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Temperature-Agnostic Pt/Au Ohmic Contacts on n-Type Gallium Nitride for Self-Aligned MOSFETs 用于自对准mosfet的n型氮化镓上的温度无关Pt/Au欧姆触点
Pub Date : 2025-04-11 DOI: 10.1109/TMAT.2025.3559869
Kevin J. Reilly;Andrew T. Binder;Jeffrey Steinfeldt;Andrew Allerman;Robert J. Kaplar
Five alternative metals are investigated as ohmic contacts to n-GaN including Cr/Au, Mo/Au, Pt/Au, Pd/Au, and Ge/Au. Ti-based contacts are traditionally used for ohmic contacts on n-GaN. However, conventional Ti/Al/Ni/Au metallization is found to be incompatible with a self-aligned process for GaN trench MOSFETs due to wet etch restrictions. Therefore, an alternative metallization is needed that is unreactive to the etch chemistry used in the self-aligned process. Additionally, the contact should remain ohmic following anneal at 900 °C so that contact formation can precede the anneal required for p-dopant activation. In the present work, an n-GaN bilayer, consisting of a thin heavily doped contact layer (n0 = 1 × 1020 cm−3) atop a thick lesser doped layer, is used to demonstrate ohmic contacts of alternative metals with low specific contact resistance and extended thermal budget. Cr/Au ohmic contacts are demonstrated up to anneal temperatures of 800 °C, an increase of 200 °C compared to the highest known reports for Cr/Au contacts on n-GaN. Pt/Au metallization is demonstrated as an ohmic contact to n-GaN for the first time and exhibits true temperature-agnostic behavior up to anneal temperatures of 900 °C with specific contact resistance that is near parity with Ti/Al/Ni/Au. The temperature-agnostic behavior of Pt/Au ohmic contacts on the n-GaN bilayer, in addition to chemical compatibility with the self-aligned process, positions Pt/Au contacts as a key enabling element for self-aligned trench MOSFETs on GaN.
研究了Cr/Au、Mo/Au、Pt/Au、Pd/Au和Ge/Au等5种金属与n-GaN的欧姆接触。钛基触点传统上用于n-GaN上的欧姆触点。然而,由于湿蚀的限制,传统的Ti/Al/Ni/Au金属化被发现与GaN沟槽mosfet的自校准工艺不相容。因此,需要一种对自对准过程中使用的蚀刻化学无反应的替代金属化。此外,在900°C退火后,触点应保持欧姆,以便在p掺杂剂活化所需的退火之前形成触点。在本研究中,一个n-GaN双分子层,由一个薄的重掺杂接触层(n0 = 1 × 1020 cm−3)在一个厚的少掺杂层上组成,被用来展示具有低比接触电阻和延长热收支的替代金属的欧姆接触。Cr/Au欧姆接触的退火温度可达800°C,与n-GaN上Cr/Au接触的最高已知报告相比,提高了200°C。Pt/Au金属化首次被证明是与n-GaN的欧姆接触,并且在900°C的退火温度下表现出真正的温度无关性,其特定接触电阻接近Ti/Al/Ni/Au。n-GaN双分子层上Pt/Au欧姆触点的温度不可知行为,以及与自对准工艺的化学相容性,使Pt/Au触点成为GaN上自对准沟槽mosfet的关键使能元件。
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引用次数: 0
Efficient and Robust Resistive Switching Behaviour of MoS$_{2}$ Based Memristor 基于MoS${2}$的忆阻器的高效鲁棒阻性开关行为
Pub Date : 2025-04-10 DOI: 10.1109/TMAT.2025.3559871
Harsh Ranjan;Chandra Prakash Singh;Vivek Pratap Singh;Saurabh Kumar Pandey
This study investigates the resistive-switching characteristics of MoS$_{2}$-based memristors, demonstrating their potential for different device applications. The device, composed of MoS$_{2}$ nanosheets positioned between silver (Ag) and fluorine-doped tin oxide (FTO) electrodes, exhibits distinct switching behaviors under different conditions. Under DC bias, the device initially shows rectification-mediated switching, characterized by asymmetric current-voltage (I-V) curves due to Schottky barriers at the MoS$_{2}$-metal interfaces. However, upon ultra violet (UV) illumination, the device transitions to conductance-mediated switching, which is attributed to the generation of photogenerated carriers that reduce Schottky barriers and enhance conductivity. This transition provides a controllable mechanism for tuning the resistive states, enabling precise modulation of the device's performance. The memristor demonstrates repeatable and stable switching characteristics, making it suitable for low-power memory applications and neuromorphic systems. Furthermore, the dual response to both voltage and light makes the MoS$_{2}$ memristor a promising candidate for developing light-tunable memory devices that can emulate synaptic behavior. These results highlight the potential of MoS$_{2}$-based memristors for integration into advanced memory and computational systems, offering a path toward energy-efficient, flexible, and multifunctional devices.
本研究探讨了基于MoS${2}$的忆阻器的电阻开关特性,展示了它们在不同器件应用中的潜力。该器件由MoS$_{2}$纳米片组成,位于银(Ag)和掺氟氧化锡(FTO)电极之间,在不同条件下表现出不同的开关行为。在直流偏置下,器件最初表现为整流中介开关,其特征是由于MoS -金属界面上的肖特基势垒导致的电流-电压(I-V)曲线不对称。然而,在紫外线(UV)照射下,该器件转变为电导介导的开关,这是由于产生的光生载流子减少了肖特基势垒并增强了电导率。这种转变为调整电阻状态提供了一种可控机制,从而能够精确调制器件的性能。该忆阻器具有可重复和稳定的开关特性,适用于低功耗存储应用和神经形态系统。此外,对电压和光的双重响应使MoS${2}$记忆电阻器成为开发可光调谐记忆器件的有希望的候选人,可以模拟突触行为。这些结果突出了基于MoS的忆阻器集成到高级存储和计算系统中的潜力,为节能,灵活和多功能的器件提供了一条道路。
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引用次数: 0
Call for Nominations for Editor-in-Chief: IEEE Transactions on Electron Devices 《IEEE电子设备汇刊》主编提名公告
Pub Date : 2025-04-09 DOI: 10.1109/TMAT.2025.3558658
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引用次数: 0
Call for Nominations for Editor-in-Chief: IEEE Transactions on Electron Device Letters 呼吁提名主编:IEEE电子设备通讯
Pub Date : 2025-04-09 DOI: 10.1109/TMAT.2025.3558659
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引用次数: 0
Design, Fabrication, Modeling and Characterization of a Polyimide-Based Membrane for High Strain Studies in Microfabricated Devices 用于微加工器件高应变研究的聚酰亚胺基膜的设计、制造、建模和表征
Pub Date : 2025-04-03 DOI: 10.1109/TMAT.2025.3557763
Loïc Lahaye;Nicolas Roisin;Nicolas André;Denis Flandre;Jean-Pierre Raskin
This paper reports the design, integration, modeling and characterization of single crystalline (c-Si) resistors on a 3.6 μm-thick and 2.7 mm-diameter polyimide MEMS membrane. We propose a straightforward top-down fabrication scheme to integrate any microfabricated devices onto a flexible membrane. A bulge-test setup is assembled to measure the deflection of the membrane under a white light interferometer. In addition, a finite elements method (FEM) model is introduced to predict the behavior of the membrane under increasing pressure up to 80 kPa. The parameters of the FEM simulation are tuned with the deflection results to extract the strain tensor, showing a maximal biaxial strain of 0.37% at 80 kPa in the 300 nm-thick c-Si devices. Raman spectroscopy is finally employed to confirm the FEM results by comparing the estimated Raman peak-shift with actual Raman measurements. The shift predicted using phonon-deformation potential (PDP) theory shows excellent agreement with the experimental validation, giving confidence in the FEM model.
本文报道了在厚3.6 μm、直径2.7 mm的聚酰亚胺MEMS薄膜上设计、集成、建模和表征单晶(c-Si)电阻。我们提出了一种直接的自上而下的制造方案,将任何微制造器件集成到柔性膜上。在白光干涉仪下,组装了一个膨胀测试装置来测量薄膜的偏转。此外,还引入了有限元法模型,对膜在80kpa压力下的性能进行了预测。将有限元模拟参数与挠度结果进行调整,提取应变张量,结果表明,300 nm厚c-Si器件在80 kPa时的最大双轴应变为0.37%。最后利用拉曼光谱对有限元计算结果进行了验证,将估算的拉曼峰移与实际拉曼测量值进行了比较。声子变形势(PDP)理论预测的位移与实验验证结果吻合良好,为有限元模型提供了信心。
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引用次数: 0
Effects of Viscoelastic-Anisotropic Properties of Prepreg on Diagonal Warpage of Multilayer PCB Substrates 预浸料粘弹性各向异性对多层PCB基板对角翘曲的影响
Pub Date : 2025-03-22 DOI: 10.1109/TMAT.2025.3572834
Chang-Yeon Gu;Chanhee Yang;Min Sang Ju;Minho Oh;Dong Min Jang;Jae Seok Jang;Jin Woo Jang;Jung Kyu Kim;Taek-Soo Kim
As artificial intelligence (AI) continues to advance, printed circuit board substrates (PCBs) are becoming increasingly important as substrates for stacking various chips. Multilayer PCBs, in particular, are crucial for enhancing performance and reliability through high-density circuit design, improved electrical performance, and miniaturization. These substrates must possess excellent thermal stability to ensure that the stacked chips maintain high performance and reliability even at elevated temperatures. However, high temperatures during production or operation can cause diagonal warpage in multilayer PCBs, potentially leading to reliability issues and malfunction of stacked chips. Therefore, understanding the mechanism behind diagonal warpage in multilayer PCBs subjected to thermal loads is essential for improving package reliability. In this study, the effects of prepreg (PPG) properties on the diagonal warpage of multilayer PCBs were investigated. The viscoelastic behavior of 170 μm thick PPG was quantitatively measured through stress relaxation tests and characterized using the Williams-Landel-Ferry (WLF) model. Additionally, the flexural moduli and coefficient of thermal expansion (CTE1, CTE2) values in the 0°, 45°, 90°, and 135° directions were precisely evaluated using the three-point bending (TPB) test and 3D digital image correlation (3D-DIC) method. Finite element analysis (FEA) simulations demonstrated that the diagonal warpage of PPG is primarily attributed to its viscoelastic-anisotropic properties. By understanding the effects of these properties on warpage behavior, this study provides insights for predicting and enhancing the reliability of multilayer PCBs.
随着人工智能(AI)的不断发展,印刷电路板基板(pcb)作为堆叠各种芯片的基板变得越来越重要。特别是多层pcb,通过高密度电路设计、改进电气性能和小型化,对提高性能和可靠性至关重要。这些基板必须具有优异的热稳定性,以确保堆叠芯片即使在高温下也能保持高性能和可靠性。然而,在生产或操作过程中的高温会导致多层pcb的对角翘曲,从而可能导致可靠性问题和堆叠芯片的故障。因此,了解受热负荷影响的多层pcb对角翘曲背后的机制对于提高封装可靠性至关重要。本文研究了预浸料(PPG)性能对多层pcb对角翘曲的影响。通过应力松弛试验定量测量了170 μm厚PPG的粘弹性行为,并使用Williams-Landel-Ferry (WLF)模型进行了表征。此外,采用三点弯曲(TPB)试验和三维数字图像相关(3D- dic)方法,精确评估了0°、45°、90°和135°方向的弯曲模量和热膨胀系数(CTE1、CTE2)值。有限元分析(FEA)仿真表明,PPG的对角翘曲主要是由其粘弹各向异性特性引起的。通过了解这些特性对翘曲行为的影响,本研究为预测和提高多层pcb的可靠性提供了见解。
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引用次数: 0
Enhanced Resistive Switching in Dopant-Free BFO Devices via TiO2 Insertion 通过TiO2插入增强无掺杂BFO器件的电阻开关
Pub Date : 2025-03-18 DOI: 10.1109/TMAT.2025.3552354
Shah Zahid Yousuf;Sreenivasulu Mamilla;N V L Narasimha Murty
This work reports the tailoring of resistive switching behavior in multilayer BiFeO3/TiO2 heterostructures through controlled oxygen vacancies. TiN/TiO2/BFO/Pt devices are fabricated using a sputtering process and the effect of BFO thickness on grain size, oxygen vacancies and in turn, on the memory window is investigated. The grain size was observed to be dependent on thickness, influencing the density of grain boundaries and consequently altering the oxygen vacancies. Furthermore, the resistive cell's switching behavior and conduction mechanism are systematically investigated. This study reveals notable enhancements in resistive switching behavior, including an increased memory window and improved endurance, due to the insertion of the TiO2 layer. The incorporation of TiO2 improves the resistive switching performance of BFO-based thin films by reducing defects, as confirmed by XPS analysis, thus enhancing stability and reproducibility. TiO2 modulates oxygen vacancies, regulating their distribution within the BFO layer and reducing their density, which directly improves switching behavior. It also enables more uniform electroforming and SET/RESET processes, boosting retention, endurance, and reliability. Furthermore, TiO2 may alter the local electric field, potentially lowering the switching voltage and increasing energy efficiency. The devices demonstrate resistive switching behavior at nanoscale dimensions, as indicated by conductive atomic force microscopy measurements. Remarkably, devices with 80 nm thick BFO on 20 nm thick TiO2 exhibit a high ON/OFF current ratio of 1850 at a read voltage of 0.5 V and stable endurance up to 5.8×106 cycles at room temperature, which is highest so far reported in multilayer BFO rewritable resistive devices. The devices have shown data retention of 10 years with less variation. Our findings indicate that the manipulation of oxygen vacancies through TiO2/BFO bilayer heterostructures holds significant potential as a promising switching layer in the development of advanced RRAM devices with significantly enhanced performance characteristics.
这项研究报告了通过控制氧空位在多层 BiFeO3/TiO2 异质结构中定制电阻开关行为。采用溅射工艺制造了 TiN/TiO2/BFO/Pt 器件,并研究了 BFO 厚度对晶粒大小、氧空位以及记忆窗口的影响。观察发现,晶粒大小与厚度有关,会影响晶界密度,进而改变氧空位。此外,还系统地研究了电阻电池的开关行为和传导机制。研究结果表明,由于插入了二氧化钛层,电阻开关行为显著增强,包括增加了记忆窗口和提高了耐久性。经 XPS 分析证实,TiO2 的加入通过减少缺陷改善了基于 BFO 的薄膜的电阻开关性能,从而提高了稳定性和可重复性。二氧化钛可调节氧空位,调节其在 BFO 层内的分布并降低其密度,从而直接改善开关行为。它还能使电铸和 SET/RESET 过程更加均匀,从而提高保持力、耐久性和可靠性。此外,TiO2 还能改变局部电场,从而有可能降低开关电压并提高能效。导电原子力显微镜测量结果表明,这些器件在纳米级尺寸上表现出电阻开关行为。值得注意的是,在 20 nm 厚的 TiO2 上带有 80 nm 厚 BFO 的器件在 0.5 V 读取电压下显示出 1850 的高导通/关断电流比,并且在室温下具有高达 5.8×106 周期的稳定耐久性,这是迄今为止在多层 BFO 可重写电阻器件中报告的最高值。这些器件的数据保存期长达 10 年,且变化较小。我们的研究结果表明,通过 TiO2/BFO 双层异质结构对氧空位的操纵具有巨大潜力,可作为一种有前途的开关层,用于开发具有显著增强性能特征的先进 RRAM 器件。
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引用次数: 0
Spray Coated GNP-PDMS Flexible Patch Antenna-Sensor for Wireless Wearable Applications 用于无线可穿戴应用的喷涂GNP-PDMS柔性贴片天线传感器
Pub Date : 2025-02-06 DOI: 10.1109/TMAT.2025.3539249
Atul Kumar Sharma;Anup Kumar Sharma;Ritu Sharma;Puneet Sharma;Mamta Devi Sharma
This paper presents the synthesis and performance of a novel flexible patch antenna sensor based on graphene nanoplatelets (GNP) material designed to operate at the 5.8 GHz frequency, targeting wearable applications. The fabrication process employed in this chapter involved a simple yet effective spray coating method, utilizing a GNP dispersion applied with a spray gun to form a rectangular patch with a full ground plane on the PDMS substrate. This method offers the advantages of being cost-effective and scalable, making it suitable for large-scale production. The antenna's performance as a sensor was evaluated by subjecting it to different bending scenarios, mimicking both compressive (positive bending) and tensile (negative bending) strains. The resulting shifts in resonant frequency under these conditions offered important information about the sensor's sensitivity. The practical applicability of the antenna sensor was demonstrated through human limb motion detection experiments, specifically tracking wrist movements. The sensor's ability to detect upward and downward wrist motions through variations in the normalized frequency output highlights its potential for real-world wearable applications. In addition to its promising performance, the operation of this antenna within the Industrial/Scientific/Medical (ISM) band at 5.8 GHz opens up a range of potential applications.
本文介绍了一种基于石墨烯纳米片(GNP)材料的新型柔性贴片天线传感器的合成和性能,设计工作频率为5.8 GHz,目标是可穿戴应用。本章中采用的制造工艺涉及一种简单而有效的喷涂方法,利用喷枪应用GNP分散液在PDMS基板上形成具有完整地平面的矩形贴片。该方法具有成本效益高、可扩展性强等优点,适合大规模生产。通过将天线置于不同的弯曲情况下,模拟压缩(正弯曲)和拉伸(负弯曲)应变,评估了天线作为传感器的性能。在这些条件下产生的谐振频率的变化提供了有关传感器灵敏度的重要信息。通过人体肢体运动检测实验,特别是腕部运动跟踪实验,验证了天线传感器的实用性。该传感器能够通过归一化频率输出的变化来检测手腕上下运动,这凸显了其在现实世界中可穿戴应用的潜力。除了具有良好的性能外,该天线在5.8 GHz的工业/科学/医疗(ISM)频段内的运行开辟了一系列潜在的应用。
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引用次数: 0
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing 呼吁提名主编:IEEE半导体制造汇刊
Pub Date : 2025-02-03 DOI: 10.1109/TMAT.2025.3535909
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引用次数: 0
Wide Band Gap Semiconductors for Automotive Applications Call for Papers 汽车用宽频带隙半导体征文
Pub Date : 2025-01-17 DOI: 10.1109/TMAT.2025.3529277
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引用次数: 0
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IEEE Transactions on Materials for Electron Devices
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