首页 > 最新文献

Nanotechnology and Precision Engineering最新文献

英文 中文
One-step synthesis of B and N co-doped carbon nanotubes for high-stability lithium-ion batteries 一步合成用于高稳定性锂离子电池的 B 和 N 共掺杂碳纳米管
Pub Date : 2024-06-14 DOI: 10.1063/10.0026319
Huan Huan, Chengxiang Tian, Shuangyue Wang, Q. Feng, H. Deng, Xiang Xia, Xiaotao Zu
Creating adsorption sites by doping heteroatoms into the graphitic structures of carbon electrodes is an effective strategy for improving lithium storage in lithium-ion batteries. In this work, we prepared carbon nanotubes with controllable morphology and controllable nitrogen-doping level by a one-step pyrolysis method through adjusting the amount of urea used during synthesis. Under the synergistic effects of high temperature and Ni-catalyst migration, the carbon nanosheets generated by pyrolysis become coiled into tube-like structures. Characterization using Raman and x-ray photoelectron spectroscopy revealed that the B and N atoms were successfully co-doped into the resultant carbon nanotubes. When the obtained materials were used as lithium-ion battery anodes, reversible specific capacities of 337.11 and 187.62 mA h g−1 were achieved at current densities of 100 and 2000 mA g−1, respectively. Moreover, a capacity of 140.53 mA h g−1 was retained after 2000 cycles at a current density of 2000 mA g−1. The mechanism of lithium storage in these carbon materials was elucidated using cyclic voltammetry tests. Regarding other functional applications, the synthesized composite carbon nanotube material could also be used in other energy-storage battery systems, such as in the sulfur-carrying structures of lithium-sulfur batteries and in the three-dimensional porous structures of sodium batteries.
通过在碳电极的石墨结构中掺杂杂原子来创建吸附位点,是提高锂离子电池锂存储能力的有效策略。在这项工作中,我们采用一步热解法,通过调节合成过程中尿素的用量,制备了形态可控、氮掺杂水平可控的碳纳米管。在高温和镍催化剂迁移的协同作用下,热解生成的碳纳米片盘绕成管状结构。利用拉曼光谱和 X 射线光电子能谱进行的表征显示,B 原子和 N 原子已成功共掺杂到生成的碳纳米管中。将获得的材料用作锂离子电池阳极时,在电流密度为 100 mA g-1 和 2000 mA g-1 时,可逆比容量分别达到 337.11 mA h g-1 和 187.62 mA h g-1。此外,在电流密度为 2000 mA g-1 时,经过 2000 次循环后,容量仍保持在 140.53 mA h g-1。循环伏安测试阐明了这些碳材料的锂存储机制。在其他功能应用方面,合成的复合碳纳米管材料还可用于其他储能电池系统,例如锂硫电池的载硫结构和钠电池的三维多孔结构。
{"title":"One-step synthesis of B and N co-doped carbon nanotubes for high-stability lithium-ion batteries","authors":"Huan Huan, Chengxiang Tian, Shuangyue Wang, Q. Feng, H. Deng, Xiang Xia, Xiaotao Zu","doi":"10.1063/10.0026319","DOIUrl":"https://doi.org/10.1063/10.0026319","url":null,"abstract":"Creating adsorption sites by doping heteroatoms into the graphitic structures of carbon electrodes is an effective strategy for improving lithium storage in lithium-ion batteries. In this work, we prepared carbon nanotubes with controllable morphology and controllable nitrogen-doping level by a one-step pyrolysis method through adjusting the amount of urea used during synthesis. Under the synergistic effects of high temperature and Ni-catalyst migration, the carbon nanosheets generated by pyrolysis become coiled into tube-like structures. Characterization using Raman and x-ray photoelectron spectroscopy revealed that the B and N atoms were successfully co-doped into the resultant carbon nanotubes. When the obtained materials were used as lithium-ion battery anodes, reversible specific capacities of 337.11 and 187.62 mA h g−1 were achieved at current densities of 100 and 2000 mA g−1, respectively. Moreover, a capacity of 140.53 mA h g−1 was retained after 2000 cycles at a current density of 2000 mA g−1. The mechanism of lithium storage in these carbon materials was elucidated using cyclic voltammetry tests. Regarding other functional applications, the synthesized composite carbon nanotube material could also be used in other energy-storage battery systems, such as in the sulfur-carrying structures of lithium-sulfur batteries and in the three-dimensional porous structures of sodium batteries.","PeriodicalId":506091,"journal":{"name":"Nanotechnology and Precision Engineering","volume":"35 2","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141338282","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Failure behavior of tantalum electrolytic capacitors under extreme dynamic impact: Mechanical–electrical model and microscale characterization 钽电解电容器在极端动态冲击下的失效行为:机械-电气模型和微观表征
Pub Date : 2024-06-05 DOI: 10.1063/10.0026017
Xiangyu Han, Da Yu, Cheng Chen, Keren Dai
Tantalum electrolytic capacitors have performance advantages of long life, high temperature stability, and high energy storage capacity and are essential micro-energy storage devices in many pieces of military mechatronic equipment, including penetration weapons. The latter are high-value ammunition used to strike strategic targets, and precision in their blast point is ensured through the use of penetration fuzes as control systems. However, the extreme dynamic impact that occurs during penetration causes a surge in the leakage current of tantalum capacitors, resulting in a loss of ignition energy, which can lead to ammunition half-burst or even sometimes misfire. To address the urgent need for a reliable design of tantalum capacitor for penetration fuzes, in this study, the maximum acceptable leakage current of a tantalum capacitor during impact is calculated, and two different types of tantalum capacitors are tested using a machete hammer. It is found that the leakage current of tantalum capacitors increases sharply under extreme impact, causing functional failure. Considering the piezoresistive effect of the tantalum capacitor dielectric and the changes in the contact area between the dielectric and the negative electrode under pressure, a force–electric simulation model at the microscale is established in COMSOL software. The simulation results align favorably with the experimental results, and it is anticipated that the leakage current of a tantalum capacitor will experience exponential growth with increasing pressure, ultimately culminating in complete failure according to this model. Finally, the morphological changes in tantalum capacitor sintered cells both without pressure and under pressure are characterized by electron microscopy. Broken particles of Ta–Ta2O5 sintered molecular clusters are observed under pressure, together with cracks in the MnO2 negative base, proving that large stresses and strains are generated at the micrometer scale.
钽电解电容器具有寿命长、温度稳定性高、储能能力强等性能优势,是包括穿透武器在内的许多军用机电一体化设备中不可或缺的微型储能装置。后者是用于打击战略目标的高价值弹药,通过使用穿透引信作为控制系统来确保其爆炸点的精确性。然而,在穿透过程中发生的剧烈动态冲击会导致钽电容器的漏电流激增,从而造成点火能量损失,这可能会导致弹药半爆裂,甚至有时会误发。为解决穿甲引信对钽电容器可靠设计的迫切需求,本研究计算了钽电容器在撞击过程中可接受的最大漏电流,并使用弯刀锤对两种不同类型的钽电容器进行了测试。结果发现,在极端冲击下,钽电容器的泄漏电流会急剧增加,导致功能失效。考虑到钽电容器电介质的压阻效应以及电介质与负电极在压力作用下接触面积的变化,在 COMSOL 软件中建立了微尺度的力-电仿真模型。仿真结果与实验结果一致,预计钽电容器的泄漏电流将随着压力的增加而呈指数增长,最终根据该模型完全失效。最后,通过电子显微镜观察了钽电容器烧结单元在无压和有压状态下的形态变化。在压力下可观察到 Ta-Ta2O5 烧结分子簇的断裂颗粒,以及 MnO2 负极基底的裂纹,证明在微米尺度上产生了巨大的应力和应变。
{"title":"Failure behavior of tantalum electrolytic capacitors under extreme dynamic impact: Mechanical–electrical model and microscale characterization","authors":"Xiangyu Han, Da Yu, Cheng Chen, Keren Dai","doi":"10.1063/10.0026017","DOIUrl":"https://doi.org/10.1063/10.0026017","url":null,"abstract":"Tantalum electrolytic capacitors have performance advantages of long life, high temperature stability, and high energy storage capacity and are essential micro-energy storage devices in many pieces of military mechatronic equipment, including penetration weapons. The latter are high-value ammunition used to strike strategic targets, and precision in their blast point is ensured through the use of penetration fuzes as control systems. However, the extreme dynamic impact that occurs during penetration causes a surge in the leakage current of tantalum capacitors, resulting in a loss of ignition energy, which can lead to ammunition half-burst or even sometimes misfire. To address the urgent need for a reliable design of tantalum capacitor for penetration fuzes, in this study, the maximum acceptable leakage current of a tantalum capacitor during impact is calculated, and two different types of tantalum capacitors are tested using a machete hammer. It is found that the leakage current of tantalum capacitors increases sharply under extreme impact, causing functional failure. Considering the piezoresistive effect of the tantalum capacitor dielectric and the changes in the contact area between the dielectric and the negative electrode under pressure, a force–electric simulation model at the microscale is established in COMSOL software. The simulation results align favorably with the experimental results, and it is anticipated that the leakage current of a tantalum capacitor will experience exponential growth with increasing pressure, ultimately culminating in complete failure according to this model. Finally, the morphological changes in tantalum capacitor sintered cells both without pressure and under pressure are characterized by electron microscopy. Broken particles of Ta–Ta2O5 sintered molecular clusters are observed under pressure, together with cracks in the MnO2 negative base, proving that large stresses and strains are generated at the micrometer scale.","PeriodicalId":506091,"journal":{"name":"Nanotechnology and Precision Engineering","volume":"49 47","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141384273","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Real-time generation of circular patterns in electron beam lithography 在电子束光刻技术中实时生成圆形图案
Pub Date : 2024-05-23 DOI: 10.1063/10.0025757
Zhengjie Li, Bohua Yin, Botong Sun, Jingyu Huang, Pengfei Wang, Li Han
Electron beam lithography (EBL) involves the transfer of a pattern onto the surface of a substrate by first scanning a thin layer of organic film (called resist) on the surface by a tightly focused and precisely controlled electron beam (exposure) and then selectively removing the exposed or nonexposed regions of the resist in a solvent (developing). It is widely used for fabrication of integrated circuits, mask manufacturing, photoelectric device processing, and other fields. The key to drawing circular patterns by EBL is the graphics production and control. In an EBL system, an embedded processor calculates and generates the trajectory coordinates for movement of the electron beam, and outputs the corresponding voltage signal through a digital-to-analog converter (DAC) to control a deflector that changes the position of the electron beam. Through this procedure, it is possible to guarantee the accuracy and real-time control of electron beam scanning deflection. Existing EBL systems mostly use the method of polygonal approximation to expose circles. A circle is divided into several polygons, and the smaller the segmentation, the higher is the precision of the splicing circle. However, owing to the need to generate and scan each polygon separately, an increase in the number of segments will lead to a decrease in the overall lithography speed. In this paper, based on Bresenham’s circle algorithm and exploiting the capabilities of a field-programmable gate array and DAC, an improved real-time circle-producing algorithm is designed for EBL. The algorithm can directly generate circular graphics coordinates such as those for a single circle, solid circle, solid ring, or concentric ring, and is able to effectively realizes deflection and scanning of the electron beam for circular graphics lithography. Compared with the polygonal approximation method, the improved algorithm exhibits improved precision and speed. At the same time, the point generation strategy is optimized to solve the blank pixel and pseudo-pixel problems that arise with Bresenham’s circle algorithm. A complete electron beam deflection system is established to carry out lithography experiments, the results of which show that the error between the exposure results and the preset patterns is at the nanometer level, indicating that the improved algorithm meets the requirements for real-time control and high precision of EBL.
电子束光刻(EBL)是指首先用聚焦精确的电子束扫描基底表面的一薄层有机薄膜(称为光刻胶)(曝光),然后在溶剂中选择性地去除光刻胶的曝光或未曝光区域(显影),从而将图案转移到基底表面。它广泛应用于集成电路制造、掩膜制造、光电器件加工等领域。通过 EBL 绘制圆形图案的关键在于图形的制作和控制。在 EBL 系统中,嵌入式处理器计算并生成电子束运动的轨迹坐标,并通过数模转换器(DAC)输出相应的电压信号,以控制偏转器改变电子束的位置。通过这一程序,可以保证电子束扫描偏转的准确性和实时控制。现有的 EBL 系统大多采用多边形近似法来显示圆。一个圆被分割成多个多边形,分割越小,拼接圆的精度就越高。然而,由于需要分别生成和扫描每个多边形,分割数的增加会导致整体光刻速度的下降。本文以 Bresenham 的圆算法为基础,利用现场可编程门阵列和 DAC 的功能,为 EBL 设计了一种改进的实时圆生成算法。该算法可直接生成单圆、实心圆、实心环或同心圆等圆形图形坐标,并能有效实现圆形图形光刻中电子束的偏转和扫描。与多边形近似法相比,改进后的算法精度更高、速度更快。同时,优化了点生成策略,解决了布列森纳姆圆算法中出现的空白像素和伪像素问题。建立了一套完整的电子束偏转系统来进行光刻实验,结果表明曝光结果与预设图案之间的误差在纳米级,表明改进算法满足了 EBL 实时控制和高精度的要求。
{"title":"Real-time generation of circular patterns in electron beam lithography","authors":"Zhengjie Li, Bohua Yin, Botong Sun, Jingyu Huang, Pengfei Wang, Li Han","doi":"10.1063/10.0025757","DOIUrl":"https://doi.org/10.1063/10.0025757","url":null,"abstract":"Electron beam lithography (EBL) involves the transfer of a pattern onto the surface of a substrate by first scanning a thin layer of organic film (called resist) on the surface by a tightly focused and precisely controlled electron beam (exposure) and then selectively removing the exposed or nonexposed regions of the resist in a solvent (developing). It is widely used for fabrication of integrated circuits, mask manufacturing, photoelectric device processing, and other fields. The key to drawing circular patterns by EBL is the graphics production and control. In an EBL system, an embedded processor calculates and generates the trajectory coordinates for movement of the electron beam, and outputs the corresponding voltage signal through a digital-to-analog converter (DAC) to control a deflector that changes the position of the electron beam. Through this procedure, it is possible to guarantee the accuracy and real-time control of electron beam scanning deflection. Existing EBL systems mostly use the method of polygonal approximation to expose circles. A circle is divided into several polygons, and the smaller the segmentation, the higher is the precision of the splicing circle. However, owing to the need to generate and scan each polygon separately, an increase in the number of segments will lead to a decrease in the overall lithography speed. In this paper, based on Bresenham’s circle algorithm and exploiting the capabilities of a field-programmable gate array and DAC, an improved real-time circle-producing algorithm is designed for EBL. The algorithm can directly generate circular graphics coordinates such as those for a single circle, solid circle, solid ring, or concentric ring, and is able to effectively realizes deflection and scanning of the electron beam for circular graphics lithography. Compared with the polygonal approximation method, the improved algorithm exhibits improved precision and speed. At the same time, the point generation strategy is optimized to solve the blank pixel and pseudo-pixel problems that arise with Bresenham’s circle algorithm. A complete electron beam deflection system is established to carry out lithography experiments, the results of which show that the error between the exposure results and the preset patterns is at the nanometer level, indicating that the improved algorithm meets the requirements for real-time control and high precision of EBL.","PeriodicalId":506091,"journal":{"name":"Nanotechnology and Precision Engineering","volume":"113 10","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141105953","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Feedback linearization and equivalent-disturbance compensation control strategy for piezoelectric stage 压电平台的反馈线性化和等效干扰补偿控制策略
Pub Date : 2024-02-26 DOI: 10.1063/10.0024700
Tao Huang, Yingbin Wang, Zhihong Luo, Huajun Cao, Guibao Tao, Mingxiang Ling
Piezoelectric stages use piezoelectric actuators and flexure hinges as driving and amplifying mechanisms, respectively. These systems have high positioning accuracy and high-frequency responses, and they are widely used in various precision/ultra-precision positioning fields. However, the main challenge with these devices is the inherent hysteresis nonlinearity of piezoelectric actuators, which seriously affects the tracking accuracy of a piezoelectric stage. Inspired by this challenge, in this work, we developed a Hammerstein model to describe the hysteresis nonlinearity of a piezoelectric stage. In particular, in our proposed scheme, a feedback-linearization algorithm is used to eliminate the static hysteresis nonlinearity. In addition, a composite controller based on equivalent-disturbance compensation was designed to counteract model uncertainties and external disturbances. An analysis of the stability of a closed-loop system based on this feedback-linearization algorithm and composite controller was performed, and this was followed by extensive comparative experiments using a piezoelectric stage developed in the laboratory. The experimental results confirmed that the feedback-linearization algorithm and the composite controller offer improved linearization and trajectory-tracking performance.
压电平台分别使用压电致动器和挠性铰链作为驱动和放大机构。这些系统具有高定位精度和高频响应,被广泛应用于各种精密/超精密定位领域。然而,这些装置面临的主要挑战是压电致动器固有的滞后非线性,这严重影响了压电平台的跟踪精度。受这一挑战的启发,在这项工作中,我们开发了一个哈默斯坦模型来描述压电平台的磁滞非线性。特别是,在我们提出的方案中,使用了反馈线性化算法来消除静态磁滞非线性。此外,我们还设计了一种基于等效干扰补偿的复合控制器,以抵消模型不确定性和外部干扰。基于这种反馈线性化算法和复合控制器,对闭环系统的稳定性进行了分析,随后使用实验室开发的压电平台进行了广泛的对比实验。实验结果证实,反馈线性化算法和复合控制器具有更好的线性化和轨迹跟踪性能。
{"title":"Feedback linearization and equivalent-disturbance compensation control strategy for piezoelectric stage","authors":"Tao Huang, Yingbin Wang, Zhihong Luo, Huajun Cao, Guibao Tao, Mingxiang Ling","doi":"10.1063/10.0024700","DOIUrl":"https://doi.org/10.1063/10.0024700","url":null,"abstract":"Piezoelectric stages use piezoelectric actuators and flexure hinges as driving and amplifying mechanisms, respectively. These systems have high positioning accuracy and high-frequency responses, and they are widely used in various precision/ultra-precision positioning fields. However, the main challenge with these devices is the inherent hysteresis nonlinearity of piezoelectric actuators, which seriously affects the tracking accuracy of a piezoelectric stage. Inspired by this challenge, in this work, we developed a Hammerstein model to describe the hysteresis nonlinearity of a piezoelectric stage. In particular, in our proposed scheme, a feedback-linearization algorithm is used to eliminate the static hysteresis nonlinearity. In addition, a composite controller based on equivalent-disturbance compensation was designed to counteract model uncertainties and external disturbances. An analysis of the stability of a closed-loop system based on this feedback-linearization algorithm and composite controller was performed, and this was followed by extensive comparative experiments using a piezoelectric stage developed in the laboratory. The experimental results confirmed that the feedback-linearization algorithm and the composite controller offer improved linearization and trajectory-tracking performance.","PeriodicalId":506091,"journal":{"name":"Nanotechnology and Precision Engineering","volume":"53 3","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140430825","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Patterning single-layer materials by electrical breakdown using atomic force microscopy 利用原子力显微镜通过电击穿对单层材料进行图案化
Pub Date : 2023-12-26 DOI: 10.1063/10.0023848
Yajie Yang, Jiajia Lu, Yanbo Xie, Libing Duan
The development of nanoelectronics and nanotechnologies has been boosted significantly by the emergence of 2D materials because of their atomic thickness and peculiar properties, and developing a universal, precise patterning technology for single-layer 2D materials is critical for assembling nanodevices. Demonstrated here is a nanomachining technique using electrical breakdown by an AFM tip to fabricate nanopores, nanostrips, and other nanostructures on demand. This can be achieved by voltage scanning or applying a constant voltage while moving the tip. By measuring the electrical current, the formation process on single-layer materials was shown quantitatively. The present results provide evidence of successful pattern fabrication on single-layer MoS2, boron nitride, and graphene, although further confirmation is still needed. The proposed method holds promise as a general nanomachining technology for the future.
由于二维材料具有原子厚度和特殊性质,二维材料的出现极大地推动了纳米电子学和纳米技术的发展,而开发一种适用于单层二维材料的通用精确图案技术对于组装纳米器件至关重要。这里展示的是一种利用原子力显微镜针尖的电击穿来按需制造纳米孔、纳米条和其他纳米结构的纳米加工技术。这可以通过电压扫描或在移动针尖的同时施加恒定电压来实现。通过测量电流,可以定量显示单层材料的形成过程。尽管还需要进一步的确认,但目前的结果提供了在单层 MoS2、氮化硼和石墨烯上成功制作图案的证据。所提出的方法有望成为未来的一种通用纳米加工技术。
{"title":"Patterning single-layer materials by electrical breakdown using atomic force microscopy","authors":"Yajie Yang, Jiajia Lu, Yanbo Xie, Libing Duan","doi":"10.1063/10.0023848","DOIUrl":"https://doi.org/10.1063/10.0023848","url":null,"abstract":"The development of nanoelectronics and nanotechnologies has been boosted significantly by the emergence of 2D materials because of their atomic thickness and peculiar properties, and developing a universal, precise patterning technology for single-layer 2D materials is critical for assembling nanodevices. Demonstrated here is a nanomachining technique using electrical breakdown by an AFM tip to fabricate nanopores, nanostrips, and other nanostructures on demand. This can be achieved by voltage scanning or applying a constant voltage while moving the tip. By measuring the electrical current, the formation process on single-layer materials was shown quantitatively. The present results provide evidence of successful pattern fabrication on single-layer MoS2, boron nitride, and graphene, although further confirmation is still needed. The proposed method holds promise as a general nanomachining technology for the future.","PeriodicalId":506091,"journal":{"name":"Nanotechnology and Precision Engineering","volume":"86 4","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-12-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139157307","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Investigation of high-quality-factor aluminum nitride MEMS cantilever resonators 研究高质量系数氮化铝 MEMS 悬臂谐振器
Pub Date : 2023-11-27 DOI: 10.1063/10.0022173
Shuai Shi, Qingrui Yang, Yi Yuan, Haolin Li, Pengfei Niu, Wenlan Guo, Chen Sun, Wei Pang
This paper presents the design, fabrication, and characterization of cantilever-type resonators with a novel stacked structure. Aluminum nitride is adopted as the material for both the structural layer and the piezoelectric layer; this simplifies the fabrication process and improves the quality factor of the resonator. Both in-plane and out-of-plane flexural modes were investigated. The effect of the structural dimensions and electrode patterns on the resonator’s performance were also studied. Finite-element simulations and experiments examining anchor loss and thermoelastic damping, which are the main loss mechanisms affecting the quality factor of these resonators, were carried out. The optimal structural dimensions and electrode patterns of the cantilever-type resonators are presented. A quality factor of 7922 with a motional impedance of 88.52 kΩ and a quality factor of 8851 with a motional impedance of 67.03 kΩ were achieved for the in-plane and out-of-plane flexural-mode resonators, respectively. The proposed resonator design will contribute to the development of high-performance devices such as accelerometers, gyroscopes, and pressure sensors.
本文介绍了具有新型叠层结构的悬臂式谐振器的设计、制造和特性分析。结构层和压电层均采用氮化铝作为材料,从而简化了制造工艺并提高了谐振器的品质因数。研究了平面内和平面外的挠曲模式。此外,还研究了结构尺寸和电极图案对谐振器性能的影响。有限元模拟和实验检验了锚定损耗和热弹性阻尼,这是影响这些谐振器品质因数的主要损耗机制。文中介绍了悬臂型谐振器的最佳结构尺寸和电极模式。平面内和平面外挠曲模式谐振器的品质因数分别达到了 7922 和 8851,前者的运动阻抗为 88.52 kΩ,后者的运动阻抗为 67.03 kΩ。所提出的谐振器设计将有助于加速计、陀螺仪和压力传感器等高性能器件的开发。
{"title":"Investigation of high-quality-factor aluminum nitride MEMS cantilever resonators","authors":"Shuai Shi, Qingrui Yang, Yi Yuan, Haolin Li, Pengfei Niu, Wenlan Guo, Chen Sun, Wei Pang","doi":"10.1063/10.0022173","DOIUrl":"https://doi.org/10.1063/10.0022173","url":null,"abstract":"This paper presents the design, fabrication, and characterization of cantilever-type resonators with a novel stacked structure. Aluminum nitride is adopted as the material for both the structural layer and the piezoelectric layer; this simplifies the fabrication process and improves the quality factor of the resonator. Both in-plane and out-of-plane flexural modes were investigated. The effect of the structural dimensions and electrode patterns on the resonator’s performance were also studied. Finite-element simulations and experiments examining anchor loss and thermoelastic damping, which are the main loss mechanisms affecting the quality factor of these resonators, were carried out. The optimal structural dimensions and electrode patterns of the cantilever-type resonators are presented. A quality factor of 7922 with a motional impedance of 88.52 kΩ and a quality factor of 8851 with a motional impedance of 67.03 kΩ were achieved for the in-plane and out-of-plane flexural-mode resonators, respectively. The proposed resonator design will contribute to the development of high-performance devices such as accelerometers, gyroscopes, and pressure sensors.","PeriodicalId":506091,"journal":{"name":"Nanotechnology and Precision Engineering","volume":"40 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139232718","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Flexible capacitive pressure sensor based on interdigital electrodes with porous microneedle arrays for physiological signal monitoring 基于多孔微针阵列间电极的柔性电容式压力传感器,用于生理信号监测
Pub Date : 2023-11-20 DOI: 10.1063/10.0022174
Jiahui Xu, Minghao Wang, Minyi Jin, Siyan Shang, Chuner Ni, Yili Hu, Xun Sun, Jun Xu, Bowen Ji, Le Li, Yuhua Cheng, Gaofeng Wang
Flexible pressure sensors have many potential applications in the monitoring of physiological signals because of their good biocompatibility and wearability. However, their relatively low sensitivity, linearity, and stability have hindered their large-scale commercial application. Herein, a flexible capacitive pressure sensor based on an interdigital electrode structure with two porous microneedle arrays (MNAs) is proposed. The porous substrate that constitutes the MNA is a mixed product of polydimethylsiloxane and NaHCO3. Due to its porous and interdigital structure, the maximum sensitivity (0.07 kPa−1) of a porous MNA-based pressure sensor was found to be seven times higher than that of an imporous MNA pressure sensor, and it was much greater than that of a flat pressure sensor without a porous MNA structure. Finite-element analysis showed that the interdigital MNA structure can greatly increase the strain and improve the sensitivity of the sensor. In addition, the porous MNA-based pressure sensor was found to have good stability over 1500 loading cycles as a result of its bilayer parylene-enhanced conductive electrode structure. Most importantly, it was found that the sensor could accurately monitor the motion of a finger, wrist joint, arm, face, abdomen, eye, and Adam’s apple. Furthermore, preliminary semantic recognition was achieved by monitoring the movement of the Adam’s apple. Finally, multiple pressure sensors were integrated into a 3 × 3 array to detect a spatial pressure distribution. Compared to the sensors reported in previous works, the interdigital electrode structure presented in this work improves sensitivity and stability by modifying the electrode layer rather than the dielectric layer.
柔性压力传感器具有良好的生物兼容性和可穿戴性,因此在生理信号监测方面有许多潜在应用。然而,相对较低的灵敏度、线性度和稳定性阻碍了它们的大规模商业应用。本文提出了一种柔性电容式压力传感器,该传感器基于带有两个多孔微针阵列(MNA)的交叉电极结构。构成 MNA 的多孔基底是聚二甲基硅氧烷和 NaHCO3 的混合产物。由于其多孔和齿间结构,基于多孔 MNA 的压力传感器的最大灵敏度(0.07 kPa-1)是无孔 MNA 压力传感器的七倍,远高于无多孔 MNA 结构的平面压力传感器。有限元分析表明,齿间 MNA 结构可以大大增加应变,提高传感器的灵敏度。此外,由于采用了双层对二甲苯增强导电电极结构,基于多孔 MNA 的压力传感器在 1500 次加载周期内具有良好的稳定性。最重要的是,研究发现该传感器可以准确监测手指、腕关节、手臂、面部、腹部、眼睛和喉结的运动。此外,通过监测喉结的运动,还实现了初步的语义识别。最后,多个压力传感器被集成到一个 3 × 3 阵列中,以检测空间压力分布。与之前报道的传感器相比,本研究中提出的齿间电极结构通过修改电极层而不是电介质层,提高了灵敏度和稳定性。
{"title":"Flexible capacitive pressure sensor based on interdigital electrodes with porous microneedle arrays for physiological signal monitoring","authors":"Jiahui Xu, Minghao Wang, Minyi Jin, Siyan Shang, Chuner Ni, Yili Hu, Xun Sun, Jun Xu, Bowen Ji, Le Li, Yuhua Cheng, Gaofeng Wang","doi":"10.1063/10.0022174","DOIUrl":"https://doi.org/10.1063/10.0022174","url":null,"abstract":"Flexible pressure sensors have many potential applications in the monitoring of physiological signals because of their good biocompatibility and wearability. However, their relatively low sensitivity, linearity, and stability have hindered their large-scale commercial application. Herein, a flexible capacitive pressure sensor based on an interdigital electrode structure with two porous microneedle arrays (MNAs) is proposed. The porous substrate that constitutes the MNA is a mixed product of polydimethylsiloxane and NaHCO3. Due to its porous and interdigital structure, the maximum sensitivity (0.07 kPa−1) of a porous MNA-based pressure sensor was found to be seven times higher than that of an imporous MNA pressure sensor, and it was much greater than that of a flat pressure sensor without a porous MNA structure. Finite-element analysis showed that the interdigital MNA structure can greatly increase the strain and improve the sensitivity of the sensor. In addition, the porous MNA-based pressure sensor was found to have good stability over 1500 loading cycles as a result of its bilayer parylene-enhanced conductive electrode structure. Most importantly, it was found that the sensor could accurately monitor the motion of a finger, wrist joint, arm, face, abdomen, eye, and Adam’s apple. Furthermore, preliminary semantic recognition was achieved by monitoring the movement of the Adam’s apple. Finally, multiple pressure sensors were integrated into a 3 × 3 array to detect a spatial pressure distribution. Compared to the sensors reported in previous works, the interdigital electrode structure presented in this work improves sensitivity and stability by modifying the electrode layer rather than the dielectric layer.","PeriodicalId":506091,"journal":{"name":"Nanotechnology and Precision Engineering","volume":"2 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-11-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139255346","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Experiment on inducing apoptosis of melanoma cells by micro-plasma jet 微等离子体喷射诱导黑色素瘤细胞凋亡的实验
Pub Date : 2023-11-15 DOI: 10.1063/10.0022239
Hua Li, Qihao Shi, Yanhua Yang, Jinghao Qi, Yuhan Zhang, Fengyun Wang, Xiaoxia Du, Wenxiang Xiao
As a promising cancer treatment method, cold atmospheric plasma has received widespread attention in recent years. However, previous research has focused more on how to realize and expand the anti-cancer scope of plasma jet. There are also studies on the killing of small-scale cancer cells, but the effects of plasma jet on normal cells and normal cell clusters have been ignored. Therefore, we proposed a 50 µm sized micro-plasma jet device, and used the device to treat melanoma cells (A-375) and human glial cells (HA1800) to evaluate their anti-cancer effects and effects on normal cells. The experimental results show that this kind of micro-plasma jet device can effectively inactivate cancer cells in a short period of time, while having little effect on normal cells. This work provides a certain experimental basis for the application of fine plasma jet to clinically inactivate cancer cells.
作为一种前景广阔的癌症治疗方法,冷大气等离子体近年来受到了广泛关注。然而,以往的研究更多集中在如何实现和扩大等离子体射流的抗癌范围。也有关于杀死小规模癌细胞的研究,但等离子体射流对正常细胞和正常细胞簇的影响一直被忽视。因此,我们提出了一种 50 µm 大小的微等离子体射流装置,并用该装置处理黑色素瘤细胞(A-375)和人神经胶质细胞(HA1800),以评估其抗癌效果和对正常细胞的影响。实验结果表明,这种微等离子体射流装置能在短时间内有效灭活癌细胞,而对正常细胞影响很小。这项工作为应用微等离子体射流在临床上灭活癌细胞提供了一定的实验依据。
{"title":"Experiment on inducing apoptosis of melanoma cells by micro-plasma jet","authors":"Hua Li, Qihao Shi, Yanhua Yang, Jinghao Qi, Yuhan Zhang, Fengyun Wang, Xiaoxia Du, Wenxiang Xiao","doi":"10.1063/10.0022239","DOIUrl":"https://doi.org/10.1063/10.0022239","url":null,"abstract":"As a promising cancer treatment method, cold atmospheric plasma has received widespread attention in recent years. However, previous research has focused more on how to realize and expand the anti-cancer scope of plasma jet. There are also studies on the killing of small-scale cancer cells, but the effects of plasma jet on normal cells and normal cell clusters have been ignored. Therefore, we proposed a 50 µm sized micro-plasma jet device, and used the device to treat melanoma cells (A-375) and human glial cells (HA1800) to evaluate their anti-cancer effects and effects on normal cells. The experimental results show that this kind of micro-plasma jet device can effectively inactivate cancer cells in a short period of time, while having little effect on normal cells. This work provides a certain experimental basis for the application of fine plasma jet to clinically inactivate cancer cells.","PeriodicalId":506091,"journal":{"name":"Nanotechnology and Precision Engineering","volume":"64 4","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-11-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139272268","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
Nanotechnology and Precision Engineering
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1