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Volume 1: 14th International Conference on Micro- and Nanosystems (MNS)最新文献

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Two-Phase Thermal Metamaterial 两相热超材料
Pub Date : 2020-08-17 DOI: 10.1115/detc2020-22158
Zifu Xu, Longqiu Li, Jiaxin Li
The capability of thermal metamaterials is required from single function to multifunction under different external heat conditions. The methods to develop thermal materials by simple structural transformations have been explored. While, the components of traditional thermal metamaterial are mainly set as solid materials, which is difficult to change the composition of materials, such as recombing and fixing the spatial position of material, because of material rigidity. Therefore, the potential of thermal materials is limited. Liquid has fluidity in spatial structure, for which the efficient combination of solid-liquid materials provides an avenue for dynamically modeling thermal field. Herein, we propose the concept of two-phase thermal metamaterial, which is switchable by microscale elements. On one side, we develop a switchable thermal meta-unit manipulated by micro-element under the gradient field and explore the process of heat transfer by focusing on radiation and conduction under translucent media condition. Otherwise, we propose a method to achieve a non-reciprocal heat transfer system by the design of two-phase media. The propose of two-phase thermal metamaterials set a general background for a variety of applications for complex conditions.
在不同的外界热条件下,热超材料的性能要求从单一功能到多功能。探索了通过简单的结构转变来开发热材料的方法。而传统的热超材料的成分主要设置为固体材料,由于材料的刚性,难以改变材料的组成,如重新梳理和固定材料的空间位置。因此,热材料的潜力是有限的。液体在空间结构上具有流动性,固液材料的有效结合为热场的动态建模提供了途径。在此,我们提出了可由微尺度元件切换的两相热超材料的概念。一方面,我们开发了一种在梯度场下由微元素操纵的可切换热元单元,并通过聚焦于半透明介质条件下的辐射和传导来探索传热过程。另外,我们提出了一种通过设计两相介质来实现非互反传热系统的方法。两相热超材料的提出为其在复杂条件下的各种应用奠定了基础。
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引用次数: 0
Unidirectional Acoustic Parametric Amplification in Space-Time Modulated Membrane System 时空调制膜系统的单向声参量放大
Pub Date : 2020-08-17 DOI: 10.1115/detc2020-22274
Xiaohui Zhu, Longqiu Li, G. Zhang
Space-time modulation puts a new twist on controlling wave behaviors and opens the door for unprecedented wave manipulation capabilities. Here we propose a space-time modulated membrane system aiming to realize the unidirectional parametric amplification. Two different approaches, continuous model and transfer matrix method, are applied to analyze the acoustic response of the system under a monochromatic incidence. In the proposed space-time modulated membrane system, these two methods are in good agreement with each other. Results show that under a monochromatic incidence from one end of the system, a harmonic is generated, and both the incident wave and generated wave exponentially grow along with the system. Our work demonstrates a metamaterial realization of unidirectional acoustic parametric amplifier via space-time modulated membranes, which offers a design platform for a number of applications in sensing, imaging and communication.
时空调制为控制波的行为提供了新的思路,并为前所未有的波操纵能力打开了大门。本文提出了一种时空调制膜系统,旨在实现单向参数放大。采用连续模型法和传递矩阵法两种不同的方法分析了单色入射下系统的声响应。在本文提出的时空调制膜系统中,这两种方法具有较好的一致性。结果表明,在系统一端单色入射下,产生谐波,且入射波和生成波均随系统呈指数增长。我们的工作展示了一种通过时空调制膜实现单向声学参数放大器的超材料,为传感、成像和通信等领域的应用提供了一个设计平台。
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引用次数: 0
Investigation of 3:1 Internal Resonance of Electrostatically Actuated Microbeams With Flexible Supports 柔性支承静电驱动微梁3:1内共振特性研究
Pub Date : 2020-08-17 DOI: 10.1115/detc2020-22050
Praveen Kumar, M. Inamdar, D. N. Pawaskar
Interaction between modes due to internal resonance has many applications in MEMS devices. In this paper, we investigate the modal interaction through 3 : 1 internal resonance of an electrostatically actuated microbeam with flexible supports in the form of rotational and transversal springs. The static displacement and the first three modal frequencies are obtained at the applied DC voltage by a reduced order model for a specified ratio of electrode gap and thickness. We then obtain the value of applied voltage for which 3 : 1 internal resonance exists for four different combinations of unequal end support stiffnesses. We calculate the coefficients of the coupled dynamical equations of first two modes for all the four cases and solve them by using numerical time integration and the method of multiple scales. We observe the interaction between the first and the second mode when each of the modes is independently excited by an external source. When the second mode is externally excited, interestingly, we also find that the undriven mode response amplitude is twice that of the driven mode.
由于内部共振引起的模式间相互作用在MEMS器件中有许多应用。本文研究了具有旋转弹簧和横向弹簧形式的柔性支承的静电驱动微梁通过3:1内共振的模态相互作用。在给定电极间距和厚度比的情况下,通过降阶模型得到了直流电压下的静态位移和前三个模态频率。然后,我们得到了四种不同的不相等端支刚度组合存在3:1内部共振的施加电压值。计算了所有四种情况下前两种模态耦合动力学方程的系数,并采用数值时间积分和多尺度方法求解。我们观察了当每个模态都被一个外部源独立激发时,第一模态和第二模态之间的相互作用。当第二模态受到外部激励时,有趣的是,我们还发现非驱动模态的响应幅度是驱动模态的两倍。
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引用次数: 3
Rapid Fabrication of POM Flexure Hinges via a Combined Injection Molding and Stereolithography Approach 结合注射成型和立体光刻技术快速制造POM柔性铰链
Pub Date : 2020-08-17 DOI: 10.1115/detc2020-22476
M. Valori, R. Surace, V. Basile, L. Luzi, R. Vertechy, I. Fassi
The aim of the research activity reported in this paper is to investigate a promising approach for the rapid and customized manufacturing of miniature flexure hinges with predictable and reliable mechanical performances. With these premises, the proposed methodology combines stereolithography and micro injection moulding, with the aim of exploiting the advantages of both manufacturing techniques. As a preliminary case study, a corner filleted hinge made of polyoxymethylene (POM) has been realized in multiple identical specimens that are then characterized in terms of both dimensional accuracy and function.
本文研究的目的是研究一种具有可预测和可靠机械性能的微型柔性铰链的快速和定制制造的有前途的方法。在这些前提下,提出的方法结合了立体光刻和微注射成型,目的是利用这两种制造技术的优势。作为初步的案例研究,已在多个相同的样品中实现了由聚甲醛(POM)制成的角圆角铰链,然后在尺寸精度和功能方面进行了表征。
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引用次数: 3
Organic Piezoresistive Pressure Sensitive Robotic Skin for Physical Human-Robot Interaction 用于人机物理交互的有机压阻压敏机器人皮肤
Pub Date : 2020-08-17 DOI: 10.1115/detc2020-22604
Danming Wei, Ruoshi Zhang, M. Saadatzi, Olalekan O. Olowo, D. Popa
Pressure sensitive robotic skins have long been investigated for applications to physical human-robot interaction (pHRI). Numerous challenges related to fabrication, sensitivity, density, and reliability remain to be addressed under various environmental and use conditions. In our previous studies, we designed novel strain gauge sensor structures for robotic skin arrays. We coated these star-shaped designs with an organic polymer piezoresistive material, Poly (3, 4-ethylenedioxythiophene)-ploy(styrenesulfonate) or PEDOT: PSS and integrated sensor arrays into elastomer robotic skins. In this paper, we describe a dry etching photolithographic method to create a stable uniform sensor layer of PEDOT:PSS onto star-shaped sensors and a lamination process for creating double-sided robotic skins that can be used with temperature compensation. An integrated circuit and load testing apparatus was designed for testing the resulting robotic skin pressure performance. Experiments were conducted to measure the loading performance of the resulting sensor prototypes and results indicate that over 80% sensor yields are possible with this fabrication process.
压敏机器人皮肤长期以来一直被研究用于物理人机交互(pHRI)。在各种环境和使用条件下,与制造、灵敏度、密度和可靠性相关的许多挑战仍有待解决。在我们之前的研究中,我们为机器人皮肤阵列设计了新的应变计传感器结构。我们用有机聚合物压阻材料,聚(3,4 -乙烯二氧噻吩)-聚(苯乙烯磺酸盐)或PEDOT: PSS涂覆这些星形设计,并将传感器阵列集成到弹性体机器人皮肤中。在本文中,我们描述了一种干燥蚀刻光刻方法,用于在星形传感器上创建稳定均匀的PEDOT:PSS传感器层,以及用于创建双面机器人皮肤的层压工艺,该皮肤可用于温度补偿。设计了集成电路和负载测试装置,用于测试所得机器人皮肤压力性能。实验测量了所得到的传感器原型的负载性能,结果表明,这种制造工艺可以实现80%以上的传感器产量。
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引用次数: 4
Machine Learning Augmentation in Micro-Sensor Assemblies 微传感器组件中的机器学习增强
Pub Date : 2020-08-17 DOI: 10.1115/detc2020-22665
M. Hasan, F. Alsaleem, Amin Abbasalipour, Siavash Pourkamali Anaraki, Muhammad Emad-Un-Din, R. Jafari
The size and power limitations in small electronic systems such as wearable devices limit their potential. Significant energy is lost utilizing current computational schemes in processes such as analog-to-digital conversion and wireless communication for cloud computing. Edge computing, where information is processed near the data sources, was shown to significantly enhance the performance of computational systems and reduce their power consumption. In this work, we push computation directly into the sensory node by presenting the use of an array of electrostatic Microelectromechanical systems (MEMS) sensors to perform colocalized sensing-and-computing. The MEMS network is operated around the pull-in regime to access the instability jump and the hysteresis available in this regime. Within this regime, the MEMS network is capable of emulating the response of the continuous-time recurrent neural network (CTRNN) computational scheme. The network is shown to be successful at classifying a quasi-static input acceleration waveform into square or triangle signals in the absence of digital processors. Our results show that the MEMS may be a viable solution for edge computing implementation without the need for digital electronics or micro-processors. Moreover, our results can be used as a basis for the development of new types of specialized MEMS sensors (ex: gesture recognition sensors).
小型电子系统(如可穿戴设备)的尺寸和功率限制限制了它们的潜力。在诸如用于云计算的模数转换和无线通信等过程中,利用当前的计算方案会损失大量能量。边缘计算是在数据源附近处理信息,可以显著提高计算系统的性能并降低其功耗。在这项工作中,我们通过使用一组静电微机电系统(MEMS)传感器来执行定位的传感和计算,将计算直接推入感知节点。MEMS网络围绕拉合状态运行,以获取该状态下可用的不稳定跳变和迟滞。在此范围内,MEMS网络能够模拟连续时间递归神经网络(CTRNN)计算方案的响应。该网络在没有数字处理器的情况下成功地将准静态输入加速度波形分类为正方形或三角形信号。我们的研究结果表明,MEMS可能是边缘计算实现的可行解决方案,而不需要数字电子或微处理器。此外,我们的结果可以作为开发新型专用MEMS传感器(例如:手势识别传感器)的基础。
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引用次数: 0
Bio-MEMS Circular Plate Sensors Under Electrostatic Hard Excitations: Frequency Response of Superharmonic Resonance of Fourth Order 静电硬激励下的Bio-MEMS圆板传感器:四阶超谐波共振的频率响应
Pub Date : 2020-08-17 DOI: 10.1115/detc2020-22229
Julio Beatriz, D. Caruntu
This paper investigates the frequency-amplitude response of electrostatically actuated Bio-MEMS clamped circular plates under superharmonic resonance of fourth order. The system consists of an elastic circular plate parallel to a ground plate. An AC voltage between the two plates will lead to vibrations of the elastic plate. Method of Multiple Scales, and Reduced Order Model with two modes of vibration are the two methods used in this work. The two methods show similar amplitude-frequency response, with an agreement in the low amplitudes. The difference between the two methods can be seen for larger amplitudes. The effects of voltage and damping on the amplitude-frequency response are reported. The steady-state amplitudes in the resonant zone increase with the increase of voltage and with the decrease of damping.
本文研究了四阶超谐波谐振下静电驱动Bio-MEMS箝位圆板的频幅响应。该系统由一个与接地板平行的弹性圆板组成。两个板之间的交流电压会引起弹性板的振动。多尺度法和双振型降阶模型是本文所采用的两种方法。两种方法表现出相似的幅频响应,在低幅值处一致。对于较大的振幅,可以看出两种方法之间的差异。本文报道了电压和阻尼对幅频响应的影响。谐振区的稳态幅值随电压的增大而增大,随阻尼的减小而减小。
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引用次数: 0
316L Stainless Steel Sensitization in Carbon Nanotube CVD Growth for Bacterial Resistance 316L不锈钢在碳纳米管CVD生长中的增敏性对细菌耐药性的影响
Pub Date : 2020-08-17 DOI: 10.1115/detc2020-22391
Sterling Voss, Bret Mecham, L. Bowden, J. Monroe, A. Bowden, B. Jensen
Physically altering the micro-topography of a surface can dramatically affect its capacity to support or prevent biofilm growth. Growing carbon-infiltrated carbon nanotubes on biomedical materials is one such approach which has proven effective. Unfortunately, the high temperature and carbon-rich gas exposure required for this procedure has proven to have deleterious effects. This paper proposes a kinetic model to explain the rusting phenomenon observed on 316L stainless steel substrates which have undergone the chemical vapor deposition process to grow carbon-infiltrated carbon nanotubes. The model is derived from Fick’s Second Law, and predicts the growth of chromium carbide as a function of temperature and time. Chromium carbide formation is shown to be the mechanism of corrosion, as chromium atoms are leeched from the the matrix, preventing the formation of a passivating chromium oxide layer in place of problematic iron oxide (rust) formation. The model is validated using experimental methods, which involve immersion in bacteria culture, scanning electron microscopy (SEM), and energy dispersive X-ray spectroscopy (EDX).
物理改变表面的微地形可以显著影响其支持或阻止生物膜生长的能力。在生物医学材料上生长碳渗透碳纳米管就是这样一种被证明有效的方法。不幸的是,这一过程所需要的高温和富含碳的气体暴露已被证明具有有害的影响。本文提出了一个动力学模型来解释在316L不锈钢基体上通过化学气相沉积生长碳渗透碳纳米管所观察到的生锈现象。该模型来源于菲克第二定律,并预测碳化铬的生长是温度和时间的函数。碳化铬的形成被证明是腐蚀的机制,因为铬原子从基体中被吸收,阻止了钝化氧化铬层的形成,取代了有问题的氧化铁(锈)的形成。该模型通过浸泡细菌培养、扫描电子显微镜(SEM)和能量色散x射线光谱(EDX)等实验方法进行了验证。
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Volume 1: 14th International Conference on Micro- and Nanosystems (MNS)
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