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EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR最新文献

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PULSE EXPLOSION ION BEAM SOURCE WITH ONE PULSE REGIME FOR SURFACE MODIFICATION OF MATERIALS 用于材料表面改性的单脉冲脉冲爆炸离子束源
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR
Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-117
S. Korenev
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引用次数: 0
THE MECHANISMS OP ATOMIC MIGRATIONS IN IMPLANTED FILMS 植入膜中原子迁移的机制
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR
Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-148
E. Shpilevsky
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引用次数: 0
ACTIVATION OF PHOSPHORUS IN SURFACE LAYERS OF P+-IMPLANTED SILICON UNDER RF PLASMA TREATMENT 射频等离子体处理下p +注入硅表层磷的活化
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR
Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-027
M. Valakh, V. S. Lyaenko, A. Nazarov, G. Rudko, A. S. Tkachenko
{"title":"ACTIVATION OF PHOSPHORUS IN SURFACE LAYERS OF P+-IMPLANTED SILICON UNDER RF PLASMA TREATMENT","authors":"M. Valakh, V. S. Lyaenko, A. Nazarov, G. Rudko, A. S. Tkachenko","doi":"10.1515/9783112575666-027","DOIUrl":"https://doi.org/10.1515/9783112575666-027","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132279239","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
ON THE MECHANISM OF ION-STIMULATED CRYSTALLIZATION 离子刺激结晶机理研究
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR
Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-151
N. Stepina, G. Kachurin, S. I. Romanov, V. Popov, V. Aliev
{"title":"ON THE MECHANISM OF ION-STIMULATED CRYSTALLIZATION","authors":"N. Stepina, G. Kachurin, S. I. Romanov, V. Popov, V. Aliev","doi":"10.1515/9783112575666-151","DOIUrl":"https://doi.org/10.1515/9783112575666-151","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130253823","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
HfllSSION PROPERTIES OP ALLOY GOLD-BERYLLIUM FIELD IOff SOURCE 合金金-铍场源的熔解特性
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR
Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-111
N. Drandarov, Borlslav Nikolov
{"title":"HfllSSION PROPERTIES OP ALLOY GOLD-BERYLLIUM FIELD IOff SOURCE","authors":"N. Drandarov, Borlslav Nikolov","doi":"10.1515/9783112575666-111","DOIUrl":"https://doi.org/10.1515/9783112575666-111","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131929569","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
SOI STRUCTURES FORMATION BY PULSED HEATING 脉冲加热形成的土质结构
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR
Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-100
S. H. Kolyadenko, A. V. Dvurechensky, A. Vasilyev
{"title":"SOI STRUCTURES FORMATION BY PULSED HEATING","authors":"S. H. Kolyadenko, A. V. Dvurechensky, A. Vasilyev","doi":"10.1515/9783112575666-100","DOIUrl":"https://doi.org/10.1515/9783112575666-100","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"12 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128258727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
APPLICATION OF ION IMPLANTATION TO CHEMICAL MICROSENSORS 离子注入在化学微传感器中的应用
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR
Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-029
M. T. Pham, W. Hoffmann, J. Hüller, J. Schöneich
{"title":"APPLICATION OF ION IMPLANTATION TO CHEMICAL MICROSENSORS","authors":"M. T. Pham, W. Hoffmann, J. Hüller, J. Schöneich","doi":"10.1515/9783112575666-029","DOIUrl":"https://doi.org/10.1515/9783112575666-029","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116612257","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
RAPID THERMAL ANNEALING OF PROTON TRASMUTATION DOPED SILICON 质子嬗变掺杂硅的快速热退火
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR
Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-053
F. P. Korshunov, A. Pavienko, N. Sobolev, A. V. Voevodova
{"title":"RAPID THERMAL ANNEALING OF PROTON TRASMUTATION DOPED SILICON","authors":"F. P. Korshunov, A. Pavienko, N. Sobolev, A. V. Voevodova","doi":"10.1515/9783112575666-053","DOIUrl":"https://doi.org/10.1515/9783112575666-053","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"68 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121868440","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
LASER INDUCED PHASE TRANSFORMATION IN SEMICONDUCTORS 半导体激光诱导相变
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR
Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-045
Yu.A. Bumay, D. S. Domanewskii, N. E. Domorod, A. Ulyashin
{"title":"LASER INDUCED PHASE TRANSFORMATION IN SEMICONDUCTORS","authors":"Yu.A. Bumay, D. S. Domanewskii, N. E. Domorod, A. Ulyashin","doi":"10.1515/9783112575666-045","DOIUrl":"https://doi.org/10.1515/9783112575666-045","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123564757","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
GENERATION AND ANNEALING OF POINT DEFECTS IN SILICON AFTER HIGH ENERGY IMPLANTATION 高能注入后硅中点缺陷的产生与退火
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR
Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-019
A. Hertens, J. Röhrich
{"title":"GENERATION AND ANNEALING OF POINT DEFECTS IN SILICON AFTER HIGH ENERGY IMPLANTATION","authors":"A. Hertens, J. Röhrich","doi":"10.1515/9783112575666-019","DOIUrl":"https://doi.org/10.1515/9783112575666-019","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"183 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121936865","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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