Pub Date : 2019-12-01DOI: 10.1109/PowerMEMS49317.2019.30773701048
Hao Wang, Shuting Liu, Tianyiyi He, S. Dong, Chengkuo Lee
Conventionally, the output amplitude of TENGs sensors is detected as the sensing output, where the accuracy and stability are easily affected by environmental interferences such as humidity, temperature and electrostatic coupling with surrounding objects. Meanwhile, the nature of pulse mode voltage output cannot provide information to further generate detailed profile of force variation along time interval when users press a typical TENG working in contact-separation mode. These two critical issues stop the TENGs sensors to be competitive with conventionally commercialized sensors.In this study, a switchable textile-triboelectric nanogenerator (S-TENG) is proposed to offer a solution for these issues. By working on a switchable mode to generate RC discharging voltage, i.e, enabling capacitive sensing, the capacitance of TENGs devices is not affected by environmental interferences. Moreover, a high-frequency switching approach is investigated to generate a continuous profile of time-dependent capacitance change as a function of force variation along time, referring to the continuous sensing parameter. Therefore, S-TENGs offer the sensory information which could not be achieved by any other TENGs so far.
{"title":"A switchable fabric-triboelectric nanogenerators (SF-TENGs) profile sensing application","authors":"Hao Wang, Shuting Liu, Tianyiyi He, S. Dong, Chengkuo Lee","doi":"10.1109/PowerMEMS49317.2019.30773701048","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.30773701048","url":null,"abstract":"Conventionally, the output amplitude of TENGs sensors is detected as the sensing output, where the accuracy and stability are easily affected by environmental interferences such as humidity, temperature and electrostatic coupling with surrounding objects. Meanwhile, the nature of pulse mode voltage output cannot provide information to further generate detailed profile of force variation along time interval when users press a typical TENG working in contact-separation mode. These two critical issues stop the TENGs sensors to be competitive with conventionally commercialized sensors.In this study, a switchable textile-triboelectric nanogenerator (S-TENG) is proposed to offer a solution for these issues. By working on a switchable mode to generate RC discharging voltage, i.e, enabling capacitive sensing, the capacitance of TENGs devices is not affected by environmental interferences. Moreover, a high-frequency switching approach is investigated to generate a continuous profile of time-dependent capacitance change as a function of force variation along time, referring to the continuous sensing parameter. Therefore, S-TENGs offer the sensory information which could not be achieved by any other TENGs so far.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"48 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74938061","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-12-01DOI: 10.1109/PowerMEMS49317.2019.92321108346
T. Grzebyk, M. Bigos, A. Gorecka-Drzazga, J. Dziuban, D. Hasan, Chang-Soon Lee
This work describes the construction, working principle and properties of two types of ion sources made in MEMS technology, designed for spectroscopic identification of gaseous and liquid samples. The first one is formed as an electro-magnetic trap efficiently ionizing gas particles even in a high vacuum. The second one uses the principle of electro-spray ionization. The application of the same materials and consistent technology allows for their integration on a single silicon-glass chip.
{"title":"Mems Ion Sources For Spectroscopic Identification Of Gaseous And Liquid Samples","authors":"T. Grzebyk, M. Bigos, A. Gorecka-Drzazga, J. Dziuban, D. Hasan, Chang-Soon Lee","doi":"10.1109/PowerMEMS49317.2019.92321108346","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.92321108346","url":null,"abstract":"This work describes the construction, working principle and properties of two types of ion sources made in MEMS technology, designed for spectroscopic identification of gaseous and liquid samples. The first one is formed as an electro-magnetic trap efficiently ionizing gas particles even in a high vacuum. The second one uses the principle of electro-spray ionization. The application of the same materials and consistent technology allows for their integration on a single silicon-glass chip.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"21 1","pages":"1-3"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73679638","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-12-01DOI: 10.1109/PowerMEMS49317.2019.51289506937
P. Nieroda, A. Kusior
The aim of this study was to determine the influence of synthesis method of $Cu_{1.8}S$ material for its thermoelectric properties. The material was synthesized by hydrothermal and high temperature method and then densified by Spark Plasma Sintering (SPS) technique. Structural, phase and chemical composition analyses were examined with X-ray diffraction (XRD) and scanning electron microscopy (SEM). The investigations of thermoelectric properties, i.e.: electrical conductivity, the Seebeck coefficient and the thermal conductivity, were carried out in the temperature range from RT to 910 K. On the basis of the experimental data, the temperature dependencies of the thermoelectric Figure of merit ZT were calculated. Detailed analysis of all obtained results was performed with additional insight into the role of the synthesis method on received thermoelectric properties. Superionic thermoelectric materials based on $Cu_{2}X$ (X = S, Se, Te) are intensively studied in recent years due to the very high values of their ZT parameter [1]. Unfortunately, their transport properties are unstable because of the high mobility of copper ions [2]. $Cu_{1.8}S$ is much more stable compared to $Cu_{2}S$ and used to be obtained mainly by the mechanical alloying method [3], [4]. In this work, the $Cu_{1.8}S$ material was received by hydrothermal synthesis and high-temperature synthesis, and then their transport properties were examined and compared.
本研究的目的是确定$Cu_{1.8}S$材料的合成方法对其热电性能的影响。采用水热法和高温法合成了该材料，然后采用火花等离子烧结(SPS)技术进行了致密化。用x射线衍射仪(XRD)和扫描电镜(SEM)对其结构、物相和化学成分进行了分析。在RT ~ 910 K的温度范围内进行了热电性能的研究，即电导率、塞贝克系数和导热系数。在实验数据的基础上，计算了热电性能图ZT的温度依赖关系。对所有获得的结果进行了详细的分析，并进一步深入了解了合成方法对接收热电性能的作用。基于$Cu_{2}X$ (X = S, Se, Te)的超离子热电材料由于其ZT参数非常高，近年来得到了广泛的研究[1]。不幸的是，由于铜离子的高迁移率，它们的输运性质不稳定[2]。$Cu_{1.8}S$比$Cu_{2}S$稳定得多，过去主要通过机械合金化方法获得[3]，[4]。本文通过水热合成和高温合成得到了$Cu_{1.8}S$材料，并对其输运性质进行了测试和比较。
{"title":"Synthesis and thermoelectric properties of Cu1.8 S","authors":"P. Nieroda, A. Kusior","doi":"10.1109/PowerMEMS49317.2019.51289506937","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.51289506937","url":null,"abstract":"The aim of this study was to determine the influence of synthesis method of $Cu_{1.8}S$ material for its thermoelectric properties. The material was synthesized by hydrothermal and high temperature method and then densified by Spark Plasma Sintering (SPS) technique. Structural, phase and chemical composition analyses were examined with X-ray diffraction (XRD) and scanning electron microscopy (SEM). The investigations of thermoelectric properties, i.e.: electrical conductivity, the Seebeck coefficient and the thermal conductivity, were carried out in the temperature range from RT to 910 K. On the basis of the experimental data, the temperature dependencies of the thermoelectric Figure of merit ZT were calculated. Detailed analysis of all obtained results was performed with additional insight into the role of the synthesis method on received thermoelectric properties. Superionic thermoelectric materials based on $Cu_{2}X$ (X = S, Se, Te) are intensively studied in recent years due to the very high values of their ZT parameter [1]. Unfortunately, their transport properties are unstable because of the high mobility of copper ions [2]. $Cu_{1.8}S$ is much more stable compared to $Cu_{2}S$ and used to be obtained mainly by the mechanical alloying method [3], [4]. In this work, the $Cu_{1.8}S$ material was received by hydrothermal synthesis and high-temperature synthesis, and then their transport properties were examined and compared.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"31 1","pages":"1-3"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84367149","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-12-01DOI: 10.1109/PowerMEMS49317.2019.92321102084
T. Wen, Y. Shi, Y. Jia
Composite materials have great advantages in their mechanical properties while being lightweight, and are widely used in various fields, especially in aerospace, automotive and medical sectors. However, the uncontrollability and difficulty in prediction of damage propagation has limited its application circumstances. Early damage detection through in situ monitoring from integrated wireless sensors is regarded as an effective solution. Therefore, energy harvesting from the vibration of wind turbine blade can be a key enabling technology to power the wireless sensors for in situ damage monitoring under complex application circumstance, where conventional power supply is not feasible due to the bulky alterations to the blade structural profile. This paper investigates the integration of macro-fibre composite (MFC) onto glass fibre composite wind turbine and explores the capacity of power generation based on ambient vibration, in order to equip the blades with piezoelectric vibration energy harvesting (PVEH) to power associated structure health monitoring (SHM) functionalities in future studies.
{"title":"Vibration Energy Harvesting for Information Transmission on Offshore Wind Turbine Blade","authors":"T. Wen, Y. Shi, Y. Jia","doi":"10.1109/PowerMEMS49317.2019.92321102084","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.92321102084","url":null,"abstract":"Composite materials have great advantages in their mechanical properties while being lightweight, and are widely used in various fields, especially in aerospace, automotive and medical sectors. However, the uncontrollability and difficulty in prediction of damage propagation has limited its application circumstances. Early damage detection through in situ monitoring from integrated wireless sensors is regarded as an effective solution. Therefore, energy harvesting from the vibration of wind turbine blade can be a key enabling technology to power the wireless sensors for in situ damage monitoring under complex application circumstance, where conventional power supply is not feasible due to the bulky alterations to the blade structural profile. This paper investigates the integration of macro-fibre composite (MFC) onto glass fibre composite wind turbine and explores the capacity of power generation based on ambient vibration, in order to equip the blades with piezoelectric vibration energy harvesting (PVEH) to power associated structure health monitoring (SHM) functionalities in future studies.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"2 1","pages":"1-5"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84023757","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-12-01DOI: 10.1109/PowerMEMS49317.2019.92321104446
N. Hodžić, D. Galayko, S. Kim, P. Basset
In this work, we demonstrate that an unstable charge pump can be an effective conditioning circuit for sliding triboelectret energy (nano) generators (TENGs) power generation and extraction, as long as we can electrically connect the sliding electrode. Studied TENG structure has two fixed interdigitated grating electrodes and a third mobile electrode, which create two variable capacitors in antiphase. A Bennet’s charge doubler electronic circuit is applied at the outputs of the TENG and two distinct cases (either one or two variable capacitors) are compared with the purpose of inspecting the efficiency and working conditions. In addition to the experimental results, a Spice simulation models are created to be compared with.
{"title":"Unstable charge-pump for signal rectification of sliding tribo-electret generators with interdigitated grating electrodes","authors":"N. Hodžić, D. Galayko, S. Kim, P. Basset","doi":"10.1109/PowerMEMS49317.2019.92321104446","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.92321104446","url":null,"abstract":"In this work, we demonstrate that an unstable charge pump can be an effective conditioning circuit for sliding triboelectret energy (nano) generators (TENGs) power generation and extraction, as long as we can electrically connect the sliding electrode. Studied TENG structure has two fixed interdigitated grating electrodes and a third mobile electrode, which create two variable capacitors in antiphase. A Bennet’s charge doubler electronic circuit is applied at the outputs of the TENG and two distinct cases (either one or two variable capacitors) are compared with the purpose of inspecting the efficiency and working conditions. In addition to the experimental results, a Spice simulation models are created to be compared with.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"21 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80898953","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-12-01DOI: 10.1109/PowerMEMS49317.2019.82063201964
Qiongfeng Shi, Chengkuo Lee
A bio-mimetic flexible wearable interface is proposed with connected spider-net coding electrodes, in order to achieve single-electrode interface for various human machine interactions. Two coding approaches are investigated based on the self-generated signals of the triboelectrification between finger and friction surface of the interface. The spider-net-coding interface shows good reliability in detecting different sliding directions according to the output patterns, which is only dependent on relative amplitudes and positions of the output peaks, irrelevant of various environmental and operational parameters. In addition, it also has high capability for scale-up applications with more directions, showing great potentials in the areas of human-machine interactions, security, robotics, Internet of Things, etc.
{"title":"Bio-Mimetic Flexible Wearable Interface with Spider-Net Coding Based On Self-Powered Triboelectric Mechanism","authors":"Qiongfeng Shi, Chengkuo Lee","doi":"10.1109/PowerMEMS49317.2019.82063201964","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.82063201964","url":null,"abstract":"A bio-mimetic flexible wearable interface is proposed with connected spider-net coding electrodes, in order to achieve single-electrode interface for various human machine interactions. Two coding approaches are investigated based on the self-generated signals of the triboelectrification between finger and friction surface of the interface. The spider-net-coding interface shows good reliability in detecting different sliding directions according to the output patterns, which is only dependent on relative amplitudes and positions of the output peaks, irrelevant of various environmental and operational parameters. In addition, it also has high capability for scale-up applications with more directions, showing great potentials in the areas of human-machine interactions, security, robotics, Internet of Things, etc.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"5 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90198746","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-12-01DOI: 10.1109/PowerMEMS49317.2019.92321106939
A. Nikkhah, A. Tessier-Poirier, N. Karami, O. Abouali, L. Fréchette
We investigate the friction force of the oscillating liquid plug in a self-oscillating fluidic heat engine (SOFHE) in the laminar regime using numerical simulations, compared to analytical relations and experimental measurements. We study the effect of varying the length to diameter ratio (L/D) and compare the results to the analytical solutions for an infinite length liquid plug, in order to clarify the impact of velocity field near the menisci (end effects). The results showed that the analytical solution for an infinite liquid plug can be used for $L/Dgt 10$ with acceptable accuracy, despite the velocity not being fully developed. Modifications are required to account for end effects for $L/Dlt 10$.
{"title":"Investigation of the Liquid Plug Friction Force in the Self-Oscillating Fluidic Heat Engine (SOFHE)","authors":"A. Nikkhah, A. Tessier-Poirier, N. Karami, O. Abouali, L. Fréchette","doi":"10.1109/PowerMEMS49317.2019.92321106939","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.92321106939","url":null,"abstract":"We investigate the friction force of the oscillating liquid plug in a self-oscillating fluidic heat engine (SOFHE) in the laminar regime using numerical simulations, compared to analytical relations and experimental measurements. We study the effect of varying the length to diameter ratio (L/D) and compare the results to the analytical solutions for an infinite length liquid plug, in order to clarify the impact of velocity field near the menisci (end effects). The results showed that the analytical solution for an infinite liquid plug can be used for $L/Dgt 10$ with acceptable accuracy, despite the velocity not being fully developed. Modifications are required to account for end effects for $L/Dlt 10$.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"107 1","pages":"1-7"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89007288","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-12-01DOI: 10.1109/PowerMEMS49317.2019.51289501055
D. Han, M. Kine, T. Shinshi, S. Kadota
This paper presents a new micro-electromagnetic power generator with a large output power density for the application of low frequency vibrations $(le 10$ Hz). The 16-poles thin magnet plate $(8.9 times 8.9 times mathrm{t}0.5$ mm) alternately magnetized with a chessboard pattern by laser assisted heating helps enhance the magnetic field to coils. The high-aspect-ratio microarray coil (4 x 6 matrix, coil width: $80 mu mathrm{m}$, coil thickness: $160 mu mathrm{m}$, total turns: 144/coil unit) fabricated by thick micromolding is beneficial for increasing coil winding density and reducing its resistance. The fabricated prototype is proved to generate 1.63 mV at 10 Hz and 2 mm excitation. This corresponds to a maximum output power of $0.12 mu mathrm{W}$ and a maximum power density of $1.03 mu mathrm{W} /$cm3.
本文提出了一种新型的用于低频振动的大输出功率密度微电磁发电机($(le 10$ Hz)。16极薄磁板$(8.9 times 8.9 times mathrm{t}0.5$毫米)交替磁化与棋盘图案的激光辅助加热有助于增强磁场线圈。高纵横比微阵列线圈(4 × 6矩阵，线圈宽度:$80 mu mathrm{m}$，线圈厚度:$160 mu mathrm{m}$，总匝数:144/线圈单位)制造的厚微成型有利于增加线圈的缠绕密度和降低其电阻。实验证明，该原型在10 Hz和2 mm激励下产生1.63 mV。这对应于最大输出功率$0.12 mu mathrm{W}$和最大功率密度$1.03 mu mathrm{W} /$ cm3。
{"title":"MEMS Energy Harvester Utilizing a Multi-pole Magnet and a High-aspect-ratio Array Coil for Low Frequency Vibrations","authors":"D. Han, M. Kine, T. Shinshi, S. Kadota","doi":"10.1109/PowerMEMS49317.2019.51289501055","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.51289501055","url":null,"abstract":"This paper presents a new micro-electromagnetic power generator with a large output power density for the application of low frequency vibrations $(le 10$ Hz). The 16-poles thin magnet plate $(8.9 times 8.9 times mathrm{t}0.5$ mm) alternately magnetized with a chessboard pattern by laser assisted heating helps enhance the magnetic field to coils. The high-aspect-ratio microarray coil (4 x 6 matrix, coil width: $80 mu mathrm{m}$, coil thickness: $160 mu mathrm{m}$, total turns: 144/coil unit) fabricated by thick micromolding is beneficial for increasing coil winding density and reducing its resistance. The fabricated prototype is proved to generate 1.63 mV at 10 Hz and 2 mm excitation. This corresponds to a maximum output power of $0.12 mu mathrm{W}$ and a maximum power density of $1.03 mu mathrm{W} /$cm3.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"66 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76026395","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-12-01DOI: 10.1109/PowerMEMS49317.2019.6397053
Z. Sun, L. Velásquez-García
We report the design, fabrication, and characterization of the first miniature ionic wind pumps with monolithic, additively manufactured, multi-needle active electrodes. Our devices stably operate in air at atmospheric pressure and room temperature while generating a negative corona discharge. Our five-needle ionic wind pumps eject gas at 2.9 m/s and at a volumetric flow rate of 343 cm3/s, which is a threefold larger than the flow rate of a single-tip device with comparable efficiency. A model that efficiently and effectively predicts the long-timescale airflow characteristics from the computation intensive, short-timescale simulation of the corona process is presented and validated via experiments.
{"title":"Additively Manufactured, Miniature Multi-Emitter Ionic Wind Pumps","authors":"Z. Sun, L. Velásquez-García","doi":"10.1109/PowerMEMS49317.2019.6397053","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.6397053","url":null,"abstract":"We report the design, fabrication, and characterization of the first miniature ionic wind pumps with monolithic, additively manufactured, multi-needle active electrodes. Our devices stably operate in air at atmospheric pressure and room temperature while generating a negative corona discharge. Our five-needle ionic wind pumps eject gas at 2.9 m/s and at a volumetric flow rate of 343 cm3/s, which is a threefold larger than the flow rate of a single-tip device with comparable efficiency. A model that efficiently and effectively predicts the long-timescale airflow characteristics from the computation intensive, short-timescale simulation of the corona process is presented and validated via experiments.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"124 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80080589","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-12-01DOI: 10.1109/PowerMEMS49317.2019.51289508728
B. Q. Ta, E. Halvorsen
We propose a new concept of vibration-powered pressure sensor that enables pressure monitoring for downhole applications at multiple locations using optical interrogation. The sensor utilizes ambient mechanical energy to excite a resonating silicon structure that consists of a doubly supported beam with a proof mass at the center. One support of the beam is attached to a pressure diaphragm. The pressure-induced bending of the diaphragm produces an axial force in the beam, which alters the stiffness, and hence the resonant frequency. This results in a modulation of the resonant frequency by the input pressure. The frequency responses of the sensor driven by white- and colored-noise excitations are simulated numerically using a lumped model and by solving stochastic differential equations. The fmite element method is used for mechanical analyses. Simulations show that the highest sensitivity (330Hz/bar) is achieved when the beam support on the diaphragm is located at a distance of 0.6 times the radius from the diaphragm center. The sensitivity is approximately zero when the beam support is located at the diaphragm center. The induced principal stresses are below 400 MPa. The sensor does not require electrical power.
{"title":"Vibration-powered pressure sensor","authors":"B. Q. Ta, E. Halvorsen","doi":"10.1109/PowerMEMS49317.2019.51289508728","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.51289508728","url":null,"abstract":"We propose a new concept of vibration-powered pressure sensor that enables pressure monitoring for downhole applications at multiple locations using optical interrogation. The sensor utilizes ambient mechanical energy to excite a resonating silicon structure that consists of a doubly supported beam with a proof mass at the center. One support of the beam is attached to a pressure diaphragm. The pressure-induced bending of the diaphragm produces an axial force in the beam, which alters the stiffness, and hence the resonant frequency. This results in a modulation of the resonant frequency by the input pressure. The frequency responses of the sensor driven by white- and colored-noise excitations are simulated numerically using a lumped model and by solving stochastic differential equations. The fmite element method is used for mechanical analyses. Simulations show that the highest sensitivity (330Hz/bar) is achieved when the beam support on the diaphragm is located at a distance of 0.6 times the radius from the diaphragm center. The sensitivity is approximately zero when the beam support is located at the diaphragm center. The induced principal stresses are below 400 MPa. The sensor does not require electrical power.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"8 1","pages":"1-6"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83930217","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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