Pub Date : 1983-01-01DOI: 10.1016/0026-2714(84)90410-4
J. Freyer, K. Standiford
{"title":"Design of an accurate production E-bean system","authors":"J. Freyer, K. Standiford","doi":"10.1016/0026-2714(84)90410-4","DOIUrl":"https://doi.org/10.1016/0026-2714(84)90410-4","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":"26 1","pages":"165-170"},"PeriodicalIF":0.0,"publicationDate":"1983-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(84)90410-4","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53720431","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1983-01-01DOI: 10.1016/0026-2714(84)90435-9
T. Mcgrath
{"title":"Applications of excimer lasers in microelectronics","authors":"T. Mcgrath","doi":"10.1016/0026-2714(84)90435-9","DOIUrl":"https://doi.org/10.1016/0026-2714(84)90435-9","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":"26 1","pages":"165-169"},"PeriodicalIF":0.0,"publicationDate":"1983-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(84)90435-9","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53720854","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1983-01-01DOI: 10.1016/0026-2714(84)90562-6
W. R. Bottoms, J. Wenstrand
{"title":"Trends in wafer fab, and their driving economic forces","authors":"W. R. Bottoms, J. Wenstrand","doi":"10.1016/0026-2714(84)90562-6","DOIUrl":"https://doi.org/10.1016/0026-2714(84)90562-6","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":"64 1","pages":"173-180"},"PeriodicalIF":0.0,"publicationDate":"1983-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(84)90562-6","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53721067","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1983-01-01DOI: 10.1016/0026-2714(84)90597-3
J. Moody, R. A. Frederick
{"title":"Developments in Czochralski silicon crystal growth","authors":"J. Moody, R. A. Frederick","doi":"10.1016/0026-2714(84)90597-3","DOIUrl":"https://doi.org/10.1016/0026-2714(84)90597-3","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":"26 1","pages":"221-225"},"PeriodicalIF":0.0,"publicationDate":"1983-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(84)90597-3","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53721362","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1983-01-01DOI: 10.1016/0026-2714(84)90561-4
D. Gupta
{"title":"Effects of enhanced gettering on device performance","authors":"D. Gupta","doi":"10.1016/0026-2714(84)90561-4","DOIUrl":"https://doi.org/10.1016/0026-2714(84)90561-4","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":"26 1","pages":"149-151"},"PeriodicalIF":0.0,"publicationDate":"1983-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(84)90561-4","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53721031","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1983-01-01DOI: 10.1016/0026-2714(84)90579-1
G. Herb, R. Caffrey, E. Eckroth, Q. T. Jarrett, C. L. Fraust, J. A. Fulton
{"title":"Plasma processing: some safety, health and engineering considerations","authors":"G. Herb, R. Caffrey, E. Eckroth, Q. T. Jarrett, C. L. Fraust, J. A. Fulton","doi":"10.1016/0026-2714(84)90579-1","DOIUrl":"https://doi.org/10.1016/0026-2714(84)90579-1","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":"26 1","pages":"185-194"},"PeriodicalIF":0.0,"publicationDate":"1983-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(84)90579-1","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53721309","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1982-01-01DOI: 10.1016/0026-2714(83)91486-5
K. M. Wilson, J. L. Resutek
{"title":"Thick film composition reproducibility and its impact on yields","authors":"K. M. Wilson, J. L. Resutek","doi":"10.1016/0026-2714(83)91486-5","DOIUrl":"https://doi.org/10.1016/0026-2714(83)91486-5","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":"467 1","pages":"115-118"},"PeriodicalIF":0.0,"publicationDate":"1982-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(83)91486-5","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53719515","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1982-01-01DOI: 10.1016/0026-2714(83)91492-0
T. Richardson, J. Boogaard
{"title":"Industry-compatible applications for visible laser energy in semiconductor production","authors":"T. Richardson, J. Boogaard","doi":"10.1016/0026-2714(83)91492-0","DOIUrl":"https://doi.org/10.1016/0026-2714(83)91492-0","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":"25 1","pages":"102-104"},"PeriodicalIF":0.0,"publicationDate":"1982-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(83)91492-0","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53719591","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1982-01-01DOI: 10.1016/0026-2714(83)90457-2
R. Kaitna, J. Wernisch
{"title":"SEM-analysis of the electrically active subsurface P-N junctions in MOS configuration","authors":"R. Kaitna, J. Wernisch","doi":"10.1016/0026-2714(83)90457-2","DOIUrl":"https://doi.org/10.1016/0026-2714(83)90457-2","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":"25 1","pages":"98-101"},"PeriodicalIF":0.0,"publicationDate":"1982-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(83)90457-2","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53719009","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1982-01-01DOI: 10.1016/0026-2714(83)91484-1
I. B. Goldman
{"title":"Use of scanning electron microscopy to solve thick film manufacturing problems","authors":"I. B. Goldman","doi":"10.1016/0026-2714(83)91484-1","DOIUrl":"https://doi.org/10.1016/0026-2714(83)91484-1","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":"25 1","pages":"108-114"},"PeriodicalIF":0.0,"publicationDate":"1982-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(83)91484-1","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53719464","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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