Pub Date : 1984-01-01DOI: 10.1016/0026-2714(84)90126-4
M. Graf
{"title":"Testing, a major concern for VLSI","authors":"M. Graf","doi":"10.1016/0026-2714(84)90126-4","DOIUrl":"https://doi.org/10.1016/0026-2714(84)90126-4","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1984-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(84)90126-4","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53720197","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1984-01-01DOI: 10.1016/0026-2714(84)91023-0
D. Shaver
{"title":"Electron-beam customization repair, and testing of wafer-scale circuits","authors":"D. Shaver","doi":"10.1016/0026-2714(84)91023-0","DOIUrl":"https://doi.org/10.1016/0026-2714(84)91023-0","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1984-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(84)91023-0","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53721951","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1984-01-01DOI: 10.1016/0026-2714(85)90145-3
S. Mastroianni
{"title":"Multilevel metallization device structures and process options","authors":"S. Mastroianni","doi":"10.1016/0026-2714(85)90145-3","DOIUrl":"https://doi.org/10.1016/0026-2714(85)90145-3","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1984-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(85)90145-3","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53722298","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1984-01-01DOI: 10.1016/0026-2714(84)91021-7
K. Harris, P. Sandland, R. M. Singleton
{"title":"Automated inspection of wafer patterns with applications in stepping, projection and direct write lithography","authors":"K. Harris, P. Sandland, R. M. Singleton","doi":"10.1016/0026-2714(84)91021-7","DOIUrl":"https://doi.org/10.1016/0026-2714(84)91021-7","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1984-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(84)91021-7","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53721856","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1984-01-01DOI: 10.1016/0026-2714(84)90143-4
J. Smith
{"title":"Influence of DC bias sputtering during aluminium metallization","authors":"J. Smith","doi":"10.1016/0026-2714(84)90143-4","DOIUrl":"https://doi.org/10.1016/0026-2714(84)90143-4","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1984-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(84)90143-4","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53719890","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1984-01-01DOI: 10.1016/0026-2714(85)90173-8
D. Pramanik, M. Current
{"title":"MeV implantation for silicon device fabrication","authors":"D. Pramanik, M. Current","doi":"10.1016/0026-2714(85)90173-8","DOIUrl":"https://doi.org/10.1016/0026-2714(85)90173-8","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1984-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(85)90173-8","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53722320","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1983-11-01DOI: 10.1016/0026-2714(84)90369-x
M. Buehler, B. Blaes, C. Piña, T. Griswold
{"title":"Pinhole array capacitor for oxide integrity analysis","authors":"M. Buehler, B. Blaes, C. Piña, T. Griswold","doi":"10.1016/0026-2714(84)90369-x","DOIUrl":"https://doi.org/10.1016/0026-2714(84)90369-x","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1983-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(84)90369-x","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53720337","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1983-01-01DOI: 10.1016/0026-2714(84)90567-5
T. Batchelder, J. Piatt
{"title":"Bake effects in positive photoresist","authors":"T. Batchelder, J. Piatt","doi":"10.1016/0026-2714(84)90567-5","DOIUrl":"https://doi.org/10.1016/0026-2714(84)90567-5","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1983-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(84)90567-5","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53721165","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1983-01-01DOI: 10.1016/0026-2714(84)90344-5
R. Anjard
{"title":"Quality solder poste systems for use in microelectronic applications","authors":"R. Anjard","doi":"10.1016/0026-2714(84)90344-5","DOIUrl":"https://doi.org/10.1016/0026-2714(84)90344-5","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1983-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(84)90344-5","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53720648","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1983-01-01DOI: 10.1016/0026-2714(84)90436-0
P. Gise
{"title":"Principles of laser scanning for defect and contamination detection in microfabrication","authors":"P. Gise","doi":"10.1016/0026-2714(84)90436-0","DOIUrl":"https://doi.org/10.1016/0026-2714(84)90436-0","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1983-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(84)90436-0","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53720883","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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