining this relationship depends on dimensional parameters. For a constant input voltage, the effect of either of the dimensional parameters on the amplitude of vibrations is dependent on the other dimensional parameter such that a turning point, whose location is dependent on the configuration of the structure, exists in all the curves.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124147584","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Alpha-Photovoltaics for Milliwatt Applications 毫瓦应用的α -光伏
Pub Date : 2022-08-14 DOI: 10.1115/detc2022-91306
M. Khan, M. Litz, J. Russo, R. Tompkins
Isotope power sources can serve applications for sensor or communication nodes that are required to last the lifetime of infrastructure because they possess at least 1000 times higher energy density, long operational lifetimes (> 10 years), and wider operational temperature range compared to chemical power sources. There are different methods of converting radiation energy into electrical energy at low power (nW – mW) levels, the most prevalent is betavoltaic devices which convert beta particles energy directly into electrical energy using a semiconductor junction. However, the current state-of-the art betavoltaics can only produce 10’s of micro-watts/cm2, and are not suitable for applications requiring mW output power. Alpha particle emitting isotopes have higher energies than beta isotopes and can be used to produce power in mW range, but require radiation tolerant ultra-wide-bandgap semiconductor junctions, which are not widely available yet. Therefore, it is necessary to look at alternate approaches to harvest energy from alpha decay using existing semiconductor technology. In this paper, we have validated one such approach to convert alpha particles energy into electrical energy by employing an intermediate phosphor layer placed between an alpha source and an InGaP PV cell. We simulated the average energy emission of Am-241 using a pelletron source accelerating He2+ ions and exposed the InGaP PV with phosphor film deposited on top while measuring the IV characteristics throughout the experiment. We measured an output power of 165 μW/cm2 at 4.5 MeV beam, representing a fluence of 3.75 × 1013 ions.
同位素电源可以服务于传感器或通信节点的应用,这些应用需要持续基础设施的使用寿命,因为与化学电源相比,它们具有至少1000倍的能量密度,较长的工作寿命(> 10年)和更宽的工作温度范围。将辐射能转换为低功率(nW - mW)水平的电能有不同的方法,最普遍的是贝塔伏打装置,它使用半导体结将贝塔粒子能量直接转换为电能。然而,目前最先进的betavoltaics只能产生10微瓦/平方厘米,并且不适合需要兆瓦输出功率的应用。α粒子发射同位素具有比β同位素更高的能量,可用于产生毫瓦范围的功率,但需要耐辐射的超宽带隙半导体结,而这种结目前尚未广泛应用。因此,有必要寻找利用现有半导体技术从α衰变中获取能量的替代方法。在本文中,我们已经验证了一种将α粒子能量转换为电能的方法,该方法通过在α源和InGaP PV电池之间放置中间荧光粉层来实现。我们使用粒子源加速He2+离子模拟了Am-241的平均能量发射,并在实验过程中暴露了顶部沉积有荧光粉膜的InGaP PV,同时测量了IV特性。我们测量了4.5 MeV束流下的输出功率为165 μW/cm2,相当于3.75 × 1013个离子的影响。
{"title":"Alpha-Photovoltaics for Milliwatt Applications","authors":"M. Khan, M. Litz, J. Russo, R. Tompkins","doi":"10.1115/detc2022-91306","DOIUrl":"https://doi.org/10.1115/detc2022-91306","url":null,"abstract":"\u0000 Isotope power sources can serve applications for sensor or communication nodes that are required to last the lifetime of infrastructure because they possess at least 1000 times higher energy density, long operational lifetimes (> 10 years), and wider operational temperature range compared to chemical power sources. There are different methods of converting radiation energy into electrical energy at low power (nW – mW) levels, the most prevalent is betavoltaic devices which convert beta particles energy directly into electrical energy using a semiconductor junction. However, the current state-of-the art betavoltaics can only produce 10’s of micro-watts/cm2, and are not suitable for applications requiring mW output power. Alpha particle emitting isotopes have higher energies than beta isotopes and can be used to produce power in mW range, but require radiation tolerant ultra-wide-bandgap semiconductor junctions, which are not widely available yet. Therefore, it is necessary to look at alternate approaches to harvest energy from alpha decay using existing semiconductor technology. In this paper, we have validated one such approach to convert alpha particles energy into electrical energy by employing an intermediate phosphor layer placed between an alpha source and an InGaP PV cell. We simulated the average energy emission of Am-241 using a pelletron source accelerating He2+ ions and exposed the InGaP PV with phosphor film deposited on top while measuring the IV characteristics throughout the experiment. We measured an output power of 165 μW/cm2 at 4.5 MeV beam, representing a fluence of 3.75 × 1013 ions.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130974422","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Novel Mass Sensor Based on Parametrically Excited Mode-Localized Resonators 一种基于参数激励模式局域谐振器的新型质量传感器
Pub Date : 2022-08-14 DOI: 10.1115/detc2022-90568
J. Song, Jian Zhao, N. Kacem, Ming Lyu, Rongjian Sun, Pengbo Liu
The nonlinear dynamics in micro/nano electromechanical sensor have attracted a myriad of attention of researchers due to its great potential to improve sensors’ performance In this paper, a novel mass sensor exploiting the bifurcation phenomenon in parametrically excited mode-localized resonators is proposed. The mathematical model is established by Euler-Bernoulli theory and solved by the method of multiple scales. Meanwhile, the harmonic balance method combined with asymptotic numerical method is utilized for validation. The dynamics and bifurcation topology of the sensor are investigated and the potential of mass sensing on bifurcation point is explored. Compared to relative shift of frequency, the sensitivity in terms of relative shift of amplitude ratio can be enhanced by 4 orders of magnitude. Finally, the effects of coupling voltage are studied which shows that the sensitivity can be further improve with the decrease of coupling voltage above the mode aliasing.
微纳机电传感器中的非线性动力学由于其在提高传感器性能方面的巨大潜力而引起了研究者们的广泛关注。本文提出了一种利用参数激励模式局域谐振器中的分岔现象的新型质量传感器。采用欧拉-伯努利理论建立数学模型,采用多尺度法求解。同时,利用谐波平衡法结合渐近数值方法进行验证。研究了传感器的动力学和分岔拓扑结构,探讨了在分岔点上进行质量传感的潜力。与频率相对位移相比,幅值比相对位移的灵敏度提高了4个数量级。最后,研究了耦合电压的影响,结果表明,在模混叠以上,随着耦合电压的降低,灵敏度可以进一步提高。
{"title":"A Novel Mass Sensor Based on Parametrically Excited Mode-Localized Resonators","authors":"J. Song, Jian Zhao, N. Kacem, Ming Lyu, Rongjian Sun, Pengbo Liu","doi":"10.1115/detc2022-90568","DOIUrl":"https://doi.org/10.1115/detc2022-90568","url":null,"abstract":"\u0000 The nonlinear dynamics in micro/nano electromechanical sensor have attracted a myriad of attention of researchers due to its great potential to improve sensors’ performance In this paper, a novel mass sensor exploiting the bifurcation phenomenon in parametrically excited mode-localized resonators is proposed. The mathematical model is established by Euler-Bernoulli theory and solved by the method of multiple scales. Meanwhile, the harmonic balance method combined with asymptotic numerical method is utilized for validation. The dynamics and bifurcation topology of the sensor are investigated and the potential of mass sensing on bifurcation point is explored. Compared to relative shift of frequency, the sensitivity in terms of relative shift of amplitude ratio can be enhanced by 4 orders of magnitude. Finally, the effects of coupling voltage are studied which shows that the sensitivity can be further improve with the decrease of coupling voltage above the mode aliasing.","PeriodicalId":325425,"journal":{"name":"Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131303632","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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Volume 8: 16th International Conference on Micro- and Nanosystems (MNS)
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