The presentation reviews optics- and material-driven resolution enhancements in DUV and EUV projection lithography for semiconductor fabrication with special emphasis on the application of computational methods for the exploration and optimization of various technology options.
{"title":"Resolution enhancements for semiconductor lithography: A computational perspective","authors":"A. Erdmann","doi":"10.1364/ISA.2016.IM4F.3","DOIUrl":"https://doi.org/10.1364/ISA.2016.IM4F.3","url":null,"abstract":"The presentation reviews optics- and material-driven resolution enhancements in DUV and EUV projection lithography for semiconductor fabrication with special emphasis on the application of computational methods for the exploration and optimization of various technology options.","PeriodicalId":263258,"journal":{"name":"Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128821934","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
a model eye incorporating a manually tunable lens and microfluidics chamber for simulation of vitreous floaters has been described. Aberrations correspond to average values in population and diffraction effects could be observed.
{"title":"Model Eye Incorporating a Manually Tunable Polymer Lens and Microfluidics Chamber for Simulation of Vitreous Floaters","authors":"V. Karitans","doi":"10.1364/ISA.2016.IM3F.2","DOIUrl":"https://doi.org/10.1364/ISA.2016.IM3F.2","url":null,"abstract":"a model eye incorporating a manually tunable lens and microfluidics chamber for simulation of vitreous floaters has been described. Aberrations correspond to average values in population and diffraction effects could be observed.","PeriodicalId":263258,"journal":{"name":"Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen","volume":"9 12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126190711","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-07-25DOI: 10.1364/ISA.2016.ITH3D.5
T. Juffmann, B. Klopfer, M. Kasevich
Multi-pass microscopy has recently been demonstrated as a tool for low damage, highsensitivity microscopy [1]. We discuss these findings and show preliminary results on creating high orbital angular momentum states using a multi-pass microscope.
{"title":"Multi-pass microscopy for quantum state engineering.","authors":"T. Juffmann, B. Klopfer, M. Kasevich","doi":"10.1364/ISA.2016.ITH3D.5","DOIUrl":"https://doi.org/10.1364/ISA.2016.ITH3D.5","url":null,"abstract":"Multi-pass microscopy has recently been demonstrated as a tool for low damage, highsensitivity microscopy [1]. We discuss these findings and show preliminary results on creating high orbital angular momentum states using a multi-pass microscope.","PeriodicalId":263258,"journal":{"name":"Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131868831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
F. Yuan, Siqi Liu, A. Chen, Jing Liu, Peng Sun, Shengqian Chang, Linjing Zhu, Zhenrong Zheng
A design method of encoded diffractive optical element (DOE) that can realize dynamic pattern generation and information encryption is proposed.The simulation results verified the design method well.
{"title":"A Method to Design Encoded Diffractive Optical Element for Dynamic Pattern Generation","authors":"F. Yuan, Siqi Liu, A. Chen, Jing Liu, Peng Sun, Shengqian Chang, Linjing Zhu, Zhenrong Zheng","doi":"10.1364/ISA.2016.IW3F.5","DOIUrl":"https://doi.org/10.1364/ISA.2016.IW3F.5","url":null,"abstract":"A design method of encoded diffractive optical element (DOE) that can realize dynamic pattern generation and information encryption is proposed.The simulation results verified the design method well.","PeriodicalId":263258,"journal":{"name":"Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129992864","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
We investigate the application of the mathematical morphology operations in star image processing for star trackers. Results verify its effectiveness in noise removal, star segmentation and broken star image reconstruction for the motion-blurred images.
{"title":"Mathematical Morphology Operations Applied in Star Image Processing for Star Trackers","authors":"Liheng Ma, Zongsheng Huang, Xingshu Wang, Shiqiao Qin","doi":"10.1364/ISA.2016.IW2F.3","DOIUrl":"https://doi.org/10.1364/ISA.2016.IW2F.3","url":null,"abstract":"We investigate the application of the mathematical morphology operations in star image processing for star trackers. Results verify its effectiveness in noise removal, star segmentation and broken star image reconstruction for the motion-blurred images.","PeriodicalId":263258,"journal":{"name":"Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128571973","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In this talk we review technology advances that have enabled a new generation of pushbroom imaging spectrometers for airborne, planetary orbital, and planetary in-situ observations and a range of applications from the Earth's coasts to the Moon's craters and beyond. Article not available.
{"title":"Imaging Spectroscopy Technologies and Applications","authors":"P. Mouroulis, R. Green, Daniel W. Wilson","doi":"10.1364/ISA.2016.IW1E.5","DOIUrl":"https://doi.org/10.1364/ISA.2016.IW1E.5","url":null,"abstract":"In this talk we review technology advances that have enabled a new generation of pushbroom imaging spectrometers for airborne, planetary orbital, and planetary in-situ observations and a range of applications from the Earth's coasts to the Moon's craters and beyond. Article not available.","PeriodicalId":263258,"journal":{"name":"Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124174080","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
By introducing an ultra-thin diffractive filter, a compact snapshot hyper-spectral imager is built and characterized. It is enabled by a fast computational algorithm and offers high-resolution, high-throughput real-time imaging and also 3D imaging.
{"title":"Snapshot high-resolution hyper-spectral imager based on an ultra-thin diffractive filter","authors":"Peng Wang, E. Shafran, F. G. Vasquez, R. Menon","doi":"10.1364/ISA.2016.IW1E.1","DOIUrl":"https://doi.org/10.1364/ISA.2016.IW1E.1","url":null,"abstract":"By introducing an ultra-thin diffractive filter, a compact snapshot hyper-spectral imager is built and characterized. It is enabled by a fast computational algorithm and offers high-resolution, high-throughput real-time imaging and also 3D imaging.","PeriodicalId":263258,"journal":{"name":"Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen","volume":"62 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127101522","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
For over a century, the standard interferogram has been in the context of interfering optical waves. This talk formally links time-of-flight cameras to electronic interferograms, where electronic waves interfere, enabling macroscopic interferometry. Article not available.
{"title":"Macroscopic Interferometry With Electrons, Instead of Photons","authors":"A. Kadambi, James Schiel, R. Raskar","doi":"10.1364/ISA.2016.IW3F.1","DOIUrl":"https://doi.org/10.1364/ISA.2016.IW3F.1","url":null,"abstract":"For over a century, the standard interferogram has been in the context of interfering optical waves. This talk formally links time-of-flight cameras to electronic interferograms, where electronic waves interfere, enabling macroscopic interferometry. Article not available.","PeriodicalId":263258,"journal":{"name":"Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129667982","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
We will present a novel temporal imaging scheme which can magnify and compress long signals in time. Our scheme is based on array of time lenses, each imaging the incoming signal from a different direction.Our results are based on lens array of four lenses but numerical results shows that by increasing the number the resolution can increase farther. Article not available.
{"title":"Temporal Lens Array","authors":"M. Fridman","doi":"10.1364/ISA.2016.IT1F.5","DOIUrl":"https://doi.org/10.1364/ISA.2016.IT1F.5","url":null,"abstract":"We will present a novel temporal imaging scheme which can magnify and compress long signals in time. Our scheme is based on array of time lenses, each imaging the incoming signal from a different direction.Our results are based on lens array of four lenses but numerical results shows that by increasing the number the resolution can increase farther. Article not available.","PeriodicalId":263258,"journal":{"name":"Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen","volume":"180 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124495872","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-07-25DOI: 10.1364/ISA.2016.ITH2F.1
Amalkumar P. Ghosh, Evan P. Donoghue, I. Khayrullin, T. Ali, I. Wacyk, Kerry Tice, F. Vazan, Laurie Sziklas, D. Fellowes, Russell S. Draper
Organic Light Emitting Diode (OLED) based displays are beginning to enter the main stream display and television market. OLED based Head mounted displays (HMD) are a major part of wearables, particularly near-to-the-eye displays. The brightness of the displays is critical for many applications including Augmented and Virtual Reality. eMagin’s recent efforts to develop high brightness OLED microdisplays will be presented.
{"title":"Recent Advances in High Brightness OLED Microdisplays","authors":"Amalkumar P. Ghosh, Evan P. Donoghue, I. Khayrullin, T. Ali, I. Wacyk, Kerry Tice, F. Vazan, Laurie Sziklas, D. Fellowes, Russell S. Draper","doi":"10.1364/ISA.2016.ITH2F.1","DOIUrl":"https://doi.org/10.1364/ISA.2016.ITH2F.1","url":null,"abstract":"Organic Light Emitting Diode (OLED) based displays are beginning to enter the main stream display and television market. OLED based Head mounted displays (HMD) are a major part of wearables, particularly near-to-the-eye displays. The brightness of the displays is critical for many applications including Augmented and Virtual Reality. eMagin’s recent efforts to develop high brightness OLED microdisplays will be presented.","PeriodicalId":263258,"journal":{"name":"Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen","volume":"207 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122509644","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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