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Heat Transfer: Volume 5最新文献

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On the Wall Boundary Condition for Computing Turbulent Heat Transfer With K–ω Models 用K -ω模型计算湍流换热的壁面边界条件
Pub Date : 2000-11-05 DOI: 10.1115/imece2000-1582
J. Bredberg, S. Peng, L. Davidson
A new wall boundary condition for the standard Wilcox’s k–ω model (1988) is proposed. The model combines a wall function and a low-Reynolds number approach, and a function that smoothly blends the two formulations, enabling the model to be used independently of the location of the first interior computational node. The model is calibrated using DNS-data for a channel flow and applied to a heat transfer prediction for a flow in a rib-roughened channel (Reb = 100 000). The results obtained with the new model are improved for various mesh sizes and are asymptotically identical with those of the standard k–ω turbulence model.
提出了标准Wilcox的k -ω模型(1988)的一个新的壁面边界条件。该模型结合了壁函数和低雷诺数方法,并且平滑地混合了两种公式,使模型能够独立于第一个内部计算节点的位置使用。该模型使用通道流动的dns数据进行校准,并应用于肋粗化通道(Reb = 100,000)中的流动的传热预测。在不同网格尺寸下,新模型的计算结果得到了改进,并与标准k -ω湍流模型的计算结果渐近一致。
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引用次数: 12
Comparison of Laser-Ceramic and Laser-Metal Material Processing 激光陶瓷与激光金属材料加工的比较
Pub Date : 2000-11-05 DOI: 10.1115/imece2000-1553
G. Deng, M. Gordon, L. Roe, A. Malshe, W. F. Schmidt
In an effort to better understand and thereby utilize laser processing, an existing code describing laser-metal (aluminum) interaction is modified to describe laser-ceramic (diamond) interaction. Comparisons between our modified code (diamond target) and the original code (aluminum target) highlight similarities and differences between laser-ceramic and laser-metal processing. Gas breakdown effects, which are expected for the simulated short (time duration), high energy laser pulses, are observed in both codes. Due to the lower sublimation heat of aluminum (1.1×104J/g) compared to diamond (5.3×104J/g), aluminum vaporizes more quickly and exhibits a faster expansion speed (1.4×107 cm/sec compared to 8×106 cm/sec for diamond) in the early stage of the laser pulse. Because aluminum requires significantly more energy to fully ionize than does carbon, our simulations show that the diamond plasma is fully ionized (6 of 6 electrons per atom) and the aluminum plasma is partially ionized (11 of 13 electrons per atom).
为了更好地理解并因此利用激光加工,对描述激光-金属(铝)相互作用的现有代码进行了修改,以描述激光-陶瓷(金刚石)相互作用。将修改后的代码(金刚石靶)与原始代码(铝靶)进行比较,突出了激光陶瓷加工与激光金属加工之间的异同。在两种编码中都观察到气体击穿效应,这种效应在模拟的短(时间持续)高能激光脉冲中是预期的。由于铝的升华热(1.1×104J/g)低于金刚石(5.3×104J/g),因此在激光脉冲的早期,铝的蒸发速度更快,膨胀速度也更快(1.4×107 cm/秒,金刚石为8×106 cm/秒)。因为铝比碳需要更多的能量才能完全电离,我们的模拟表明,金刚石等离子体完全电离(每个原子6个电子中的6个),铝等离子体部分电离(每个原子13个电子中的11个)。
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引用次数: 0
Thermal Modeling of the Cavity in Pulsed Excimer Laser Calorimeters 脉冲准分子激光量热计腔体的热模拟
Pub Date : 2000-11-05 DOI: 10.1115/imece2000-1574
D. Chen, Z. M. Zhang
A simplified finite element model is built to study the thermal response of the 193-nm pulsed-laser calorimeter. The nonequivalence between pulsed-laser heating and electrical heating is estimated to be 0.46% at the thermocouple locations by comparing the calibration factors for average-power laser heating and electrical heating. This study should help the development of calibration and measurement standards in pulsed energy measurements for deep ultraviolet excimer lasers that are important for photolithographic and materials processing applications.
建立了简化有限元模型,研究了193 nm脉冲激光量热计的热响应。通过比较平均功率激光加热和电加热的标定系数,估计在热电偶位置,脉冲激光加热和电加热的不等效性为0.46%。该研究有助于制定深紫外准分子激光脉冲能量测量的校准和测量标准,这对光刻和材料加工应用具有重要意义。
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引用次数: 0
Experimental and Numerical Investigation of Air-Particle Two-Phase Flow in Centrifugal Separator 离心分离器内空气-颗粒两相流的实验与数值研究
Pub Date : 2000-11-05 DOI: 10.1115/imece2000-1578
H. Kang, B. Zheng, C. Lin, M. Ebadian
The velocity distributions inside a centrifugal separator with outside and inside diameters of 152.4 mm (6″) and 76.2 mm (3″), respectively, have been investigated experimentally and numerically to obtain optimum separation efficiency. Two 12.7 mm (1/2-inch) holes were drilled on the external surface of the separator to measure the velocity distribution in the separator. Two direction velocities (tangential direction along the cylinder surface and axial along the vertical direction) were measured to compare with the numerical simulation results. A 6060P Pitot probe was employed to obtain the velocity distribution. The dust samples (a mixture of steel particle and dust) from the dust collection box were analyzed using a Phillips XL30 Scanning Electron Microscope. FLUENT code is used as the numerical solver for this fully three-dimensional problem. The fluid flow in the separator is assumed to be steady and incompressible turbulent flow. The standard k–ε model was employed in this study. Non-uniform, unstructured grids are chosen to discretize the entire computation domain. Almost 100,000 cells are used to discretize the whole separator. The constant velocity profile is imposed on the inlet plane. The pressure boundary condition is adopted at outlet plane. Comparing the velocity distribution and separation efficiency from the experiment and the numerical modeling shows that the experimental results and the estimated data agree fairly well and with a deviation within ±10%.
为获得最佳分离效率,对外径152.4 mm(6″)和内径76.2 mm(3″)的离心分离器内部速度分布进行了实验和数值研究。在分离器外表面钻两个12.7 mm(1/2英寸)的孔,测量分离器内的速度分布。测量了沿圆柱体表面切向速度和沿垂直方向轴向速度,并与数值模拟结果进行了比较。采用6060P皮托管探针测量速度分布。利用philips XL30扫描电子显微镜对收集盒中的粉尘样品(钢颗粒和粉尘的混合物)进行分析。使用FLUENT代码作为这个全三维问题的数值求解器。假定分离器内流体流动为稳定的不可压缩湍流。本研究采用标准k -ε模型。选择非均匀的非结构化网格来离散整个计算域。将近10万个单元用于分离整个分离器。在进气道平面上施加匀速剖面。在出口平面采用压力边界条件。实验结果与数值模拟结果的速度分布和分离效率比较表明,实验结果与估计数据吻合较好,误差在±10%以内。
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引用次数: 0
Buoyancy Effect on Developing Turbulent Flow and Heat Transfer in a Helical Pipe With Finite Pitch 有限螺距螺旋管内浮力对湍流发展和换热的影响
Pub Date : 2000-11-05 DOI: 10.1115/imece2000-1581
B. Zheng, C. Lin, M. Ebadian
Numerical modeling was performed to investigate the buoyancy effect on developing turbulent flow and the heat transfer characteristics of saturated water in a helical pipe with finite pitch. The renormalization group (RNG) κ–ε model was used to account for the turbulent flow and heat transfer in the helical pipe at a constant wall temperature with or without buoyancy force effect. A control volume method with second-order accuracy was used to numerically solve the three-dimensional full elliptic governing equations for this problem. The O-type nonuniform structured grid system was adopted to discretize the computation domain. The Boussinesq approximation was applied to deal with the buoyancy. This study explored the influence of buoyancy on the developing heat transfer along the helical pipe. Based on the results of this research, the velocity, temperature, and Nusselt number are presented graphically and analyzed.
采用数值模拟的方法研究了浮力对有限螺距螺旋管内饱和水发生湍流的影响和换热特性。采用重整化群(RNG) κ -ε模型,研究了在有或无浮力作用下,恒壁温条件下螺旋管内的湍流流动和换热过程。采用二阶精度的控制体积法对该问题的三维全椭圆控制方程进行了数值求解。采用o型非均匀结构网格系统对计算域进行离散化。采用Boussinesq近似来处理浮力。本研究探讨了浮力对螺旋管传热过程的影响。在此基础上,对速度、温度和努塞尔数进行了图解和分析。
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引用次数: 0
Monte Carlo Simulation for Radiometric Temperature Measurement in Rapid Thermal Processing 快速热加工中辐射测温的蒙特卡罗模拟
Pub Date : 2000-11-01 DOI: 10.1115/imece2000-1575
Yongmao Zhou, Y. J. Shen, Zhuomin M. Zhang, B. Tsai, D. Dewitt
This work employs a Monte Carlo method to study the radiative process in a rapid thermal processing (RTP) furnace. A “true” effective emissivity, accounting for the directional optical properties, is defined and predicted in order to determine the wafer temperature from the measured spectral radiance temperature using light-pipe radiation thermometry. The true effective emissivity is the same as the hemispherical effective emissivity for diffuse wafers, in which case the Monte Carlo model gives the same results as the net-radiation method. Deviations exist between the hemispherical effective emissivity and the true effective emissivity for specular wafers because the effective emissivity is directional dependent. This research will help reduce the uncertainty in the temperature measurement for RTP furnaces to meet the future requirements for integrated circuit manufacturing.
本文采用蒙特卡罗方法研究了快速热加工(RTP)炉的辐射过程。定义和预测了考虑定向光学特性的“真正”有效发射率,以便使用光管辐射测温法从测量的光谱辐射温度确定晶圆温度。漫射晶圆的真实有效发射率与半球面有效发射率相同,在这种情况下,蒙特卡罗模型与净辐射方法得到相同的结果。镜面晶圆的半球形有效发射率与真实有效发射率之间存在偏差,因为有效发射率与方向有关。本研究将有助于降低RTP炉温度测量的不确定性,以满足未来集成电路制造的要求。
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引用次数: 2
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Heat Transfer: Volume 5
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